Diffusion sheet replacing device

Abstract

The utility model belongs to the technical field of diffusion sheets, and particularly relates to a diffusion sheet replacing device which comprises a handle rod mechanism and a handle head mechanism, the handle rod mechanism comprises a handle rod body, a horizontal spring and a check block, the handle head mechanism comprises a sliding connecting part and a clamping part, and the side face of the handle rod body is fixedly connected with the check block. The upper end of the sliding connecting part is fixedly connected with the lower end of the clamping part, the handle rod body and the sliding connecting part are slidably connected in the horizontal direction, the two ends of the horizontal spring are detachably connected with the check block and the side face of the sliding connecting part respectively, the clamping part comprises a clamping body and a conical clamping head, and the clamping body and the conical clamping head are coaxial; compared with the prior art, the diffusion sheet replacement device has the advantages and positive effects that the clamping part is inserted into the diffusion sheet through hole during replacement, the probability of collision between the diffusion sheet replacement device and a zoom lens during replacement is reduced, and the handle rod main body and the sliding connection part are in sliding connection in the horizontal direction, so that fine adjustment can be realized; and a plurality of handle head mechanisms can be conveniently and quickly matched with the corresponding diffusion sheet through holes.

Description

Technical Field

[0001] The utility model belongs to the technical field of diffusion sheets, and in particular relates to a diffusion sheet replacement device. Background Art

[0002] The step-and-scan projection lithography machine includes an illumination system, which generally includes an integrator mirror, a diffuser and a zoom lens optical element. The diffuser is disc-shaped and has an external thread on its outer surface. The diffuser is fastened by connecting the external thread to the internal thread of the integrator mirror, and a plurality of diffuser through holes are distributed on the diffuser. A diffuser replacement device is used through the diffuser through holes. However, the existing diffuser replacement device is generally a hexagonal wrench, which is easy to slip out of the diffuser through hole and collide with the zoom lens, thereby affecting the performance of the zoom lens and having low safety. In addition, the hexagonal wrench is unevenly stressed during disassembly and is easy to damage the diffuser, reducing the actual service life of the diffuser. Therefore, a diffuser replacement device with high safety and uniform force during disassembly is urgently needed. Utility Model Content

[0003] In view of the above problems, the utility model provides a diffusion sheet replacement device.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is as follows: a diffuser replacement device, including a handle rod mechanism and a handle head mechanism, the handle rod mechanism is horizontal in length direction, the diffuser to be replaced includes a diffuser body, a plurality of diffuser through holes are provided on the diffuser body, the handle rod mechanism includes a handle rod body, a horizontal spring and a stopper, and the handle head mechanism includes a sliding connection part and a clamping part;

[0005] The side surface of the handle body is fixedly connected to the block, the upper end of the sliding connection part is fixedly connected to the lower end of the clamping part, the handle body and the sliding connection part are slidably connected in the horizontal direction, the two ends of the horizontal spring are detachably connected to the block and the side surface of the sliding connection part respectively, and the clamping part is coaxial with the through hole of the diffuser;

[0006] The clamping part comprises a clamping body and a conical clamping joint. The upper end of the clamping body is fixedly connected to the lower end of the conical clamping joint. The clamping body and the conical clamping joint are coaxial.

[0007] Preferably, it also includes a positioning mechanism, which includes telescopic cylinder 1, telescopic cylinder 2, a vertical spring and a positioning plate. The lower end of the telescopic cylinder is fixedly connected to the upper end of the handle rod body, the telescopic cylinder 1 and the telescopic cylinder 2 are slidably connected in the vertical direction, the lower end of the positioning plate is detachably connected to the upper end of the telescopic cylinder 2, the upper end of the vertical spring is detachably connected to the lower end surface of the positioning plate, the lower end of the vertical spring is detachably connected to the upper end of the handle rod body, and the positioning plate is in contact with the bottom surface of the diffusion sheet body.

[0008] Preferably, it also includes a handle mechanism, which includes handle one and handle two, and the handle rod mechanism also includes a handle rod threaded portion, which includes a first threaded portion and a second threaded portion, and both ends of the handle rod body in the length direction are respectively fixedly connected to the first threaded portion and the second threaded portion, and the handle one is detachably connected to an end of the first threaded portion away from the handle rod body, and the handle two is detachably connected to an end of the second threaded portion away from the handle rod body.

[0009] Preferably, the length direction of handle 1 is horizontal, and the length direction of handle 2 is vertical.

[0010] Preferably, the number of the crown mechanisms is two, and the two crown mechanisms are symmetrically distributed about the positioning mechanism.

[0011] Preferably, the handle body is a regular polygon, and the sliding connection portion is provided with a regular polygonal through hole.

[0012] Preferably, it further comprises a pressure sensor, a controller and an alarm light, wherein the pressure sensor is detachably connected to the side of the card-connecting body, and the pressure sensor and the alarm light are both communicatively connected to the controller.

[0013] Compared with the prior art, the advantages and positive effects of the utility model are:

[0014] (1) The upper end of the clamping body is fixedly connected to the lower end of the conical clamping joint. When replacing, the clamping part is inserted into the diffuser through hole, which reduces the probability of collision between the diffuser replacement device and the zoom lens during replacement. The safety is high. The handle rod body and the sliding connection part are slidably connected in the horizontal direction, which can achieve fine adjustment, making it easy for multiple handle head mechanisms to quickly match with the corresponding diffuser through holes.

[0015] (2) The two ends of the horizontal spring are detachably connected to the stopper and the side of the sliding connection part, respectively. The upper end of the clamping body is fixedly connected to the lower end of the conical clamping joint. The conical clamping joint is conical, which facilitates the vertical insertion of the clamping body into the through hole of the diffuser to achieve accurate and rapid replacement.

[0016] (3) The positioning plate fits the bottom surface of the diffuser body, and the positioning mechanism realizes the positioning during disassembly. The clamping body is vertically inserted into the through hole of the diffuser, and the force is evenly applied during disassembly, which avoids excessive wear of the diffuser and increases the actual service life of the diffuser.

[0017] (4) The length direction of handle 1 is horizontal, and the length direction of handle 2 is vertical, so that it is convenient to replace the diffuser by holding handle 1 or handle 2;

[0018] (5) The handle body is a regular polygon, which ensures that the handle body and the sliding connection part can only slide relative to each other but not rotate relative to each other;

[0019] (6) The pressure sensor is detachably connected to the side of the card-connecting body. The pressure sensor and the alarm light are both connected to the controller for communication. The pressure on the side of the card-connecting body is detected in real time by the pressure sensor, thereby avoiding damage to the through hole of the diffuser when the pressure is too high, thereby damaging the diffuser. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the following is a brief introduction to the drawings required for describing the embodiment:

[0021] Figure 1 It is the front view of the diffuser replacement device;

[0022] Figure 2 A top view of a diffuser replacement device;

[0023] Figure 3 Replacement of diffuser for stereoscopic viewing Figure 1 ;

[0024] Figure 4 Replacement of diffuser for stereoscopic viewing Figure 2 ;

[0025] Figure 5 Schematic diagram of the diffuser of the diffuser replacement device.

[0026] Reference numerals:

[0027] 1—handle mechanism, 11—handle body, 12—horizontal spring, 13—stopper, 14—threaded portion of the handle;

[0028] 2—handle mechanism, 21—sliding connection portion, 22—clamping portion, 23—clamping body, 24—conical clamping joint;

[0029] 3—positioning mechanism, 31—telescopic cylinder 1, 32—telescopic cylinder 2, 33—vertical spring, 34—positioning plate;

[0030] 4—handle mechanism, 41—handle one, 42—handle two;

[0031] 5—diffuser, 51—diffuser body, 52—diffuser through hole. DETAILED DESCRIPTION

[0032] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0033] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0034] Example 1

[0035] Combine the following Figures 1 to 5 Specifically describe the diffuser replacement device, such as Figure 3 and Figure 4 As shown, a diffuser replacement device includes a handle mechanism 1 and a handle head mechanism 2. The handle mechanism 1 is horizontal in length. Figure 5 As shown, the diffuser 5 to be replaced includes a diffuser body 51 , on which a plurality of diffuser through holes 52 are provided. The handle mechanism 1 includes a handle body 11 , a horizontal spring 12 and a stopper 13 , and the handle head mechanism 2 includes a sliding connection portion 21 and a clamping portion 22 .

[0036] like Figure 1 and Figure 2 As shown, the side of the handle rod body 11 is fixedly connected to the block 13, the upper end of the sliding connection part 21 and the lower end of the clamping part 22 are fixedly connected, the handle rod body 11 and the sliding connection part 21 are slidably connected in the horizontal direction, the two ends of the horizontal spring 12 are detachably connected to the block 13 and the side of the sliding connection part 21 respectively, and the clamping part 22 is coaxial with the diffuser through hole 52.

[0037] like Figure 3 As shown, the clamping portion 22 includes a clamping body 23 and a conical clamping head 24 . The upper end of the clamping body 23 is fixedly connected to the lower end of the conical clamping head 24 . The clamping body 23 and the conical clamping head 24 are coaxial.

[0038] like Figure 1 and Figure 4 As shown, it also includes a positioning mechanism 3, which includes a telescopic cylinder 1 31, a telescopic cylinder 2 32, a vertical spring 33 and a positioning plate 34. The lower end of the telescopic cylinder 1 31 is fixedly connected to the upper end of the handle rod body 11, the telescopic cylinder 1 31 and the telescopic cylinder 2 32 are slidably connected in the vertical direction, the lower end of the positioning plate 34 is detachably connected to the upper end of the telescopic cylinder 2 32, the upper end of the vertical spring 33 is detachably connected to the lower end surface of the positioning plate 34, the lower end of the vertical spring 33 is detachably connected to the upper end of the handle rod body 11, and the positioning plate 34 is fitted with the bottom surface of the diffusion sheet body 51.

[0039] like Figure 2 As shown, it also includes a handle mechanism 4, the handle mechanism 4 includes a handle 1 41 and a handle 2 42, the handle rod mechanism 1 also includes a handle rod threaded portion 14, the handle rod threaded portion 14 includes a first threaded portion and a second threaded portion, both ends of the handle rod body 11 in the length direction are respectively fixedly connected to the first threaded portion and the second threaded portion, the handle 1 41 is detachably connected to an end of the first threaded portion away from the handle rod body 11, and the handle 2 42 is detachably connected to an end of the second threaded portion away from the handle rod body 11.

[0040] like Figure 3As shown, the length direction of handle 1 41 is horizontal, and the length direction of handle 2 42 is vertical.

[0041] like Figure 2 As shown, there are two crown mechanisms 2 , and the two crown mechanisms 2 are symmetrically distributed about the positioning mechanism 3 .

[0042] like Figure 1 As shown, the handle body 11 is a regular polygon, and a regular polygon through hole is provided on the sliding connection portion 21 .

[0043] It also includes a pressure sensor, a controller and an alarm light. The pressure sensor is detachably connected to the side of the card-connecting body 23, and both the pressure sensor and the alarm light are communicatively connected to the controller.

[0044] Working principle of the diffuser replacement device:

[0045] Insert multiple clamping parts 22 into the corresponding diffuser through holes 52. Since the two ends of the horizontal spring 12 are detachably connected to the block 13 and the side of the sliding connection part 21 respectively, and the upper end of the clamping body 23 is fixedly connected to the lower end of the conical clamping head 24, quick insertion can be achieved. The positioning during disassembly is achieved through the positioning mechanism 3 to ensure the uniformity of force. Then, the construction personnel turn handle 1 41 or handle 2 42 to separate the diffuser 5 from the integrator mirror.

[0046] As the technical solution of the utility model, the hardware setting provided is only for the purpose of facilitating the realization of braking control based on the hardware facilities. How to realize braking control and braking control method specifically is not the technical problem to be solved and the object to be protected by the utility model. At the same time, the communication methods between the devices adopt the existing communication methods, which are not the utility model points of the present application.

[0047] The above description is only a preferred embodiment of the present invention and does not constitute any other form of limitation to the present invention. Any technician familiar with the profession may use the technical contents disclosed above to change or modify them into equivalent embodiments with equivalent changes for application in other fields. However, any simple modification or equivalent change made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A diffuser replacement device, comprising a handle mechanism (1) and a handle head mechanism (2), wherein the handle mechanism (1) is horizontal in length, and a diffuser (5) to be replaced comprises a diffuser body (51), wherein the diffuser body (51) is provided with a plurality of diffuser through holes (52), characterized in that: The handle mechanism (1) comprises a handle body (11), a horizontal spring (12) and a stopper (13); the handle head mechanism (2) comprises a sliding connection portion (21) and a clamping portion (22); The side surface of the handle rod body (11) is fixedly connected to the block (13), the upper end of the sliding connection part (21) and the lower end of the clamping part (22) are fixedly connected, the handle rod body (11) and the sliding connection part (21) are slidably connected in the horizontal direction, the two ends of the horizontal spring (12) are detachably connected to the block (13) and the side surface of the sliding connection part (21), and the clamping part (22) is coaxial with the diffuser through hole (52); The clamping portion (22) comprises a clamping body (23) and a conical clamping joint (24); the upper end of the clamping body (23) is fixedly connected to the lower end of the conical clamping joint (24); and the clamping body (23) and the conical clamping joint (24) are coaxial.

2. A diffuser replacement device according to claim 1, characterized in that: The invention also comprises a positioning mechanism (3), wherein the positioning mechanism (3) comprises a telescopic tube 1 (31), a telescopic tube 2 (32), a vertical spring (33) and a positioning plate (34); the lower end of the telescopic tube 1 (31) is fixedly connected to the upper end of the handle rod body (11); the telescopic tube 1 (31) and the telescopic tube 2 (32) are slidably connected in the vertical direction; the lower end of the positioning plate (34) is detachably connected to the upper end of the telescopic tube 2 (32); the upper end of the vertical spring (33) is detachably connected to the lower end surface of the positioning plate (34); the lower end of the vertical spring (33) is detachably connected to the upper end of the handle rod body (11); and the positioning plate (34) is in contact with the bottom surface of the diffusion sheet body (51).

3. A diffuser replacement device according to claim 1, characterized in that: The invention also comprises a handle mechanism (4), wherein the handle mechanism (4) comprises a handle 1 (41) and a handle 2 (42); the handle rod mechanism (1) further comprises a handle rod threaded portion (14), wherein the handle rod threaded portion (14) comprises a first threaded portion and a second threaded portion; both ends of the handle rod body (11) in the length direction are respectively fixedly connected to the first threaded portion and the second threaded portion; the handle 1 (41) is detachably connected to an end of the first threaded portion away from the handle rod body (11); and the handle 2 (42) is detachably connected to an end of the second threaded portion away from the handle rod body (11).

4. A diffuser replacement device according to claim 3, characterized in that: The length direction of the handle 1 (41) is horizontal, and the length direction of the handle 2 (42) is vertical.

5. The diffusion sheet replacement device according to claim 2, characterized in that: The number of the crown mechanisms (2) is two, and the two crown mechanisms (2) are symmetrically distributed with respect to the positioning mechanism (3).

6. The diffuser replacement device according to claim 1, characterized in that: The handle rod body (11) is a regular polygon, and the sliding connection portion (21) is provided with a regular polygonal through hole.

7. The diffusion sheet replacement device according to claim 2, characterized in that: It also comprises a pressure sensor, a controller and an alarm light, wherein the pressure sensor is detachably connected to the side of the clamping body (23), and the pressure sensor and the alarm light are both communicatively connected to the controller.

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