Ionization device and plasma processing device

Abstract

The utility model discloses an ionization device and a plasma processing device, and relates to the technical field of plasma etching, the ionization device comprises a housing and an ionization assembly; the shell is provided with a gas conveying channel; the ionization assembly comprises a plurality of electrodes, the multiple electrodes are arranged in the gas conveying channel, at least two electrodes are oppositely arranged at intervals in the first direction, and the first direction intersects with the extending direction of the gas conveying channel; a cooling channel through which a cooling medium flows is correspondingly arranged in at least one electrode; according to the technical scheme provided by the utility model, the ionization assembly is arranged in the ionization device, the plurality of electrodes are arranged in the ionization assembly, and the cooling channels for the cooling substances to pass through are arranged in the electrodes, so that the cooling substances take away heat generated by the electrodes when passing through the cooling channels, and the effect of cooling the electrodes is achieved; therefore, the ionization device is prevented from being damaged due to over-high temperature.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma etching, in particular to an ionization device and a plasma processing device. Background Art

[0002] Plasma etching is a processing technology for processing the surface of integrated circuits, integrated optical circuits and various solid electronic devices. The plasma formed by ionization combines with the surface of the material to be processed. The two react to produce volatile substances, which are removed by vacuum to finally complete the surface processing. Plasma etching technology has a wide range of applications in semiconductors, optoelectronics, microelectronics and other fields. In the semiconductor industry, plasma etching technology is often used in process steps such as preparing integrated circuits and photolithography masks.

[0003] Plasma etching equipment is mainly composed of devices with different functions such as a gas supply device, a vacuum device, an ionization device and a power supply device. The ionization device is a device that processes process gas to generate plasma. In many existing plasma etching devices, the electrodes in the ionization device lack a cooling structure and will continuously generate heat when powered on, which may eventually cause the temperature of the ionization device and even the entire device to be too high, and may even cause equipment failure due to excessively high temperature. Utility Model Content

[0004] The main purpose of the utility model is to provide an ionization device and a plasma processing device, aiming to provide an ionization device with a cooling structure.

[0005] To achieve the above-mentioned purpose, the ionization device proposed in the utility model includes: a shell and an ionization component; the shell has a gas delivery channel; the ionization component includes a plurality of electrodes, the plurality of electrodes are arranged in the gas delivery channel, and at least two of them are arranged relatively spaced along a first direction, and the first direction intersects with the extension direction of the gas delivery channel; at least one of the electrodes has a cooling channel for a cooling medium to flow through.

[0006] In one embodiment, the plurality of electrodes include a first electrode and a second electrode, both of which are provided with the cooling channel, and the cooling channel of the first electrode and the cooling channel of the second electrode are connected in parallel or in series to a cooling material delivery system.

[0007] In one embodiment, the electrode includes an electrode body and an end cap and a connecting portion respectively arranged at both ends of the electrode body, the electrode body is provided with the cooling channel, the end cap is connected to a first fluid connector, the connecting portion is connected to a second fluid connector, and the first fluid connector and the second fluid connector are respectively provided with fluid channels connected to the cooling channel.

[0008] In one embodiment, an insulating layer is provided on the inner wall of the cooling channel.

[0009] In one embodiment, the end head is provided with a first plug hole connected to the cooling channel, an extension direction of the first plug hole intersects with an extension direction of the cooling channel, and the first fluid connector is plugged into the first plug hole.

[0010] In one embodiment, the connecting portion is provided with a second plug hole communicating with the cooling channel, the extension direction of the second plug hole is the same as the extension direction of the cooling channel, and the second fluid connector is plugged into the second plug hole.

[0011] In one embodiment, the first socket has a first hole segment and a second hole segment connected to each other along a direction perpendicular to the axial direction, the first hole segment is located on a side of the second hole segment away from the cooling channel, the inner diameter of the first hole segment is larger than the inner diameter of the second hole segment, so that a first limiting step is formed at the position where the first hole segment and the second hole segment are connected, and the first fluid connector is inserted into the first hole segment and abuts against the first limiting step.

[0012] In one embodiment, the second socket has a third hole segment and a fourth hole segment which are axially connected to each other, the third hole segment is located on a side of the fourth hole segment away from the cooling channel, the inner diameter of the third hole segment is larger than the inner diameter of the fourth hole segment, so that a second limiting step is formed at the junction of the third hole segment and the fourth hole segment, and the second fluid connector is inserted into the third hole segment and abuts against the second limiting step.

[0013] In one embodiment, the ionization device further includes a first insulator and a second insulator disposed in the shell, the first insulator partially wraps the first electrode, and the second insulator partially wraps the second electrode.

[0014] In one embodiment, the gas delivery channel is provided with an air inlet and an air outlet at both ends along the first direction, and the ionization device also includes a gas source module, which is arranged at the gas inlet and is used to deliver process gas into the gas delivery channel.

[0015] In one embodiment, the ionization device further comprises a power module, wherein the power module is electrically connected to the ionization component, and the power module is used to periodically change the polarity of the power output to the first electrode and the second electrode.

[0016] The utility model also provides a plasma processing device, comprising a device body and any one of the above-mentioned ionization devices, wherein the device body has a reaction chamber, and the gas outlet end of the gas delivery channel is connected to the reaction chamber.

[0017] The technical solution of the utility model adopts an ionization device including a shell and an ionization component, the shell has a gas delivery channel, the ionization component includes a plurality of electrodes, and the plurality of electrodes are arranged in the gas delivery channel, so that when the process gas passes through the gas delivery channel, it is ionized by the electrodes arranged in the shell to generate plasma; the technical solution of the utility model is provided with a cooling channel for a cooling material to pass through inside the electrode, so that the cooling material takes away the heat generated by the electrode when passing through the cooling channel, thereby achieving the effect of cooling the electrode, thereby avoiding damage to the ionization device due to excessive temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0019] Figure 1 A schematic structural diagram of an embodiment of an ionization device provided by the utility model;

[0020] Figure 2 A schematic diagram of the structure inside the housing of the ionization device provided by the utility model;

[0021] Figure 3 for Figure 1 Sectional view at AA in the middle;

[0022] Figure 4 A schematic diagram of the structure of an ionization component in the ionization device provided by the utility model;

[0023] Figure 5 This is a cross-sectional view of an ionization component in the ionization device provided by the utility model.

[0024] Description of Figure Numbers:

[0025] 100. Ionization device; 1. Shell; 11. Gas delivery channel; 111. Air inlet; 112. Air outlet; 2. Ionization assembly; 21. First electrode; 22. Second electrode; 23. Cooling channel; 24. Electrode body; 25. Terminal; 26. Connecting portion; 251. First plug hole; 252. First limiting step; 261. Second plug hole; 262. Second limiting step; 31. First insulator; 32. Second insulator; 4. Gas source module; 5. Power module.

[0026] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0029] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0030] The utility model provides an ionization device.

[0031] See also Figure 1 In one embodiment of the utility model, the ionization device 100 includes: a shell 1 and an ionization component 2; the shell 1 has a gas delivery channel 11; the ionization component 2 includes a plurality of electrodes, the plurality of electrodes are arranged in the gas delivery channel 11, and at least two of them are arranged relatively spaced along a first direction, and the first direction intersects with the extension direction of the gas delivery channel 11; at least one electrode has a corresponding cooling channel 23 for a cooling medium to flow through.

[0032] In this embodiment, the gas delivery channel 11 is set in vacuum and does not contact with the external air. The gas delivery channel 11 is connected to the gas source, and the gas source is used to pump process gas into the gas delivery channel 11. The process gas enters from the air inlet end of the gas delivery channel 11 under the action of pressure, and after passing through the ionization component 2 arranged in the gas delivery channel 11, it is ionized to generate plasma. The subsequently generated plasma flows out to the air outlet end of the gas delivery channel 11 under the action of gas pressure, enters the subsequent etching module, and etches the surface of the workpiece. The ionization component 2 located in the gas delivery channel 11 is continuously energized during the ionization process. The ionization component 2 includes multiple electrodes. The electrodes generate heat under the action of current, and the temperature continues to rise. A cooling channel 23 is set in the electrode, and a cooling fluid is passed into the cooling channel 23. The heat generated by the electrode in the energized state is taken away by the continuously flowing cooling fluid to cool the electrode; wherein, the cooling fluid can be deionized water or other fluids that do not corrode the electrode and have a high heat absorption efficiency.

[0033] The technical solution of the utility model adopts an ionization device 100 including a shell 1 and an ionization component 2, wherein the shell 1 has a gas delivery channel 11, and the ionization component 2 includes a plurality of electrodes, and the plurality of electrodes are arranged in the gas delivery channel 11, so that when the process gas passes through the gas delivery channel 11, it is ionized by the electrodes arranged in the shell 1 to generate plasma; the technical solution of the utility model also provides a cooling channel 23 for a cooling material to pass through inside the electrode, so that the cooling material takes away the heat generated by the electrode when passing through the cooling channel 23, thereby achieving the effect of cooling the electrode, thereby avoiding damage to the ionization device 100 due to excessive temperature.

[0034] In one embodiment, the plurality of electrodes include a first electrode 21 and a second electrode 22, and the first electrode 21 and the second electrode 22 are both provided with a cooling channel 23, and the cooling channel 23 of the first electrode 21 and the cooling channel 23 of the second electrode 22 are connected in parallel or in series to a cooling material delivery system. The first electrode 21 and the second electrode 22 are used in pairs, and have different polarities. The electrodes of different polarities work simultaneously to ionize the process gas. The first electrode 21 and the second electrode 22 are provided with through holes along the central axis to form the cooling channel 23. The cooling channels 23 of the first electrode 21 and the second electrode 22 can be connected in series to a circulating cooling fluid, so that the cooling fluid can absorb heat to the maximum extent, saving the cost of the cooling fluid; the cooling channels 23 of the first electrode 21 and the second electrode 22 can also be connected in parallel to the cooling fluid to improve the cooling capacity. In other embodiments, the cooling channel 23 can be designed to be a curved shape to increase the length of the cooling channel 23, thereby increasing the cooling capacity of the cooling channel 23.

[0035] In one embodiment, the electrode includes an electrode body 254 and a terminal 25 and a connecting portion 26 respectively arranged at both ends of the electrode body 254. The electrode body 254 is provided with a cooling channel 23, the terminal 25 is connected to a first fluid connector, and the connecting portion 26 is connected to a second fluid connector. The first fluid connector and the second fluid connector are respectively provided with fluid channels communicating with the cooling channel 23. The terminal 25 is used to change the flow direction of the cooling fluid. The fluid channel arranged in the terminal 25 intersects with the cooling channel 23 so that the cooling fluid can be connected or discharged from other directions as needed. In addition to being used to pass the cooling fluid, the connecting portion 26 is also connected to the power module 5 to energize the electrode.

[0036] In one embodiment, an insulating layer is provided on the inner wall of the cooling channel 23. The insulating layer can be provided as required. If the cooling fluid has a strong conductivity, the insulating layer can be provided to prevent the fluid inside the cooling channel 23 from being conductive, which ultimately leads to the situation where the electrode cannot ionize the process gas. In other embodiments, if the cooling fluid is a water channel with a large resistance, the resistance of the cooling fluid itself can prevent the conduction phenomenon in the cooling channel 23. Even if the insulating layer is not provided, the probability of conduction is very small. Therefore, the insulating layer may not be provided to reduce the manufacturing cost of the device.

[0037] In one embodiment, the end head 25 is provided with a first socket 251 connected to the cooling channel 23, the extension direction of the first socket 251 intersects with the extension direction of the cooling channel 23, and the first fluid connector is inserted into the first socket 251; the connector is used to connect or remove the cooling fluid, and the extension direction of the first socket 251 intersects with the extension direction of the cooling channel 23, which can change the flow direction of the cooling fluid to adapt to different operating spaces.

[0038] In one embodiment, the connection portion 26 is provided with a second plug hole 261 communicating with the cooling channel 23, the extension direction of the second plug hole 261 is the same as the extension direction of the cooling channel 23, and the second fluid connector is plugged into the second plug hole 261. The connection portion 26 is plugged into the housing 1, which is used to fix the electrode to the housing 1, and the fluid connector is inserted into the second plug hole 261 for connecting or disconnecting the cooling fluid.

[0039] In one embodiment, the first insertion hole 251 has a first hole section and a second hole section connected to each other in a direction perpendicular to the axial direction, the first hole section is located on a side of the second hole section away from the cooling channel 23, the inner diameter of the first hole section is larger than the inner diameter of the second hole section, so that a first limiting step 252 is formed at the position where the first hole section and the second hole section meet, and the first fluid connector is plugged into the first hole section and abuts against the first limiting step 252. The diameter of the first hole section is slightly larger than the outer diameter of the first fluid connector, so that the connector can be just inserted into the first hole section and sealed with the first hole section to prevent the cooling fluid from flowing out, the diameter of the second hole section is smaller than the diameter of the first fluid connector, so as to limit the first fluid connector from entering the second hole section, and the first hole section and the second hole section of different diameters form a limiting step to limit the insertion depth of the first fluid connector.

[0040] In one embodiment, the second insertion hole 261 has a third hole section and a fourth hole section connected to each other in the axial direction, the third hole section is located on the side of the fourth hole section away from the cooling channel 23, the inner diameter of the third hole section is larger than the inner diameter of the fourth hole section, so that the second limiting step 262 is formed at the portion where the third hole section and the fourth hole section meet, and the second fluid connector is plugged into the third hole section and abuts against the second limiting step 262. The diameter of the third hole section is slightly larger than the outer diameter of the second fluid connector, so that the connector can be just inserted into the third hole section and sealed with the third hole section to prevent the cooling fluid from flowing out, the diameter of the fourth hole section is smaller than the diameter of the second fluid connector, so as to limit the second fluid connector from entering the fourth hole section, and the third hole section and the fourth hole section of different diameters form a limiting step to limit the insertion depth of the second fluid connector.

[0041] In one embodiment, the ionization device 100 further includes a first insulator 31 and a second insulator 32 disposed in the housing 1, wherein the first insulator 31 partially wraps the first electrode 21, and the second insulator 32 partially wraps the second electrode 22. The first insulator 31 and the second insulator 32 are used to isolate the electrode from the housing 1 to prevent electrical conduction between the electrode and the housing 1, which would result in the electrode being unable to ionize the process gas to generate plasma.

[0042] In one embodiment, the gas delivery channel 11 is provided with an air inlet 111 and an air outlet 112 at both ends along the first direction, and the ionization device 100 further includes a gas source module 4, which is provided at the air inlet 111, and is used to deliver process gas into the gas delivery channel 11. The process gas enters from the air inlet 111 and flows toward the air outlet 112, and is ionized into plasma by the ionization component 2 provided in the gas delivery channel 11 during the flow, and then flows out from the air outlet 112 for etching. The gas delivery channel 11 has no other channels for gas inlet and outlet except the air inlet 111 and the air outlet 112, so as to ensure the vacuum setting of the device, so that the process gas is ionized to a greater extent.

[0043] In one embodiment, the ionization device 100 further includes a power module 5, which is electrically connected to the ionization component 2, and is used to periodically change the polarity of the power output to the first electrode 21 and the second electrode 22. The power supply is used to power the ionization device 100, so that the ionization component 2 works and the process gas is ionized into a plasma that can be used for etching. The power module 5 is arranged at one end of the ionization device 100, and the two electrodes are energized at the same time. The power module 5 includes a power circuit and a polarity conversion circuit; the power circuit is used to generate a high-frequency electromagnetic field, and the polarity conversion circuit has an input end, a first output end, and a second output end. The input end of the polarity conversion circuit is connected to the output end of the power supply, the first output end of the polarity conversion circuit is electrically connected to the first electrode 21, and the second output end of the polarity conversion circuit is electrically connected to the second electrode 22. The polarity conversion circuit is used to periodically change the polarity of the power output to the first electrode 21 and the second electrode 22. By changing the power polarity of the first electrode 21 and the second electrode 22, the positive and negative polarities of the first electrode 21 and the second electrode 22 are changed, which can avoid the problem of uneven etching of a single positive and negative electrode, and further improve the uniformity of etching. This solution can be combined with a solution that adopts a long strip of the first electrode 21 and the second electrode 22, and is spaced apart in the vertical direction, which can improve the efficiency of ionization and the uniformity of plasma. The power supply circuit can be a radio frequency power supply for outputting an alternating current signal, and the polarity conversion circuit is an electromagnetic coupler, and the alternating current signal can achieve polarity switching through the electromagnetic coupler. The electromagnetic coupler can be a transformer, a mutual inductor or a rotary transformer.

[0044] The utility model also proposes a plasma processing device, which includes a device body and any of the above ionization devices 100, the device body has a reaction chamber, the gas outlet end of the gas delivery channel 11 is connected to the reaction chamber, and the specific structure of the ionization device 100 refers to the above embodiment. Since the plasma processing device adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here. Among them, the reaction chamber is set in a vacuum, and the electronic device that needs to be surface processed is placed in the reaction chamber, and the ionized process gas is introduced into it. The plasma in the gas reacts with the workpiece to etch the surface of the workpiece to produce parts that meet the production standards.

[0045] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An ionization device, characterized in that: include: a housing having a gas delivery passage; as well as An ionization component, the ionization component includes a plurality of electrodes, the plurality of electrodes are arranged in the gas delivery channel, and at least two of the electrodes are arranged relatively spaced apart along a first direction, the first direction intersecting with the extension direction of the gas delivery channel; at least one of the electrodes has a corresponding cooling channel inside for cooling medium to flow through.

2. The ionization device according to claim 1, characterized in that The plurality of electrodes include a first electrode and a second electrode, both of which are provided with the cooling channel, and the cooling channel of the first electrode and the cooling channel of the second electrode are connected in parallel or in series to a cooling material delivery system.

3. The ionization device according to claim 1, characterized in that The electrode includes an electrode body and an end cap and a connecting portion respectively arranged at both ends of the electrode body, the electrode body is provided with the cooling channel, the end cap is connected to a first fluid connector, the connecting portion is connected to a second fluid connector, and the first fluid connector and the second fluid connector are respectively provided with fluid channels connected to the cooling channel.

4. The ionization device according to claim 1, characterized in that An insulating layer is provided on the inner wall of the cooling channel.

5. The ionization device according to claim 3, characterized in that: The end head is provided with a first plug hole connected with the cooling channel, the extension direction of the first plug hole intersects with the extension direction of the cooling channel, and the first fluid connector is plugged into the first plug hole.

6. The ionization device according to claim 3, characterized in that The connecting portion is provided with a second plug hole communicating with the cooling channel, the extension direction of the second plug hole is the same as the extension direction of the cooling channel, and the second fluid connector is plugged into the second plug hole.

7. The ionization device according to claim 5, characterized in that The first insertion hole has a first hole segment and a second hole segment connected to each other along a direction perpendicular to the axial direction, the first hole segment is located on a side of the second hole segment away from the cooling channel, the inner diameter of the first hole segment is larger than the inner diameter of the second hole segment, so that a first limiting step is formed at the position where the first hole segment and the second hole segment are connected, and the first fluid connector is inserted into the first hole segment and abuts against the first limiting step.

8. The ionization device according to claim 6, characterized in that The second socket has a third hole segment and a fourth hole segment which are axially connected to each other, the third hole segment is located on a side of the fourth hole segment away from the cooling channel, the inner diameter of the third hole segment is larger than the inner diameter of the fourth hole segment, so that a second limiting step is formed at the position where the third hole segment and the fourth hole segment are connected, and the second fluid connector is inserted into the third hole segment and abuts against the second limiting step.

9. The ionization device according to claim 2, characterized in that: The ionization device further includes a first insulator and a second insulator disposed in the shell, wherein the first insulator partially wraps the first electrode, and the second insulator partially wraps the second electrode.

10. The ionization device according to claim 1, characterized in that The gas delivery channel is provided with an air inlet and an air outlet at both ends along the first direction, respectively. The ionization device also includes a gas source module, which is arranged at the gas inlet and is used to deliver process gas into the gas delivery channel.

11. The ionization device according to claim 2, characterized in that The ionization device further comprises a power module, wherein the power module is electrically connected to the ionization component and is used for periodically changing the polarity of the power output to the first electrode and the second electrode.

12. A plasma processing device, characterized in that: The invention comprises a device body and an ionization device as claimed in any one of claims 1 to 11, wherein the device body has a reaction chamber, and the gas outlet end of the gas delivery channel is connected to the reaction chamber.

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