Polysilicon drying system

Abstract

The utility model discloses a polysilicon drying system, which relates to the field of semiconductor manufacturing. The polysilicon drying system includes a conveying device, a carrying container, a drying device and a cooling device. The conveying device includes a conveying member and a driving member. The carrying container is used to carry polysilicon materials. The driving member is connected to the conveying member in a transmission manner and is used to drive the conveying member to move to convey the carrying container. By arranging a conveying device in the polysilicon drying system, the carrying container carrying the polysilicon material is sequentially conveyed to the drying device and the cooling device, so that the polysilicon material is sequentially dried and cooled to remove the water vapor on the polysilicon material and reduce the temperature of the polysilicon material. The conveying device has a simple structure and is easy to operate, which can improve the degree of production automation and work efficiency. In addition, the cooling device can quickly cool the polysilicon material, so as to quickly package the dried polysilicon material, thereby improving the production rhythm.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a polysilicon drying system. Background Art

[0002] Polysilicon is one of the most basic and important raw materials for manufacturing semiconductor silicon wafers. In the process of manufacturing polysilicon, the polysilicon needs to be dried after pickling. In the related technology, the drying process of polysilicon has a low degree of automation and low work efficiency. In addition, the temperature of the dried polysilicon is high and it needs to be left to stand for a long time before packaging, which seriously affects the production rhythm. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a polysilicon drying system, which can automatically transport the carrying container, has a high degree of automation, high work efficiency, and can improve the production cycle.

[0004] According to the polysilicon drying system of the embodiment of the utility model, it includes: a conveying device and a carrying container, the conveying device includes a conveying member and a driving member, the carrying container is used to carry polysilicon material and is placed on the conveying member, the driving member is transmission-connected to the conveying member and is used to drive the conveying member to move to convey the carrying container; a drying device and a cooling device, the drying device and the cooling device are arranged along the conveying direction of the conveying member, the drying device is used to dry the polysilicon material carried by the carrying container, and the cooling device is used to cool the polysilicon material carried by the carrying container.

[0005] According to the polysilicon drying system of the embodiment of the utility model, a conveying device is arranged in the polysilicon drying system to convey the carrying container carrying the polysilicon material to the drying device and the cooling device in sequence, so as to perform drying operations and cooling operations on the polysilicon material in sequence, so as to remove the water vapor on the polysilicon material and reduce the temperature of the polysilicon material. The conveying device has a simple structure and is easy to operate, which can improve the degree of production automation and improve work efficiency. In addition, the cooling device can quickly cool down the polysilicon material to facilitate the rapid packaging of the dried polysilicon material, thereby improving the production rhythm.

[0006] According to some embodiments of the utility model, the conveying device also includes: a driving wheel and a driven wheel, the driving wheel and the driven wheel are arranged at intervals along the conveying direction of the conveying member, the conveying member is sleeved on the outside of the driving wheel and the driven wheel and is transmission connected to the driving wheel and the driven wheel, and the driving member is transmission connected to the driving wheel.

[0007] According to some embodiments of the present invention, a plurality of push plates are arranged at intervals on the conveying member, and the push plates are used to push the carrying container.

[0008] According to some embodiments of the utility model, the conveying device also includes: a plurality of supporting shafts, the plurality of supporting shafts are arranged at intervals along the conveying direction of the conveying member, the conveying member is sleeved on the outside of the plurality of supporting shafts and is transmission-connected to the plurality of supporting shafts, and the supporting shafts are capable of rotating.

[0009] According to some embodiments of the present invention, at least part of the material of the conveying member and at least part of the material of the supporting shaft are made of polyvinylidene fluoride.

[0010] According to some embodiments of the present invention, the drying device is configured as a microwave generator, and the microwave generator is used to emit microwaves to dry the polycrystalline silicon material carried by the carrying container.

[0011] According to some embodiments of the utility model, the cooling device includes: a compressor, a condenser, an expansion valve, an evaporator, and an air supply component. The compressor, the condenser, the expansion valve, and the evaporator form a cooling circulation loop. The air supply component is arranged corresponding to the evaporator and is used to drive cold air around the evaporator to cool the polysilicon material carried by the carrying container.

[0012] According to some embodiments of the utility model, the polysilicon drying system further includes: a vacuum pump, wherein the vacuum pump, the drying device, and the cooling device are arranged along the conveying direction of the conveying member, and the vacuum pump is used to evacuate the carrying container.

[0013] According to some embodiments of the utility model, the polysilicon drying system also includes: a controller and a sensor component, the sensor component is communicatively connected to the controller and is arranged on the conveying device, the sensor component is used to detect the position information of the carrying container, and the controller is used to obtain the position information of the carrying container and control the working states of the drying device, the cooling device, and the driving component according to the position information of the carrying container.

[0014] According to some embodiments of the utility model, the sensor assembly includes: a first sensor and a second sensor, the first sensor and the second sensor are arranged along the conveying direction of the conveying member, the first sensor and the second sensor are both used to detect position information of the carrying container, the controller is used to control the operation of the drying device and the shutdown of the driving member for a first preset time according to the output information of the first sensor, and the controller is used to control the operation of the cooling device and the shutdown of the driving member for a second preset time according to the output information of the second sensor.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0017] Figure 1 Schematic diagram of a polysilicon drying system according to an embodiment of the utility model.

[0018] Reference numerals:

[0019] Conveying device 1; conveying member 11; driving wheel 12; driven wheel 13; push plate 14; supporting shaft 15;

[0020] Carrying container 2; Carrying space 21;

[0021] Drying device 3; cooling device 4; vacuum pump 5; polysilicon material 6; material receiving support platform 7;

[0022] Polysilicon drying system 100 . DETAILED DESCRIPTION

[0023] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] Reference below Figure 1 A polysilicon drying system 100 according to an embodiment of the present invention is described.

[0025] refer to Figure 1 As shown, according to an embodiment of the utility model, the polysilicon drying system 100 includes: a conveying device 1, a carrying container 2, a drying device 3 and a cooling device 4, the conveying device 1 includes a conveying member 11 and a driving member, the carrying container 2 is used to carry the polysilicon material 6 and is placed on the conveying member 11, the driving member is transmission-connected to the conveying member 11 and is used to drive the conveying member 11 to move to convey the carrying container 2, along the conveying direction of the conveying member 11, the drying device 3 and the cooling device 4 are arranged, the drying device 3 is used to dry the polysilicon material 6 carried by the carrying container 2, and the cooling device 4 is used to cool the polysilicon material 6 carried by the carrying container 2.

[0026] Among them, the polysilicon material 6 needs to undergo an acid pickling operation to remove impurities and defects on the surface of the polysilicon material 6. After the acid pickling operation, due to the presence of tiny gaps on the surface of the polysilicon material 6, water vapor is easily retained in the gaps, and the retained water vapor is not conducive to the subsequent single crystal pulling process, so the polysilicon material 6 needs to be dried.

[0027] Before the drying operation, the polysilicon material 6 may be placed in the carrying container 2. As some embodiments of the present application, the carrying container 2 may be constructed as a closed box structure, and corresponding equipment is required to allow the gas inside and outside the carrying container 2 to circulate or exchange. As some embodiments of the present application, the carrying container 2 may be constructed as an open box structure. The carrying container 2 may define a carrying space 21 for accommodating the polysilicon material 6. The conveying device 1 may be constructed as a belt conveyor, a roller conveyor, etc. The conveying device 1 may be used to convey the carrying container 2. The carrying container 2 carrying the polysilicon material 6 may be placed on a conveying member 11. The conveying member 11 may be constructed as a belt, a roller, etc. The driving member is in transmission connection with the conveying member 11, and the driving member may drive the conveying member 11 to move along the conveying member 11. Figure 1 The A direction shown is used to transport the carrying container 2. Figure 1 The direction A shown is the conveying direction of the conveying member 11 .

[0028] along Figure 1 In the direction A shown, the drying device 3 and the cooling device 4 are arranged and set. The drying device 3 and the cooling device 4 can be set on the conveying device 1. The drying device 3 and the cooling device 4 can be welded or bolted to the conveying device 1, or the drying device 3 and the cooling device 4 can be set on the upper side, lower side, left side, right side, etc. of the conveying device 1. The utility model is not limited to this. It is only necessary that the drying device 3 and the cooling device 4 can act on the carrying container 2 on the conveying member 11.

[0029] The conveying member 11 can convey the carrying container 2 to the drying device 3, and the drying device 3 can dry the carrying container 2. As some embodiments of the present application, the drying device 3 can be constructed as an air flow dryer, the carrying container 2 can have an air inlet and an air outlet, and the drying device 3 can be connected to the air inlet and the air outlet respectively. The drying device 3 can introduce a high-speed airflow into the carrying container 2, and the high-speed airflow can flow out of the carrying container 2 from the air outlet. When the high-speed airflow flows, the pressure in the carrying container 2 can be reduced, so that the water vapor on the polysilicon material 6 flows out of the carrying container 2 with the high-speed airflow, so as to dry the polysilicon material 6. The air flow dryer has a simple structure, convenient operation, and low cost, and can effectively realize the drying operation. As some embodiments of the present application, the drying device 3 can be constructed as a microwave generator, which can emit microwaves to the supporting container 2. Under the action of the microwaves, the water vapor on the polysilicon material 6 is heated and evaporated into gas, thereby drying the polysilicon material 6. The microwave generator can heat the water vapor on the polysilicon material 6 evenly and quickly to dry the polysilicon material 6 more comprehensively and improve the drying efficiency.

[0030] After the drying operation, the conveyor 11 can convey the carrier container 2 to the cooling device 4, and the cooling device 4 can reduce the temperature of the polysilicon material 6 in the carrier container 2. As some embodiments of the present application, the cooling device 4 can be configured as an air conditioner, and the air conditioner can blow cold air to the carrier container 2 to reduce the temperature of the polysilicon material 6 in the carrier container 2. After the cooling operation, the polysilicon material 6 in the carrier container 2 can be packaged for sale or for subsequent single crystal pulling processes, etc. The packaging operation can also prevent the polysilicon material 6 from being contaminated by impurities and water vapor in the environment. The cooling operation of the polysilicon material 6 by the cooling device 4 can quickly reduce the temperature of the polysilicon material 6, so that the dried polysilicon material 6 can be quickly packaged, which can improve the production cycle.

[0031] In the above embodiment, a conveying device 1 is provided in the polysilicon drying system 100 to convey the carrying container 2 carrying the polysilicon material 6 to the drying device 3 and the cooling device 4 in sequence, so as to perform drying operations and cooling operations on the polysilicon material 6 in sequence, so as to remove the water vapor on the polysilicon material 6 and reduce the temperature of the polysilicon material 6. The conveying device 1 has a simple structure and is easy to operate, which can improve the degree of production automation and work efficiency. In addition, the cooling device 4 can quickly cool the polysilicon material 6 to facilitate the rapid packaging of the dried polysilicon material 6, thereby improving the production rhythm.

[0032] As some embodiments of the present application, Figure 1As shown, after the cooling operation, the conveying member 11 can convey the carrying container 2 to the material receiving support table 7 of the polysilicon drying system 100, and the polysilicon material 6 can be packaged on the material receiving support table 7, or the carrying container 2 can be taken away from the material receiving support table 7 to package the polysilicon material 6, and the vacant position on the conveying member 11 can be used to convey other carrying containers 2, so as to make the structure of the polysilicon drying system 100 more reasonable, so as to improve the reliability of the use of the polysilicon drying system 100.

[0033] In some embodiments of the present invention, Figure 1 As shown, the conveying device 1 also includes: a driving wheel 12 and a driven wheel 13, the driving wheel 12 and the driven wheel 13 are arranged at intervals along the conveying direction of the conveying member 11, the conveying member 11 is sleeved on the outside of the driving wheel 12 and the driven wheel 13 and is transmission connected to the driving wheel 12 and the driven wheel 13, and the driving member is transmission connected to the driving wheel 12.

[0034] Among them, the driving wheel 12 and the driven wheel 13 can be along Figure 1 As shown, the conveying member 11 is arranged at intervals in the direction A, and can be sleeved on the outside of the driving wheel 12 and the driven wheel 13. The driving wheel 12 and the driven wheel 13 can be used to support the conveying member 11. The driving wheel 12 and the driven wheel 13 are both connected to the conveying member 11 by transmission. The driving member can be connected to the driving wheel 12 by transmission. The driving member can drive the driving wheel 12 to rotate around the axis direction of the driving wheel 12. The driving wheel 12 can transmit power and torque to the conveying member 11 to drive the conveying member 11 to transport the carrying container 2 along the direction A. The conveying member 11 can drive the driven wheel 13 to rotate around the axis direction of the driven wheel 13. By providing the driving wheel 12 and the driven wheel 13, the conveying member 11 can be supported, the risk of partial collapse of the conveying member 11 can be reduced, the conveying device 1 can operate normally and transmit efficiently, and the conveying process of the conveying device 1 can be made consistent, so as to more effectively transport the carrying container 2, thereby improving the reliability of the polysilicon drying system 100.

[0035] In some embodiments of the present invention, Figure 1 As shown, a plurality of push plates 14 are disposed at intervals on the conveying member 11 , and the push plates 14 are used to push the carrying container 2 .

[0036] Among them, a plurality of push plates 14 may be arranged at intervals on the outer side of the conveying member 11 away from the driving wheel 12 and the driven wheel 13, and the plurality of push plates 14 may be connected to the conveying member 11 by snapping, bonding or bolting, or the plurality of push plates 14 may be integrally formed with the conveying member 11. The number of push plates 14 may be five, ten, twenty, etc., and the number of push plates 14 may be reasonably set according to actual conditions. When the conveying member 11 is working, the push plate 14 may abut against the carrying container 2, and the push plate 14 may push the carrying container 2 so that the carrying container 2 moves along the direction A on the conveying member 11 to transport the carrying container 2 to the corresponding position. By providing a plurality of push plates 14, relative sliding between the carrying container 2 and the conveying member 11 can be avoided, and the conveying device 1 can transport the carrying container 2 to the corresponding position more accurately, so as to improve the controllability of the polysilicon drying system 100 and enhance the conveying effect.

[0037] In some embodiments of the present invention, Figure 1 As shown, the conveying device 1 also includes: multiple supporting shafts 15, which are arranged at intervals along the conveying direction of the conveying member 11, and the conveying member 11 is sleeved on the outside of the multiple supporting shafts 15 and is transmission-connected to the multiple supporting shafts 15, and the supporting shafts 15 can rotate.

[0038] Among them, the multiple support shafts 15 can all be constructed as a circular tubular structure, the multiple support shafts 15 can all rotate around their axes, the multiple support shafts 15 can be arranged at intervals along the A direction, the conveying member 11 can be sleeved on the outside of the multiple support shafts 15, the multiple support shafts 15 can all support the conveying member 11, and the conveying member 11 can be connected to the multiple support shafts 15 in a transmission manner. When the conveying member 11 is working, the conveying member 11 can drive the multiple support shafts 15 to rotate around its own axis, and rolling friction occurs between the conveying member 11 and the multiple support shafts 15. By setting up multiple support shafts 15, the multiple support shafts 15 can support the conveying member 11, so that the conveying member 11 will not be compressed and deformed during the process of conveying the carrying container 2, so as to improve the reliability and stability of the polysilicon drying system 100, and the friction coefficient between the conveying member 11 and the multiple support shafts 15 can be reduced to reduce power loss.

[0039] In some embodiments of the present invention, at least part of the material of the conveying member 11 and at least part of the material of the supporting shaft 15 are made of polyvinylidene fluoride.

[0040] Among them, polyvinylidene fluoride has good chemical stability, strong mechanical strength, good chemical corrosion resistance and good insulation. By making at least part of the material of the conveying member 11 and at least part of the material of the supporting shaft 15 into polyvinylidene fluoride, the conveying member 11 and the supporting shaft 15 can be made less susceptible to chemical corrosion, breakage, and decomposition to generate excess substances, thereby reducing the risk of the conveying device 1 contaminating the polysilicon material 6, and extending the service life of the conveying member 11 and the supporting shaft 15, thereby improving the safety and reliability of the polysilicon drying system 100.

[0041] In some embodiments of the present invention, the drying device 3 is configured as a microwave generator, and the microwave generator is used to emit microwaves to dry the polycrystalline silicon material 6 carried by the carrying container 2 .

[0042] Among them, the drying device 3 can be constructed as a microwave generator, which can emit microwaves to the carrying container 2. There will be tiny gaps on the surface of the polycrystalline silicon material 6. The microwave generator can vaporize the remaining water vapor in the tiny gaps. Under the action of microwaves, the water vapor on the polycrystalline silicon material 6 is heated and evaporated into gas, and then the polycrystalline silicon material 6 can be dried. The microwave generator can heat the water vapor on the polycrystalline silicon material 6 evenly and quickly to dry the polycrystalline silicon material 6 more comprehensively, which can improve the drying effect and drying efficiency, and can improve the yield rate of the polycrystalline silicon material 6. In addition, this can reduce the risk of subsequent single crystal breakage.

[0043] In some embodiments of the present invention, the cooling device 4 includes: a compressor, a condenser, an expansion valve, an evaporator, and an air supply component. The compressor, the condenser, the expansion valve, and the evaporator form a cooling circulation loop. The air supply component is arranged corresponding to the evaporator and is used to drive cold air around the evaporator to cool the polysilicon material 6 carried by the carrying container 2.

[0044] Among them, the compressor can be used to compress the gas to increase the pressure and temperature of the gas to form a high-temperature and high-pressure gas, the condenser can be used to reduce the temperature of the high-temperature and high-pressure gas compressed by the compressor to dissipate the heat of the high-temperature and high-pressure gas to form a low-temperature and high-pressure liquid refrigerant, the expansion valve has the functions of throttling, reducing pressure, and controlling the gas flow, and can reduce the pressure of the low-temperature and high-pressure liquid refrigerant to a low-temperature and low-pressure liquid refrigerant, the evaporator can be used to absorb the heat of the ambient gas to vaporize the low-temperature and low-pressure liquid refrigerant to reduce the temperature of the ambient gas, and the air supply member can guide the cooled ambient gas to the required equipment to cool the required equipment. When the cooling device 4 is working, the compressor, condenser, expansion valve, and evaporator form a cooling circulation loop to generate cold air, and the air supply member is arranged corresponding to the evaporator, and the air supply member can drive the cold air around the evaporator to blow toward the container to cool the polysilicon material 6 carried by the carrying container 2. By arranging the compressor, condenser, expansion valve, evaporator, and air supply member, the polysilicon material 6 carried by the carrying container 2 can be effectively cooled, and the cooling device 4 has a simple structure, good cooling effect, and is easy to implement.

[0045] In some embodiments of the present invention, Figure 1 As shown, the polysilicon drying system 100 further includes: a vacuum pump 5 . Along the conveying direction of the conveyor 11 , the vacuum pump 5 , the drying device 3 , and the cooling device 4 are arranged. The vacuum pump 5 is used to evacuate the carrying container 2 .

[0046] Among them, along Figure 1 In the direction A shown, the vacuum pump 5, the drying device 3, and the cooling device 4 can be arranged in sequence, and the conveying member 11 can convey the carrying container 2 to the vacuum pump 5, the drying device 3, and the cooling device 4 in sequence. When the carrying container 2 is conveyed to the vacuum pump 5, the vacuum pump 5 can be connected with the carrying container 2, and the vacuum pump 5 works to evacuate the carrying container 2 to facilitate subsequent drying operations, so that the drying device 3 can dry the water vapor on the polysilicon material 6, which is beneficial to improve the drying efficiency and drying effect, thereby improving the production efficiency.

[0047] As some embodiments of the present application, the vacuum pump 5 can be connected to the containment chamber 2 by automated equipment, or the vacuum pump 5 can be connected to the containment chamber 2 manually by an operator.

[0048] In some embodiments of the present invention, the polysilicon drying system 100 also includes: a controller and a sensor component, the sensor component is communicatively connected to the controller and is arranged on the conveying device 1, the sensor component is used to detect the position information of the carrying container 2, and the controller is used to obtain the position information of the carrying container 2 and control the working status of the drying device 3, the cooling device 4, and the driving component according to the position information of the carrying container 2.

[0049] The sensor assembly may be provided on the conveying device 1, and the sensor assembly may be used to detect the position information of the carrier container 2. The controller may be connected to the sensor assembly in communication, and the controller may be used to obtain the position information of the carrier container 2. The controller may control the working state of the drying device 3, the cooling device 4, and the driving member according to the position information of the carrier container 2. For example, when the polysilicon drying system 100 needs to work, the controller may control the driving member to work so as to drive the conveying device 1 to convey the carrier container 2. When the sensor assembly detects that the carrier container 2 is conveyed to the drying device 3, the controller may control the drying device 3 to work so as to dry the polysilicon material 6 carried by the carrier container 2. When the sensor assembly detects that the carrier container 2 is conveyed to the cooling device 4, the controller may control the cooling device 4 to work so as to cool the carrier container 2. By providing the sensor assembly and the controller, the degree of automation of the polysilicon drying system 100 may be improved, so as to reduce the labor intensity of the operator, and to improve the production efficiency.

[0050] In some embodiments of the utility model, the sensor assembly includes: a first sensor and a second sensor, the first sensor and the second sensor are arranged along the conveying direction of the conveying member 11, the first sensor and the second sensor are both used to detect the position information of the carrying container 2, the controller is used to control the operation of the drying device 3 and the shutdown of the driving member for a first preset time according to the output information of the first sensor, and the controller is used to control the operation of the cooling device 4 and the shutdown of the driving member for a second preset time according to the output information of the second sensor.

[0051] The first sensor and the second sensor can be arranged along the conveying direction of the conveying member 11, and both the first sensor and the second sensor can be used to detect the position information of the carrier container 2. When the first sensor detects that the carrier container 2 is conveyed to the drying device 3, the controller can control the drying device 3 to work according to the position information obtained by the first sensor, and the controller can control the driving member to stop for a first preset time. Within the first preset time, the drying device 3 can complete the drying operation of the carrier container 2. When the second sensor detects that the carrier container 2 is conveyed to the cooling device 4, the controller can control the cooling device 4 to work according to the position information obtained by the second sensor, and the controller can control the driving member to stop for a second preset time. Within the second preset time, the cooling device 4 can complete the cooling operation of the polysilicon material 6 carried by the carrier container 2.

[0052] By setting the first sensor and the second sensor, the controller can more accurately control the time nodes of opening and closing the driving member, so that the drying device 3 and the cooling device 4 can perform drying operations and cooling operations on the polysilicon material 6 carried by the carrying container 2 respectively, so as to further improve the degree of automation of the polysilicon drying system 100, which is beneficial to improve production efficiency.

[0053] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0054] In the description of the present invention, "first feature" or "second feature" may include one or more of the features.

[0055] In the description of the present invention, "plurality" means two or more.

[0056] In the description of the present invention, a first feature being “above” or “below” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact but are in contact with each other via another feature therebetween.

[0057] In the description of the present invention, a first feature “above”, “over” and “above” a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0058] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0059] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A polysilicon drying system, characterized in that: include: A conveying device (1) and a carrying container (2), wherein the conveying device (1) comprises a conveying member (11) and a driving member, the carrying container (2) is used to carry polysilicon material (6) and is placed on the conveying member (11), and the driving member is in driving connection with the conveying member (11) and is used to drive the conveying member (11) to move so as to convey the carrying container (2); A drying device (3) and a cooling device (4), wherein the drying device (3) and the cooling device (4) are arranged along the conveying direction of the conveying member (11), the drying device (3) being used for drying the polycrystalline silicon material (6) carried by the carrying container (2), and the cooling device (4) being used for cooling the polycrystalline silicon material (6) carried by the carrying container (2); A vacuum pump (5) is arranged along the conveying direction of the conveying member (11), the vacuum pump (5), the drying device (3), and the cooling device (4), and the vacuum pump (5) is used to evacuate the carrying container (2).

2. The polysilicon drying system according to claim 1, characterized in that: The conveying device (1) further comprises: a driving wheel (12) and a driven wheel (13), wherein the driving wheel (12) and the driven wheel (13) are arranged at intervals along the conveying direction of the conveying member (11), the conveying member (11) is sleeved on the outside of the driving wheel (12) and the driven wheel (13) and is transmission-connected to both the driving wheel (12) and the driven wheel (13), and the driving member is transmission-connected to the driving wheel (12).

3. The polysilicon drying system according to claim 1, characterized in that: A plurality of push plates (14) are arranged at intervals on the conveying member (11), and the push plates (14) are used to push the carrying container (2).

4. The polysilicon drying system according to claim 1, characterized in that: The conveying device (1) further comprises: a plurality of supporting rotating shafts (15), wherein the plurality of supporting rotating shafts (15) are arranged at intervals along the conveying direction of the conveying member (11), the conveying member (11) is sleeved on the outside of the plurality of supporting rotating shafts (15) and is transmission-connected to the plurality of supporting rotating shafts (15), and the supporting rotating shafts (15) are rotatable.

5. The polysilicon drying system according to claim 4, characterized in that: At least part of the material of the conveying member (11) and at least part of the material of the supporting shaft (15) are made of polyvinylidene fluoride.

6. The polysilicon drying system according to claim 1, characterized in that: The drying device (3) is configured as a microwave generator, and the microwave generator is used to emit microwaves to dry the polysilicon material (6) carried by the carrying container (2).

7. The polysilicon drying system according to claim 1, characterized in that: The cooling device (4) comprises: a compressor, a condenser, an expansion valve, an evaporator, and an air supply component, wherein the compressor, the condenser, the expansion valve, and the evaporator form a cooling circulation loop, and the air supply component is arranged corresponding to the evaporator and is used to drive cold air around the evaporator to cool the polysilicon material (6) carried by the carrying container (2).

8. The polysilicon drying system according to claim 1, characterized in that: Also includes: A controller and a sensor component, wherein the sensor component is communicatively connected with the controller and is arranged on the conveying device (1), the sensor component is used to detect position information of the carrying container (2), and the controller is used to obtain the position information of the carrying container (2) and control the working states of the drying device (3), the cooling device (4), and the driving member according to the position information of the carrying container (2).

9. The polysilicon drying system according to claim 8, characterized in that: The sensor assembly comprises: a first sensor and a second sensor, the first sensor and the second sensor being arranged along the conveying direction of the conveying member (11), the first sensor and the second sensor both being used to detect position information of the carrying container (2), the controller being used to control the operation of the drying device (3) and the stopping of the driving member for a first preset time according to output information of the first sensor, and the controller being used to control the operation of the cooling device (4) and the stopping of the driving member for a second preset time according to output information of the second sensor.

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