Bearing device and processing equipment

Abstract

The utility model belongs to the technical field of semiconductors, and discloses a bearing device and processing equipment. The bearing device comprises a boat support and a bearing boat. The boat support is provided with a plurality of first bearing parts and a plurality of second bearing parts, the first bearing parts and the second bearing parts are alternately arranged in the length direction of the boat support, the first bearing parts can bear the bearing boats arranged in the first direction, and the second bearing parts can bear the bearing boats arranged in the second direction. The first direction is not parallel to the second direction. The bearing device can be used for bearing the bearing boats with various slide glass modes, so that the flexibility is improved, and the application range is expanded.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a carrier device and processing equipment. Background Art

[0002] The horizontal oxidation furnace is a device used to process copper or silicon wafers. During processing, the copper or silicon wafers are first loaded into a wafer boat, then placed on a boat support, and finally sent into the reaction chamber in the furnace.

[0003] The film boat generally includes a horizontal film loading mode and a vertical film loading mode. The existing boat support cannot be used to carry both the horizontal film loading mode and the vertical film loading mode. In actual production, if it is necessary to switch the horizontal film loading mode boat to the vertical film loading mode boat, or to switch the vertical film loading mode boat to the horizontal film loading mode boat, the entire boat support needs to be replaced. Therefore, the existing boat support has the problems of poor flexibility and narrow application range.

[0004] Therefore, there is an urgent need for a carrying device and processing equipment to solve the above problems. Utility Model Content

[0005] According to one aspect of the utility model, an object is to provide a carrying device that can be used to carry a carrying boat of various wafer carrying modes, thereby improving flexibility and expanding the scope of application.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The carrying device comprises:

[0008] A boat support and a carrying boat, the boat support is provided with a plurality of first carrying parts and a plurality of second carrying parts, along the length direction of the boat support, the first carrying parts and the second carrying parts are alternately arranged, the first carrying parts can carry the carrying boat arranged along a first direction, the second carrying parts can carry the carrying boat arranged along a second direction, the first direction is non-parallel to the second direction.

[0009] As an optional solution of the carrying device provided by the utility model, the boat support includes two support rods arranged at intervals and a plurality of support seats arranged at intervals from each other, the support seat is arranged at an angle between the two support rods, the second carrying portion is formed on the support seat, and the first carrying portion is formed at positions where the two support rods are opposite to each other.

[0010] As an optional solution of the carrying device provided by the utility model, the carrying boat includes a first carrying boat and a second carrying boat, the first carrying part is used for carrying the first carrying boat, and the second carrying part is used for carrying the second carrying boat.

[0011] As an optional solution of the bearing device provided by the utility model, a plurality of first bearing grooves are provided at intervals along the length direction of the supporting rod, and two first bearing grooves arranged opposite to each other on two supporting rods form the first bearing part;

[0012] The first carrying boat comprises a first boat body and two first boat wings, the two first boat wings are respectively arranged on two opposite sides of the first boat body, and the two first boat wings can be supported in two corresponding first supporting grooves respectively;

[0013] The first boat body is used to carry a base body, and the insert direction of the base body is perpendicular to the plane where the two first boat wings are located.

[0014] As an optional solution of the bearing device provided by the utility model, the depths of the two corresponding first supporting grooves are different, and the first boat body is obliquely arranged between the two supporting rods.

[0015] As an optional solution of the bearing device provided by the utility model, the first boat body further includes at least two first limiting rods, which are arranged at the bottom of the first boat body in the gravity direction and are configured to support the base.

[0016] As an optional solution of the bearing device provided by the utility model, the bracket is provided with a second bearing groove, and the second bearing grooves on two adjacent brackets form the second bearing portion;

[0017] The second carrying boat comprises a second boat body and two second boat wings, the two second boat wings are respectively arranged on two opposite sides of the second boat body, and the two second boat wings can be supported in two opposite second supporting grooves respectively;

[0018] The second boat body is used to carry the base body, and the inserting direction of the base body is parallel to the plane where the two second boat wings are located.

[0019] As an optional solution of the load-bearing device provided by the utility model, lugs are respectively arranged on the sides of the two second boat wings, and the lugs are single; or the lugs are at least two arranged at intervals;

[0020] In the second supporting groove, at least two limit blocks are arranged at intervals along the length direction of the bracket, and the lug can be clamped between two adjacent limit blocks, or between the limit block and the end of the second supporting groove;

[0021] The numbers of lugs arranged on the two second boat wings are the same or different; and / or,

[0022] The lugs arranged on the two second boat wings are arranged in one-to-one correspondence or staggered arrangement.

[0023] As an optional solution for the load-bearing device provided by the utility model, the bottom height of the second supporting groove gradually decreases along the direction from one supporting rod to the other supporting rod, and the second boat body is tiltedly arranged between the two supporting rods.

[0024] As an optional solution for the carrying device provided by the utility model, the second boat body also includes at least two second limiting rods, which are arranged on the rear end of the second boat body parallel to the insertion direction of the base and are configured to stop the base.

[0025] As an optional solution of the carrying device provided by the utility model, the carrying boat includes a plurality of boat ears, the boat ears protrude from the upper end surface of the carrying boat, the boat ears are provided with through holes, and the through holes are configured to pass through the boat taking rods.

[0026] As an optional solution of the carrying device provided by the utility model, the carrying boat includes two boat plates arranged parallel to each other and spaced apart, and boat rods arranged parallel to each other and in an array between the two boat plates, a plurality of slot structures are arranged on the boat rods, and the base can be accommodated between the plurality of boat rods and inserted in the slot structures.

[0027] As an optional solution of the bearing device provided by the utility model, the two opposite inner side walls of the slot structure gradually move away from each other in a direction away from the inner bottom of the slot structure.

[0028] According to another aspect of the utility model, the object is to provide a processing equipment, which includes a furnace body, a furnace door, a paddle structure and a supporting device as described in any one of the above schemes, wherein the paddle structure is connected to the furnace door, and the furnace door is removably sealed at the opening of the furnace body, and the supporting device is configured to be arranged on the paddle structure and can be inserted into the furnace body along with the paddle structure.

[0029] Beneficial effects of the utility model:

[0030] The load-bearing device provided by the utility model includes a boat support and a load-bearing boat. The boat support is provided with a plurality of first load-bearing parts and a plurality of second load-bearing parts. The first load-bearing parts and the second load-bearing parts are alternately arranged along the length direction of the boat support. The first load-bearing parts can carry the load-bearing boat arranged along the first direction, and the second load-bearing parts can carry the load-bearing boat arranged along the second direction. The first direction is not parallel to the second direction, that is, the boat support can provide support for the load-bearing boat in two directions at an angle to each other. Through the above arrangement, the limitation of the boat support on the film-carrying method of the load-bearing boat is eliminated, the flexibility is improved, and the scope of application is expanded. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1It is a partial schematic diagram of a processing device provided by an embodiment of the utility model;

[0032] Figure 2 yes Figure 1 A partial enlarged view of the structure marked as A;

[0033] Figure 3 is a schematic diagram of a carrying device provided in an embodiment of the utility model;

[0034] Figure 4 It is a schematic diagram of a boat support provided by an embodiment of the utility model;

[0035] Figure 5 It is a side view of the boat support provided by the embodiment of the utility model;

[0036] Figure 6 yes Figure 5 Cross-sectional view along the BB direction;

[0037] Figure 7 It is a schematic diagram of a first carrying boat provided by an embodiment of the utility model;

[0038] Figure 8 It is a schematic diagram of a second carrying boat provided in an embodiment of the utility model;

[0039] Fig. 9 It is a partial schematic diagram of the carrying device provided in the embodiment of the utility model.

[0040] In the figure:

[0041] 10. furnace door; 20. paddle structure; 30. connector;

[0042] 100, boat support; 110, support rod; 111, first support groove; 120, support seat; 121, second support groove; 122, limit block;

[0043] 200, first carrying boat; 210, first boat body; 211, first boat board; 212, first boat rod; 213, first slot structure; 214, first limiting rod; 220, first boat wing; 230, first boat ear;

[0044] 300, second carrying boat; 310, second boat body; 311, second boat plate; 312, second boat rod; 313, second slot structure; 314, second limiting rod; 320, second boat wing; 321, groove; 322, lug; 330, second boat ear. DETAILED DESCRIPTION

[0045] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0046] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0048] In the description of this embodiment, the terms "upper", "lower", "right", "left" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0049] Figure 1 A partial schematic diagram of a processing device provided by an embodiment of the utility model is shown; Figure 2 Show Figure 1 A partial enlarged view of the structure marked as A. Figure 1 and Figure 2 , this embodiment provides a carrying device and a processing device. In this embodiment, the processing device is specifically a horizontal oxidation furnace. The carrying device can extend into the reaction chamber of the processing device to carry a substrate. In this embodiment, the substrate can specifically be a copper sheet or a silicon sheet.

[0050] Specifically, the processing equipment includes a furnace body, a furnace door 10, a paddle structure 20 and a carrying device provided in this embodiment. The paddle structure 20 is specifically two, and the two paddle structures 20 are arranged parallel to each other and spaced apart, connected to the furnace door 10, and penetrate the furnace door 10. The interior of the furnace body is the reaction chamber, and the furnace door 10 is detachably sealed at the opening of the furnace body. The carrying device is configured to be detachably arranged on the paddle structure 20, and can be inserted into the reaction chamber of the furnace body with the paddle structure 20. A portion of the paddle structure 20 located outside the reaction chamber can be used to connect to a transportation mechanism, etc.

[0051] More specifically, the processing equipment further includes a connecting member 30. The connecting member 30 is disposed at the end of the paddle structure 20 away from the furnace door 10 and extending into the reaction chamber, and can connect the two paddle structures 20 to ensure the parallelism and integrity of the two paddle structures 20, while ensuring the supporting stability of the paddle structure 20 on the bearing device.

[0052] More specifically, the paddle structure 20 is a hollow structure, and is hollowed out along its length. Through the above arrangement, it is possible to achieve lightness and avoid excessive load pressure on the transport mechanism.

[0053] Figure 3 A schematic diagram showing a carrying device provided by an embodiment of the utility model; Figure 4 A schematic diagram showing a boat support provided by an embodiment of the utility model is shown; Figure 6 Show Figure 5 Cross-sectional view along the BB axis. Figure 3-Figure 6 , the carrying device includes a boat support 100 and a carrying boat. The boat support 100 is provided with a plurality of first carrying parts and a plurality of second carrying parts. Along the length direction of the boat support 100, the first carrying parts and the second carrying parts are alternately arranged. The first carrying parts can carry the carrying boat arranged along a first direction, and the second carrying parts can carry the carrying boat arranged along a second direction. The first direction is non-parallel to the second direction. In this embodiment, the first direction is perpendicular to the second direction.

[0054] The existing carrying boats for horizontal film loading and the carrying boats for vertical film loading have different locations of the components supported by the boat support 100. Through the above arrangement, the carrying boat can be supported on the boat support 100 under the support of the first supporting part, and can also be supported on the boat support 100 under the support of the second supporting part. In other words, the boat support 100 can provide support for the carrying boat in two directions that are angled with each other. Through the above arrangement, the restrictions of the boat support 100 on the location of the components supported by the boat support 100 on the carrying boat are eliminated, and thus the restrictions of the boat support 100 on the film loading method of the carrying boat are eliminated, thereby improving flexibility and expanding the scope of application.

[0055] Specifically, the boat support 100 includes two support rods 110 that are parallel to each other and spaced apart, and a plurality of support seats 120 that are parallel to each other and spaced apart. The support seat 120 is fixedly disposed between the two support rods 110 at a right angle, the second bearing portion is formed on the support seat 120, and the first bearing portion is formed at a position where the two support rods 110 are opposite to each other. In this embodiment, the support rod 110 and the support seat 120 are specifically an integrally formed structure.

[0056] More specifically, refer to Figure 2 The support rod 110 and the plurality of support seats 120 form an overlapped portion at the connection between the two. The shape of the overlapped portion matches the shape of the support portion of the paddle structure 20, that is, the support rod 110 is placed and abutted against the upper end surface of the paddle structure 20, the support seat 120 is sandwiched between the two paddle structures 20, and the two end side portions of the support seat 120 respectively abut against the side portions of the two paddle structures 20 facing each other. Through the above arrangement, the assembly reliability of the boat support 100 and the paddle structure 20 is improved.

[0057] Continue to refer to Figure 1-Figure 3 The carrying boat includes a first carrying boat 200 and a second carrying boat 300 , the first carrying portion is used to carry the first carrying boat 200 , and the second carrying portion is used to carry the second carrying boat 300 .

[0058] Figure 7 A schematic diagram of a first carrying boat provided by an embodiment of the utility model is shown, referring to Figure 3 and Figure 7 In one embodiment, the boat support 100 is used to carry the first carrying boat 200, and the first carrying boat 200 specifically adopts a vertical loading method to carry the substrate.

[0059] Specifically, the first load-bearing boat 200 includes a first boat body 210 and two first boat wings 220, and the two first boat wings 220 are respectively arranged on opposite sides of the first boat body 210. A plurality of first bearing grooves 111 are spaced apart along the length direction of the support rod 110, and the two first bearing grooves 111 oppositely arranged on the two support rods 110 can form a first load-bearing portion. The two first boat wings 220 can be supported in the corresponding two first bearing grooves 111 respectively. The first boat body 210 is used to accommodate a substrate, and the insert direction of the substrate in the first boat body 210 is perpendicular to the plane where the two first boat wings 220 are located.

[0060] More specifically, refer to Figure 7The first boat body 210 includes two first boat plates 211 that are arranged in parallel and spaced apart from each other, and first boat rods 212 that are arranged in parallel and arrayed between the two first boat plates 211. A plurality of first boat rods 212 and two first boat plates 211 are arranged to form a first base accommodating space. A plurality of first slot structures 213 are arranged on one side of the plurality of first boat rods 212 facing the first base accommodating space. The base can be inserted into the corresponding plurality of first slot structures 213 to limit the two opposite side edges thereof, so that the plurality of bases are inserted in the first base accommodating space with spacing from each other. The two opposite inner side walls of the first slot structure 213 gradually move away from each other in the direction away from the inner bottom of the slot structure, and the first slot structure 213 is specifically a V-shaped structure. In another embodiment, the bottom wall and the two inner side walls of the first slot structure 213 can form an opening, that is, the bottom wall of the first slot structure 213 is a planar structure, and the distance between the two inner side walls of the first slot structure 213 gradually increases in the direction away from the bottom wall of the first slot structure 213. Through the above arrangement, the contact and shielding between the first slot structure 213 and the substrate can be reduced, so that more areas of the substrate are exposed, the substrate can be fully reacted, and the processing yield rate is improved.

[0061] More specifically, the first boat body 210 further includes at least two first limiting rods 214. The first limiting rods 214 are disposed at the bottom of the first boat body 210 in the gravity direction, and are used to limit and support the substrate in the first substrate accommodation space to prevent the substrate from sliding out of the first substrate accommodation space under the action of gravity. In this embodiment, the first limiting rods 214 are parallel to the first boat rod 212 and are spaced apart from each other.

[0062] More specifically, the first carrying boat 200 further includes a plurality of first boat ears 230, which are arranged protruding from the upper end surface of the first boat body 210. The first boat ears 230 are provided with a through hole, and the through hole is configured to be penetrated by a boat taking rod. The first boat ears 230 are specifically four, two of which are arranged at intervals on one first boat plate 211, and the other two are arranged at intervals on another first boat plate 211, so as to be distributed at the four vertex corners of the first boat body 210. Along the direction parallel to the first boat rod 212, the through holes of the two first boat ears 230 are opposite to each other. The boat taking rod is penetrated in the two through holes along the direction parallel to the first boat rod 212, so as to form a handle for taking the first carrying boat 200 out of the boat support 100 or putting it into the boat support 100.

[0063] Reference Figure 6In this embodiment, the depths of the two corresponding first supporting grooves 111 are different. The bottoms of the first boat wings 220 arranged on both sides of the first boat body 210 are at the same height. When the two first boat wings 220 are respectively arranged in the two first supporting grooves 111, the first boat body 210 can be tilted between the two supporting rods 110. Through the above arrangement, the multiple substrates inserted in the multiple first slot structures 213 can tilt in one direction under the action of gravity, ensuring the consistency of the tilting directions of the multiple substrates. Thereby reducing the contact and shielding between the first carrying boat 200 and the substrate, exposing more areas of the substrate, allowing the substrate to fully react, and improving the processing yield.

[0064] Furthermore, the bottom of the first supporting groove 111 is inclined, and the inclination direction of the bottom of the first supporting groove 111 is specifically consistent with the direction from the first supporting groove 111 with a smaller depth to the first supporting groove 111 with a larger depth. The angle between the bottom of the first supporting groove 111 and the gravity direction is preferably 92°.

[0065] Figure 8 A schematic diagram showing a second carrying boat provided by an embodiment of the utility model is shown, referring to Figure 3 and Figure 8 In another embodiment, the boat support 100 is used to carry the second carrying boat 300, and the second carrying boat 300 specifically adopts a horizontal carrier method to carry the substrate.

[0066] Specifically, the second carrying boat 300 includes a second boat body 310 and two second boat wings 320, and the two second boat wings 320 are respectively arranged on opposite sides of the second boat body 310. The bracket 120 is provided with a second supporting groove 121, and the second supporting grooves 121 on two adjacent brackets 120 can form the second bearing portion. The two second boat wings 320 can be supported in two opposite second supporting grooves 121 respectively. The second boat body 310 is used to accommodate a substrate, and the insert direction of the substrate in the second boat body 310 is parallel to the plane where the two second boat wings 320 are located.

[0067] More specifically, refer to Figure 8The second boat body 310 includes two second boat plates 311 that are arranged in parallel and spaced apart from each other, and second boat rods 312 that are arranged in parallel and arrayed between the two second boat plates 311. A plurality of second boat rods 312 and two second boat plates 311 are arranged to form a second base accommodating space. A plurality of second boat rods 312 are provided with a plurality of second slot structures 313 on one side facing the second base accommodating space. The base can be inserted into the corresponding plurality of second slot structures 313 to limit the two opposite side edges thereof, so that the plurality of bases are inserted into the second base accommodating space at intervals from each other. The two opposite inner side walls of the second slot structure 313 gradually move away from each other in the direction away from the inner bottom of the slot structure, that is, the second slot structure 313 is specifically a V-shaped structure. In another embodiment, the bottom wall and the two inner side walls of the second slot structure 313 can form an opening, that is, the bottom wall of the second slot structure 313 is a planar structure, and the distance between the two inner side walls of the second slot structure 313 gradually increases in the direction away from the bottom wall of the second slot structure 313. Through the above arrangement, the contact and shielding between the second slot structure 313 and the substrate can be reduced, so that more areas of the substrate are exposed, the substrate can be fully reacted, and the processing yield rate is improved.

[0068] More specifically, the second boat body 310 further includes at least two second limiting rods 314. The second limiting rods 314 are arranged on the second boat body 310 at the rear end parallel to the insertion direction of the base, and are configured to stop the base. The second limiting rods 314 are used to limit and support the base in the second base accommodating space to prevent the base from sliding out of the second base accommodating space. In this embodiment, the plurality of second limiting rods 314 are parallel to the second boat rod 312 and are arranged at intervals from each other.

[0069] More specifically, the second carrying boat 300 also includes a plurality of second boat ears 330, which are arranged protruding from the upper end surface of the second boat body 310. The second boat ears 330 are provided with a through hole, and the through hole is configured to be penetrated by a boat taking rod. The second boat ears 330 are specifically four, and the four second boat ears 330 are respectively arranged at the four vertex corners of the second boat plate 311 located at the top. In a direction perpendicular to the second boat rod 312, the through holes of the two second boat ears 330 are opposite to each other. The boat taking rod is penetrated in the two through holes in a direction perpendicular to the second boat rod 312, so as to form a handle for taking the second carrying boat 300 out of the boat support 100 or putting it into the boat support 100.

[0070] More specifically, the sides of the two second boat wings 320 on the same second carrying boat 300 are respectively provided with lugs 322, and the lugs 322 are single; or, the lugs 322 are at least two arranged at intervals. In the second supporting groove 121, at least two limit blocks 122 are arranged at intervals along the length direction of the bracket 120, and the lugs 322 can be clamped between two adjacent limit blocks 122, or between the limit block 122 and the end of the second supporting groove 121. The number of lugs 322 arranged on the two second boat wings 320 is the same or different; and / or, the lugs 322 arranged on the two second boat wings 320 are arranged one-to-one or staggered with each other. Through the above arrangement, the second boat wing 320 and the second supporting groove 121 can form a plug-in fit, thereby ensuring a stable and reliable connection.

[0071] As a preference, Fig. 9 A partial schematic diagram of a carrying device provided by an embodiment of the utility model is shown. Fig. 9 , lugs 322 are provided at both ends of a second boat wing 320 in the same second carrying boat 300, a groove 321 is formed between the two lugs 322, and a lug 322 is provided at the center position of the other second boat wing 320. In the second supporting groove 121, two limit blocks 122 are arranged at intervals along the length direction of the bracket 120. When a second boat wing 320 is embedded in the second supporting groove 121, the two limit blocks 122 can be accommodated in the groove 321, and the lugs 322 at both ends of the second boat wing 320 can be respectively clamped between a limit block 122 and one end of the second supporting groove 121. The lug 322 at the center position of the other second boat wing 320 can be clamped between two adjacent limit blocks 122. Through the above arrangement, the force uniformity of the two second boat wings 320 in the corresponding second supporting grooves 121 can be further improved.

[0072] In this embodiment, a second boat wing 320 is concavely provided at the center to form a groove 321, and another second boat wing 320 is convexly provided at the center to form a lug 322. Two limit blocks 122 are provided in the second supporting groove 121. The lug 322 of one second boat wing 320 is sandwiched between the two limit blocks 122 in one second supporting groove 121; the two limit blocks 122 in another second supporting groove 121 are embedded in the groove 321 of another second boat wing 320, and the two ends of the second boat wing 320 can be sandwiched between the two limit blocks 122 and the two ends of the second supporting groove 121, respectively. Through the above arrangement, the installation stability of the second carrying boat 300 on the boat support 100 can be improved.

[0073] Reference Figure 6In this embodiment, the bottom height of the second supporting groove 121 gradually decreases along the direction from one supporting rod 110 to another supporting rod 110. The bottoms of the second boat wings 320 arranged on both sides of the second boat body 310 are of equal height. When the two second boat wings 320 are respectively arranged in the two second supporting grooves 121, the second boat body 310 can be arranged obliquely between the two supporting rods 110. Through the above arrangement, the multiple substrates inserted in the multiple second slot structures 313 can be tilted in one direction under the action of gravity, ensuring the consistency of the tilting direction of the multiple substrates. Thereby reducing the contact and shielding between the second supporting boat 300 and the substrate, exposing more areas of the substrate, allowing the substrate to fully react, and improving the processing yield. Specifically, the angle between the bottom of the second supporting groove 121 and the gravity direction is preferably 92°.

[0074] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A carrying device, characterized in that: include: A boat support (100) and a carrying boat, wherein the boat support (100) is provided with a plurality of first carrying parts and a plurality of second carrying parts, and along the length direction of the boat support (100), the first carrying parts and the second carrying parts are alternately arranged, the first carrying parts can carry the carrying boat arranged along a first direction, and the second carrying parts can carry the carrying boat arranged along a second direction, and the first direction is non-parallel to the second direction.

2. The carrying device according to claim 1, characterized in that: The boat support (100) comprises two support rods (110) arranged at intervals and a plurality of support seats (120) arranged at intervals from each other, wherein the support seat (120) is arranged at an angle between the two support rods (110), the second bearing portion is formed on the support seat (120), and the first bearing portion is formed at a position where the two support rods (110) are opposite to each other.

3. The carrying device according to claim 2, characterized in that: The carrying boat comprises a first carrying boat (200) and a second carrying boat (300), the first carrying portion is used for carrying the first carrying boat (200), and the second carrying portion is used for carrying the second carrying boat (300).

4. The carrying device according to claim 3, characterized in that: A plurality of first supporting grooves (111) are arranged at intervals along the length direction of the supporting rod (110), and two first supporting grooves (111) arranged opposite to each other on two supporting rods (110) form the first bearing portion; The first carrying boat (200) comprises a first boat body (210) and two first boat wings (220), wherein the two first boat wings (220) are respectively arranged on two opposite sides of the first boat body (210), and the two first boat wings (220) can be supported in two corresponding first supporting grooves (111) respectively; The first boat body (210) is used to support a base body, and the insert direction of the base body is perpendicular to the plane where the two first boat wings (220) are located.

5. The carrying device according to claim 4, characterized in that: The depths of the two corresponding first supporting grooves (111) are different, and the first boat body (210) is obliquely arranged between the two supporting rods (110).

6. The carrying device according to claim 4, characterized in that: The first boat body (210) further comprises at least two first limiting rods (214), wherein the first limiting rods (214) are arranged at the bottom of the first boat body (210) in the gravity direction and are configured to support the base.

7. The carrying device according to claim 3, characterized in that: The bracket (120) is provided with a second supporting groove (121), and the second supporting grooves (121) on two adjacent brackets (120) form the second bearing portion; The second carrying boat (300) comprises a second boat body (310) and two second boat wings (320), wherein the two second boat wings (320) are respectively arranged on two opposite sides of the second boat body (310), and the two second boat wings (320) can be supported in two opposite second supporting grooves (121) respectively; The second boat body (310) is used to support a base body, and the insert direction of the base body is parallel to the plane where the two second boat wings (320) are located.

8. The carrying device according to claim 7, characterized in that: Lugs (322) are respectively arranged on the sides of the two second boat wings (320), and the lug (322) is a single one; or, the lugs (322) are at least two arranged at intervals; In the second supporting groove (121), at least two limit blocks (122) are arranged at intervals along the length direction of the bracket (120), and the lug (322) can be clamped between two adjacent limit blocks (122), or between the limit block (122) and the end of the second supporting groove (121); The numbers of lugs (322) provided on the two second boat wings (320) are the same or different; and / or, The lugs (322) arranged on the two second boat wings (320) are arranged in one-to-one correspondence or in a mutually staggered arrangement.

9. The carrying device according to claim 7, characterized in that: The bottom height of the second supporting groove (121) gradually decreases along the direction from one supporting rod (110) to the other supporting rod (110), and the second boat body (310) is obliquely arranged between the two supporting rods (110).

10. The carrying device according to claim 7, characterized in that: The second boat body (310) further comprises at least two second limiting rods (314), which are arranged on the rear end of the second boat body (310) parallel to the insertion direction of the base body and are configured to stop the base body.

11. The carrying device according to claim 1, characterized in that: The carrying boat comprises a plurality of boat ears, wherein the boat ears protrude from the upper end surface of the carrying boat, and the boat ears are provided with through holes, and the through holes are configured to be penetrated by a boat taking rod.

12. The carrying device according to claim 1, characterized in that: The carrying boat includes two boat plates arranged in parallel and spaced apart from each other and boat rods arranged in parallel and arrayed between the two boat plates. A plurality of slot structures are arranged on the boat rods. The base can be accommodated between the plurality of boat rods and inserted into the slot structures.

13. The carrying device according to claim 12, characterized in that: The two opposite inner side walls of the slot structure gradually move away from each other along a direction away from the inner bottom of the slot structure.

14. Processing equipment, characterized in that It comprises a furnace body, a furnace door (10), a paddle structure (20) and a carrying device as described in any one of claims 1 to 13, wherein the paddle structure (20) is connected to the furnace door (10), the furnace door (10) is detachably sealed at the opening of the furnace body, and the carrying device is configured to be arranged on the paddle structure (20) and can be inserted into the furnace body along with the paddle structure (20).

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