A vacuum valve for semiconductor equipment

Abstract

The utility model discloses a semiconductor equipment vacuum valve, including a vacuum valve body, a valve plate movably mounted inside the vacuum valve body, a protective component movably mounted on the surface of the valve plate, the protective component including a protective baffle, the protective baffle is designed in a hemispherical arc shape, the area of ​​the protective baffle is the same as that of the valve plate, and a rubber sealing ring is movably mounted on the outer wall of the valve plate. The utility model provides a protective component and a protective baffle with a hemispherical arc surface design, which can effectively disperse the impact force to the surroundings when in contact with the airflow, thereby avoiding deformation of the valve plate due to concentrated force, and the protective baffle can be movably docked with the valve plate, and is quick to disassemble and assemble, and is relatively convenient to use. The rubber sealing ring can be movably docked with the valve plate through the annular docking groove provided on the valve plate and the annular block provided on the inner wall of the rubber sealing ring, and can be quickly replaced after the rubber sealing ring is worn.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, in particular to a vacuum valve for semiconductor equipment. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductors need to be manufactured using specialized manufacturing equipment. In order to ensure the quality of finished semiconductor products, it is usually necessary to install specialized vacuum valves on the equipment. The vacuum valves adjust the direction and flow of airflow by opening and closing the valve plate.

[0003] The existing technology has the following problems:

[0004] In the prior art, the valve plate of the vacuum valve is generally of flat design. When blown by strong airflow, the force on the surface of the valve plate is relatively concentrated. Long-term use may cause the valve plate to deform and be damaged, thereby reducing the service life of the valve plate. Utility Model Content

[0005] In view of the problems in the related technology, the utility model proposes a vacuum valve for semiconductor equipment to overcome the above technical problems existing in the existing related technology.

[0006] To this end, the specific technical solutions adopted by the utility model are as follows:

[0007] A vacuum valve for semiconductor equipment comprises a vacuum valve body, a valve plate is movably mounted inside the vacuum valve body, a protective component is movably mounted on the surface of the valve plate, the protective component comprises a protective baffle, the protective baffle is designed in a hemispherical arc shape, the area of ​​the protective baffle is the same as that of the valve plate, and a rubber sealing ring is movably mounted on the outer wall of the valve plate.

[0008] Preferably, a docking rod is provided on the back of the protective baffle, and a limiting hole is opened at the surface edge of the valve plate. Through the provided docking rod and limiting hole, the protective baffle can be movably docked with the valve plate, which is convenient for disassembly and assembly.

[0009] Preferably, the outer wall of the docking rod is sleeved with an anti-slip sleeve, and the end of the docking rod and the inside of the limiting socket are provided with magnetic blocks, the sizes of the magnetic blocks match each other, and the anti-slip sleeve and magnetic blocks can increase the connection stability of the valve plate and the protective baffle, and the angle change when the valve plate rotates can prevent it from being blown off by strong airflow.

[0010] Preferably, a connection block is fixedly connected at the center of the surface of the protective baffle, and a pull ring is provided at the end of the connection block. The pull ring is provided to facilitate people to hook their fingers to pull off the protective baffle.

[0011] Preferably, the surface of the protective baffle is coated with an acid- and alkali-resistant coating, which is a water-based coating made of polyurethane material. A lot of acidic and alkaline gases will be generated during the semiconductor production process. By setting up the acid- and alkali-resistant coating, the corrosion resistance of the protective baffle is increased, which helps to increase the service life of the protective baffle.

[0012] Preferably, the outer wall of the valve plate is provided with an annular docking groove, and the inner wall of the rubber sealing ring is provided with an annular clamping block. Through the provided annular docking groove and annular clamping block, the rubber sealing ring can be movably docked with the valve plate, and the rubber sealing ring can be quickly replaced after being worn.

[0013] Preferably, the diameter of the rubber sealing ring is slightly smaller than the valve plate, and the rubber sealing ring is made of butyl rubber. Butyl rubber also has good corrosion resistance and good ductility, which is conducive to long-term use.

[0014] The beneficial effects of the utility model are:

[0015] 1. The semiconductor equipment vacuum valve, through the protection component and the protective baffle with hemispherical arc surface design, can effectively disperse the impact force to all sides when it comes into contact with the airflow, so as to avoid the valve plate from being deformed due to concentrated force, and the protective baffle can be movably connected with the valve plate, which is quick to disassemble and assemble and convenient to use.

[0016] 2. The semiconductor equipment vacuum valve has an annular docking groove on the valve plate and an annular block on the inner wall of the rubber sealing ring, so that the rubber sealing ring can be movably docked with the valve plate. After the rubber sealing ring is worn, it can be quickly replaced. The rubber sealing ring itself is made of butyl rubber, so it has good corrosion resistance and good ductility, which is conducive to long-term use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the protection component of the utility model;

[0020] Figure 3 This is a schematic diagram of the overall structure of the rubber sealing ring of the utility model;

[0021] Figure 4It is a schematic diagram of the overall structure of the valve plate of the utility model.

[0022] In the figure: 1. Vacuum valve body; 2. Valve plate; 3. Protection assembly; 301. Protection baffle; 302. Docking rod; 303. Connecting block; 304. Pull ring; 305. Acid and alkali resistant coating; 4. Rubber sealing ring; 5. Annular clamp block; 6. Limiting socket; 7. Annular docking slot. DETAILED DESCRIPTION

[0023] To further illustrate each embodiment, the present invention provides drawings, which are part of the disclosure of the present invention and are mainly used to illustrate the embodiments. They can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, ordinary technicians in the field should be able to understand other possible implementation methods and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0024] According to an embodiment of the utility model, a vacuum valve for semiconductor equipment is provided.

[0025] Embodiment 1;

[0026] like Figure 1-Figure 4 As shown, according to the embodiment of the utility model, the vacuum valve of the semiconductor equipment includes a vacuum valve body 1, a valve plate 2 is movably installed inside the vacuum valve body 1, a protective component 3 is movably installed on the surface of the valve plate 2, the protective component 3 includes a protective baffle 301, the protective baffle 301 is a hemispherical arc surface design, the area of ​​the protective baffle 301 is the same as that of the valve plate 2, and a rubber sealing ring 4 is movably installed on the outer wall of the valve plate 2.

[0027] In this embodiment, a docking rod 302 is provided on the back of the protective baffle 301, and a limiting hole 6 is opened at the surface edge of the valve plate 2. Through the provided docking rod 302 and the limiting hole 6, the protective baffle 301 can be movably docked with the valve plate 2, which is convenient for disassembly and assembly.

[0028] In this embodiment, the outer wall of the docking rod 302 is sleeved with an anti-slip sleeve, and the end of the docking rod 302 and the inside of the limiting hole 6 are provided with magnetic blocks, the sizes of the magnetic blocks match each other, and the anti-slip sleeve and magnetic blocks can increase the connection stability between the valve plate 2 and the protective baffle 301, and the change in angle when the valve plate 2 rotates can prevent it from being blown off by strong airflow.

[0029] In this embodiment, a connection block 303 is fixedly connected to the center of the surface of the protective baffle 301, and a pull ring 304 is provided at the end of the connection block 303. The pull ring 304 allows people to hook their fingers and pull off the protective baffle 301.

[0030] In this embodiment, the surface of the protective baffle 301 is coated with an acid- and alkali-resistant coating 305. The acid- and alkali-resistant coating 305 is a water-based coating made of polyurethane material. A lot of acidic and alkaline gases are generated during the semiconductor production process. The acid- and alkali-resistant coating 305 is set to increase the corrosion resistance of the protective baffle 301, which helps to increase the service life of the protective baffle 301.

[0031] Embodiment 2:

[0032] Based on the first embodiment, a preferred embodiment of the semiconductor device vacuum valve provided by the present invention is as follows: Figures 1 to 4 As shown:

[0033] In this embodiment, an annular docking groove 7 is provided on the outer wall of the valve plate 2, and an annular clamping block 5 is provided on the inner wall of the rubber sealing ring 4. Through the annular docking groove 7 and the annular clamping block 5, the rubber sealing ring 4 can be movably docked with the valve plate 2, and the rubber sealing ring 4 can be quickly replaced after being worn.

[0034] In this embodiment, the diameter of the rubber sealing ring 4 is slightly smaller than the valve plate 2. The rubber sealing ring 4 is made of butyl rubber. Butyl rubber also has good corrosion resistance and good ductility, which is conducive to long-term use.

[0035] In order to facilitate understanding of the above technical solution of the present invention, the working principle or operation method of the present invention in the actual process is described in detail below.

[0036] In actual application, the protective baffle 301 is inserted into the limiting socket 6 on the surface of the valve plate 2 through the docking rod 302 on the back thereof to complete the docking installation of the two, and then the rubber sealing ring 4 is sleeved into the annular docking groove 7 on the outer wall of the valve plate 2 through the annular block 5 on its inner wall to complete the docking installation of the two. The rubber sealing ring 4 itself is made of butyl rubber, so it has good corrosion resistance and good ductility, which is conducive to long-term use. Since the protective baffle 301 is a hemispherical arc surface design, it can effectively disperse the impact force to the surroundings when it comes into contact with the airflow, thereby avoiding the valve plate 2 from being deformed due to concentrated force, and effectively protecting the valve plate 2. The setting of the acid and alkali resistant coating 305 increases the corrosion resistance of the protective baffle 301 and helps to increase the service life of the protective baffle 301. After use, the protective baffle 301 can be disassembled by hooking the pull ring 304 with your fingers to pull out the protective baffle 301.

[0037] In summary, with the aid of the above-mentioned technical scheme of the utility model, through the setting of the protective component 3, the protective baffle 301 with a hemispherical arc surface design can effectively disperse the impact force to the surroundings when in contact with the airflow, thereby avoiding the valve plate 2 from being deformed due to concentrated force, and the protective baffle 301 can be movably docked with the valve plate 2, and the disassembly and assembly are fast and the use is relatively convenient. Through the annular docking groove 7 opened on the valve plate 2 and the annular block 5 set on the inner wall of the rubber sealing ring 4, the rubber sealing ring 4 can be movably docked with the valve plate 2, and the rubber sealing ring 4 can be quickly replaced after being worn. The rubber sealing ring 4 itself is made of butyl rubber, so it has good corrosion resistance and good ductility, which is conducive to long-term use.

[0038] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A semiconductor device vacuum valve, comprising a vacuum valve body (1), characterized in that: A valve plate (2) is movably mounted inside the vacuum valve body (1); a protective component (3) is movably mounted on the surface of the valve plate (2); the protective component (3) comprises a protective baffle (301); the protective baffle (301) is designed to be a hemispherical arc surface; the area of ​​the protective baffle (301) is the same as that of the valve plate (2); and a rubber sealing ring (4) is movably mounted on the outer wall of the valve plate (2).

2. A semiconductor device vacuum valve according to claim 1, characterized in that: A docking plug rod (302) is provided on the back of the protective baffle (301), and a limited insertion hole (6) is provided at the surface edge of the valve plate (2).

3. A semiconductor device vacuum valve according to claim 2, characterized in that: The outer wall of the docking rod (302) is sleeved with an anti-slip sleeve, and the end of the docking rod (302) and the interior of the limiting socket (6) are both provided with magnetic blocks, and the sizes of the magnetic blocks match each other.

4. A semiconductor device vacuum valve according to claim 1, characterized in that: A connection block (303) is fixedly connected at the center of the surface of the protective baffle (301), and a pull ring (304) is provided at the end of the connection block (303).

5. The semiconductor device vacuum valve according to claim 1, characterized in that: The surface of the protective baffle (301) is coated with an acid- and alkali-resistant coating (305), and the acid- and alkali-resistant coating (305) is a water-based coating made of a polyurethane material.

6. A semiconductor device vacuum valve according to claim 1, characterized in that: An annular docking groove (7) is provided on the outer wall of the valve plate (2), and an annular clamping block (5) is provided on the inner wall of the rubber sealing ring (4).

7. A semiconductor device vacuum valve according to claim 1, characterized in that: The diameter of the rubber sealing ring (4) is slightly smaller than that of the valve plate (2), and the rubber sealing ring (4) is made of butyl rubber.

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