A SIC powder proportioning device

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a SIC powder material proportioning device, including a frame, a workbench is arranged at the upper end of the frame, a bearing bracket parallel to the workbench is installed in the frame; a feeding mechanism, including a feeding assembly and a vibrating assembly arranged below the feeding assembly, the feeding assembly including a feeding funnel and an electric valve, the feeding funnel is mounted on the bearing bracket, and the electric valve is connected to the discharge port of the feeding funnel; the vibrating assembly includes a straight vibrator and a feeding trough mounted on the upper end of the straight vibrator; a storage mechanism, including a storage funnel, a support frame, a second weighing sensor and a base, the storage funnel is mounted above the support frame, the upper end of the second weighing sensor abuts against the bottom of the support frame, and the lower end of the second weighing sensor abuts against the base; the storage mechanism is used to receive the powder output from the feeding trough and weigh the powder. The SIC powder material proportioning device reduces production costs, improves production efficiency and the accuracy of powder material proportioning.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a SIC powder proportioning device. Background Art

[0002] Crystal growth of SIC semiconductor refers to the process used to prepare single crystal SIC materials when producing semiconductor devices. SIC has excellent physical and electrical properties and is widely used in high-power, high-frequency and high-temperature electronic devices. In the semiconductor industry, the preparation of high-quality SIC single crystals is crucial for the production of high-performance and high-efficiency SIC devices. Therefore, the accuracy of the SIC powder ratio and the control of temperature, pressure and atmosphere during crystal growth are directly related to the quality and shape of the crystal.

[0003] In the existing SIC powder proportioning technology, there are still many methods that rely on manual weighing of powders of various mesh sizes and calculation of proportions for mixed packaging. This powder proportioning method not only has high production costs, but is also prone to errors during the manual proportioning process, resulting in poor accuracy of the powder proportioning.

[0004] Therefore, there is an urgent need for a SIC powder proportioning device to solve the above problems. Utility Model Content

[0005] Based on the above, the purpose of the utility model is to provide a SIC powder proportioning device to solve the problems of high production cost and poor powder proportioning accuracy caused by manual proportioning of SIC powder in the background technology.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The utility model provides a SIC powder proportioning device, comprising:

[0008] A frame, wherein a workbench is provided at the upper end of the frame, and a bearing bracket parallel to the workbench is installed in the frame;

[0009] The feeding mechanism comprises a feeding assembly and a vibrating assembly arranged below the feeding assembly, wherein the feeding assembly comprises a feeding hopper and an electric valve, wherein the feeding hopper is mounted on the supporting bracket, and its feeding port extends above the workbench, and the electric valve is connected to the discharge port of the feeding hopper; the vibrating assembly comprises a straight vibrator and a feeding trough installed at the upper end of the straight vibrator;

[0010] The material storage mechanism includes a material storage funnel, a support frame, a second weighing sensor and a base. The material storage funnel is arranged above the support frame, the upper end of the second weighing sensor abuts against the bottom of the support frame, and the lower end of the second weighing sensor abuts against the base; the material storage mechanism is used to receive the powder output by the feed trough and weigh the powder.

[0011] As an optional technical solution for a SIC powder proportioning device, the feeding assembly also includes an upper fixed plate, a lower fixed plate and a first weighing sensor, the first weighing sensor is arranged between the upper fixed plate and the lower fixed plate, the upper fixed plate and the lower fixed plate are both hollow structures, and the feeding funnel passes through the upper fixed plate and the lower fixed plate in sequence and is mounted on the upper fixed plate.

[0012] As an optional technical solution for a SIC powder proportioning device, a plurality of right-angled fasteners are fixedly provided at intervals in the circumferential position of the upper end of the feeding funnel, and the bottoms of the plurality of right-angled fasteners are fixedly connected to the top surface of the upper fixing plate.

[0013] As an optional technical solution for a SIC powder proportioning device, a "V"-shaped fastener is sleeved on the discharge port of the feeding funnel, the bottom of the "V"-shaped fastener abuts against a conical surface near the discharge port of the feeding funnel, and the upper ends of the "V"-shaped fasteners are respectively fixed to the bottom surface of the lower fixed plate.

[0014] As an optional technical solution for an SIC powder proportioning device, the upper and lower ends of the electric valve are respectively provided with a first flange and a second flange, the upper end of the first flange is conductively connected to the discharge port of the feeding funnel, and the lower end of the second flange extends into the feed trough.

[0015] As an optional technical solution for a SIC powder proportioning device, a mounting plate is provided at the upper end of the feed trough near its discharge port, a discharge cylinder is fixedly provided on the mounting plate, a discharge baffle is connected to the telescopic end of the discharge cylinder, and the discharge cylinder can drive the discharge baffle to open and close the discharge port of the feed trough.

[0016] As an optional technical solution for an SIC powder proportioning device, a discharge ball is provided in the storage funnel, a driving cylinder is installed on the supporting bracket above the discharge ball, and the telescopic end of the driving cylinder is connected to the discharge ball through a pull wire.

[0017] As an optional technical solution for a SIC powder proportioning device, a curved discharge pipe is provided below the discharge port of the storage funnel, the upper end of the curved discharge pipe is connected to the discharge port of the storage funnel, the upper end of the curved discharge pipe is fixed by a fixing member, and the lower end of the curved discharge pipe is connected to a large and small adapter.

[0018] As an optional technical solution for the SIC powder proportioning device, the frame is further provided with a machine cover, the workbench is equipped with a storage rack, and the storage rack is provided with a plurality of upper covers matching the feeding funnel.

[0019] As an optional technical solution for a SIC powder proportioning device, there are multiple feeding mechanisms, and the multiple feeding mechanisms are arranged around the storage mechanism, and the discharge port of each feeding trough is arranged above the storage funnel.

[0020] The beneficial effects of the utility model are:

[0021] The SIC powder proportioning device provided by the utility model comprises: a frame, a feeding mechanism and a storage mechanism; the feeding mechanism comprises a feeding component and a vibrating component arranged below the feeding component; the storage mechanism comprises a storage hopper, a support frame, a second weighing sensor and a base, the storage hopper is arranged above the support frame, the upper end of the second weighing sensor abuts against the bottom of the support frame, and the lower end of the second weighing sensor abuts against the base; the storage mechanism is used for receiving the powder output by the feeding trough and weighing the powder. Under the above structure, powders of different mesh sizes are placed in different feeding funnels respectively, and the operation of the SIC powder proportioning device is controlled by setting the data of the background control module, the electric valve is opened and the discharge cylinder is started to drive the baffle to open and convey the target amount of powder to the material trough, and then the powder is conveyed into the storage funnel by the vibration of the material trough by the straight vibrator; the powder conveyed from the feeding funnel to the storage funnel can be accurately controlled by setting the first weighing sensor, and the total weight of the powder after proportioning is accurately controlled by setting the second weighing sensor under the storage funnel, so as to achieve a high-precision powder ratio; the SIC powder proportioning device realizes automatic feeding of powder for proportioning and mixing, reduces production costs, and improves production efficiency and the accuracy of powder proportioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of the SIC powder proportioning device of the utility model embodiment;

[0023] Figure 2 It is a partial structural schematic diagram of the SIC powder proportioning device implemented in the utility model;

[0024] Figure 3 This is a schematic diagram of the structure of the feeding assembly in the embodiment of the utility model;

[0025] Figure 4 This is a schematic diagram of the structure of the vibration assembly in the embodiment of the utility model;

[0026] Figure 5 This is a structural schematic diagram of the material storage mechanism in the embodiment of the utility model;

[0027] Figure 6 It is a cross-sectional view of the material storage mechanism in the embodiment of the utility model.

[0028] In the figure:

[0029] 1. Frame; 11. Workbench; 101. Storage rack; 102. Upper cover; 12. Load-bearing bracket; 13. Machine cover;

[0030] 2. Feeding mechanism; 21. Feeding assembly; 201. Feeding hopper; 202. Upper fixing plate; 203. Lower fixing plate; 204. First weighing sensor; 205. Right-angle fixing; 206. "V"-shaped fixing; 212. Electric valve; 213. First flange; 214. Second flange; 22. Vibrating assembly; 221. Straight vibrator; 222. Feeding trough; 223. Mounting plate; 224. Discharging cylinder; 225. Baffle;

[0031] 3. Material storage mechanism; 30. Material storage hopper; 31. Support frame; 32. Second weighing sensor; 33. Base; 34. Driving cylinder; 35. Material discharge ball; 36. Curved material discharge pipe; 37. Fixing piece; 38. Large and small adapters. DETAILED DESCRIPTION

[0032] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0033] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, terms such as "up", "down", "left", and "right" and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present utility model.

[0036] In the description of the present invention, unless otherwise specified, the meaning of "plurality" is two or more than two. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0037] like Figure 1-6 As shown, the utility model provides a SIC powder proportioning device, which comprises: a frame 1, a workbench 11 is arranged at the upper end of the frame 1, and a bearing bracket parallel to the workbench 11 is installed in the frame 1; a feeding mechanism 2, comprising a feeding component 21 and a vibrating component 22 arranged below the feeding component 21, the feeding component 21 comprises a feeding funnel 201 and an electric valve 212, the feeding funnel 201 is mounted on the bearing bracket, and its feeding port extends above the workbench 11, and the electric valve 212 is connected to the discharge port of the feeding funnel 201; The component 22 includes a straight vibrator 221 and a feed trough 222 installed on the upper end of the straight vibrator 221; the storage mechanism 3 includes a storage funnel 30, a support frame 31, a second weighing sensor 32 and a base 33, the storage funnel 30 is mounted above the support frame 31, the upper end of the second weighing sensor 32 abuts against the bottom of the support frame 31, and the lower end of the second weighing sensor 32 abuts against the base 33; the storage mechanism 3 is used to receive the powder output by the feed trough 222 and weigh the powder.

[0038] The utility model provides a SIC powder proportioning device that puts powders of different mesh sizes into different feeding funnels 201 respectively, controls the operation of the SIC powder proportioning device by setting data of a background control module, opens an electric valve 212, starts a discharge cylinder 224, drives a baffle 225 to open, and delivers a target amount of powder to a material trough, and then delivers the powder to a storage hopper 30 by vibrating the material trough with a straight vibrator 221; the powder delivered to the storage hopper 30 by the feeding funnel 201 can be accurately controlled by setting a first weighing sensor 204, and at the same time, a second weighing sensor 32 is set below the storage hopper 30 to accurately control the total weight of the powder after proportioning, thereby achieving a high-precision powder ratio; the SIC powder proportioning device realizes automatic powder feeding for proportioning and mixing, reduces production costs, and improves production efficiency and the accuracy of powder proportioning.

[0039] In this embodiment, if Figure 1 and Figure 2 As shown, at least three feeding mechanisms 2 are provided, and the three feeding mechanisms 2 are arranged around the storage mechanism 3, and the discharge port of the feeding trough 222 on each vibrating component 22 extends above the storage funnel 30, so that the powder in each feeding trough 222 can be accurately transported to the storage funnel 30 for proportional blending; Figure 2 As shown, the straight vibrator 221 is installed on the support seat, and the support seat can support the feeding mechanism 2 at the target height, so that the feeding port of the feeding funnel 201 can extend above the workbench 11, which is convenient for adding powder to the feeding funnel 201, and also enables the feed trough 222 to be above the storage funnel 30. The support seat includes an upper seat connected to the straight vibrator 221 and a lower seat connected to the bottom of the frame 1. The four corners between the upper seat and the lower seat are supported and connected by four support columns. A shock-absorbing layer is also provided between the lower seat and the bottom of the frame 1. The shock-absorbing layer is made of rubber or other materials with shock-absorbing and buffering effects. The shock-absorbing layer can filter out the vibration generated during the operation of the feeding mechanism 2 to prevent the feeding mechanism 2 from directly vibrating the bottom of the frame 1 and damaging the equipment, thereby improving the stability of the device.

[0040] Specifically, Figure 3As shown, the feeding assembly 21 also includes an upper fixed plate 202, a lower fixed plate 203 and a first weighing sensor 204. A plurality of first weighing sensors 204 are provided, which are spaced apart and connected between the upper fixed plate 202 and the lower fixed plate 203, and are used to weigh the powder in the feeding hopper 201. The powder output from the feeding hopper 201 can also be weighed and calculated. The current stock of the powder in the feeding hopper 201 and the current quantitative output can be accurately controlled, thereby improving the accuracy of the powder ratio. The upper fixed plate 202 and the lower fixed plate 203 are both hollow structures, and the feeding funnel 201 passes through the upper fixed plate 202 and the lower fixed plate 203 in sequence and is mounted on the upper fixed plate 202; the diameters of the hollow parts of the upper fixed plate 202 and the lower fixed plate 203 are both larger than the diameter of the bottom of the feeding funnel 201, and smaller than the diameter of the feeding port of the feeding funnel 201; the bottom of the lower fixed plate 203 is installed on the supporting bracket, that is, the feeding funnel 201 is mounted on the supporting bracket through the lower fixed plate 203, and thus, the discharge port of the feeding funnel 201 and the feed trough 222 are suspended.

[0041] Furthermore, a plurality of right-angled fasteners 205 are fixedly provided at intervals in the circumferential position on the upper end of the feeding funnel 201, and the bottoms of the plurality of right-angled fasteners 205 are fixedly connected to the top surface of the upper fixed plate 202; a "V"-shaped fastener 206 is sleeved on the discharge port of the feeding funnel 201, and the bottom of the "V"-shaped fastener 206 is an annular hollow structure and is sleeved on the discharge port of the feeding funnel 201 and abuts against a conical surface near the discharge port of the feeding funnel 201, and the upper ends of the "V"-shaped fasteners 206 are respectively fixed on the bottom surface of the lower fixed plate 203. Since the feeding funnel 201 is a conical structure and is mounted on a fixed plate, when the staff adds powder to the feeding funnel 201 and the electric valve 212 is opened and closed to discharge the material, the feeding mechanism 2 will shake under the condition of weightlessness; in the above structure, the right-angle fastener 205 can firmly reinforce and stabilize the upper part of the feeding funnel 201, and the "V"-shaped fastener 206 can firmly mount the lower end of the feeding funnel 201 and the discharge port on the fixed plate, thereby preventing the feeding mechanism 2 from shaking and displacing during the loading and unloading process, thereby further improving the stability of the device.

[0042] In this embodiment, if Figure 4As shown, the upper and lower ends of the electric valve 212 are respectively provided with a first flange 213 and a second flange 214, the upper end of the first flange 213 is connected to the discharge port of the feeding funnel 201, and the lower end of the second flange 214 extends into the feeding trough 222, but does not abut against the conveying trough; the powder in the feeding funnel 201 is conveyed to the conveying trough through the second flange 214; the upper end of the feeding trough 222 near its discharge port is provided with a mounting plate 223, and a discharge cylinder 224 is fixedly provided on the mounting plate 223, and a "7"-shaped drive is connected to the telescopic end of the discharge cylinder 224. The movable rod is connected to the discharge baffle 225 through a "7"-shaped driving rod, and the discharge cylinder 224 can drive the discharge baffle 225 to open and close the discharge port of the feed trough 222; when the target powder in the storage hopper 30 has reached a certain amount, the discharge cylinder 224 contracts to tightly close the discharge baffle 225 and the discharge port to prevent the remaining material in the feed trough 222 from continuing to be transported into the storage funnel 30 under the action of inertia and affecting the accuracy of the powder ratio. In other words, the setting of the discharge cylinder 224 and the discharge baffle 225 further improves the accuracy of the powder ratio of the device.

[0043] In this embodiment, if Figure 5 and Figure 6 As shown, a discharge ball 35 is provided in the material storage funnel 30, and the diameter of the discharge ball 35 is larger than the diameter of the material storage funnel 30. When the discharge ball 35 is at the bottom of the material storage funnel 30, the discharge port of the material storage funnel 30 can be sealed and closed; a driving cylinder 34 is installed on the supporting bracket above the discharge ball 35, and the output end of the driving cylinder 34 is arranged downward, and the telescopic end of the driving cylinder 34 is connected to the discharge ball 35 through a pull line; when the material storage funnel 30 needs to discharge material, the piston rod of the driving cylinder 34 is contracted to drive the pull line to pull the discharge ball 35 upward, so that a certain distance is formed between the discharge ball 35 and the discharge port of the material storage funnel 30. The gap is used for powder material to be discharged; a curved discharge pipe 36 is provided below the discharge port of the storage funnel 30, and the upper end of the curved discharge pipe 36 is connected to the discharge port of the storage funnel 30, and the upper end diameter of the curved discharge pipe 36 is larger than the diameter of the discharge port of the storage funnel 30, and the two are connected in a non-contact conductive manner; the upper end of the curved discharge pipe 36 is fixed by a fixing member 37, and the fixing member 37 includes a support block connected to the base 33, the upper end of the curved discharge pipe 36 is fixed to the support block by a clamp, and the lower end of the curved discharge pipe 36 is connected to a large and small adapter 38, which is convenient for the subsequent vacuum mechanism to switch its large and small joints for drawing materials.

[0044] Furthermore, a plurality of second weighing sensors 32 are installed, and the plurality of second weighing sensors 32 are spaced apart between the support frame 31 and the base 33, and are used for weighing the storage hopper 30 and calculating the weight of the powder delivered to the storage hopper 30 each time. That is to say, the utility model achieves high precision in the final powder proportioning through accurate measurement of the first weighing sensor 204 and the second sensor and calibration of the measurement of each proportioning by the cooperation between the two. In addition, the setting of the plurality of feeding mechanisms 2 can proportion a plurality of different powders at the same time, realizing fully automated operation without manual intervention in the middle, thereby reducing labor costs and improving the efficiency and precision of the powder proportioning.

[0045] In this embodiment, if Figure 1 and Figure 2 As shown, the frame 1 is also provided with a hood 12 supporting bracket; 13, the hood 12 supporting bracket; the setting of 13 can prevent dust and magazines in the working environment from falling into the feeding funnel 201 and causing pollution to its SIC powder. In addition, a storage rack 101 is installed on the workbench 11, and a plurality of upper covers 102 matching the feeding funnel 201 are mounted on the storage rack 101. When it is necessary to add powder to the feeding funnel 201, the cover is removed and placed on the storage rack 101; the setting of the storage rack 101 makes the SIC powder proportioning device more convenient and quick when adding powder.

[0046] The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Although the utility model is disclosed as a preferred embodiment as above, it is not used to limit the utility model. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical content disclosed above without departing from the scope of the technical solution of the utility model. However, any simple modification, equivalent change and modification made to the above embodiments according to the technology of the utility model, which does not depart from the content of the technical solution of the utility model, belongs to the scope of the technical solution of the utility model.

Claims

1. A SIC powder proportioning device, characterized in that: include: A frame, wherein a workbench is provided at the upper end of the frame, and a bearing bracket parallel to the workbench is installed in the frame; The feeding mechanism comprises a feeding assembly and a vibrating assembly arranged below the feeding assembly, wherein the feeding assembly comprises a feeding hopper and an electric valve, wherein the feeding hopper is mounted on the supporting bracket, and its feeding port extends above the workbench, and the electric valve is connected to the discharge port of the feeding hopper; the vibrating assembly comprises a straight vibrator and a feeding trough installed at the upper end of the straight vibrator; The material storage mechanism includes a material storage funnel, a support frame, a second weighing sensor and a base. The material storage funnel is arranged above the support frame, the upper end of the second weighing sensor abuts against the bottom of the support frame, and the lower end of the second weighing sensor abuts against the base; the material storage mechanism is used to receive the powder output by the feed trough and weigh the powder.

2. A SIC powder proportioning device according to claim 1, characterized in that: The feeding assembly also includes an upper fixed plate, a lower fixed plate and a first weighing sensor, wherein the first weighing sensor is arranged between the upper fixed plate and the lower fixed plate, and the upper fixed plate and the lower fixed plate are both hollow structures, and the feeding funnel passes through the upper fixed plate and the lower fixed plate in sequence and is mounted on the upper fixed plate.

3. A SIC powder proportioning device according to claim 2, characterized in that: A plurality of right-angled fasteners are fixedly disposed at intervals in the circumferential direction of the upper end of the feeding funnel, and the bottoms of the plurality of right-angled fasteners are fixedly connected to the top surface of the upper fixing plate.

4. A SIC powder proportioning device according to claim 3, characterized in that: A "V"-shaped fastener is sleeved on the discharge port of the feeding funnel, the bottom of the "V"-shaped fastener abuts against the conical surface near the discharge port of the feeding funnel, and the upper end of the "V"-shaped fastener is fixed to the bottom surface of the lower fixed plate.

5. A SIC powder proportioning device according to claim 1, characterized in that: The upper end and the lower end of the electric valve are respectively provided with a first flange and a second flange, the upper end of the first flange is conductively connected to the discharge port of the feeding funnel, and the lower end of the second flange extends into the feeding trough.

6. A SIC powder proportioning device according to claim 1, characterized in that: A mounting plate is provided at the upper end of the feed trough near its discharge port, a discharge cylinder is fixedly provided on the mounting plate, a discharge baffle is connected to the telescopic end of the discharge cylinder, and the discharge cylinder can drive the discharge baffle to open and close the discharge port of the feed trough.

7. A SIC powder proportioning device according to claim 1, characterized in that: A discharge ball is arranged in the material storage hopper, a driving cylinder is arranged on the supporting bracket above the discharge ball, and a telescopic end of the driving cylinder is connected to the discharge ball through a pull line.

8. A SIC powder proportioning device according to claim 7, characterized in that: A curved discharge pipe is provided below the discharge port of the storage funnel, the upper end of the curved discharge pipe is connected to the discharge port of the storage funnel, the upper end of the curved discharge pipe is fixed by a fixing member, and the lower end of the curved discharge pipe is connected to a large and small adapter.

9. A SIC powder proportioning device according to claim 8, characterized in that: The frame is also provided with a machine cover, the workbench is installed with a storage rack, and the storage rack is provided with a plurality of upper covers matching with the feeding funnel.

10. A SIC powder proportioning device according to any one of claims 1 to 9, characterized in that: There are multiple feeding mechanisms, and the multiple feeding mechanisms are arranged around the storage mechanism, and the discharge port of each feeding trough is arranged above the storage hopper.

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