Chuck mounting jig and system

Abstract

The utility model provides a chuck installation jig and a chuck installation system. The chuck installation jig and the chuck installation system comprise a tray and a supporting component, the tray comprises a bottom plate and an annular convex edge, and the annular convex edge is wound around the edge of the bottom plate; a bulge is arranged in the middle of the bottom plate; the height of the protrusion is smaller than the height of the annular protruding edge and larger than one third of the height of the annular protruding edge. N grooves are formed in the outer side wall of the tray, and N is a natural number larger than 1; the outer side wall of each groove is provided with a protruding part, and each protruding part is provided with a chuck fixing part penetrating through the corresponding groove. The supporting component comprises a base and a rack, the tray is arranged on the base, and the base is arranged on the rack. The protrusion is arranged in the middle of the tray, when the chuck is placed on the protrusion, the clamping needle on the chuck can be suspended on the tray and does not make contact with the tray, and the situation that the clamping needle is broken due to collision in the installation process is further avoided.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor installation equipment, in particular to a chuck installation fixture and a system. Background Art

[0002] The core part of semiconductor cleaning equipment is the chuck that drives and fixes the wafer. The structure of the chuck is crucial to ensure the stability and safety of the wafer during the cleaning process. The structure of the chuck is relatively complex, which further increases the difficulty of installation and the requirements for operating accuracy. At present, there are still some problems in the installation process of the chuck. For example, there is no corresponding fixture during the installation process of the chuck, which makes the chuck unable to be fixed, resulting in damage to the surface of the chuck and damage to the overall structure of the chuck. Among them, the clamping pin on the chuck is a relatively important structure on the chuck. In the absence of a fixture, the clamping pin is easy to contact hard objects such as the installation table, causing collision and breakage. At the same time, the installation process is relatively difficult, so the installation process requires high experience of the operator, which is not conducive to the operation of ordinary workers and has low labor efficiency.

[0003] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because they are described in the background technology section of the present application. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of the utility model is to provide a chuck installation fixture and system for solving the difficulties and technical problems in the prior art where, during the installation process of the chuck, the chuck cannot be fixed due to the lack of a corresponding fixture, resulting in the clamping pins on the chuck easily coming into contact with hard objects such as the mounting table when the chuck is installed, causing collision and breakage.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a chuck installation jig, which comprises: a tray and a supporting component;

[0006] The tray comprises a bottom plate and an annular convex edge, wherein the annular convex edge is arranged around the edge of the bottom plate; a protrusion is arranged in the middle of the bottom plate; the height of the protrusion is less than the height of the annular convex edge and greater than 1 / 3 of the height of the annular convex edge;

[0007] The outer wall of the tray is provided with N grooves, where N is a natural number greater than 1; the outer wall of the groove is provided with a protruding component, and the protruding component is provided with a chuck fixing component passing through the groove;

[0008] The supporting component comprises a base and a frame, the tray is arranged on the base, and the base is arranged on the frame.

[0009] Optionally, a through hole is further provided on the base; the chuck mounting fixture further includes a rotating component; the rotating component is provided on the base through the through hole and is fixedly connected to the lower bottom surface of the tray.

[0010] Optionally, the height of the rack ranges from 200 mm to 1000 mm.

[0011] Optionally, the chuck fixing component is configured as a toggle clamp.

[0012] Optionally, the chuck mounting fixture further comprises a lining plate, and the lining plate is arranged on the upper surface of the protrusion.

[0013] Optionally, the liner is a plastic liner.

[0014] Optionally, the diameter of the liner is smaller than the diameter of the chuck.

[0015] Optionally, the diameter of the lining plate is equal to the diameter of the chuck, and M grooves are provided on the lining plate, each groove corresponds to the position of a clamping needle on the chuck, and the size of the groove is larger than the size of the clamping needle; M is a natural number greater than 2.

[0016] Optionally, the height of the groove ranges from 20mm to 30mm.

[0017] The utility model also provides a chuck installation system, the chuck installation system at least comprising: a chuck and the chuck installation fixture;

[0018] The chuck is placed upside down on the protrusion; the chuck includes M clamping needles, and the M clamping needles are distributed on the front side of the chuck.

[0019] As described above, the utility model provides a chuck installation fixture and system, which has the following beneficial effects:

[0020] 1. The chuck installation fixture and system of the utility model provides a protrusion in the middle of the pallet, so that when the chuck is placed on the protrusion, the clamping pins on the chuck can be suspended on the pallet without contacting the pallet, further avoiding collision and breakage during the installation process.

[0021] 2. A plastic liner is placed on the protrusion of the chuck installation fixture and system of the utility model, so that the plastic liner contacts the chuck, avoiding direct contact between the chuck and the tray, which would cause the chuck to be scratched due to friction, and preventing the surface of the chuck from being contaminated by metal.

[0022] 3. The chuck installation fixture and system of the utility model include a rotating component, which allows the entire tray to rotate, making it convenient to rotate the chuck at any time during the installation process, so that the operator does not need to change the workstation to install the chuck, further saving the space and time required during the installation process. It also includes a supporting component to support the tray to ensure that the entire system is more stable and firm, and the height of the rack is set to be suitable for the height required during the installation of the chuck, so that the operator can install the chuck more conveniently. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Shown is a front view of the chuck installation fixture of the present invention.

[0024] Figure 2 Shown is a top view of the chuck mounting system of the present invention.

[0025] Figure 3 Shown is a structural schematic diagram of the chuck installation system of the utility model.

[0026] Figure 4 Shown is another structural schematic diagram of the chuck installation system of the present utility model.

[0027] Component number description

[0028] 1Chuck installation fixture

[0029] 10 pallets

[0030] 100 base plate

[0031] 101 annular flange

[0032] H1 Height of the annular ridge

[0033] 102 bulge

[0034] H2 raised height

[0035] 110 base

[0036] 111 rack

[0037] H3 rack height

[0038] 12 Liner

[0039] 120 grooves

[0040] H4 Groove Height

[0041] H5 groove width

[0042] 13 Grooves

[0043] 14 Protruding parts

[0044] 15Chuck fixing parts

[0045] 16 Rotating parts

[0046] 2-chuck mounting system

[0047] 20 Chuck

[0048] 200 clamping needle DETAILED DESCRIPTION

[0049] The following is a specific example to illustrate the implementation of the present invention. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0050] See also Figures 1 to 4 . It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings attached to this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any structural decoration, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the utility model without substantially changing the technical content.

[0051] like Figure 1 As shown, this embodiment provides a chuck installation fixture 1, including: a tray 10 and a supporting component 11.

[0052] like Figure 1 As shown, the tray 10 includes a base plate 100 and an annular flange 101, and the annular flange 101 is arranged around the edge of the base plate 100; a protrusion 102 is arranged in the middle of the base plate 100; the height H2 of the protrusion 102 is less than the height H1 of the annular flange 101, and greater than 1 / 3 of the height H1 of the annular flange 101.

[0053] Specifically, in the present embodiment, the annular convex edge 101 is arranged around the edge of the base plate 100, and the base plate 100 is used to carry the chuck. The geometric shape of the base plate 100 includes but is not limited to a circle. In actual use, any geometric shape of the base plate that can fit the shape of the chuck is applicable to the present utility model, and will not be described one by one here. By providing the annular convex edge 101, the chuck is prevented from slipping off the tray 10, and the stability of the contact surface between the chuck and the tray 10 is further increased. A protrusion 102 is provided in the middle position of the base plate 100. The height H2 of the protrusion 102 needs to be less than the height H1 of the annular convex edge 101 to avoid the entire chuck mounting fixture 1 being unstable due to the height H2 of the protrusion 103 being too high, so that the chuck cannot be stably placed. And the height H2 of the protrusion 102 needs to be greater than 1 / 3 of the height H1 of the annular convex edge 101 to avoid the height H2 of the protrusion 102 being too low to provide sufficient support for the chuck, causing the clamping pin on the chuck to contact a hard object and break. In actual use, the height of the protrusion can be set arbitrarily according to needs, and is not limited to this embodiment. In actual use, the height of the annular convex edge can be set arbitrarily according to needs, and will not be repeated here.

[0054] like Figure 2 As shown, N grooves 13 are provided on the outer wall of the tray 10, where N is a natural number greater than 1; a protruding part 14 is provided on the outer wall of each groove 13, and a chuck fixing part 15 passing through the groove 13 is provided on the protruding part 14.

[0055] Specifically, in this embodiment, Figure 2 As shown, three grooves 13 are provided on the outer wall of the tray 10, and three protruding parts 14 are provided on the outer wall of the three grooves 13, that is, three grooves 13 correspond to three protruding parts 14. Three chuck fixing parts 15 passing through the grooves 13 are provided on the three protruding parts 14, that is, three protruding parts 14 correspond to three chuck fixing parts 15. In actual use, the number of grooves, the number of protruding parts and the number of chuck fixing parts can be set arbitrarily according to needs, and are not limited to this embodiment. The chuck fixing part 15 includes but is not limited to an elbow clamp, which can be quickly clamped and opened. That is, the chuck can be quickly fixed and can also be quickly opened to loosen the chuck. By setting the groove 13, the chuck can be taken out more conveniently and quickly. In actual use, any chuck fixing part that can fix the chuck is applicable to the utility model, and will not be described one by one here.

[0056] like Figure 1 As shown, the supporting component 11 includes a base 110 and a frame 111 , the tray 10 is disposed on the base 110 , and the base 110 is disposed on the frame 111 .

[0057] Specifically, in the present embodiment, the tray 10 is arranged on the base 110, and the base 110 is arranged on the frame 111 to support the tray 10, so as to ensure that the entire chuck mounting fixture 1 is more stable and firm. The height H3 of the frame 111 is set in the range of 200mm-1000mm, such as 250mm, 350mm, 500mm, 750mm. The height H3 of the frame 111 is just adapted to the height required in the process of installing the chuck, so as to achieve the purpose of more convenient installation of the chuck. In actual use, the height of the frame that can be adapted to install the chuck can be arbitrarily set as needed, which will not be described in detail here. In actual use, any structure of the supporting component that can support the tray is applicable to the utility model, which will not be described in detail here.

[0058] More specifically, in this embodiment, a through hole is further provided on the base 110; the chuck installation fixture 1 further includes a rotating component 16; the rotating component 16 is provided on the base 110 through the through hole and is fixedly connected to the lower bottom surface of the tray 10. The rotating component 16 enables the entire tray 10 to rotate, so that the tray can be rotated at any time during the installation process to drive the chuck to rotate, and there is no need to change the workstation to install the chuck, further saving the space and time required during the installation process.

[0059] like Figure 1 As shown, the chuck mounting fixture 1 further includes a lining plate 12 , which is disposed on the upper surface of the protrusion 102 .

[0060] Specifically, in this embodiment, the liner 12 includes but is not limited to a plastic liner. The plastic liner is soft and smooth, and will not cause friction and scratch the chuck when in contact with the chuck surface, and will not cause metal pollution to the chuck surface, further protecting the chuck surface. In actual use, any material of the liner that will not scratch the chuck is suitable for the utility model, and will not be described one by one here.

[0061] More specifically, as Example 1, when the diameter of the liner 12 is smaller than the diameter of the chuck, the size of the contact portion between the chuck and the liner 12 is consistent with the size of the liner 12, and the other parts of the chuck except the contact portion with the liner 12 are suspended above the bottom plate 100 of the tray 10, that is, each clamping pin on the chuck is in a suspended state and has no contact with the liner 12 and the tray 10, thereby further protecting each clamping pin.

[0062] More specifically, as example 2, Figure 4As shown, when the diameter of the backing plate 12 is equal to the diameter of the chuck, M grooves 120 are provided on the backing plate 12, and each groove 120 corresponds to the position of the clamping pin on the chuck (in this embodiment, the clamping pin is provided on the front of the chuck to fix the wafer), and the size of each groove 120 is larger than the size of the clamping pin; M is a natural number greater than 2. That is, the height H4 of each groove 120 is larger than the length of the clamping pin, and the width H5 of each groove 120 is larger than the width of the clamping pin. At this time, the clamping pin is suspended above each groove 120 and does not contact the inner side wall of each groove 120, that is, it does not contact the backing plate 12. Among them, the height range of each groove 120 is 20mm-30mm, such as 24mm, 26mm, 28mm. In actual use, any height and width of the groove that can make the clamping pin suspended is applicable to the utility model, and will not be described one by one here. In actual use, any diameter of the liner that can suspend the clamping needle is applicable to the present invention, and will not be described in detail here.

[0063] like Figure 3 As shown, the utility model also provides a chuck installation system 2, which is used to protect the components on the chuck 20. The chuck installation system 2 includes: a chuck 20 and a chuck installation fixture 1. The chuck 20 is placed upside down on the protrusion 102, and a lining plate 12 is arranged between the protrusion 102 and the chuck 20. By setting the lining plate 12 as a plastic lining plate, the surface of the chuck is not only prevented from being contaminated by metal, but also protected from being damaged by friction. The chuck 20 is fixed by the chuck fixing component 15 to prevent the chuck 20 from shifting during the installation process, affecting the installation process of the chuck 20, and at the same time affecting the stability of the installation of the chuck 20, causing the installation of the chuck 20 to fail, further reducing material and labor costs. Among them, the chuck 20 includes M clamping needles 200, and the M clamping needles 200 are distributed on the front of the chuck 20, and M is a natural number greater than 2. For example, the number of clamping needles 200 is 3, 6, or 8. In actual use, the number of clamping needles can be set arbitrarily according to needs, and will not be described in detail here. By setting the protrusion 102, and the height H1 of the protrusion 102 is less than the height H2 of the annular ridge 101, and greater than 1 / 3 of the height H2 of the annular ridge 101, each clamping needle 200 does not contact the tray 10, but is suspended on the bottom plate 100. After adding the lining plate 12, in order to prevent the lining plate 12 from contacting the clamping needle 200, the corresponding size of the lining plate 12 can also be limited. Figure 3 As shown, when the diameter of the backing plate 12 is smaller than the diameter of the chuck 20, the clamping needle 200 can be suspended above the base plate 100. Figure 4As shown, when the diameter of the backing plate 12 is equal to the size of the chuck 20, it is necessary to set a plurality of grooves 120 on the backing plate 12 (the number of the grooves 120 corresponds to the number of the clamping pins 200), and each groove 120 corresponds to the position of each clamping pin 200, and the height H4 of each groove 120 is greater than the length of the clamping pin 200, and the width H5 of each groove 120 is greater than the width of the clamping pin 200, so that each clamping pin 200 is suspended above each groove 120 and does not contact the backing plate 12. At the same time, by setting the size of the backing plate 12, the clamping pins 200 on the chuck 20 are further protected from being collided and broken due to contact with foreign objects during installation.

[0064] In summary, the utility model provides a chuck installation fixture and system, including: a tray and a supporting component; the tray includes a bottom plate and an annular convex edge, the annular convex edge is arranged around the edge of the bottom plate; a protrusion is arranged in the middle of the bottom plate; the height of the protrusion is less than the height of the annular convex edge, and greater than 1 / 3 of the height of the annular convex edge; N grooves are arranged on the outer wall of the tray, N is a natural number greater than 1; a protruding component is arranged on the outer wall of each groove, and each protruding component is provided with a chuck fixing component passing through the groove; the supporting component includes a base and a frame, the tray is arranged on the base, and the base is arranged on the frame. The utility model arranges a protrusion in the middle of the tray, so that when the chuck is placed on the protrusion, the clamping pin on the chuck can be suspended on the tray without contacting the tray, further avoiding collision and breaking of the clamping pin during the installation process. At the same time, the chuck is fixed by the fixture, the efficiency of installing the chuck parts is improved, and the probability of installation failure is reduced. A plastic lining is also provided on the protrusion so that the plastic lining contacts the chuck, thereby preventing the chuck from directly contacting the tray, causing the chuck to be damaged due to friction, and further preventing the surface of the chuck from being contaminated by metal. At the same time, by providing a rotating component, the tray can rotate, and the chuck is driven to rotate by the rotation of the tray, so that the chuck can be rotated at any time during the installation process, so that the operator can install the chuck without changing the workstation, further saving the space and time required during the installation process. At the same time, the requirements for the operating experience of the installation operator are reduced, and the labor efficiency is improved. Therefore, the utility model effectively overcomes the various shortcomings of the prior art and has a high industrial utilization value.

[0065] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A chuck installation fixture, characterized in that: The chuck installation fixture comprises: a tray and a supporting component; The tray comprises a bottom plate and an annular convex edge, wherein the annular convex edge is arranged around the edge of the bottom plate; a protrusion is arranged in the middle of the bottom plate; the height of the protrusion is less than the height of the annular convex edge and greater than 1 / 3 of the height of the annular convex edge; The outer wall of the tray is provided with N grooves, where N is a natural number greater than 1; a protruding component is provided on the outer wall of each groove, and a chuck fixing component passing through the groove is provided on the protruding component; The supporting component comprises a base and a frame, the tray is arranged on the base, and the base is arranged on the frame.

2. The chuck installation fixture according to claim 1, characterized in that: The base is also provided with a through hole; the chuck installation fixture also includes a rotating component; the rotating component is arranged on the base through the through hole and is fixedly connected to the lower bottom surface of the tray.

3. The chuck installation fixture according to claim 1, characterized in that: The height range of the rack is 200mm-1000mm.

4. The chuck installation fixture according to claim 1, characterized in that: The chuck fixing component is configured as a toggle clamp.

5. The chuck installation fixture according to claim 1, characterized in that: The chuck installation fixture also includes a lining plate, and the lining plate is arranged on the upper surface of the protrusion.

6. The chuck installation fixture according to claim 5, characterized in that: The lining plate is a plastic lining plate.

7. The chuck installation fixture according to claim 5, characterized in that: The diameter of the lining plate is smaller than the diameter of the chuck.

8. The chuck installation fixture according to claim 5, characterized in that: The diameter of the lining plate is equal to the diameter of the chuck, and M grooves are arranged on the lining plate, each groove corresponds to the position of the clamping needle on the chuck one by one, and the size of each groove is larger than the size of the clamping needle; M is a natural number greater than 2.

9. The chuck installation fixture according to claim 8, characterized in that: The height of each groove ranges from 20mm to 30mm.

10. A chuck mounting system, characterized in that: The chuck installation system comprises: a chuck and a chuck installation fixture as claimed in any one of claims 1 to 9; The chuck is placed upside down on the protrusion; the chuck includes M clamping needles, and the M clamping needles are distributed on the front side of the chuck.

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