A temperature-raising crystal oscillator device

Abstract

The utility model discloses a temperature-raising crystal oscillator device, comprising a device cavity and a group of evaporation sources of different film materials, a monitoring crystal oscillator probe is arranged in the device cavity, an inner cavity structure is arranged in the device cavity corresponding to each evaporation source, and a built-in crystal oscillator probe is arranged in the inner cavity structure. The temperature-raising crystal oscillator device has a reasonable structural design, a built-in crystal oscillator probe is arranged in the evaporation source baffle, and in conjunction with the external monitoring crystal oscillator probe of the evaporation source baffle, multiple evaporation sources can be simultaneously heated up and monitored, thereby achieving simultaneous heating of the same cavity and different film materials, and improving the evaporation efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of displays, in particular to a temperature-raising crystal oscillator device. Background Art

[0002] Currently in the Micro OLED industry, most evaporation film-forming equipment uses point sources, and different film layers and different materials are in the same cavity. In order to ensure the quality of the evaporated film layer and product performance, the evaporation equipment is evaporating the film layer. The materials of other film layers are not allowed to have a rate (evaporation rate of organic evaporation materials). This means that the evaporation equipment must complete the evaporation of the previous film layer before the material of the next film layer is allowed to heat up, which will greatly affect the production rhythm and production capacity of the evaporation.

[0003] For example, a crystal oscillator probe device disclosed in Chinese patent CN218146908U includes a probe part, which includes a probe body and a protective cover connected to the probe body; the probe body includes a crystal oscillator and a probe for monitoring the thickness of the crystal oscillator; only one probe is arranged in the cavity of the device, and it is impossible to realize simultaneous heating rate monitoring of multiple evaporation sources. Utility Model Content

[0004] In view of the shortcomings of the prior art, the utility model provides a temperature-raising crystal oscillator device to achieve the purpose of simultaneous temperature-raising monitoring of multiple evaporation sources.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] The temperature-raising crystal oscillator device comprises a device cavity and a group of evaporation sources of different film materials. A monitoring crystal oscillator probe is arranged in the device cavity. An inner cavity structure is arranged in the device cavity corresponding to each evaporation source, and a built-in crystal oscillator probe is arranged in the inner cavity structure.

[0007] The built-in crystal oscillator probes are a group of built-in crystal oscillator probes arranged side by side.

[0008] A point source evaporation source and a point source crucible are arranged in the cavity of the device, and the point source crucible is arranged in the corresponding point source evaporation source.

[0009] The inner cavity structure is a hollow evaporation source baffle, and a baffle door is provided at the lower part of the evaporation source baffle corresponding to the evaporation source.

[0010] A sliding structure is arranged in the inner cavity structure, and a group of built-in crystal oscillator probes are arranged on the sliding structure.

[0011] The sliding structure comprises a sliding rail and a crystal oscillator support rod, and the crystal oscillator support rod is movably arranged on the sliding rail.

[0012] The corresponding blocking door of the group of built-in crystal oscillator probes is arranged at the lower part of the crystal oscillator supporting rod.

[0013] Compared with the prior art, the utility model has the following advantages:

[0014] The structure of the temperature-raising crystal oscillator device is reasonably designed. A built-in crystal oscillator probe is provided in the evaporation source baffle. Together with the external monitoring crystal oscillator probe of the evaporation source baffle, simultaneous temperature-raising monitoring of multiple evaporation sources can be realized, thereby achieving simultaneous temperature-raising of different film materials in the same cavity and improving evaporation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The following is a brief description of the contents and symbols in the drawings of this specification:

[0016] Figure 1 This is a schematic diagram of a temperature-raising crystal oscillator device of the present utility model.

[0017] In the figure:

[0018] 1. Crystal oscillator support rod, 2. Evaporation source baffle, 3. Point source crucible, 4. Built-in crystal oscillator probe, 5. Slide rail, 6. Normal rate monitoring crystal oscillator probe. DETAILED DESCRIPTION

[0019] The specific implementation of the utility model will be further explained in detail below through the description of embodiments with reference to the accompanying drawings.

[0020] like Figure 1 As shown, the temperature-raising crystal oscillator device includes a device cavity and a group of evaporation sources of different film materials. A monitoring crystal oscillator probe is provided in the device cavity. An inner cavity structure is provided in the device cavity corresponding to each evaporation source, and a built-in crystal oscillator probe 4 is provided in the inner cavity structure.

[0021] A point source evaporation source and a point source crucible 3 are arranged in the cavity of the device, and the point source crucible is arranged in the corresponding point source evaporation source; the built-in crystal oscillator probe is a group of built-in crystal oscillator probes arranged side by side, and several more probes can be arranged according to actual conditions, and a probe is switched when its service life reaches the end.

[0022] The inner cavity structure is a hollow evaporation source baffle 2, and a baffle door is provided at the lower part of the evaporation source corresponding to the evaporation source, and the baffle door can be opened or closed according to the evaporation film layer.

[0023] Furthermore, a sliding structure is provided in the inner cavity structure, and a group of built-in crystal oscillator probes are arranged on the sliding structure; the sliding structure includes a slide rail 5 and a crystal oscillator support rod 1, and the crystal oscillator support rod is movably arranged on the slide rail.

[0024] A set of built-in crystal oscillator probes and corresponding baffles are arranged at the lower part of the crystal oscillator support rod; when the crystal oscillator of a certain crystal oscillator probe reaches the end of its service life, the crystal oscillator support rod can be pushed by a cylinder to move on the slide rail to realize crystal oscillator switching, so as to ensure that rate monitoring can be carried out for a long time with the evaporation source baffle closed.

[0025] Preferred specific embodiment 1:

[0026] In the evaporation source baffle 2, a built-in crystal oscillator probe 4, a crystal oscillator support rod 1 and a slide rail 5 are installed, so that the point source crucible 3 can detect the actual evaporation rate of the evaporation source when the evaporation source baffle 2 is closed;

[0027] Since the height of the normal rate monitoring crystal oscillator probe 6 from the crucible mouth of the point source crucible is different from the height of the built-in crystal oscillator probe 4 from the point source crucible, the actual rates monitored are also different. Therefore, two rate monitoring windows need to be designed on the evaporation computer side, one window is used for rate data analysis of the normal rate monitoring crystal oscillator probe, and the other window is used for rate data analysis of the built-in crystal oscillator probe. Then, according to the film thickness relationship, the corresponding heating parameters are adjusted to ensure that the rate monitored by the normal rate monitoring crystal oscillator probe is consistent with the actual rate monitored by the built-in crystal oscillator probe.

[0028] During film deposition, the evaporation source that forms the film first opens the corresponding evaporation source baffle to increase the temperature, and uses the normal rate monitoring probe to monitor the rate. The evaporation source that forms the film later closes the evaporation source baffle to increase the temperature, and uses the built-in crystal oscillator probe to monitor the rate. Because the rate monitored by the normal rate monitoring crystal oscillator probe is consistent with the actual rate monitored by the built-in crystal oscillator probe, when the evaporation source that forms the film later needs to form a film, the corresponding evaporation source baffle is directly opened to form the film.

[0029] In the utility model, a built-in crystal oscillator probe is provided in the evaporation source baffle, which cooperates with the external monitoring crystal oscillator probe of the evaporation source baffle to realize simultaneous temperature rise monitoring of multiple evaporation sources, thereby realizing simultaneous temperature rise of different film layer materials in the same cavity, thereby reducing the temperature rise time when different materials are formed into films in the same cavity, thereby achieving the purpose of improving the evaporation capacity and shortening the evaporation cycle.

[0030] The above is only an explanation of the preferred embodiments of the present invention. The above technical features can be arbitrarily combined to form multiple embodiments of the present invention.

[0031] The utility model is described above by way of example in conjunction with the accompanying drawings. It is obvious that the specific implementation of the utility model is not limited to the above-mentioned method. As long as various non-substantial improvements are made using the concept and technical solution of the utility model, or the concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A temperature-raising crystal oscillator device, comprising a device cavity and a group of evaporation sources of different film materials, wherein a monitoring crystal oscillator probe is provided in the device cavity, characterized in that: An inner cavity structure is provided in the cavity of the device corresponding to each evaporation source, and a built-in crystal oscillator probe is provided in the inner cavity structure; The built-in crystal oscillator probe is a group of built-in crystal oscillator probes arranged side by side; a point source evaporation source and a point source crucible are arranged in the cavity of the device, and the point source crucible is arranged in the corresponding point source evaporation source; the inner cavity structure is a hollow evaporation source baffle, and a baffle door is arranged at the lower part of the evaporation source baffle corresponding to the evaporation source; A sliding structure is arranged in the inner cavity structure, and a group of built-in crystal oscillator probes are arranged on the sliding structure.

2. The temperature-raising crystal oscillator device according to claim 1, characterized in that: The sliding structure comprises a sliding rail and a crystal oscillator support rod, and the crystal oscillator support rod is movably arranged on the sliding rail.

3. The temperature-raising crystal oscillator device according to claim 2, characterized in that: The corresponding blocking door of the group of built-in crystal oscillator probes is arranged at the lower part of the crystal oscillator supporting rod.

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