Aging test equipment

Abstract

The present application relates to an aging test device, including a temperature controller, a test chamber, a fan and an air supply duct. The air supply duct includes an air inlet and multiple air outlet groups. The fan is used to supply air to the air inlet of the air supply duct, the air outlet group of the air supply duct is used to supply air toward the test chamber, and the temperature controller is used to control the temperature of the air flow entering the test chamber. Among them, a diverter plate is arranged in the air supply duct, and the diverter plate divides the internal space of the air supply duct into multiple air flow channels that are connected to each group of air outlet groups in a one-to-one correspondence, and each air flow channel is independently connected to the air inlet. The technical solution of the present application helps to enable each air outlet group of the air supply duct to evenly distribute the air volume to various parts of the test chamber, thereby improving the uniformity of temperature distribution in the test chamber.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor integrated circuit aging test, and in particular to aging test equipment. Background Art

[0002] Semiconductor devices usually need to be subjected to aging tests before leaving the factory. Aging tests mainly involve placing products in high temperature, high temperature and high humidity, or low temperature environments, and monitoring the electrical variables of the products during operation, as well as the chemical or physical changes that occur, in order to screen out defective products.

[0003] Most of the current aging test devices set up air circulation in the test chamber to maintain the temperature of the device under test in the test chamber stable. Usually, an air supply duct is set at the air inlet position corresponding to the test chamber in the aging test device, and the air volume discharged by the centrifugal fan is transported to the test chamber through the air supply duct. The air supply duct usually has multiple air outlet groups. The air volume distribution uniformity of each air outlet group of the conventional air supply duct is poor, which is not conducive to the uniformity of temperature distribution in the test chamber. Utility Model Content

[0004] Based on this, it is necessary to provide an air supply duct and aging test equipment to address the problem of uneven temperature distribution in the test chamber due to poor uniformity of air volume distribution of the air supply duct outlet group of the aging test equipment.

[0005] An aging test device includes a temperature controller, a test chamber, a fan and an air supply duct;

[0006] The air supply duct includes an air inlet and a plurality of air outlet groups; the fan is used to supply air to the air inlet of the air supply duct, the air outlet group of the air supply duct is used to supply air toward the test cavity, and the temperature controller is used to control the temperature of the air flow entering the test cavity;

[0007] Wherein, a diverter plate is arranged in the air supply duct, and the diverter plate divides the internal space of the air supply duct to form a plurality of air flow channels connected to each group of the air outlet groups in a one-to-one correspondence, and each of the air flow channels is independently connected to the air inlet.

[0008] In some embodiments, the plurality of air outlet groups include a first air outlet group and a second air outlet group arranged sequentially in a first direction;

[0009] The diverter plate includes a first diverter plate, which has a proximal end and a distal end arranged opposite to each other in the first direction, the proximal end is arranged close to the air inlet, and the distal end is arranged between the first air outlet group and the second air outlet group to separate the first air flow channel and the second air flow channel in the air supply duct, the first air flow channel is connected to the first air outlet group, and the second air flow channel is connected to the second air outlet group.

[0010] In some embodiments, the air supply duct includes a first wall extending along the first direction, and the first air outlet group and the second air outlet group are spaced apart from each other on the first wall along the first direction; the first diversion plate is inclined relative to the first wall, and its distal end is connected to the first wall and is located between the first air outlet group and the second air outlet group.

[0011] In some embodiments, the air supply duct includes:

[0012] An air inlet section and an air outlet section are connected, the air inlet section is intersected and arranged at one side of the air outlet section in the first direction; the first air outlet group and the second air outlet group are arranged in the air outlet section, and the air inlet section has the air inlet;

[0013] Wherein, the proximal end of the first splitter plate is located at the air outlet section; or, the proximal end of the first splitter plate extends into the air inlet section and extends toward the air inlet.

[0014] In some embodiments, the air supply duct further includes:

[0015] a plurality of focusing plates, located in the first air flow channel and arranged on the first flow splitter plate at intervals along the width direction of the first flow splitter plate, the focusing plates being arranged closer to the air inlet than the first air outlet group;

[0016] A concentrating channel for guiding the airflow to flow toward the middle area of ​​the first splitter plate is formed between adjacent concentrating plates.

[0017] In some embodiments, the air supply duct further includes:

[0018] The baffle is located in the first air flow channel. On the air flow path, the baffle is located between the focusing channel and the first air outlet group; the baffle is inclined on the first splitter plate toward the side where the air inlet is located.

[0019] In some embodiments, the air supply duct further includes:

[0020] A first guide plate and a first orifice plate, both of which are located in the first air flow channel;

[0021] Wherein, a first guide channel is formed between the first guide plate and the proximal end of the first diverter plate, and the first guide channel connects the air inlet and the first air outlet group;

[0022] The first orifice plate is disposed at the air flow outlet of the first guide channel, and is disposed closer to the air inlet in the first direction than the first air outlet group.

[0023] In some embodiments, the air supply duct further includes:

[0024] A second guide plate and / or a second orifice plate, both of which are located in the second air flow channel;

[0025] The second guide plate is directly opposite to the second air outlet group, and is obliquely connected between the inner walls of the second air flow channel on both sides opposite to each other, and together with the inner wall of the second air flow channel, forms a second guide channel connecting the air inlet and the second air outlet group, and the flow area of ​​the second guide channel is arranged to decrease away from the air inlet;

[0026] The second orifice plate is arranged on a flow path of the airflow in the second air flow channel flowing toward the second air outlet group.

[0027] In some embodiments, the second guide plate and the first splitter plate each include an upstream inclined section and a downstream inclined section connected to each other, the downstream inclined section is opposite to the corresponding air outlet group, and the upstream inclined section is arranged close to the air inlet; the inclination degree of the upstream inclined section relative to the first direction is greater than the inclination degree of the downstream inclined section relative to the first direction;

[0028] The inclination degree of the upstream inclined section and the inclination degree of the downstream inclined section of both the second guide plate and the first splitter plate are the same.

[0029] In some embodiments, each of the air outlet groups includes a plurality of air outlets, and an air outlet plate is disposed at each of the air outlets.

[0030] In the actual application of the above-mentioned aging test equipment, the air volume entering the air inlet of the air supply duct forms multiple air flows toward each air flow duct under the diversion of the diverter plate, and the air flow entering each air flow duct is finally discharged into the test chamber through the connected air outlet group. In this way, the air volume entering each air flow duct can be uniform by reasonably designing the position of the diverter plate, that is, the total air volume of the air supply duct is roughly evenly distributed to each air flow duct through the diverter plate, so that each air outlet group can evenly distribute the air volume to various parts of the test chamber, thereby improving the uniformity of temperature distribution in the test chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Moreover, the same reference numerals are used throughout the drawings to represent the same components. In the drawings:

[0032] Figure 1 It is a schematic diagram of the structure of the aging test equipment of some embodiments;

[0033] Figure 2 A perspective schematic diagram of an assembled air supply duct, a fan and a thermostat of some embodiments;

[0034] Figure 3 It is a perspective schematic diagram of the air supply duct, the fan and the temperature controller after assembly in some other embodiments;

[0035] Figure 4 for Figure 3 a perspective view of the structure shown;

[0036] Figure 5 Schematic perspective view of the assembled air supply duct, fan and thermostat of some other embodiments.

[0037] The reference numerals in the specific implementation manner are as follows:

[0038] 100, air supply duct; z, first direction; x, second direction; y, third direction;

[0039] 110, air inlet section; 120, air outlet section; 10, air inlet; 20, air outlet group; 20a, air outlet hole plate; 21, first air outlet group; 22, second air outlet group; 121, first wall; 122, second wall;

[0040] 30, splitter plate; d1, proximal end; d2, tail end; 31, first splitter plate; 31a, curved section; 31b, first inclined section; 31c, second inclined section; S, air flow channel; S1, first air flow channel; S2, second air flow channel;

[0041] 40, flow concentrator; 50, baffle; 60, first flow guide plate; P1, first flow guide channel; 70, second flow guide plate; P2, second flow guide channel; 71, third inclined section; 72, fourth inclined section; 80, first orifice plate; 90, second orifice plate; Q1, upstream inclined section; Q2, downstream inclined section;

[0042] 200, temperature controller; 300, fan; 400, test chamber. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0044] In the description of the present application, it should be understood that terms such as “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships, if any, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0045] In addition, if present, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0046] In this application, unless otherwise clearly specified and limited, if any, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0047] In the present application, if it appears, unless otherwise clearly specified and limited, a first feature “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature “above”, “above” and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature “below”, “below” and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0048] It should be noted that, if present, when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0049] According to some embodiments of the present application, referring to Figure 1 and Figure 2 The aging test equipment provided in the present application includes a temperature controller 200, a test chamber 400, a fan 300 and an air supply duct 100. The air supply duct 100 includes an air inlet 10 and a plurality of air outlet groups 20. The fan 300 is used to supply air to the air inlet 10 of the air supply duct 100, the air outlet group 20 of the air supply duct 100 is used to supply air toward the test chamber 400, and the temperature controller 200 is used to control the temperature of the air flow entering the test chamber 400. Among them, a diverter plate 30 is provided in the air supply duct 100, and the diverter plate 30 divides the internal space of the air supply duct 100 into a plurality of air flow channels S corresponding to each air outlet group 20, and each air flow channel S is independently connected to the air inlet 10.

[0050] The test chamber 400 provides a space for storing the test device in the aging test equipment. The fan 300 can be a centrifugal fan 300, an axial flow fan 300, etc., which supplies air to the air inlet 10 of the air supply duct 100. The airflow in the air supply duct 100 is blown into the test chamber 400 through the air outlet group 20 to adjust the temperature in the test chamber 400. The temperature controller 200 can be a heater or a cooler (such as an evaporator), which can adjust the temperature of the airflow entering the test chamber 400. Specifically, the temperature controller 200 can be arranged in the air supply duct 100, can also be arranged on the airflow path between the air outlet group 20 and the test chamber 400, can also be arranged on the air inlet side of the fan 300, etc. Its specific arrangement position is not limited, and those skilled in the art can flexibly arrange it.

[0051] The air outlet group 20 is used to discharge air from the air supply duct 100. Generally, each air outlet group 20 includes a plurality of air outlets. The caliber and number of the air outlets included in each air outlet group 20 are generally, but not limited to, the same.

[0052] A diverter plate 30 is provided in the air supply duct 100. The number of diverter plates 30 may be one or more, and may be determined specifically according to the number of air outlet groups 20. Generally, when the number of air outlet groups 20 is N, N-1 diverter plates 30 are provided, and N air flow channels S are correspondingly separated and formed, where N is greater than or equal to 2. Generally, the diverter plate 30 cooperates with the inner wall of the air supply duct 100 to form a plurality of independent air flow channels S, and each air flow channel S is independently connected to the air inlet 10.

[0053] The diverter plate 30 is roughly plate-shaped, and has a thickness direction, an extension direction and a width direction that are roughly perpendicular to each other. The diverter plate 30 guides the airflow from one end of its extension direction to the other end. The diverter plate 30 is usually sealed with the inner wall of the air supply duct 100 or other diverter plates 30 in its width direction to prevent air from flowing between the various air flow channels S.

[0054] In actual application, the air volume entering the air inlet 10 of the air supply duct 100 forms multiple air flows toward each air flow channel S under the diversion of the diverter plate 30, and the air flow entering each air flow channel S is finally discharged into the test chamber 400 through the connected air outlet group 20. In this way, the air volume entering each air flow channel S can be uniform by reasonably designing the position of the diverter plate 30, that is, the total air volume of the air supply duct 100 is roughly evenly distributed to each air flow channel S through the diverter plate 30, so that each air outlet group 20 can evenly distribute the air volume to various parts of the test chamber 400, thereby improving the uniformity of temperature distribution in the test chamber 400.

[0055] In some embodiments, reference Figure 2 The plurality of air outlet groups 20 include a first air outlet group 21 and a second air outlet group 22 sequentially arranged in the first direction z. The splitter plate 30 includes a first splitter plate 31, and the first splitter plate 31 has a proximal end d1 and a distal end d2 opposite to each other in the first direction z, the proximal end d1 is arranged close to the air inlet 10, and the distal end d2 is arranged between the first air outlet group 21 and the second air outlet group 22, so as to separate and form a first air flow channel S1 and a second air flow channel S2 in the air supply duct 100, the first air flow channel S1 is connected to the first air outlet group 21, and the second air flow channel S2 is connected to the second air outlet group 22.

[0056] The first direction z may be a vertical direction or a horizontal direction. Usually, the first direction z is an extension direction of the air supply duct 100 .

[0057] The first splitter plate 31 is disposed in the air supply duct 100 and separates the first air flow channel S1 and the second air flow channel S2 in the air supply duct 100. It can be understood that the first air flow channel S1 and the second air flow channel S2 are separated by the first splitter plate 31 and are independently connected to the air inlet 10.

[0058] It is understandable that the proximal end d1 of the first splitter plate 31 is disposed closer to the air inlet 10 in the first direction z than the first and second air outlet groups 21 and 22. To prevent air from flowing between the first and second air channels S1 and S2, the distal end d2 of the first splitter plate 31 is usually connected to the inner wall of the air supply duct 100.

[0059] At this time, the first air outlet group 21 and the second air outlet group 22 are arranged in sequence in the first direction z, which means that the two are completely staggered. For example, the first air outlet group 21 and the second air outlet group 22 are used to supply air to different areas of the test chamber 400 in the first direction z, and the air volume distribution in the test chamber 400 is more uniform.

[0060] Specifically in the embodiment, the first air outlet group 21 and the second air outlet group 22 are located on the same side of the air inlet 10 in the first direction z, and the two are arranged on the same side of the air supply duct 100 in the thickness direction of the first diverter plate 31, and the distal end d2 of the first diverter plate 31 is connected to the inner wall of the air supply duct 100 where the first air outlet group 21 and the second air outlet group 22 are located. That is, the airflow entering from the air inlet 10, after being diverted by the proximal end d1 of the first diverter plate 31, respectively enters the first air flow channel S1 and the second air flow channel S2 toward the same side in the first direction z, and is discharged to the test chamber 400 from the first air outlet group 21 connected to the first air flow channel S1, and is discharged to the test chamber 400 from the second air outlet group 22 connected to the second air flow channel S2.

[0061] At this time, the airflow of the air supply duct 100 can be discharged to the test chamber 400 through the first air outlet group 21 and the second air outlet group 22 located on the same side of the air inlet 10. The air supply duct 100 can be inlet at one end and outlet at the other end, which helps to simplify the structure of the air supply duct 100 and facilitates the layout of the aging test equipment. The first air outlet group 21 and the second air outlet group 22 are discharged on the same side, which is more conducive to the internal structure design and layout of the aging test equipment.

[0062] It should be noted that the specific arrangement of the first air outlet group 21 and the second air outlet group 22 is not limited in the embodiment of the present application. For example, the first air outlet group 21 and the second air outlet group 22 can be arranged on different sides of the air supply duct 100 in the thickness direction of the first diverter plate 31. For another example, the first air outlet group 21 and the second air outlet group 22 are arranged on different sides of the air inlet 10 in the first direction z, that is, the air supply duct 100 can have air intake in the middle and air outlet at both ends.

[0063] In some embodiments, reference Figure 2 The air supply duct 100 includes a first wall 121 extending along a first direction z, a first air outlet group 21 and a second air outlet group 22 are spaced apart from each other on the first wall 121 along the first direction z, a first diverter plate 31 is inclined relative to the first wall 121, and a distal end d2 thereof is connected to the first wall 121 and is located between the first air outlet group 21 and the second air outlet group 22.

[0064] A first wind channel S1 is formed between the first diverter plate 31 and the first wall 121. It can be understood that when the first diverter plate 31 is tilted relative to the first wall 121, its proximal end d1 is spaced from the first wall 121 and its distal end d2 is connected to the first wall 121. Therefore, the flow area of ​​the first wind channel S1 decreases along its drainage direction.

[0065] When the airflow flows in the air flow channel S, its kinetic energy is gradually reduced. At this time, the first diverter plate 31 is arranged obliquely, so that the flow channel area of ​​the first air flow channel S1 can be gradually reduced, and the kinetic energy of the airflow increases when the airflow flows through a position with a small flow channel area, which can improve the uniformity of the air outlet at each location of the first air outlet group 21 in the first direction z.

[0066] In some embodiments, reference Figure 2 The air supply duct 100 further includes a second wall 122 disposed opposite to the first wall 121 , and the second wall 122 and the first diverter plate 31 are disposed in the same inclined direction relative to the first wall 121 .

[0067] A second air flow channel S2 is formed between the second wall 122, the first splitter plate 31 and the first wall 121. Similarly, since the second wall 122 and the first splitter plate 31 are inclined in the same direction, the flow channel area of ​​the second air flow channel S2 decreases along its flow direction, which helps to improve the uniformity of air outlet at each location of the second air outlet group 22 in the first direction z.

[0068] Optionally, each air outlet group 20 includes a plurality of air outlets arranged at intervals in the first direction z.

[0069] In some embodiments, in combination Figure 2 , Figure 3 and Figure 5 It is understood that the air supply duct 100 includes an air inlet section 110 and an air outlet section 120 that are connected. The air inlet section 110 is intersected and arranged at one side of the air outlet section 120 in the first direction z, the first air outlet group 21 and the second air outlet group 22 are arranged in the air outlet section 120, and the air inlet section 110 has an air inlet 10. Among them, the proximal end d1 of the first diverter plate 31 is located in the air outlet section 120, or the proximal end d1 of the first diverter plate 31 extends into the air inlet section 110 and extends toward the air inlet 10.

[0070] The air inlet section 110 and the air outlet section 120 are arranged to intersect, so that the air supply duct 100 has an intersecting air inlet duct and an air outlet duct. At this time, the air supply duct 100 has a smaller size in the first direction z and a more compact structure. The air inlet section 110 has an air inlet 10, and the air outlet group 20 is arranged on the air outlet section 120. The air outlet section 120 extends roughly along the first direction z, and the air inlet section 110 is arranged at the air inlet end of the air outlet section 120. The airflow sent by the fan 300 first passes through the air inlet section 110 and the air outlet section 120.

[0071] The first splitter plate 31 is at least arranged in the air outlet section 120 to form a first air flow channel S1 and a second air flow channel S2 in the air outlet section 120. Figure 2 and Figure 3 , the first diverter plate 31 is only arranged in the air outlet section 120. Specifically, the proximal end d1 of the first diverter plate 31 is located in the air outlet section 120, that is, the first diverter plate 31 diverts the air volume at the air inlet end of the air outlet section 120. At this time, the first diverter plate 31 has a simple structure (for example, the first diverter plate 31 is a flat plate) and is easy to process.

[0072] In other examples, refer to Figure 5 , the first splitter plate 31 is partially located at the air outlet section 120, and partially located at the air inlet section 110 and extending toward the air inlet 10. At this time, the first splitter plate 31 splits the air volume entering the air supply duct 100 at a position close to the air inlet 10. When the air flow flows in the air inlet section 110, the air flow distribution is easily affected by the structure of the air inlet section 110 and is uneven. At this time, the first splitter plate 31 splits the air flow from the air inlet 10, which can reduce this influence and make the air flow distribution more uniform.

[0073] In the embodiment of the present application, the position where the first splitter plate 31 starts to split can be at the air inlet section 110 or at the air outlet section 120, and the structural design of the first splitter plate 31 is more flexible.

[0074] Specifically in some embodiments, refer to Figure 2 When the first splitter plate 31 is entirely located in the air outlet section 120 , the first splitter plate 31 may be a flat plate that is inclined.

[0075] Specifically in other embodiments, refer to Figure 5 , when the first splitter plate 31 is partially located in the air outlet section 120 and partially located in the air inlet section 110, the first splitter plate 31 includes a curved section 31a, a first inclined section 31b and a second inclined section 31c connected in sequence, and the curved section 31a, as the proximal end d1 of the first splitter plate 31, extends into the air inlet section 110. The first inclined section 31b and the second inclined section 31c are both air outlet sections 120, and are both inclined relative to the first direction z away from the first air outlet group 21, and the inclination of the second inclined section 31c is less than that of the first inclined section 31b. The end of the second inclined section 31c away from the first inclined section 31b is connected to the inner wall of the air outlet section 120 located between the first air outlet group 21 and the second air outlet group 22.

[0076] Among them, the proximal end d1 of the first diverter section is a curved structure, which can reduce the airflow resistance when guiding the airflow. The second inclined section 31c and the first inclined section 31b jointly realize the inclined setting of the first diverter plate 31 relative to the first wall 121, so that the flow area of ​​the first air flow channel S1 decreases. Specifically, the first inclined section 31b is highly inclined relative to the second inclined section 31c, and the decrease degree of the flow channel area at the first inclined section 31b is less than the decrease degree of the flow channel area at the second inclined section 31c, which can make the airflow velocity at the first inclined section 31b slower, and the airflow velocity at the second inclined section 31c faster, which can make the air volume at each location in the first direction z of the first air outlet group 21 more uniform.

[0077] In some embodiments, reference Figure 3 and Figure 4 The air supply duct 100 further includes a plurality of focusing plates 40, all of which are located in the first air flow channel S1 and are arranged on the first diverter plate 31 at intervals along the width direction of the first diverter plate 31. The focusing plates 40 are arranged closer to the air inlet 10 than the first air outlet group 21. A focusing channel for guiding the airflow to flow toward the middle area of ​​the first diverter plate 31 is formed between adjacent focusing plates 40.

[0078] Specifically, the focusing plate 40 is located on the surface of the first diverter plate 31 facing the first wall 121, and can guide the airflow in the first air flow channel S1 to flow toward the middle area of ​​the first diverter plate 31. The focusing channel formed by adjacent focusing plates 40 can be inclined toward the middle area of ​​the first diverter plate 31 to guide the airflow to flow toward the middle area of ​​the first diverter plate 31. Specifically, the focusing plate 40 can be arranged to be inclined relative to the middle area of ​​the first diverter plate 31 along the extension direction of the first diverter plate 31.

[0079] When the airflow flows toward the middle area of ​​the first diverter plate 31, it mainly flows toward the middle area in the width direction of the first diverter plate 31, so that the airflow can gather toward the middle area of ​​the first air outlet group 21, reducing the difference between the air volume in the two end areas of the first air outlet group 21 in the width direction of the first diverter plate 31 and the air volume in the middle area, which helps to improve the air outlet uniformity of the first air outlet group 21 from the width direction of the first diverter plate 31.

[0080] In some embodiments, continue to refer to Figure 3 and Figure 4 The air supply duct 100 further includes a baffle 50, which is located in the first air flow channel S1. In the air flow path, the baffle 50 is located between the focusing channel and the first air outlet group 21. The baffle 50 is tilted on the first diverter plate 31 toward the side where the air inlet 10 is located.

[0081] It can be understood that in the first direction z, the baffle plate 50 is located between the first air outlet group 21 and the focusing plate 40 to block the airflow from the focusing channel to the first air outlet group 21 in the airflow path. Taking the first direction z as a vertical direction as an example, the air inlet 10 is arranged above the first air outlet group 21, and the baffle plate 50 is inclined toward the side where the air inlet 10 is located, that is, one end of the baffle plate 50 is arranged on the first diverter plate 31, and the other end is inclined upward.

[0082] In this way, under the guidance of the baffle plate 50, the airflow gathered in the middle can flow toward the upper end, so that the air output of the first air outlet group 21 in the up and down direction (ie, the first direction z) can be more uniform.

[0083] In some embodiments, reference Figure 5 The air supply duct 100 further includes a first guide plate 60 and a first orifice plate 80, both of which are located in the first air flow duct S1. The first guide plate 60 and the proximal end d1 of the first diverter plate 31 are separated to form a first guide channel P1, and the first guide channel P1 connects the air inlet 10 and the first air flow duct S1. The first orifice plate 80 is disposed at the air flow outlet of the first guide channel P1, and is disposed closer to the air inlet 10 in the first direction z than the first air outlet group 21.

[0084] Preferably, one end of the first guide plate 60 close to the air inlet 10 is connected to the inner wall of the air supply duct 100 so that the airflow of the air inlet 10 will not leak into the first air outlet group 21 through the gap between the first guide plate 60 and the air supply duct 100.

[0085] The first guide plate 60 and the first diverter plate 31 are spaced apart to form a first guide channel P1. Figure 5 The first guide plate 60 and the curved surface section 31a of the first diverter plate 31 both extend into the air inlet section 110, and a first guide channel P1 is formed between the two. A first orifice plate 80 is provided at the airflow outlet of the first guide channel P1. The first orifice plate 80 is a structure with multiple vents for uniform air discharge.

[0086] Optionally, the flow area of ​​the first flow guide channel P1 remains unchanged along its flow direction. The means adopted to achieve this purpose may be that the first flow guide plate 60 has a curved surface structure similar to the contour of the curved surface section 31a of the first diverter plate 31. Figure 5 The air inlet section 110 and the air outlet section 120 are connected by an arc transition, which can reduce airflow loss, and the curved section 31a of the first diverter plate 31 is arranged between the transition arc and the first guide section, and the space between the transition arc and the first guide section is roughly evenly divided, so that the air volume of the first air flow channel S1 and the second air flow channel S2 is basically equal, achieving uniform diversion.

[0087] At this time, the airflow enters the first guide channel P1 through the air inlet 10, and then is evenly discharged through the first orifice plate 80 and discharged to the first air outlet group 21. The arrangement of the first guide channel P1 and the first orifice plate 80 can make the air volume entering the first air outlet group 21 more evenly distributed, which helps the first air outlet group 21 to evenly discharge air.

[0088] In some embodiments, reference Figure 5 The air supply duct 100 further includes a second guide plate 70 and / or a second orifice plate 90, both of which are located in the second air flow duct S2. The second guide plate 70 is directly opposite to the second air outlet group 22, and is obliquely connected between the inner walls of the second air flow duct S2 on both sides opposite to each other, and together with the inner wall of the second air flow duct S2, forms a second guide channel P2 connecting the air inlet 10 and the second air outlet group 22, and the flow area of ​​the second guide channel P2 is arranged to decrease away from the air inlet 10. The second orifice plate 90 is arranged on the flow path of the airflow in the second air flow duct S2 flowing to the second air outlet group 22.

[0089] Specifically, one inclined end of the second guide plate 70 is connected to the inner wall where the second air outlet group 22 is located, and is located on the side of the second air outlet group 22 away from the air inlet 10 in the first direction z, and the other inclined end of the second guide plate 70 is connected to the inner wall opposite to the second air outlet group 22.

[0090] The second guide plate 70 separates the second guide channel P2 in the second air channel S2 and independently connects the second air outlet group 22 and the air inlet 10. The second guide plate 70 faces the second air outlet group 22 and is disposed on the inner wall of the second guide channel P2.

[0091] Since the second guide plate 70 is arranged at an angle, the flow area of ​​the second guide channel P2 decreases away from the air inlet 10, that is, the air flow velocity increases as it approaches the lower end of the second air outlet group 22. As mentioned above, this can improve the air outlet uniformity of the second air outlet group 22 at various locations in the first direction z.

[0092] In addition, a second orifice plate 90 is disposed in the second air flow channel S2, and the second orifice plate 90 can be disposed upstream of the second guide channel P2 but is not limited thereto. The second orifice plate 90 can make the air flow distribution in the second air flow channel S2 more uniform.

[0093] Specifically in the embodiment, refer to Figure 5 The second guide plate 70 and the first splitter plate 31 both include an upstream inclined section Q1 and a downstream inclined section Q2 connected to each other, the downstream inclined section Q2 is opposite to the corresponding air outlet group 20, and the upstream inclined section Q1 is arranged close to the air inlet 10; the inclination degree of the upstream inclined section Q1 relative to the first direction z is greater than the inclination degree of the downstream inclined section Q2 relative to the first direction z. The inclination degree of the upstream inclined section Q1 and the inclination degree of the downstream inclined section Q2 of both the second guide plate 70 and the first splitter plate 31 are the same.

[0094] It can be understood that the downstream inclined section Q2 of the second guide plate 70 is opposite to the second air outlet group 22, and the downstream inclined section Q2 of the first diverter plate 31 is opposite to the first air outlet group 21. The degree of inclination of each inclined section can be the minimum angle between each inclined section and the first direction z. The degree of inclination of the upstream inclined section Q1 is greater than that of the downstream inclined section Q2, indicating that the speed of the airflow flowing downward along the upstream inclined section Q1 is less than the speed of the airflow flowing downward along the downstream inclined section Q2, that is, the airflow can flow faster toward the air outlet group 20 when flowing along the downstream inclined section Q2, which can further improve the uniformity of the air outlet of the air outlet group 20 in the up and down directions (first direction z).

[0095] In addition, the inclination degrees of the upstream inclined sections Q1 and the downstream inclined sections Q2 of the first diverter plate 31 and the second guide plate 70 are the same, that is, the flow channel space formed by the upstream inclined section Q1 and the downstream inclined section Q2 of the first diverter plate 31 and the second guide plate 70 can be basically the same, and the air volume entering the flow channel space is basically the same, which helps to make the first air outlet group 21 and the second air outlet group 22 output equal amounts of air.

[0096] In the above embodiment, the first inclined section 31b of the first splitter plate 31 serves as its upstream inclined section Q1, and the second inclined section 31c of the first splitter plate 31 serves as its downstream inclined section Q2. It can be understood that the airflow in the first air flow channel S1 first flows through the upstream inclined section Q1 of the first splitter plate 31, and then flows through the downstream inclined section Q2 of the first splitter plate 31. The airflow in the second air flow channel S2 first flows through the upstream inclined section Q1 of the second guide plate 70, and then flows through the downstream inclined section Q2 of the second guide plate 70.

[0097] Specifically in the embodiment, refer to Figure 5 The second guide plate 70 includes a third inclined section 71 and a fourth inclined section 72 connected to each other, both of which are inclined away from the second air outlet group 22 relative to the first direction z, the third inclined section 71 is connected to the inner wall of the second air flow channel S2 facing the second air outlet group 22, and the fourth inclined section 72 is connected to the other inner wall of the second air flow channel S2. The inclination of the fourth inclined section 72 is less than that of the third inclined section 71. That is, the third inclined section 71 serves as the upstream inclined section Q1 of the second guide plate 70, and the fourth inclined section 72 serves as the downstream inclined section Q2 of the second guide plate 70.

[0098] In some embodiments, reference Figures 2 to 5, each air outlet group 20 includes a plurality of air outlets, and an air outlet plate 20a is provided at each air outlet. The air outlet plate 20a has a plurality of ventilation holes for uniform air outlet. At this time, an air outlet plate 20a is provided at each air outlet so that the air outlet can discharge air uniformly. Among them, the air outlet can be a round hole, a square hole, etc. Optionally, the plurality of air outlets of each air outlet group 20 are arranged at intervals in the first direction z. Each air outlet corresponds to a layer of aging test board in the test chamber 400, and each air outlet group 20 blows air to the chips on the plurality of aging test boards through the plurality of air outlets, thereby performing temperature control tests on the plurality of chips.

[0099] It should be noted that in the embodiment of the present application, the air outlet group 20 is not limited to including the first air outlet group 21 and the second air outlet group 22, and the number of air outlet groups 20 can exceed two groups, and the diverter plate 30 is not limited to including the first diverter plate 31, and the number of diverter plates can exceed one. The specific setting of the number of both can be flexibly configured according to actual needs. As an example but not limiting, the air outlet group 20 can also include a third air outlet group, and the third air outlet group is arranged on the side of the second air outlet group away from the first air outlet group in the first direction. The diverter plate 30 can also include a second diverter plate, and the second diverter plate can be spaced apart from the first diverter plate 31 in the air supply duct, and the first diverter plate 31 is spaced together to form a first air flow channel S1, a second air flow channel S2, and a third air flow channel, and the third air flow channel is independently connected to the third air outlet group.

[0100] In one embodiment of the present application, the air supply duct 100 includes an air inlet 10, a first air outlet group 21, and a second air outlet group 22. All the air outlet groups 20 are located on the same side of the air inlet 10 in the first direction z, and all the air outlet groups 20 are located on the same side of the air supply duct 100 in the second direction x. A first diverter plate 31 is arranged in the air supply duct 100. The first diverter plate 31 is arranged obliquely and is separated between the first air outlet group 21 and the second air outlet group 22 to form a first air flow channel S1 connected to the first air outlet group 21 and a second air flow channel S2 connected to the second air outlet group 22. A focusing plate 40 and a baffle plate 50 are arranged in the first air flow channel S1, and a second guide plate 70 and a second orifice plate 90 are arranged in the second air flow channel S2. In addition, a first guide plate 60 and a first orifice plate 80 may also be arranged in the first air flow channel S1. It can be understood that in this embodiment, the width direction of the first diverter plate 31 is approximately perpendicular to the first direction z and the second direction x, and is perpendicular to the first direction z and the second direction x. Figure 4 Corresponding to the third direction y.

[0101] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0102] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. An aging test device, characterized in that: Including temperature controller, test chamber, fan and air supply duct; The air supply duct includes an air inlet and a plurality of air outlet groups; the fan is used to supply air to the air inlet of the air supply duct, the air outlet group of the air supply duct is used to supply air toward the test cavity, and the temperature controller is used to control the temperature of the air flow entering the test cavity; Wherein, a diverter plate is arranged in the air supply duct, and the diverter plate divides the internal space of the air supply duct to form a plurality of air flow channels connected to each group of the air outlet groups in a one-to-one correspondence, and each of the air flow channels is independently connected to the air inlet.

2. The aging test equipment according to claim 1, characterized in that: The plurality of air outlet groups include a first air outlet group and a second air outlet group arranged sequentially in a first direction; The diverter plate includes a first diverter plate, which has a proximal end and a distal end arranged opposite to each other in the first direction, the proximal end is arranged close to the air inlet, and the distal end is arranged between the first air outlet group and the second air outlet group to separate the first air flow channel and the second air flow channel in the air supply duct, the first air flow channel is connected to the first air outlet group, and the second air flow channel is connected to the second air outlet group.

3. The aging test equipment according to claim 2, characterized in that: The air supply duct includes a first wall body extending along the first direction, and the first air outlet group and the second air outlet group are spaced apart from each other on the first wall body along the first direction; the first diverter plate is inclined relative to the first wall body, and its distal end is connected to the first wall body and is located between the first air outlet group and the second air outlet group.

4. The aging test equipment according to claim 2, characterized in that: The air supply duct comprises: An air inlet section and an air outlet section are connected, the air inlet section is intersected and arranged at one side of the air outlet section in the first direction; the first air outlet group and the second air outlet group are arranged in the air outlet section, and the air inlet section has the air inlet; Wherein, the proximal end of the first splitter plate is located at the air outlet section; or, the proximal end of the first splitter plate extends into the air inlet section and extends toward the air inlet.

5. The aging test equipment according to any one of claims 2 to 4, characterized in that: The air supply duct also includes: a plurality of focusing plates, located in the first air flow channel and arranged on the first flow splitter plate at intervals along the width direction of the first flow splitter plate, the focusing plates being arranged closer to the air inlet than the first air outlet group; A concentrating channel for guiding the airflow to flow toward the middle area of ​​the first splitter plate is formed between adjacent concentrating plates.

6. The aging test equipment according to claim 5, characterized in that: The air supply duct also includes: The baffle is located in the first air flow channel. On the air flow path, the baffle is located between the focusing channel and the first air outlet group; the baffle is inclined on the first splitter plate toward the side where the air inlet is located.

7. The aging test equipment according to any one of claims 2 to 4, characterized in that: The air supply duct also includes: A first guide plate and a first orifice plate, both of which are located in the first air flow channel; Wherein, a first guide channel is formed between the first guide plate and the proximal end of the first diverter plate, and the first guide channel connects the air inlet and the first air outlet group; The first orifice plate is disposed at the air flow outlet of the first guide channel, and is disposed closer to the air inlet in the first direction than the first air outlet group.

8. The aging test equipment according to any one of claims 2 to 4, characterized in that: The air supply duct also includes: A second guide plate and / or a second orifice plate, both of which are located in the second air flow channel; The second guide plate is directly opposite to the second air outlet group, and is obliquely connected between the inner walls on both sides of the second air flow channel, and together with the inner wall of the second air flow channel, forms a second guide channel connecting the air inlet and the second air outlet group, and the flow area of ​​the second guide channel decreases away from the air inlet; The second orifice plate is arranged on a flow path of the airflow in the second air flow channel flowing toward the second air outlet group.

9. The aging test equipment according to claim 8, characterized in that: The second guide plate and the first splitter plate each include an upstream inclined section and a downstream inclined section connected to each other, the downstream inclined section is opposite to the corresponding air outlet group, and the upstream inclined section is arranged close to the air inlet; the inclination degree of the upstream inclined section relative to the first direction is greater than the inclination degree of the downstream inclined section relative to the first direction; The inclination degree of the upstream inclined section and the inclination degree of the downstream inclined section of both the second guide plate and the first splitter plate are the same.

10. The aging test equipment according to claim 1, characterized in that: Each of the air outlet groups includes a plurality of air outlets, and an air outlet plate is arranged at each of the air outlets.

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