Door sealing device and processing equipment

Abstract

The utility model belongs to the technical field of semiconductors, and particularly discloses a door sealing device and processing equipment, a door body is in sliding connection with a door frame, the door frame is provided with an opening, the door body is provided with a first working position and a second working position relative to the door frame, the opening is blocked when the door body is in the first working position, and the opening is opened when the door body is in the second working position. The driving assembly drives the door body to reciprocate between the first working position and the second working position. The limiting assembly is connected to the door frame and / or the door body, the door body moves in the preset direction and the preset track through the limiting assembly, and therefore it is guaranteed that the moving track of the door body is accurate, the door body is not prone to shaking, the door body is accurately aligned with an opening in the door frame, and the door body can completely cover and block the opening of the door frame. When the door body is located at the first working position, the periphery of the door body is pressed on the door frame through the sealing pressing assembly, the door body is tightly attached to the door frame, the sealing performance of the cavity is good, and air leakage is not prone to occurring. The utility model further provides processing equipment which comprises the door sealing device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a door sealing device and processing equipment. Background Art

[0002] In semiconductor manufacturing, it is necessary to cool the workpieces that have been treated at high temperatures in the reactor. In order to prevent the workpieces from being oxidized by oxygen in the air, the high-temperature workpieces need to be placed in a closed chamber isolated from the air for cooling. Before the workpieces enter the closed chamber, the closed chamber needs to be evacuated, and then filled with nitrogen. The workpieces are then moved into the closed chamber. Nitrogen acts as a heat transfer medium to cool the workpieces in the closed chamber. After the workpieces cool to room temperature, they can be removed from the closed chamber.

[0003] Generally speaking, a closed chamber is a closed space composed of a cavity and a door structure. The door structure is flippably arranged at the opening of the cavity by means of hinges, etc. When the door structure closes the opening of the cavity, the door structure and the cavity are sealed by a sealing ring. When the door structure flips to one side and leaves the opening of the cavity, the carrier can carry the workpiece in and out of the opening of the cavity. For example, the carrier includes a boat support and a wafer boat. The boat support carries a plurality of wafer boats, and the workpieces are arranged on the wafer boats. A transport paddle is provided in the cavity, and the carrier can enter from the opening and be placed on the transport paddle, and the transport paddle sends the carrier and the workpiece into or out of the reactor. However, since the stroke of the hinge cannot be adjusted and there is no automatic alignment function, the manufacturing and installation requirements for the cavity and door structure are relatively high.

[0004] In addition, when the carrier and the workpiece enter the closed chamber for cooling, the sealed chamber needs to be evacuated first, and then nitrogen gas is introduced into the sealed chamber. Due to the high temperature of the carrier and the workpiece, the door structure and the cavity may expand unevenly due to heat, resulting in the door structure and the cavity not being able to fit tightly, the sealing is poor, and air can easily enter the sealed chamber, causing the workpiece to be oxidized. Utility Model Content

[0005] The first purpose of the utility model is to provide a door sealing device, which has low manufacturing and installation requirements, and can accurately position the door body when it is opened and closed. At the same time, the door body can fit tightly with the cavity when it is closed, and the seal is good, preventing air from entering the cavity and causing oxidation of the processed parts, thereby ensuring better quality of the finished product.

[0006] The second object of the utility model is to provide a processing equipment, which adopts the above-mentioned door sealing device to seal the chamber, and has good sealing performance, thereby preventing the outside air from entering the chamber to oxidize the processed parts, and also preventing the leakage of nitrogen in the chamber.

[0007] To achieve this purpose, the utility model adopts the following technical solutions:

[0008] On the one hand, the utility model provides a door sealing device, including a door frame, a door body, a driving assembly, a limiting assembly and a sealing and pressing assembly. The door frame is connected to the cavity of the processing equipment, and the door frame is provided with an opening, and the opening is communicated with the chamber of the cavity. The door body is slidably connected to the door frame, and the door body has a first working position and a second working position relative to the door frame. When the door body is in the first working position, the door body blocks the opening, and when the door body is in the second working position, the opening is open. The driving assembly is drivingly connected to the door body, and the driving assembly can drive the door body to move back and forth between the first working position and the second working position. The limiting assembly is connected to the door frame and / or the door body, and the limiting assembly enables the door body to move along a preset direction and a predetermined trajectory, and can limit the door body to move back and forth between the first working position and the second working position along the predetermined trajectory. The sealing and pressing assembly can press the door body around the door frame when the door body is in the first working position, and the end face of the door body close to the door frame is tightly fitted with the end face of the door frame away from the cavity.

[0009] The beneficial effects of the door sealing device of the utility model are as follows: the driving component can drive the door body to slide on the door frame so as to block or open the opening on the door frame. The setting of the limiter component can ensure that the movement trajectory of the door body is accurate and not easy to shake, and the door body and the opening on the door frame are accurately aligned, and the door body can completely cover and block the opening of the door frame. The setting of the sealing and pressing component can make the door body pressed against the door frame on all sides, and there is no gap between the door body and the door frame, which is conducive to improving the sealing performance of the chamber, preventing air from entering the chamber to oxidize the processed parts, and also preventing nitrogen leakage.

[0010] As an optional solution, the limit assembly includes a limit cam, and a side limit strip is provided at the end of the door frame in the width direction. A slide groove is formed between the side limit strip and the door frame, and the side edge of the door body in the width direction is slidably arranged in the slide groove. The limit cam is rotatably arranged on the door body, and the limit cam is in rolling contact with the side limit strip.

[0011] As an optional solution, the door sealing device further includes at least one position detection unit, and the position detection unit is used to detect whether the door body reaches the first working position or the second working position;

[0012] The position detection unit includes a slot-type photoelectric sensor and a light shielding sheet, wherein the slot-type photoelectric sensor is arranged on one of the side limit strips or the side edges in the width direction of the door body, and the light shielding sheet is arranged on the other of the side limit strips or the side edges in the width direction of the door body, and the light shielding sheet can trigger the slot-type photoelectric sensor;

[0013] And / or, the position detection unit further includes a micro switch, the micro switch is arranged on the door frame, and the door body can trigger the micro switch.

[0014] As an optional solution, the limiting assembly includes a locking unit, which is arranged on a side of the door frame close to the cavity, and the locking unit is used to lock the door body in the second working position.

[0015] As an optional solution, the locking unit includes a cylinder, a connecting plate and a blocking rod, the cylinder body of the cylinder is arranged on the door frame, the output end of the cylinder is connected to one end of the connecting plate, the other end of the connecting plate is connected to the blocking rod, the door frame is provided with a first limiting hole, the door body is provided with a second limiting hole, and the blocking rod can be inserted into the first limiting hole and the second limiting hole to fix the door body in the second working position; or

[0016] The locking unit includes a telescopic rod, and a first guide surface is provided on the side of the telescopic rod facing the door body; a second guide surface is provided on the top of the door body, and the first guide surface can slide with the second guide surface. A first limiting hole is provided on the door frame, and a second limiting hole is provided on the door body. The telescopic rod can be inserted into the first limiting hole and the second limiting hole to fix the door body in the second working position.

[0017] As an optional solution, the limit assembly also includes a limit groove and a universal ball, one of the limit groove and the universal ball is arranged on the door frame, and the other of the limit groove and the universal ball is arranged on the door body, and the universal ball can be clamped in the limit groove to position the door body in the first working position.

[0018] As an optional solution, the sealing and clamping assembly includes a top sealing unit, which is arranged on the side of the top of the door body away from the door frame. The door frame is provided with a pressure frame, which cooperates with the top sealing unit to press the top of the door body above the opening.

[0019] As an optional solution, a first fixing seat is provided on a side of the pressure-bearing frame facing the door body, and a rotatable first pressure roller is provided on the first fixing seat;

[0020] The top sealing unit includes an adjusting unit and a wedge block. The adjusting unit is arranged on the side of the door body facing the pressure frame. The adjusting unit is connected to the wedge block. The adjusting unit is used to adjust the position of the wedge block in the height direction of the door body. The wedge block can abut against the first pressure roller.

[0021] As an optional scheme, the sealing and clamping assembly includes a bottom sealing unit, and the bottom sealing unit includes a second fixed seat and a second pressure roller. The second fixed seat is arranged on the side of the bottom of the door frame close to the door body, and a receiving groove is formed between the second fixed seat and the door frame. The bottom of the door body can extend into the receiving groove, and the second pressure roller is rotatably set on the second fixed seat. The second pressure roller can press the bottom of the door body below the opening.

[0022] As an optional solution, the sealing and clamping assembly includes a side sealing unit, which includes a handle and a buckle. The handle is rotatably arranged on the side of the door body away from the door frame, and the buckle is connected to the door frame. The buckle is provided with a slot, and the handle is provided with a protrusion. The protrusion can be inserted into the slot to press the side of the door body against the side of the opening.

[0023] As an optional solution, the sealing and clamping assembly includes a sealing ring, and one of the door body or the door frame is provided with an annular groove. The sealing ring is arranged in the annular groove, and the sealing ring can abut against the end face of the other of the door body or the door frame. The sealing ring is arranged around the circumference of the opening.

[0024] As an optional solution, the driving assembly includes a driving motor and a chain transmission mechanism, the driving motor is arranged on the cavity, the output end of the driving motor is connected to the chain transmission mechanism, and the chain transmission mechanism is connected to the door body.

[0025] As an optional solution, the chain transmission mechanism includes a driving shaft, a driving sprocket, a driven sprocket and a chain, the driving shaft passes through the top of the door frame and is connected to the output end of the drive motor, the driving sprocket is coaxial with the driving shaft and fixedly connected, the driven sprocket is rotatably arranged at the bottom end of the door frame, the chain is wound around the driving sprocket and the driven sprocket, and the chain is meshed with the driving sprocket and the driven sprocket, and the door body is fixedly connected to at least part of the chain;

[0026] And / or, the chain transmission mechanism includes a tension adjustment unit, the tension adjustment unit is arranged on the door frame, and the tension adjustment unit is used to adjust the tension of the chain.

[0027] As an optional solution, a transparent observation window is provided on the door body.

[0028] On the other hand, the utility model also provides a processing equipment, including a cavity, and a door sealing device in any of the above schemes, wherein the door sealing device is connected to the cavity and can seal the chamber of the cavity to form a closed space.

[0029] The beneficial effects of the processing equipment in the utility model are as follows: by adopting the door sealing device, the chamber inside the cavity can be ensured to be well sealed, and air will not enter the cavity during the cooling process of the workpiece to cause oxidation of the workpiece, the quality of the finished product is better, and leakage of nitrogen in the chamber is also prevented. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is an exploded view of a door sealing device provided in an embodiment of the utility model;

[0031] Figure 2 yes Figure 1 A partial enlarged view of the middle A;

[0032] Figure 3 yes Figure 1 A partial enlarged view of point B in the middle;

[0033] Figure 4 yes Figure 1 A partial enlarged view of point C in the middle;

[0034] Figure 5 yes Figure 1 A partial enlarged view of point D in the middle;

[0035] Figure 6 is a structural schematic diagram of a door sealing device provided in an embodiment of the utility model in a first working position;

[0036] Figure 7 yes Figure 6 A partial enlarged view of point E in the middle;

[0037] Figure 8 yes Figure 6 A partial enlarged view of point F in the middle;

[0038] Fig. 9 is a front view of the door sealing device provided in an embodiment of the utility model in a first working position;

[0039] Fig.10 is a structural schematic diagram of the door sealing device provided in an embodiment of the utility model in the second working position;

[0040] Fig.11 yes Fig.10 A partial enlarged view of the G in the middle;

[0041] Fig.12 is a front view of the door sealing device provided in an embodiment of the utility model in a second working position;

[0042] Fig.13 is a schematic structural diagram of a bottom sealing unit provided in an embodiment of the utility model;

[0043] Fig.14 It is a structural schematic diagram of the processing equipment provided in the embodiment of the utility model;

[0044] Fig.15 It is a front view of the processing equipment provided in the embodiment of the utility model.

[0045] In the figure:

[0046] 10. cavity; 11. chamber;

[0047] 100, door frame; 101, opening; 102, first limiting hole; 103, limiting groove; 104, annular groove; 110, side limiting strip; 111, first side plate; 1101, slide groove; 112, second side plate; 120, pressure frame; 121, first fixing seat; 122, first pressure roller; 123, first pin shaft;

[0048] 200, door body; 201, second limiting hole; 202, fixing groove; 203, observation window;

[0049] 300, drive assembly; 310, drive motor; 311, motor mounting plate; 312, cross universal joint; 320, chain transmission mechanism; 321, driving shaft; 322, driving sprocket; 323, driven sprocket; 324, chain; 325, tension adjustment unit; 3251, idler wheel; 326, seat bearing; 327, chain lock block;

[0050] 410, limit cam; 420, position detection unit; 421, slot type photoelectric sensor; 422, light shielding sheet; 423, micro switch; 430, locking unit; 431, cylinder; 432, connecting plate; 433, blocking rod; 434, oil-free bushing; 440, universal ball;

[0051] 510, top sealing unit; 511, wedge-shaped block; 5111, strip hole; 5112, third guide surface; 512, adjustment seat; 5121, threaded hole; 513, adjustment bolt; 520, bottom sealing unit; 521, second fixed seat; 5211, receiving groove; 522, second pressure roller; 523, second pin shaft; 524, pressure roller mounting block; 530, handle; 540, buckle; 550, sealing ring. DETAILED DESCRIPTION

[0052] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0053] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0055] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0056] like Figure 1 , Figure 6 and Fig.10 As shown, this embodiment provides a door sealing device, which can be used in processing equipment with a cavity 10 such as a copper substrate pre-oxidation furnace and a horizontal oxidation furnace. A chamber 11 is formed inside the cavity 10, and the chamber 11 can be used to cool the workpiece.

[0057] The door sealing device in this embodiment includes a door frame 100, a door body 200, a drive assembly 300, a limit assembly and a sealing and pressing assembly. The door frame 100 is connected to the cavity 10 of the processing equipment, and the door frame 100 is provided with an opening 101, and the opening 101 is connected to the chamber 11 of the cavity 10. The door body 200 can slide back and forth on the door frame 100, and the door body 200 has a first working position and a second working position relative to the door frame 100. When the door body 200 is in the first working position, the door body 200 blocks the opening 101, and the chamber 11 forms a closed space (see Figure 6 and Fig. 9), at this time, the air in the chamber 11 can be extracted by vacuum equipment to form a vacuum environment inside the chamber 11, and then nitrogen is introduced into the chamber 11 and the carrier and the workpiece are moved into the chamber 11. The heat of the carrier and the workpiece is taken away by the nitrogen to achieve cooling of the workpiece. When the door body 200 is in the second working position, the opening 101 is open and the chamber 11 is an open space (see Fig.10 and Fig.12 ), the carrier can carry the workpiece and move out of the cavity 10 through the opening 101. The driving assembly 300 is drivingly connected to the door body 200, and the door body 200 can be driven to move back and forth between the first working position and the second working position through the driving assembly 300. The driving assembly 300 is a power source for the door body 200 to move relative to the door frame 100. Exemplarily, the carrier in this embodiment can be a boat support and a wafer boat, the workpiece can be a copper sheet or a silicon sheet, the copper sheet or the silicon sheet is arranged on the wafer boat, and the wafer boat is arranged on the boat support.

[0058] The limiting assembly is connected to the door frame 100 and / or the door body 200. The limiting assembly enables the door body 200 to move along a preset direction and a preset track, and can limit the door body 200 to move back and forth between a first working position and a second working position along the preset track, wherein the first working position and the second working position are two end positions of the reciprocating movement of the door body 200. The limiting assembly can ensure that the movement track of the door body 200 is accurate and not easy to shake, and at the same time, the door body 200 is accurately aligned with the opening 101 on the door frame 100, and the door body 200 can completely cover and block the opening 101 of the door frame 100. Furthermore, the sealing and pressing assembly can press the door body 200 against the door frame 100 on all sides when the door body 200 is in the first working position, and the end face of the door body 200 close to the door frame 100 is tightly fitted with the end face of the door frame 100 away from the cavity 10, thereby ensuring that there is no gap between the door body 200 and the door frame 100, which is beneficial to improving the sealing performance of the chamber 11, preventing air from entering the chamber 11 and causing oxidation of the workpiece, and also preventing nitrogen leakage.

[0059] As an optional solution, in this embodiment, the door body 200 is relative to the door frame 100 along its height direction (i.e. Figure 1 The door body 200 moves up and down in the Z-axis direction (as shown in FIG. 1 ) as an example. When the door body 200 moves downward relative to the door frame 100, the door body 200 closes the opening 101, and the door body 200 can block the opening 101 on the door frame 100; when the door body 200 moves upward relative to the door frame 100, the door body 200 opens the opening 101, and the door body 200 can open the opening 101 on the door frame 100.

[0060] Of course, in other embodiments, the door body 200 may also be arranged to extend in the width direction of the door frame 100 (ie Figure 1The door body 200 is moved left and right in the X-axis direction (as shown in FIG. 1 ), so as to open and close the opening 101 of the door body 200, which will not be described in detail here.

[0061] See also Figure 2 , Figure 3 and Figure 8 The limiting assembly in this embodiment includes a limiting cam 410, a door frame 100 in the width direction ( Figure 1 A side limit strip 110 is provided at the end of the door body 200 (in the X-axis direction shown in the figure). The cross section of the side limit strip 110 is L-shaped. The side limit strip 110 includes a first side plate 111 and a second side plate 112 that are perpendicular to each other. A slide groove 1101 is formed between the first side plate 111, the second side plate 112 and the door frame 100. The side edge of the door body 200 in the width direction is slidably arranged in the slide groove 1101. The limit cam 410 is rotatably arranged on the door body 200. When the door body 200 moves relative to the door frame 100, the limit cam 410 rolls in contact with the first side plate 111 of the side limit strip 110. Therefore, the cooperation between the limit cam 410 and the side limit strip 110 can realize the positioning of the door body 200 in the width direction, so that it can be positioned in the height direction ( Figure 1 The door body 200 can reciprocate along the Z-axis direction (in the Z-axis direction), that is, the door body 200 can move along the preset direction.

[0062] In addition, as an optional implementation scheme, in this embodiment, there are four limit cams 410, which are respectively arranged in the width direction of the top of the door body 200 ( Figure 1 The two side limit strips 110 are arranged at two ends of the door frame 100 in the width direction (X-axis direction) and at two ends of the door frame 200 in the width direction. Figure 1 The two ends of the door body 200 in the width direction can be slidably arranged in the corresponding slide groove 1101, and the door body 200 in the height direction ( Figure 1 Limit cams 410 are provided at both ends (in the Z-axis direction), that is, the top and bottom of the door body 200, which are in rolling contact with the first side plate 111 of the side limit strip 110, thereby ensuring accurate positioning of the door body 200 in the width direction, and the door body 200 is subjected to a more even force, moves smoothly, and is not prone to shaking or bumping.

[0063] Furthermore, the door sealing device further includes at least one position detection unit 420, and the position detection unit 420 is used to detect whether the door body 200 reaches the first working position or the second working position.

[0064] See also Figure 2-Figure 4Each position detection unit 420 includes a slot-type photoelectric sensor 421 and a light shielding sheet 422. The slot-type photoelectric sensor 421 and the micro switch 423 are connected to the controller, and the controller is connected to the driving assembly 300. The slot-type photoelectric sensor 421 is arranged on the side limit strip 110, and the light shielding sheet 422 is arranged on the side of the door body 200 in the width direction. The light shielding sheet 422 is used in conjunction with the slot-type photoelectric sensor 421, and the slot-type photoelectric sensor 421 can be triggered by the light shielding sheet 422. Of course, in other embodiments, the slot-type photoelectric sensor 421 can also be arranged on the side of the door body 200 in the width direction, and the light shielding sheet 422 can be arranged on the side limit strip 110.

[0065] Furthermore, the position detection unit 420 also includes a micro switch 423, which is arranged on the door frame 100 and can be triggered by the door body 200. The two position detection methods, namely the slot-type photoelectric sensor 421 and the micro switch 423, are provided to increase the reliability of position detection. When one of the detection methods fails, the other detection method can still be used to ensure that the driving assembly 300 can stop driving when the door body 200 moves to the first working position or the second working position.

[0066] As an optional solution, in this embodiment, two position detection units 420 are provided for illustration, wherein one position detection unit 420 is used to detect whether the door body 200 reaches the first working position, and the other position detection unit 420 is used to detect whether the door body 200 reaches the second working position. Thus, the two end positions of the reciprocating movement of the door body 200 are determined to ensure accurate positioning of the door body 200 when opening the opening 101 and closing the opening 101.

[0067] Exemplarily, there are two slot-type photoelectric sensors 421, two shading sheets 422 and two micro switches 423, the two slot-type photoelectric sensors 421 are respectively located at the top and bottom ends of the height direction of the side limit strip 110, the two shading sheets 422 are arranged at the top and bottom of the door body 200, and the two micro switches 423 are respectively arranged at the top and bottom of the door frame 100. When the door body 200 is located in the first working position, the shading sheet 422 located at the bottom of the door body 200 triggers the slot-shaped photoelectric sensor 421 located at the bottom end of the side limit strip 110, and at the same time, the door body 200 touches the micro switch 423 located at the bottom of the door frame 100. At this time, the slot-shaped photoelectric sensor 421 and the micro switch 423 send signals to the controller. After the controller obtains the dual signals of the slot-shaped photoelectric sensor 421 and the micro switch 423, it confirms that the door body 200 has moved to one of the end positions of the reciprocating movement, and can control the drive assembly 300 to stop, and the door body 200 stops moving. At this time, the door body 200 closes the opening 101. Similarly, when the door body 200 moves to the second working position driven by the driving assembly 300, the shading sheet 422 located at the top of the door body 200 triggers the slot-shaped photoelectric sensor 421 located at the top of the side limit strip 110, and at the same time, the door body 200 touches the micro switch 423 located at the top of the door frame 100. At this time, the slot-shaped photoelectric sensor 421 and the micro switch 423 send signals to the controller. After the controller obtains the dual signals of the slot-shaped photoelectric sensor 421 and the micro switch 423, it confirms that the door body 200 has moved to the other end position of the reciprocating movement, and can control the driving assembly 300 to stop, and the door body 200 stops moving. At this time, the door body 200 opens the opening 101 (see Fig.11 ). Through the above two position detection units 420, it can be confirmed whether the door body 200 has moved to the end position of the door body 200 reciprocating along the predetermined trajectory, ensuring that the door body 200 is accurately positioned when opening the opening 101 and closing the opening 101. In addition, since the position of the door body 200 is confirmed by two detection methods, the slot-type photoelectric sensor 421 and the micro switch 423, the positioning is more accurate and reliable.

[0068] Of course, in some embodiments, the two position detection units 420 may also share the same light shielding sheet 422, in which case the position of the slot-type photoelectric sensor 421 needs to be rearranged. When the door body 200 moves to the first working position, the light shielding sheet 422 triggers the slot-type photoelectric sensor 421 disposed near the bottom end of the side limit strip 110; when the door body 200 moves to the second working position, the light shielding sheet 422 triggers the slot-type photoelectric sensor 421 disposed near the top end of the side limit strip 110, which can save the setting of one component.

[0069] Furthermore, the limiting assembly includes a locking unit 430, which is arranged on a side of the door frame 100 close to the cavity 10. The door body 200 can be locked in the second working position through the locking unit 430 to ensure that the door body 200 will not fall when the opening 101 is opened, thereby avoiding collision between the door body 200 and carriers and workpieces, etc., and improving safety and reliability.

[0070] As an alternative, continue to see Figure 2 , Figure 7 and Fig.11 The locking unit 430 includes a cylinder 431, a connecting plate 432 and a blocking rod 433. The cylinder body of the cylinder 431 is arranged on the side of the door frame 100 close to the cavity 10. The output end of the cylinder 431 is connected to one end of the connecting plate 432, and the other end of the connecting plate 432 is connected to the blocking rod 433. The door frame 100 is provided with a first limiting hole 102, and the door body 200 is provided with a second limiting hole 201. An oil-free bushing 434 is provided on the side of the door frame 100 away from the door body 200. The oil-free bushing 434 is connected to the first limiting hole 102. The blocking rod 433 is penetrated by the oil-free bushing 434 and the first limiting hole 102, and the oil-free bushing 434 can provide support for the blocking rod 433. When the cylinder 431 drives the connecting plate 432 to move toward the door frame 100, the blocking rod 433 can be inserted into the first limiting hole 102 and the second limiting hole 201 to fix the door body 200 in the second working position, and the door body 200 opens the opening 101; when the cylinder 431 drives the connecting plate 432 to move away from the door frame 100, the blocking rod 433 can escape from the second limiting hole 201, and the driving assembly 300 can drive the door body 200 to move from the second working position to the first working position, that is, the door body 200 closes the opening 101.

[0071] Of course, in other embodiments, the locking unit 430 may also adopt other structural forms. For example, the locking unit 430 includes a telescopic rod, a first guide surface is provided on the side of the telescopic rod facing the door body 200; a second guide surface is provided on the top of the door body 200, a first limiting hole 102 is provided on the door frame 100, and a second limiting hole 201 is provided on the door body 200. For example, the first guide surface and the second guide surface can be set as inclined surfaces with the same inclination. When the door body 200 opens the opening 101, that is, when the driving assembly 300 drives the door body 200 to move to the second working position, the first guide surface of the telescopic rod can slide with the second guide surface of the door body 200. As the door body 200 approaches the second working position, the telescopic rod is gradually compressed and abuts against the end surface of the door frame 100 close to the cavity 10, until the door body 200 reaches the second working position, the telescopic rod returns to the state before compression and is inserted into the first limiting hole 102 and the second limiting hole 201, thereby fixing the door body 200 in the second working position through the telescopic rod, completing the locking and fixing of the door body 200. It should be noted that when the door body 200 needs to close the opening 101, the staff can manually compress the telescopic rod and disengage it from the first limiting hole 102 and the second limiting hole 201, so that the door body 200 can move from the second working position to the first working position. Of course, the telescopic rod can also be driven to retract by other driving sources, which will not be described in detail here.

[0072] Further, the number of the locking units 430 can be two, and the two locking units 430 are respectively arranged near the two ends of the width direction of the door frame 100, and the two locking units 430 are symmetrically arranged, thereby ensuring that the force of the door body 200 is balanced as much as possible, and the reliability of locking and fixing is high. Optionally, the two locking units 430 are locking units of the same structural form. For example, the two locking units 430 can both adopt the structural form of the cylinder 431, the connecting plate 432 and the blocking rod 433 to cooperate with the door body 200 to achieve locking. Or the two locking units 430 can also adopt the structural form of the telescopic rod to cooperate with the door body 200 to achieve locking. Of course, in other implementations, the number of the locking units 430 can also be set to three, four, etc., and the three or four locking units 430 are arranged in sequence along the width direction of the door frame 100. The specific structural form of the locking unit 430 can be selected as needed, and will not be listed here one by one.

[0073] Furthermore, the limiting assembly further includes a limiting groove 103 and a universal ball 440, one of which is arranged on the door frame 100, and the other of which is arranged on the door body 200. When the door body 200 closes the opening 101, the driving assembly 300 drives the door body 200 to move from the second working position to the first working position. When the door body 200 reaches the first working position, the universal ball 440 can be stuck in the limiting groove 103 to position the door body 200 in the first working position, ensuring that the door body 200 can be stationary in the first working position, avoiding the door body 200 from shaking, and having higher safety and reliability.

[0074] See also Figure 1 , Figure 3 and Figure 4 In this embodiment, the limit groove 103 is set on the end surface of the door frame 100 close to the door body 200 as an example for explanation, and the universal ball 440 is set on the end surface of the door body 200 close to the door frame 100. Optionally, there are multiple limit grooves 103 and universal balls 440, and the universal balls 440 correspond to the limit grooves 103 one by one. Multiple universal balls 440 are arranged at both ends of the door body 200 in the width direction, and the multiple universal balls 440 are arranged in sequence along the height direction of the door body 200. Multiple limit grooves 103 are set in the width direction ( Figure 1 The plurality of limit grooves 103 are arranged in sequence along the height direction of the door frame 100. The plurality of limit grooves 103 and the universal ball 440 are provided to improve the accuracy of positioning the door body 200 in the first working position, and to avoid shaking of the door body 200 as much as possible after the door body 200 closes the opening 101.

[0075] Furthermore, the sealing and pressing assembly includes a top sealing unit 510, which is arranged on the side of the top of the door body 200 away from the door frame 100. The door frame 100 is provided with a pressure frame 120. The pressure frame 120 cooperates with the top sealing unit 510 to press the top of the door body 200 above the opening 101, so that when the door body 200 closes the opening 101, the top of the door body 200 fits well with the top of the opening 101 of the door frame 100, thereby avoiding air leakage at the top of the door body 200.

[0076] See also Figure 3 , Figure 5 and Figure 8In this embodiment, the pressure frame 120 is provided with a first fixed seat 121 on the side facing the door body 200, and a rotatable first pressure roller 122 is provided on the first fixed seat 121. Exemplarily, the first pressure roller 122 can be set on the first fixed seat 121 through a first pin shaft 123, and the first pressure roller 122 can rotate around the first pin shaft 123. The top sealing unit 510 includes an adjustment unit and a wedge block 511, and a third guide surface 5112 is provided on the side of the wedge block 511 facing the first pressure roller 122. Exemplarily, the third guide surface 5112 can also be set as an inclined slope, and the slope is inclined in a direction away from the first pressure roller 122. The adjustment unit is arranged on the side of the door body 200 facing the pressure frame 120, and the adjustment unit is connected to the wedge block 511. The adjustment unit is used to adjust the position of the wedge block 511 in the height direction of the door body 200. The first pressure roller 122 can roll and abut against the third guide surface 5112 of the wedge block 511, so that the pressure frame 120 can press the top of the door body 200 against the door frame 100. In addition, due to the setting of the adjustment unit, the position of the wedge block 511 along the height direction of the door body 200 can be adjusted, so that the pressing force between the top of the door body 200 and the door frame 100 located above the opening 101 is flexibly adjustable, and the adjustment method is simple and convenient to operate.

[0077] As an optional solution, a fixing groove 202 is provided on the end surface of the door body 200 facing the pressure frame 120, a wedge block 511 is partially embedded in the fixing groove 202, a fixing hole is provided on the bottom wall of the fixing groove 202, strip holes 5111 are provided on both sides of the wedge block 511, the strip holes 5111 extend along the height direction of the door body 200, and the fixing bolts pass through the strip holes 5111 of the wedge block 511 and then threadedly engage with the fixing holes, thereby locking the wedge block 511 on the bottom wall of the fixing groove 202. The adjustment unit includes an adjustment seat 512 and an adjustment bolt 513, a threaded hole 5121 is provided on the adjustment seat 512, one end of the adjustment bolt 513 passes through the threaded hole 5121 and then abuts against the top of the wedge block 511, and the adjustment bolt 513 is threadedly engaged with the threaded hole 5121. By screwing the adjusting bolt 513, the length of the adjusting bolt 513 extending into the fixing groove 202 can be lengthened. Due to the arrangement of the strip-shaped hole 5111, the adjusting bolt 513 can push the wedge block 511 downward in the fixing groove 202, and then the wedge block 511 is locked in the fixing groove 202 by the fixing bolt, and the pressing force between the door body 200 and the door frame 100 is increased. Conversely, by screwing the adjusting bolt 513, the length of the adjusting bolt 513 extending into the fixing groove 202 can be shortened, and the position of the wedge block 511 in the fixing groove 202 can be moved upward, and then the wedge block 511 is locked in the fixing groove 202 by the fixing bolt, and the pressing force between the door body 200 and the door frame 100 is reduced.

[0078] Furthermore, in the present embodiment, a plurality of top sealing units 510 are provided, and the plurality of top sealing units 510 are sequentially arranged at intervals on the top of the door frame 100 along the width direction of the door frame 100, and a plurality of first pressure rollers 122, first pin shafts 123 and first fixing seats 121 on the corresponding pressure-bearing frame 120 are also provided correspondingly, and each first pressure roller 122 is opposite to a top sealing unit 510. By providing a plurality of top sealing units 510, each position of the top of the door body 200 is pressed against the top of the door frame 100 where the opening 101 is provided, so as to ensure that there is no gap between the top of the door body 200 and the door frame 100, and the sealing is good. Exemplarily, in the present embodiment, eight top sealing units 510 are provided. Of course, in other embodiments, the top sealing units 510 can also be provided in other numbers, which are not limited here.

[0079] See also Figure 6 , Figure 8 and Fig.13 The sealing and pressing assembly includes a bottom sealing unit 520, which includes a second fixed seat 521 and a second pressing roller 522. The second fixed seat 521 is arranged at the bottom of the door frame 100 near the door body 200. A receiving groove 5211 is formed between the second fixed seat 521 and the door frame 100. The bottom of the door body 200 can extend into the receiving groove 5211. The second pressing roller 522 is rotatably arranged on the second fixed seat 521. The second pressing roller 522 can roll with the door body 200 and press the bottom of the door body 200 under the opening 101 of the door frame 100. Through the arrangement of the bottom sealing unit 520, the bottom of the door body 200 is pressed against the door frame 100 without a gap between the two, so as to avoid air leakage at the bottom of the door body 200 and achieve a good sealing effect.

[0080] Optionally, two roller mounting blocks 524 are provided on each second fixing seat 521, each roller mounting block 524 is provided with a second pin shaft 523, each second pin shaft 523 is provided with a second roller 522, and the second roller 522 can rotate on the second pin shaft 523. Thus, the contact area between the bottom sealing unit 520 and the door body 200 is increased, so that the bottom of the door body 200 is tightly pressed below the opening 101 of the door frame 100.

[0081] Further, a plurality of bottom sealing units 520 are provided, and the plurality of bottom sealing units 520 are sequentially arranged at intervals at the bottom of the door frame 100 along the width direction of the door frame 100. By providing a plurality of bottom sealing units 520, each position of the bottom of the door body 200 is pressed against the door frame 100, ensuring that there is no gap between the bottom of the door body 200 and the door frame 100, and the sealing is good. Exemplarily, four bottom sealing units 520 are provided in this embodiment. Of course, in other embodiments, the bottom sealing units 520 can also be provided in other numbers, which is not limited here.

[0082] Continue to see Figure 8 The sealing and pressing assembly includes a side sealing unit, which includes a handle 530 and a buckle 540. The handle 530 is rotatably arranged on the side of the door body 200 away from the door frame 100. The buckle 540 is connected to the side limit strip 110 on the door frame 100. The buckle 540 is provided with a slot, and the handle 530 is provided with a convex. When the door body 200 moves to the first working position, the handle 530 can be rotated to make the convex engage in the slot to press the side of the door body 200 against the side of the opening 101. The handle 530 and the buckle 540 cooperate to press the side of the door body 200 against the side of the opening 101 of the door frame 100 to prevent air leakage from the side of the door body 200.

[0083] In this embodiment, two handles 530 and buckles 540 are provided, and the two handles 530 are respectively arranged at both ends of the door body 200 in the width direction, and the two buckles 540 are respectively provided on the two side limit strips 110. By providing the handles 530 and buckles 540 on both sides of the opening 101 on the door frame 100, both ends of the door body 200 in the width direction can be pressed against the side of the door frame 100 where the opening 101 is provided, effectively preventing air leakage from the side of the door body 200. At the same time, it also ensures that the force on the door body 200 is balanced.

[0084] Furthermore, the sealing and pressing assembly includes a sealing ring 550. One of the door body 200 or the door frame 100 is provided with an annular groove 104. The sealing ring 550 is disposed in the annular groove 104. The sealing ring 550 can abut against the end surface of the other of the door body 200 or the door frame 100. The sealing ring 550 is arranged around the circumference of the opening 101. The gap between the door body 200 and the door frame 100 is blocked by the sealing ring 550, so that the opening 101 is well sealed around, thereby preventing air leakage around the opening 101 on the door frame 100.

[0085] Continue to see Figure 1 and Figure 4 In this embodiment, the annular groove 104 is provided on the door frame 100 as an example for explanation. The annular groove 104 is provided in the circumference of the opening 101 and is provided around the opening 101. When the door body 200 moves to the first working position, the top, bottom and sides of the door body 200 are pressed against the door frame 100 by the top sealing unit 510, the bottom sealing unit 520 and the side sealing unit, and the sealing ring 550 between the door frame 100 and the door body 200 is compressed. Each position of the sealing ring 550 is tightly fitted with the door frame 100 and the door body 200, thereby achieving good sealing around the opening 101 to avoid air leakage.

[0086] See also Figure 7 and Figure 8The drive assembly 300 includes a drive motor 310 and a chain transmission mechanism 320. The drive motor 310 is arranged on the cavity 10. The output end of the drive motor 310 is connected to the chain transmission mechanism 320, and the chain transmission mechanism 320 is connected to the door body 200. The drive motor 310 drives the chain transmission mechanism 320 to move, and then the chain transmission mechanism 320 drives the door body 200 to close the opening 101 or open the opening 101, that is, the chain transmission mechanism 320 can drive the door body 200 to move from the first working position to the second working position, and can drive the door body 200 to move from the second working position to the first working position. The transmission accuracy of the chain head transmission mechanism is high, and the position of the door body 200 can be accurately adjusted, and the controllability is high. Of course, in other embodiments, the drive assembly 300 can also use a linear motor, a cylinder 431, etc. as a driving source to drive the door body 200 to reciprocate along the slide groove 1101 on the door frame 100.

[0087] As an optional solution, in this embodiment, the driving motor 310 is a worm reducer, and two chain transmission mechanisms 320 are provided. The worm reducer has two output ends, each output end is connected to a chain transmission mechanism 320, and the two chain transmission mechanisms 320 are respectively connected to the two ends of the door body 200 in the width direction.

[0088] Each chain transmission mechanism 320 includes a driving shaft 321, a driving sprocket 322, a driven sprocket 323 and a chain 324. The driving shaft 321 passes through the top of the door frame 100 and is connected to the output end of the worm reducer. The driving shaft 321 can rotate relative to the door frame 100. The driving sprocket 322 is coaxial with the driving shaft 321 and is fixedly connected. The driven sprocket 323 is rotatably arranged at the bottom end of the door frame 100. The chain 324 is wound around the driving sprocket 322 and the driven sprocket 323, and the chain 324 is meshed with the driving sprocket 322 and the driven sprocket 323. The door body 200 is fixedly connected to at least part of the chain 324. When the driving motor 310 drives the driving shaft 321 to rotate, the driving sprocket 322 rotates along with the driving shaft 321, and the chain 324 meshed with the driving sprocket 322 drives the driven sprocket 323 to rotate, and the chain 324 moves, and then the chain 324 drives the door body 200 to move from the first working position to the second working position. When the driving motor 310 drives the driving shaft 321 to rotate in the opposite direction, the chain 324 drives the door body 200 to move from the second working position to the first working position.

[0089] Of course, in some embodiments, a plurality of seat bearings 326 may be provided on the door frame 100, and the driving shaft 321, the driving sprocket 322 and the driven sprocket 323 correspond one to one with the seat bearings 326, and the driving shaft 321, the driving sprocket 322 and the driven sprocket 323 are all arranged on a seat bearing 326, thereby ensuring that the driving shaft 321, the driving sprocket 322 and the driven sprocket 323 rotate smoothly and the door body 200 moves smoothly.

[0090] Optionally, the output end of the worm reducer is an output shaft, that is, the worm reducer has two output shafts, and a cross universal joint 312 is provided between each output shaft and the corresponding driving shaft 321, one end of the cross universal joint 312 is fixedly connected to the output shaft of the worm reducer, and the other end of the cross universal joint 312 is connected to one end of the driving shaft 321. The power transmission between the output shaft of the worm reducer and the driving shaft 321 can be realized through the cross universal joint 312, and the angle between the output shaft and the driving shaft 321 can be adjusted, so that the power transmission between the output shaft and the driving shaft 321 is smooth.

[0091] In addition, the door body 200 and the chain 324 can be connected and fixed by a chain lock block 327. Specifically, in some embodiments, a screw is fixedly connected to a certain link of the chain 324, and the screw is passed through and fixed in the connection hole of the chain lock block 327, and the chain lock block 327 is fixed to the end of the width direction of the door body 200. Of course, in other embodiments, the chain lock block 327 and the chain 324 can also be fixed by a lock pin, and the lock pin is inserted into the link of the chain 324 and the connection hole of the chain lock block 327 to achieve the fixation of the two. In other embodiments, the chain lock block 327 and the chain 324 can also be fixed by a clamp, for example, the clamp is fixed on the chain lock block 327, and the clamp has a clamping opening, the chain 324 is clamped into the clamping opening of the clamp and the clamping opening is locked by a bolt, so that the clamp tightly holds the chain 324, and the door body 200 and the chain 324 are connected. Of course, the above solution is only an example, and the chain 324 and the door body 200 can also be connected in other ways.

[0092] Furthermore, the chain transmission mechanism 320 includes a tension adjustment unit 325, which is arranged on the side of the door frame 100, and the tension of the chain 324 can be adjusted by the tension adjustment unit 325. The arrangement of the tension adjustment unit 325 can ensure that the chain 324 is in a tensioned state, so that the chain 324 is kept in mesh with the driving sprocket 322 and the driven sprocket 323, and is not easy to fall off from the driving sprocket 322 and the driven sprocket 323, thereby achieving precise transmission. Exemplarily, in this embodiment, the tension adjustment unit 325 can be a tension adjustment device with an idler wheel, which is arranged on one side of the chain 324. The idler wheel tension adjustment device includes an idler wheel 3251 and a base. The base is arranged on the door frame 100, and the idler wheel 3251 is rotatably arranged on the base. The idler wheel 3251 is meshed with the chain 324, and the position of the idler wheel 3251 on the base is adjustable, thereby realizing the adjustment of the tension of the chain 324, and the operation is very simple and convenient.

[0093] Continue to see Figure 1In this embodiment, a transparent observation window 203 is provided on the door body 200. Through the setting of the observation window 203, it is convenient for the staff to observe the processing status of the workpiece in the chamber 11.

[0094] See also Fig.14 and Fig.15 The present embodiment also provides a processing device, including a cavity 10, and the above-mentioned door sealing device, the door sealing device is connected to the cavity 10, and can seal the chamber 11 of the cavity 10 to form a closed space, and the cavity 10 can be used to cool the workpiece. Specifically, when the workpiece needs to be cooled, the air in the chamber 11 is first evacuated to form a vacuum environment in the chamber 11, and then nitrogen can be filled into the chamber 11 and the carrier and the workpiece are moved in. By using the door sealing device, it can be ensured that the chamber 11 inside the cavity 10 is well sealed, and the workpiece is ensured to be in a nitrogen environment, so that the workpiece is prevented from contacting with oxygen in the air and oxidized, and at the same time, the nitrogen in the chamber 11 will not leak at the opening 101 during the cooling process of the workpiece.

[0095] Optionally, the driving motor 310 of the door sealing device in this embodiment is arranged on the top of the cavity 10 through the motor mounting plate 311, and the cavity 10 is longitudinally ( Fig.14 An inlet is provided at one end of the carrier (in the X-axis direction), and the inlet is connected to the chamber 11 and the reactor. When the carrier carries a high-temperature workpiece that needs to be cooled, the door body 200 closes the opening 101, that is, the door body 200 is moved to the first working position by the driving assembly 300, and the handle 530 is rotated to lock. At this time, the opening 101 on the door frame 100 is blocked by the door body 200, and the chamber 11 is evacuated to a vacuum by a vacuum device, and nitrogen is introduced into the chamber 11. Then, the carrier carries the workpiece from the reactor through the inlet into the chamber 11, and the carrier and the workpiece are cooled by nitrogen. When the carrier and the workpiece are cooled, the door body 200 opens the opening 101, that is, the door body 200 is moved to the second working position by the driving assembly 300. At this time, the carrier and the workpiece can be moved out of the chamber 11 through the opening 101 on the door frame 100.

[0096] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A door sealing device, characterized in that: include: A door frame connected to the cavity, wherein the door frame is provided with an opening, and the opening is communicated with the chamber of the cavity; A door body is slidably connected to the door frame, the door body has a first working position and a second working position relative to the door frame, when the door body is in the first working position, the door body blocks the opening, and when the door body is in the second working position, the opening is open; A driving assembly, drivingly connected to the door body, the driving assembly being capable of driving the door body to reciprocate between the first working position and the second working position; a limiting assembly connected to the door frame and / or the door body, the limiting assembly enables the door body to move along a preset direction and a preset track, and can limit the door body to reciprocate between the first working position and the second working position along the preset track; The sealing and pressing assembly can press the periphery of the door body against the door frame when the door body is in the first working position, and the end face of the door body close to the door frame is tightly fitted with the end face of the door frame away from the cavity.

2. The door sealing device according to claim 1, characterized in that: The limiting assembly includes a limiting cam, and a side limiting strip is provided at the end of the door frame in the width direction. A sliding groove is formed between the side limiting strip and the door frame. The side edge of the door body in the width direction is slidably arranged in the sliding groove. The limiting cam is rotatably arranged on the door body, and the limiting cam is in rolling contact with the side limiting strip.

3. The door sealing device according to claim 2, characterized in that: The door sealing device further comprises at least one position detection unit, and the position detection unit is used to detect whether the door body reaches the first working position or the second working position; The position detection unit includes a slot-type photoelectric sensor and a light shielding sheet, wherein the slot-type photoelectric sensor is arranged on one of the side limit strips or the side edges in the width direction of the door body, and the light shielding sheet is arranged on the other of the side limit strips or the side edges in the width direction of the door body, and the light shielding sheet can trigger the slot-type photoelectric sensor; And / or, the position detection unit further includes a micro switch, the micro switch is arranged on the door frame, and the door body can trigger the micro switch.

4. The door sealing device according to claim 1, characterized in that: The limiting assembly includes a locking unit, which is arranged on a side of the door frame close to the cavity, and is used to lock the door body in the second working position.

5. The door sealing device according to claim 4, characterized in that: The locking unit comprises a cylinder, a connecting plate and a blocking rod, the cylinder body of the cylinder is arranged on the door frame, the output end of the cylinder is connected to one end of the connecting plate, the other end of the connecting plate is connected to the blocking rod, the door frame is provided with a first limiting hole, the door body is provided with a second limiting hole, the blocking rod can be inserted into the first limiting hole and the second limiting hole to fix the door body in the second working position; or The locking unit includes a telescopic rod, and a first guide surface is provided on the side of the telescopic rod facing the door body; a second guide surface is provided on the top of the door body, and the first guide surface can slide with the second guide surface. A first limiting hole is provided on the door frame, and a second limiting hole is provided on the door body. The telescopic rod can be inserted into the first limiting hole and the second limiting hole to fix the door body in the second working position.

6. The door sealing device according to claim 1, characterized in that: The limiting assembly also includes a limiting groove and a universal ball, one of the limiting groove and the universal ball is arranged on the door frame, and the other of the limiting groove and the universal ball is arranged on the door body, and the universal ball can be clamped in the limiting groove to position the door body in the first working position.

7. The door sealing device according to claim 1, characterized in that: The sealing and pressing assembly includes a top sealing unit, which is arranged on the side of the top of the door body away from the door frame. The door frame is provided with a pressure frame, which cooperates with the top sealing unit to press the top of the door body above the opening.

8. The door sealing device according to claim 7, characterized in that: A first fixing seat is provided on the side of the pressure-bearing frame facing the door body, and a rotatable first pressure roller is provided on the first fixing seat; The top sealing unit includes an adjusting unit and a wedge block. The adjusting unit is arranged on the side of the door body facing the pressure frame. The adjusting unit is connected to the wedge block. The adjusting unit is used to adjust the position of the wedge block in the height direction of the door body. The wedge block can abut against the first pressure roller.

9. The door sealing device according to claim 1, characterized in that: The sealing and pressing assembly includes a bottom sealing unit, and the bottom sealing unit includes a second fixed seat and a second pressure roller. The second fixed seat is arranged on the side of the bottom of the door frame close to the door body. A receiving groove is formed between the second fixed seat and the door frame. The bottom of the door body can extend into the receiving groove. The second pressure roller is rotatably set on the second fixed seat. The second pressure roller can press the bottom of the door body below the opening.

10. The door sealing device according to claim 1, characterized in that: The sealing and clamping assembly includes a side sealing unit, which includes a handle and a buckle. The handle is rotatably arranged on the side of the door body away from the door frame, and the buckle is connected to the door frame. The buckle is provided with a slot, and the handle is provided with a protrusion. The protrusion can be inserted into the slot to press the side of the door body against the side of the opening.

11. The door sealing device according to claim 1, characterized in that: The sealing and clamping assembly includes a sealing ring, and one of the door body or the door frame is provided with an annular groove. The sealing ring is arranged in the annular groove. The sealing ring can abut against the end face of the other of the door body or the door frame, and the sealing ring is arranged around the circumference of the opening.

12. The door sealing device according to any one of claims 1 to 11, characterized in that: The driving assembly comprises a driving motor and a chain transmission mechanism. The driving motor is arranged on the cavity. The output end of the driving motor is connected to the chain transmission mechanism, and the chain transmission mechanism is connected to the door body.

13. The door sealing device according to claim 12, characterized in that: The chain transmission mechanism comprises a driving shaft, a driving sprocket, a driven sprocket and a chain, wherein the driving shaft passes through the top end of the door frame and is connected to the output end of the driving motor, the driving sprocket is coaxial with the driving shaft and fixedly connected, the driven sprocket is rotatably arranged at the bottom end of the door frame, the chain is wound around the driving sprocket and the driven sprocket, and the chain is meshed with the driving sprocket and the driven sprocket, and the door body is fixedly connected to at least part of the chain; And / or, the chain transmission mechanism includes a tension adjustment unit, the tension adjustment unit is arranged on the door frame, and the tension adjustment unit is used to adjust the tension of the chain.

14. The door sealing device according to any one of claims 1 to 11, characterized in that: The door body is provided with a transparent observation window.

15. A processing equipment, characterized in that: It comprises a cavity, and a door sealing device according to any one of claims 1 to 14, wherein the door sealing device is connected to the cavity and can seal the chamber of the cavity to form a closed space.

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