A kind of cardboard graphite insulation cylinder for producing single crystal by Czochralski method

Abstract

The utility model discloses a card-plate graphite insulation cylinder for producing single crystals by the Czochralski method, and specifically relates to the technical field of producing single crystals by the Czochralski method, including an inner liner for support, on which a connection assembly is provided, and the connection assembly includes a plurality of graphite insulation plates provided on the outer side of the inner liner, and each of the graphite insulation plates is distributed along the circumference of the axis point of the inner liner. The utility model provides a connection assembly, and two adjacent graphite insulation plates are clamped together through mutually adjacent card slots and card strips, so that each graphite insulation plate can be sleeved on the outer side of the inner liner, which not only facilitates the installation of the device but also makes the joints tighter, and also facilitates the transportation of the device, so as to improve the convenience of the device when in use, and when one of the components is damaged, only one component needs to be replaced for continued use, which effectively prolongs the life of the thermal field component and reduces the non-silicon cost.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production by Czochralski method, and more specifically, to a cardboard-type graphite heat-insulating cylinder for producing single crystal by Czochralski method. Background Art

[0002] The graphite insulation cylinder used in the production of single crystals by the Czochralski method is a heat preservation device used in the single crystal growth process. In the Czochralski method single crystal growth process, the high-temperature molten raw materials need to be gradually cooled and crystallized to form single crystals. In order to maintain the stability of the raw materials at a suitable temperature, a heat preservation device is required to keep the molten pool warm;

[0003] The single crystal graphite insulation cylinder produced by the Czochralski method is generally made of high-purity graphite material with good thermal conductivity and high temperature resistance. The shape of the insulation cylinder is generally cylindrical, with a hollow interior to accommodate the molten pool. The surface of the insulation cylinder is usually coated with special coatings or cladding materials to improve the insulation effect and corrosion resistance.

[0004] Among them, it was found through searching that the utility model patent with patent application number CN202222749425.5 disclosed a new type of single crystal furnace oxygen reduction upper insulation cylinder, the inside of the cylinder is a step through hole, forming an upper cavity and a lower cavity, the inner diameter of the lower cavity is the same as the inner diameter of the middle insulation cylinder below it, and is larger than the inner diameter of the upper cavity, and a circle of annular vacuum grooves that are evacuated to vacuum are provided on the side wall of the cylinder, the top of the vacuum groove is closed with a top plug, and a layer of insulation material is wrapped on the outer wall of the cylinder;

[0005] When this structure is in use, the argon gas flow inside the single crystal furnace thermal field is smoother, which speeds up the removal of volatiles and oxygen atoms generated inside the thermal field and prevents volatiles from remaining in the graphite parts of the thermal field. This is beneficial to improving the high-purity environment of crystal pulling inside the thermal field of the single crystal furnace and increasing the longitudinal temperature gradient, thereby reducing wire breakage and significantly reducing oxygen. It can effectively maintain the temperature of the upper insulation tube and reduce heat dissipation. However, this structure is an integrated structure when in use, which may cause a break in a certain place and require the entire structure to be replaced. It is also inconvenient to disassemble and transport, and is not convenient enough when in use. Utility Model Content

[0006] In order to overcome the above-mentioned defects of the prior art, the utility model provides a pallet-type graphite insulation cylinder for producing single crystals by the Czochralski method, aiming to solve the problems raised in the above-mentioned background technology.

[0007] The utility model is implemented in this way. The utility model provides the following technical solutions: a cardboard graphite insulation cylinder for producing single crystals by the Czochralski method, comprising an inner lining for support, and a connecting assembly is arranged on the inner lining;

[0008] The connection assembly includes a plurality of graphite insulation plates arranged outside the inner liner, and each of the graphite insulation plates is distributed along the circumference of the axis point of the inner liner;

[0009] A plurality of the graphite insulation boards are provided with a card slot on one side of the surface, and a card strip matching the card slot is provided on the other side of the surface of the plurality of the graphite insulation boards;

[0010] External blocking pieces are arranged on the outer sides of the plurality of graphite insulation plates.

[0011] It can be seen that in the above technical solution, two adjacent graphite insulation plates are clamped together through mutually close clamping grooves and clamping strips, so that each graphite insulation plate can be sleeved on the outside of the liner, which not only facilitates the installation of the device but also makes the joints tighter and facilitates the transportation of the device, so as to improve the convenience of the device when in use, and when one of the components is damaged, only one component needs to be replaced for continued use, which effectively prolongs the life of the thermal field component and reduces the non-silicon cost;

[0012] Optionally, in a possible implementation, a plurality of the outer blocking members are provided with corrugated guards, and the vertical cross-sectional shape of each of the corrugated guards is set to be wavy, an extension cylinder for limiting is set at the top of the liner, and the top of the extension cylinder extends to the top of the graphite insulation board, and a thermal insulation layer for heat preservation is set on the outer side of the plurality of corrugated guards, and the thermal insulation layer is filled with a tin foil insulation layer, and a hollow baffle cavity is formed between the corrugated guard and the graphite insulation board, and the corrugated guard is detachably connected to the graphite insulation board, and the vertical cross-sectional shape of the liner and the graphite insulation board is set to be arc-shaped, and the graphite insulation board is detachably connected to the liner;

[0013] It can be seen that in the above technical scheme, through the setting of the outer blocking member and the corrugated protective member, the graphite insulation board can be effectively prevented from being damaged by external force. At the same time, through the setting of the hollow blocking cavity, the function of low thermal insulation performance caused by heat conduction can be effectively reduced. And through the setting of the thermal insulation layer, the heat can be effectively blocked on the outside to improve the thermal insulation effect.

[0014] Technical effects and advantages of the utility model:

[0015] By setting a connection component, two adjacent graphite insulation boards are clamped together through mutually close clamping grooves and clamping strips through the connection component set on the inner liner, so that each graphite insulation board can be sleeved on the outer side of the inner liner, which not only facilitates the installation of the device but also makes the joints tighter;

[0016] It is also convenient to transport the device, so as to improve the convenience of the device when in use. When one of the components is damaged, only one part needs to be replaced for continued use, which effectively prolongs the life of the thermal field component and reduces the non-silicon cost.

[0017] The provision of the outer baffle and the corrugated protective member can effectively prevent the graphite insulation board from being damaged by external force. Meanwhile, the provision of the hollow baffle cavity can effectively reduce the function of low insulation performance caused by heat conduction. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present disclosure, the following briefly introduces the drawings required to be used in some embodiments of the present disclosure. Obviously, the drawings described below are only drawings of some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of the signal, etc.

[0019] Figure 1 It is the front view of the overall structure of the utility model.

[0020] Figure 2 This is a front view of the inner lining, extension tube and graphite insulation board of the utility model.

[0021] Figure 3 It is a top view of the overall structure of the utility model.

[0022] Figure 4 This is a front view of the inner lining, graphite insulation board and corrugated protective member of the utility model.

[0023] Figure 5 This is a front view of the graphite insulation board, outer baffle and corrugated protective member of the utility model.

[0024] The accompanying drawings are marked as follows: 1. lining; 2. graphite insulation board; 3. slot; 4. clamping strip; 5. outer baffle; 6. corrugated protective member; 7. extension tube; 8. insulation layer; 9. hollow baffle cavity. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] As attached Figure 1-5The illustrated card-type graphite insulation cylinder for producing single crystals by the Czochralski method has two adjacent graphite insulation plates 2 clamped together through mutually adjacent clamping grooves 3 and clamping strips 4 through a connecting assembly arranged on the inner liner 1, so that each graphite insulation plate 2 can be sleeved on the outer side of the inner liner 1, which not only facilitates the installation of the device but also makes the joints tighter and facilitates the transportation of the device, so as to improve the convenience of the device when in use. When one of the components is damaged, only one component needs to be replaced for continued use, which effectively prolongs the life of the thermal field component and reduces the non-silicon cost. The specific structural arrangement of the assembly is as follows;

[0027] The connection assembly includes a plurality of graphite insulation plates 2 arranged on the outside of the liner 1, and each graphite insulation plate 2 is distributed along the circumference of the axis point of the liner 1;

[0028] A plurality of graphite insulation boards 2 are provided with a card slot 3 on one side of the surface, and a card strip 4 matching the card slot 3 is provided on the other side of the surface of the plurality of graphite insulation boards 2;

[0029] External blocking members 5 are provided on the outer sides of the plurality of graphite insulation plates 2 .

[0030] A plurality of outer blocking members 5 are each provided with a corrugated guard member 6, and a vertical cross-sectional shape of each corrugated guard member 6 is configured to be wavy; an extension tube 7 for limiting is configured on the top of the inner lining 1, and the top of the extension tube 7 extends to the top of the graphite insulation board 2; an insulation layer 8 for heat preservation is configured on the outer side of the plurality of corrugated guard members 6, and a tin foil insulation layer is filled in the insulation layer 8; a hollow partition cavity 9 is formed between the corrugated guard member 6 and the graphite insulation board 2; the corrugated guard member 6 and the graphite insulation board 2 are detachably connected; the vertical cross-sectional shapes of the inner lining 1 and the graphite insulation board 2 are both configured to be arc-shaped; and the graphite insulation board 2 and the inner lining 1 are detachably connected.

[0031] According to the above structure, when the staff installs the insulation cylinder, they place each graphite insulation board 2 along the axis point of the liner 1, and make two adjacent graphite insulation boards 2 clamped together through the clamping grooves 3 and clamping strips 4 close to each other, so that each graphite insulation board 2 can be sleeved on the outside of the liner 1, which not only facilitates the installation of the device but also makes the joints tighter and facilitates the transportation of the device, so as to improve the convenience of the device when in use, and when one of the components is damaged, only one component needs to be replaced for continued use, which effectively prolongs the life of the thermal field component and reduces the non-silicon cost;

[0032] Furthermore, the provision of the outer blocking member 5 and the corrugated protective member 6 can effectively prevent the graphite insulation board 2 from being damaged by external forces, and the provision of the hollow baffle cavity 9 can effectively reduce the function of low insulation performance caused by heat conduction;

[0033] Furthermore, by providing the heat-insulating layer 8, the heat can be effectively blocked on the outside to improve the heat-insulating effect.

[0034] Different from the prior art, the present application discloses a card-plate graphite insulation cylinder for producing single crystals by the direct pulling method. Two adjacent graphite insulation plates 2 are clamped together through mutually close card slots 3 and card strips 4, so that each graphite insulation plate 2 can be sleeved on the outside of the inner lining 1, which not only facilitates the installation of the device but also makes the joints tighter and facilitates the transportation of the device, so as to improve the convenience of the device during use. When one of the components is damaged, only one part needs to be replaced for continued use, which effectively extends the life of the thermal field component and reduces non-silicon costs.

[0035] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A cardboard graphite insulation cylinder for producing single crystals by the Czochralski method, characterized in that: It comprises an inner liner (1) for support, wherein a connection component is arranged on the inner liner (1); The connection assembly comprises a plurality of graphite insulation plates (2) arranged on the outside of the inner liner (1), and each of the graphite insulation plates (2) is distributed along the circumference of the axis center point of the inner liner (1); A plurality of the graphite insulation boards (2) are provided with a card slot (3) on one side of their surfaces, and a card strip (4) matching the card slot (3) is provided on the other side of their surfaces. External blocking members (5) are provided on the outer sides of the plurality of graphite insulation plates (2).

2. According to claim 1, a cardboard graphite insulation cylinder for producing single crystals by the Czochralski method is characterized in that: A plurality of the outer blocking members (5) are each provided with a corrugated protective member (6), and the vertical cross-sectional shape of each of the corrugated protective members (6) is configured to be wavy.

3. According to claim 1, a pallet-type graphite insulation cylinder for producing single crystals by the Czochralski method is characterized in that: An extension tube (7) for limiting position is provided at the top of the liner (1), and the top of the extension tube (7) extends to the top of the graphite insulation board (2).

4. The cardboard graphite insulation cylinder for producing single crystals by the Czochralski method according to claim 2 is characterized in that: A heat-insulating layer (8) for heat preservation is arranged on the outer sides of the plurality of corrugated protective members (6), and the heat-insulating layer (8) is filled with a tin foil heat-insulating layer.

5. The cardboard graphite insulation cylinder for producing single crystals by the Czochralski method according to claim 4 is characterized in that: A hollow baffle cavity (9) is formed between the corrugated protective member (6) and the graphite thermal insulation plate (2), and the corrugated protective member (6) and the graphite thermal insulation plate (2) are detachably connected.

6. The cardboard-type graphite heat-insulating cylinder for producing single crystals by the Czochralski method according to claim 1, characterized in that: The vertical cross-sectional shapes of the inner liner (1) and the graphite insulation board (2) are both arranged to be arc-shaped, and the graphite insulation board (2) and the inner liner (1) are detachably connected.

Images