Linear scraper device for dust cleaning and process waste gas treatment system

Abstract

The utility model discloses a linear scraper device for dust cleaning and a process waste gas treatment system, belongs to the technical field of tail gas treatment, and aims to solve the problems of unsmooth flow, dust accumulation and blockage of the process waste gas treatment system in the prior art. The linear scraper device is arranged in a cavity of a process waste gas treatment system; the linear scraper device comprises a rotating rod, a rotating cylinder and a plurality of ribbons arranged on the rotating rod, a rotating shaft of the rotating cylinder is fixed with one end of the rotating rod, the other end of the rotating rod is suspended, one end of each ribbon is detachably connected with the rotating rod, and the other end of each ribbon is in contact with the inner wall of a cavity of the process waste gas treatment system in the rotating process of the rotating rod. The device can be used for cleaning dust on the inner wall of a cavity of a process waste gas treatment system.

Description

Technical Field

[0001] The utility model belongs to the technical field of tail gas treatment, and in particular relates to a linear scraper device for dust cleaning and a process waste gas treatment system. Background Art

[0002] In the Harsh process, for example, the borophosphosilicate glass (BPSG) process in the chemical vapor deposition (CVD) process, the high aspect ratio (HARP) process, the silicon nitride (SiN) process, the metal etching (MetalETCH) process in the etching (ETCH), the atomic layer deposition (ALD) process in the diffusion (Diffusion) process, the time sensitive network (TSN) process, etc., a large amount of SiO2 dust and highly corrosive and harmful substances will be generated, which can easily cause problems such as poor flow, dust accumulation and blockage in the process exhaust gas treatment system. Utility Model Content

[0003] In view of the above analysis, the utility model aims to provide a linear scraper device for dust cleaning and a process waste gas treatment system to solve the problems of poor flow, dust accumulation and blockage in the process waste gas treatment system in the prior art.

[0004] The purpose of the utility model is mainly achieved through the following technical solutions.

[0005] The utility model provides a straight scraper device for dust cleaning, which is arranged in the cavity of a process waste gas treatment system; the straight scraper device comprises a rotating rod, a rotating cylinder and a plurality of cable ties arranged on the rotating rod, the rotating shaft of the rotating cylinder is fixed to one end of the rotating rod, the other end of the rotating rod is suspended, one end of the cable tie is connected to the rotating rod, and the other end of the cable tie is used to scrape and / or beat the dust on the inner wall of the cavity of the process waste gas treatment system.

[0006] Furthermore, the length of the cable tie gradually decreases in a direction gradually away from the perpendicular midline of the rotating rod.

[0007] Furthermore, the cable tie includes an elastic belt body and a tie ring, one end of the elastic belt body is fixedly connected to the tie ring, and the other end of the elastic belt body passes around the rotating rod and then passes through the tie ring, so that the cable tie and the rotating rod are detachably connected.

[0008] Furthermore, the elastic belt body is in an arc shape.

[0009] Furthermore, the elastic belt body includes a straight strip and a Z-shaped strip, one end of the straight strip is fixedly connected to the tie ring, and the other end of the straight strip is detachably connected to the Z-shaped strip.

[0010] Furthermore, the elastic belt body includes a straight strip and an S-shaped strip, one end of the straight strip is fixedly connected to the tie ring, and the other end of the straight strip is detachably connected to the S-shaped strip.

[0011] Furthermore, the elastic belt body includes a first main strip, a second main strip and a plurality of branch strips, one end of the first main strip is fixedly connected to the ring, the other end of the first main strip is detachably connected to the second main strip, and the plurality of branch strips are arranged on the second main strip.

[0012] Further, a plurality of cable ties are provided on the outer wall of the rotating rod and are arranged in a spiral shape; or, the plurality of cable ties are divided into at least two groups, a plurality of cable ties in each group are arranged along the axial direction of the rotating rod, and a plurality of groups of cable ties are arranged along the circumferential direction of the rotating rod.

[0013] The utility model also provides a process waste gas treatment system, comprising the above-mentioned linear scraper device for dust cleaning.

[0014] Furthermore, it also includes a spray tower, a swirl sheet and a spray head, and the linear scraper device, the swirl sheet and the spray head are all arranged in the spray tower; along the flow direction of the exhaust gas, the swirl sheet, the spray head and the linear scraper device are arranged in sequence.

[0015] Compared with the prior art, the utility model can achieve at least one of the following beneficial effects.

[0016] A) The utility model provides a linear scraper device for dust cleaning, which drives a rotating rod to rotate by rotating a cylinder, thereby driving a plurality of cable ties to move relative to the inner wall of a cavity of a process waste gas treatment system, scraping and beating the inner wall of the cavity, thereby cleaning the dust accumulated on the inner wall of the cavity, and avoiding problems such as poor flow, dust accumulation, and blockage in the process waste gas treatment system.

[0017] B) The linear scraper device for dust cleaning provided by the utility model is independently arranged between multiple cable ties. When one of the cable ties is damaged, only the cable tie needs to be replaced, and there is no need to replace the entire linear scraper device for dust cleaning, thereby simplifying the replacement process and reducing replacement costs.

[0018] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by implementing the present invention. The purpose and other advantages of the present invention can be achieved and obtained through the contents particularly pointed out in the embodiments of the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present invention. In the entire drawings, the same reference symbols represent the same components.

[0020] Figure 1A schematic diagram of the structure of a linear scraper device for dust cleaning provided in Embodiment 1 of the utility model;

[0021] Figure 2 A schematic diagram of a first structure of an elastic belt body in a linear scraper device for dust cleaning provided in the first embodiment of the utility model;

[0022] Figure 3 A schematic diagram of a second structure of an elastic belt body in a linear scraper device for dust cleaning provided in the first embodiment of the utility model;

[0023] Figure 4 A schematic diagram of a third structure of an elastic belt body in a linear scraper device for dust cleaning provided in the first embodiment of the utility model;

[0024] Figure 5 A schematic diagram of a fourth structure of an elastic belt body in a linear scraper device for dust cleaning provided in the first embodiment of the utility model;

[0025] Figure 6 A partial schematic diagram of a process waste gas treatment system provided in Example 2 of the present invention.

[0026] Reference numerals:

[0027] 1-mounting ring; 2-tie; 21-elastic belt; 211-straight strip; 212-Z-shaped strip; 213-S-shaped strip; 214-first main strip; 215-second main strip; 216-branch strip; 22-tie ring; 3-rotating cylinder; 4-spray head; 5-spray tower; 6-swirl blade; 7-spray head. DETAILED DESCRIPTION

[0028] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0029] Embodiment 1

[0030] This embodiment provides a linear scraper device for dust cleaning, which is arranged in the cavity of the process exhaust gas treatment system, see Figure 1 , including a rotating rod 1, a rotating cylinder 3 and a plurality of cable ties 2 arranged on the rotating rod 1, the rotating cylinder 3 is used to drive the rotating rod 1 to rotate, the rotating shaft of the rotating cylinder 3 is fixed to one end of the rotating rod 1, and the other end of the rotating rod 1 is suspended, one end of the cable tie 2 is detachably connected to the rotating rod 1, and the other end of the cable tie 2 contacts the inner wall of the cavity of the process waste gas treatment system during the rotation of the rotating rod 1.

[0031] The existing scraper usually includes a spiral cutter body and a rotating shaft. The spiral cutter body is arranged axially along the rotating shaft and is fixedly connected to the rotating shaft. However, once the spiral cutter body of such a scraper is damaged, the spiral cutter body or even the entire scraper needs to be replaced, resulting in a high replacement cost.

[0032] Compared with the prior art, the linear scraper device for dust cleaning provided in this embodiment drives the rotating rod 1 to rotate by rotating the cylinder 3, thereby driving multiple cable ties 2 to move relative to the inner wall of the cavity of the process waste gas treatment system, scraping and patting the inner wall of the cavity, thereby cleaning the dust accumulated on the inner wall of the cavity, avoiding problems such as poor flow, dust accumulation and blockage in the process waste gas treatment system.

[0033] At the same time, since multiple cable ties 2 are independently arranged, when one of the cable ties 2 is damaged, only the cable tie 2 needs to be replaced, and there is no need to replace the entire linear scraper device used for dust cleaning, thereby simplifying the replacement process and reducing replacement costs.

[0034] As for the arrangement of the cable ties 2, illustratively, multiple cable ties 2 are provided on the outer wall of the rotating rod 1 and are arranged in a spiral shape; or, multiple cable ties 2 are divided into at least two groups, and multiple cable ties 2 in each group are evenly arranged along the axial direction of the rotating rod 1, and multiple groups of cable ties 2 are evenly arranged along the circumference of the rotating rod 1.

[0035] From the perspective of structural simplification, the plurality of cable ties 2 are divided into two groups, and the two groups of cable ties 2 are symmetrically arranged relative to the axis of the rotating rod 1, that is, one group of cable ties 2 is located on one side of the rotating rod 1, and the other group of cable ties 2 is located on the other side of the rotating rod 1.

[0036] In order to make the tie 2 as close as possible to the inner wall of the chamber of the process waste gas treatment system, for example, the length of the tie 2 is gradually reduced in the direction away from the perpendicular line of the rotating rod 1. In this way, it can not only ensure that each tie 2 can fully contact the inner wall of the chamber, but also appropriately reduce the problem of excessive rotation resistance caused by the length of the tie 2.

[0037] To facilitate the detachability of the cable tie 2, the cable tie 2 includes an elastic belt body 21 and a ring 22. One end of the elastic belt body 21 is fixedly connected to the ring 22 and is integrally formed in actual applications. The other end of the elastic belt body 21 passes around the rotating rod 1 and then through the ring 22, so that the cable tie 2 can be detachably connected to the rotating rod 1.

[0038] Specifically, the structure of the elastic band 21 can be in the following forms in order to further increase the contact area between the tie 2 and the inner wall of the chamber of the process waste gas treatment system:

[0039] In the first form, the elastic belt body 21 is in an arc shape. Figure 2 .

[0040] In the second form, the elastic belt body 21 includes a straight strip 211 and a Z-shaped strip 212, see Figure 3 One end of the straight strip 211 is fixedly connected to the ring 22, and the other end of the straight strip 211 is detachably connected to the Z-shaped strip 212, or the elastic belt body 21 is integrally formed. When the other end of the straight strip 211 is detachably connected to the Z-shaped strip 212, during actual installation, the other end of the straight strip 211 passes through the ring 22 after passing through the rotating rod 1, and then the Z-shaped strip 212 is connected to the straight strip 211.

[0041] In the third form, the elastic belt body 21 includes a straight strip 211 and an S-shaped strip 213, see Figure 4 One end of the straight strip 211 is fixedly connected to the ring 22, and the other end of the straight strip 211 is detachably connected to the S-shaped strip 213, or the elastic belt body 21 is integrally formed. When the other end of the straight strip 211 is detachably connected to the S-shaped strip 213, during actual installation, the other end of the straight strip 211 passes through the ring 22 after passing through the rotating rod 1, and then the S-shaped strip 213 is connected to the straight strip 211.

[0042] In the fourth form, the elastic belt body 21 includes a first main strip 214, a second main strip 215 and a plurality of branch strips 216, see Figure 5 One end of the first main strip 214 is fixedly connected to the ring 22, and the other end of the first main strip 214 is detachably connected to the second main strip 215. A plurality of branch strips 216 are provided on the second main strip 215, so that the elastic belt body 21 forms a tree branch shape, or the elastic belt body 21 is integrally formed. When the other end of the first main strip 214 is detachably connected to the second main strip 215, during actual installation, the other end of the first main strip 214 passes through the ring 22 after passing through the rotating rod 1, and then the second main strip 215 is connected to the first main strip 214.

[0043] Considering that the rotation angle of the rotating rod 1 directly determines the movement amplitude of the cable tie 2 on the inner wall of the cavity of the process waste gas treatment system, illustratively, the rotation angle of the rotating rod 1 is 90 to 360°, for example, 90°, 180°, 270° or 360°.

[0044] In order to automatically start the linear scraper device for dust cleaning according to the actual dust accumulation situation of the process exhaust gas treatment system to clean the dust on the inner wall of the cavity, the linear scraper device for dust cleaning also includes a pressure sensor and a scraper controller. The scraper controller is respectively connected to the pressure sensor and the circuit of the rotating cylinder 3. The pressure sensor is used to collect pressure data in the cavity of the process exhaust gas treatment system.

[0045] Exemplarily, the number of pressure sensors is 1. Along the exhaust gas flow direction, the pressure sensor is arranged in front of the rotating rod 1. The pressure sensor collects the pressure data in the cavity in real time and transmits it to the scraper controller. The scraper controller determines whether the pressure data is lower than the pressure threshold. If it is greater than the pressure threshold, it means that the cavity is blocked. The scraper controller controls the rotation of the rotating shaft of the rotating cylinder 3, and the elastic scraper cleans the dust on the inner wall of the cavity.

[0046] Alternatively, the number of pressure sensors is 2, namely the first pressure sensor and the second pressure sensor. Along the exhaust gas flow direction, the first pressure sensor, the rotating rod 1 and the second pressure sensor are arranged in sequence. The first pressure sensor collects the front pressure data of the rotating rod 1 in the cavity in real time and transmits it to the scraper controller. The second pressure sensor collects the rear pressure data of the rotating rod 1 in the cavity in real time and transmits it to the scraper controller. The scraper controller calculates the difference between the front pressure data and the rear pressure data of the rotating rod 1. If the difference exceeds the threshold, it means that the cavity is blocked. The scraper controller controls the rotating cylinder 3 to rotate, and the cable tie 2 cleans the dust on the inner wall of the cavity.

[0047] In practical applications, the linear scraper device can be opened at a fixed time to clean the inner wall of the cavity. For example, the frequency of opening the rotating cylinder 3 is 0.25 to 6 hours, and each time it rotates 1 to 5 times. Specifically, if the cavity is seriously blocked, the frequency of opening the rotating cylinder 3 is 0.25 to 3 hours, and if the cavity is slightly blocked, the frequency of opening the rotating cylinder 3 is 3 to 6 hours.

[0048] The rotating cylinder 3 can also be set to be normally open during the operation of the process waste gas treatment device.

[0049] It should be noted that in the linear scraper device for dust cleaning provided by the utility model, the software methods involved in the pressure sensor, scraping controller, etc. are all common methods in the prior art. It is only necessary to connect each device with corresponding functions through the connection relationship given in the embodiment of the utility model to obtain the technical solution of the utility model, which does not involve any software improvement. As for the connection method between the devices with corresponding functions, it can be realized by those skilled in the art using the existing technology and will not be described in detail here.

[0050] Embodiment 2

[0051] This embodiment provides a process waste gas treatment system, see Figure 6 , including the linear scraper device for dust cleaning provided in Example 1.

[0052] Compared with the prior art, the beneficial effects of the process waste gas treatment system provided in this embodiment are basically the same as the beneficial effects of the linear scraper device for dust cleaning provided in Example 1, and are not described in detail here.

[0053] Exemplarily, the process waste gas treatment system further includes a spray tower 5, a swirl sheet 6 and a spray head 4. The linear scraper device, the swirl sheet 6 and the spray head 4 are all arranged in the spray tower 5. Along the flow direction of the exhaust gas, the swirl sheet 6, the spray head 4 and the linear scraper device are arranged in sequence. This is because dust accumulation is likely to occur behind the spray head 4. The rotation of the rotating shaft of the rotating cylinder 3 drives the cable tie 2 to rotate. The cable tie 2 contacts the inner wall of the spray tower 5 to scrape off the dust adhered to the inner wall. The dust can fall from the gap between the blades of the swirl sheet 6, or fall downward with the flushing of the spray water, thereby ensuring smooth airflow in the spray tower 5 and ensuring the normal and stable operation of the process waste gas treatment system.

[0054] Specifically, a through hole is provided on the side wall of the spray tower 5 , and the rotating shaft of the rotating cylinder 3 passes through the through hole from the outside to the inside and is connected to the rotating rod 1 .

[0055] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.

Claims

1. A linear scraper device for dust cleaning, characterized in that: It is located in the chamber of the process waste gas treatment system; The linear scraper device includes a rotating rod, a rotating cylinder and a plurality of cable ties arranged on the rotating rod, wherein the rotating shaft of the rotating cylinder is fixed to one end of the rotating rod, the other end of the rotating rod is suspended in the air, one end of the cable tie is connected to the rotating rod, and the other end of the cable tie is used to scrape and / or beat the dust on the inner wall of the cavity of the process waste gas treatment system.

2. The linear scraper device for dust cleaning according to claim 1, characterized in that: The length of the cable tie gradually decreases along a direction gradually away from the perpendicular midline of the rotating rod.

3. The linear scraper device for dust cleaning according to claim 1, characterized in that: The cable tie comprises an elastic belt body and a tie ring, one end of the elastic belt body is fixedly connected to the tie ring, and the other end of the elastic belt body passes through the tie ring after passing around the rotating rod, so that the cable tie is detachably connected to the rotating rod.

4. The linear scraper device for dust cleaning according to claim 3, characterized in that: The elastic belt body is in an arc shape.

5. The linear scraper device for dust cleaning according to claim 3, characterized in that: The elastic belt body comprises a straight strip and a Z-shaped strip, one end of the straight strip is fixedly connected to the tie ring, and the other end of the straight strip is detachably connected to the Z-shaped strip.

6. The linear scraper device for dust cleaning according to claim 3, characterized in that: The elastic belt body comprises a straight strip and an S-shaped strip, one end of the straight strip is fixedly connected to the tie ring, and the other end of the straight strip is detachably connected to the S-shaped strip.

7. The linear scraper device for dust cleaning according to claim 3, characterized in that: The elastic belt body includes a first main strip, a second main strip and a plurality of branch strips, one end of the first main strip is fixedly connected to the ring, the other end of the first main strip is detachably connected to the second main strip, and the plurality of branch strips are arranged on the second main strip.

8. The linear scraper device for dust cleaning according to claim 1, characterized in that: A plurality of cable ties are disposed on the outer wall of the rotating rod and are arranged in a spiral shape; Alternatively, the plurality of cable ties are divided into at least two groups, the plurality of cable ties in each group are arranged along the axial direction of the rotating rod, and the plurality of groups of cable ties are arranged along the circumferential direction of the rotating rod.

9. A process waste gas treatment system, characterized in that: It comprises a linear scraper device for dust cleaning as described in any one of claims 1 to 8.

10. The process waste gas treatment system according to claim 9, characterized in that: It also includes a spray tower, a swirl sheet and a spray head, wherein the linear scraper device, the swirl sheet and the spray head are all arranged in the spray tower; Along the flow direction of the tail gas, the swirl blades, the spray head and the linear scraper device are arranged in sequence.

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