Conveying device and photovoltaic material processing equipment

By designing a conveying device that uses alternate translation and lifting in the photovoltaic material production, and setting a protective layer in the bearing area, the problem of material quality reduction caused by belt transmission is solved, and more efficient and stable material transmission is achieved.

CN222762943UActive Publication Date: 2025-04-15LAPLACE (WUXI) SEMICON TECH CO LTD
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Patent Information

Application Number
CN202421503834.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-27
Publication Date
2025-04-15
Estimated Expiration
2034-06-27

AI Technical Summary

Technical Problem

During the production of photovoltaic materials, the belt transmission method causes static friction on the surface of the sheet material, and the belt is prone to imprinting, resulting in a decrease in material quality.

Method used

A conveying device is designed to convey sheet-like material by alternating translation and lifting, and to provide protective layers in the bearing area to reduce friction and adhesion of impurities.

Benefits of technology

It effectively reduces the friction and adhesion risks when the sheet material comes into contact with the conveying device, and improves the quality of the material and the conveying efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a conveying device and photovoltaic material processing equipment. The conveying device comprises a bearing assembly and a bearing part. The upper surface of the bearing assembly comprises at least two first bearing areas arranged in the first direction, and the bearing assembly is provided with a containing space passing through all the first bearing areas in the first direction. The upper surface of the bearing piece comprises at least two second bearing areas arranged in the first direction, and in the second direction, the projection of the containing space and the projection of the bearing piece at least partially coincide. The second bearing area is provided with adsorption holes used for adsorbing the sheet materials. The bearing part can move up and down or horizontally relative to the bearing assembly. According to the conveying device, the flaky materials can stably move on the multiple first bearing areas one by one by sequentially ascending, descending and translating and adopting an adsorption mode, and the quality of the flaky materials can be improved.
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Description

Technical Field

[0001] The present application relates to the field of photovoltaic manufacturing equipment, and in particular to a conveying device and photovoltaic material processing equipment. Background Art

[0002] In the process of photovoltaic material production, the carriers for storing solar cells are basically baskets, quartz boats, graphite frames or other slot-type tooling. For example, in PVD process production, a basket is needed to carry multiple sheet materials for processing. Before and after processing, multiple sheet materials need to be loaded and unloaded in sequence. Generally, when belt drive is used for loading and unloading, there is static friction between the rotating belt and the surface of the sheet material. The belt is easy to leave marks on the sheet material, resulting in the problem of reduced quality of the sheet material. Utility Model Content

[0003] In view of this, the present application provides a conveying device, which achieves the purpose of conveying sheet materials by alternating translation and lifting, and solves the problem of reduced quality of sheet materials by setting a protective layer.

[0004] The present application provides a conveying device, comprising: a first carrier and a carrier. The upper surface of the carrier assembly comprises at least two first bearing areas, at least two of which are arranged along the first direction, and the carrier assembly is provided with a receiving space, and the receiving space passes through all the first bearing areas along the first direction. The upper surface of the carrier comprises at least two second bearing areas, at least two of which are arranged along the first direction, and in the second direction, the projection of the carrier assembly and the projection of the carrier at least partially overlap, and the first direction and the second direction are perpendicular. The second bearing area is provided with adsorption holes, and the adsorption holes are configured to adsorb sheet materials. The carrier is configured to move relative to the carrier assembly along the first direction, so that each second bearing area located in the projection of the receiving space is aligned with a first bearing area. The carrier assembly is configured to move up and down relative to the carrier along the second direction, so that the upper surface of the carrier can be higher or lower than the first bearing area, wherein when each second bearing area is aligned with a first bearing area, the sheet material is transferred between the second bearing area and the first bearing area.

[0005] In the above embodiment, the sheet material is stably moved one by one on multiple first load-bearing areas by lifting and translating in sequence and adopting an adsorption method. Compared with belt transmission, this reduces the risk of debris generated by the friction of the belt adhering to the sheet material when the sheet material contacts the belt, which helps to improve the quality of the sheet material.

[0006] In some embodiments, the conveying device includes two or more bearing members, which are arranged in parallel along the third direction. The bearing assembly is provided with two or more accommodation spaces, which are arranged in parallel along the third direction, and each bearing member corresponds to one accommodation space. The first direction, the second direction and the third direction are perpendicular to each other.

[0007] In some embodiments, the bearing assembly includes a connecting rod and at least two bearing rods, the bearing rods are arranged at equal intervals along the third direction, and at least two bearing rods are connected to the connecting rod. The accommodating space is located between two adjacent bearing rods, and at least part of the first bearing area is disposed on the upper surface of the bearing rod. The first direction, the second direction, and the third direction are perpendicular to each other.

[0008] In some embodiments, the bearing assembly further includes reinforcing ribs located above and / or below the bearing rod, wherein the middle portion of the reinforcing ribs bends in the second direction away from the bearing rod to form an escape space for accommodating the bearing member.

[0009] In some embodiments, the conveying device further comprises a protective layer, which is disposed on a surface of the first bearing area and / or the second bearing area, and the protective layer is used to contact with the sheet material.

[0010] In some embodiments, the protective layer is made of ceramic, and silicon powder is disposed on the surface of the protective layer.

[0011] In some embodiments, along the first direction, a distance between any two adjacent second supporting regions is equal to a distance between any two adjacent first supporting regions.

[0012] In some embodiments, the conveying device further comprises a base, a lifting assembly and a translation assembly. The lifting assembly is connected to the bearing assembly and the base, and is used to drive the bearing assembly to move up and down relative to the bearing member and the base in the second direction. The translation assembly is connected to the bearing member and the base, and is used to drive the bearing member to move relative to the bearing assembly in the first direction.

[0013] In some embodiments, the conveying device further comprises: a limiting member and a limiting device. The limiting member is connected to the base, the limiting member is arranged below the bearing member, and the limiting member is used to limit the downward moving bearing assembly. The limiting device is installed to the translation assembly, and the limiting device is configured to detect the position of the bearing member.

[0014] In some embodiments, the conveying device further includes a base, a lifting assembly and a translation assembly. The bearing assembly is connected to the base, the lifting assembly is installed between the translation assembly and the base, the translation assembly is connected to the bearing member, the lifting assembly is used to drive the translation assembly and the bearing member to move up and down relative to the bearing assembly, and the translation assembly is used to drive the bearing member to move along a first direction relative to the bearing assembly. Or the translation assembly and the bearing assembly are respectively connected to the base, the lifting assembly is connected to the translation assembly and the bearing member, the translation assembly is used to drive the lifting assembly and the bearing member to move along a first direction relative to the bearing assembly, and the lifting assembly is used to drive the bearing member to move up and down relative to the bearing assembly along a second direction.

[0015] A photovoltaic material processing device comprises a carrying tool and the above-mentioned conveying device. The carrying tool is used to carry a plurality of sheet materials. The part of the carrying member located outside the projection of the accommodating space can extend into the carrying tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1(e) to Figure 1(g) A schematic diagram of the working status of a photovoltaic material processing device provided in one embodiment of the present application.

[0017] Figure 2 A schematic diagram of the structure of a transmission device provided in one embodiment of the present application.

[0018] Figure 3 for Figure 2 Schematic diagram of the working status of part of the conveying device.

[0019] Figure 4 for Figure 2 Schematic diagram of the working status of another part of the conveying device.

[0020] Figure 5 for Figure 4 A magnified schematic diagram of center A.

[0021] Figure 6 A top view of a conveying device provided in another embodiment of the present application.

[0022] Main component symbols

[0023] Conveying device 10

[0024] Carrying component 11

[0025] The first bearing area 111

[0026] Accommodation space 112

[0027] Loading rod 113

[0028] Connecting rod 114

[0029] Carrier 12

[0030] The second bearing area 121

[0031] Frontend 122

[0032] Backend 123

[0033] Protective layer 13

[0034] Reinforcement 14

[0035] Avoidance Space 141

[0036] Connection block 142

[0037] Adsorption hole 15

[0038] Lifting assembly 16

[0039] Lifting drive 161

[0040] Translation component 17

[0041] Slider 171

[0042] Slide 172

[0043] Drive 173

[0044] Baffle 174

[0045] Photoelectric sensor 175

[0046] Through hole 18

[0047] Base 19

[0048] Mounting frame 191

[0049] Limiting parts 192

[0050] Sheet material 20

[0051] Reaction device 30

[0052] Loading tooling 40 DETAILED DESCRIPTION

[0053] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0054] It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "located on" another component, it may be directly located on the other component or there may be a central component at the same time. The terms "top", "upper", "lower", "front", "back" and similar expressions used herein are for illustrative purposes only.

[0055] The terms "first", "second", etc. are only used to distinguish different objects and shall not be understood as indicating or implying relative importance or implying the quantity, specific order or primary and secondary relationship of the indicated technical features.

[0056] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0057] Some embodiments of the present application will be described below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0058] In some embodiments, the first direction X and the third direction Z are both directions on a horizontal plane, the second direction Y is a direction parallel to the direction of gravity, and the first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0059] In some embodiments, the present application discloses a photovoltaic material processing device (not labeled) comprising: a reaction device 30, a carrying tool 40 and a conveying device 10, see Figure 1(e) to Figure 1(g) , wherein: FIG. 1( e ) shows the conveying device 10 before partially extending into the carrying fixture 40 , FIG. 1( f ) shows the conveying device 10 partially extending into the carrying fixture 40 , and FIG. 1( g ) shows the carrying fixture 40 located in the reaction device 30 .

[0060] When the photovoltaic material processing equipment is working, the carrying fixture 40 carries a plurality of sheet materials 20 in the reaction device 30 for reaction processing. After the sheet materials 20 are processed, part of the conveying device 10 extends into the carrying fixture 40 to take out the processed sheet materials 20 from the carrying fixture 40. The part of the conveying device 10 carrying the sheet materials 20 to be reacted extends into the carrying fixture 40 to place the sheet materials 20 to be reacted on the carrying fixture 40, thereby achieving the purpose of quickly loading and unloading the sheet materials 20, thereby helping to improve the processing efficiency of the sheet materials 20.

[0061] In some embodiments, the sheet material 20 is a photovoltaic material such as a silicon wafer or a solar cell.

[0062] In some embodiments, the carrying tool 40 is a flower basket, a quartz boat, a graphite frame, or other carrying devices with a groove.

[0063] In some embodiments, see Figures 2 to 4 The conveying device 10 includes: a bearing assembly 11 and a bearing member 12. The upper surface of the bearing assembly 11 includes three first bearing areas 111 arranged at intervals along the first direction X. The bearing assembly 11 is provided with a receiving space 112. Along the first direction X, the receiving space 112 passes through all the first bearing areas 111. In the second direction, part of the bearing member 12 is located within the projection of the receiving space 112. The upper surface of the bearing member 12 includes three second bearing areas 121 arranged at intervals along the first direction X. In the first direction X, the bearing member 12 is a plate-shaped member. The bearing member 12 has a front end 122 and a rear end 123 opposite to each other. The front end 122 can move from the projection of the receiving space 112 to the projection of the receiving space 112, or from the projection of the receiving space 112 to the projection of the receiving space 112. A second bearing area 121 is located at the front end 122. The front end 122 is used to extend into the bearing fixture 40. In the first direction X, the spacing between any adjacent second carrying areas 121 is equal to the spacing between any adjacent first carrying areas 111. When a first carrying area 111 is aligned and flush with a second carrying area 121 located within the projection of the accommodating space 112, the sheet material 20 is transferred between the first carrying area 111 and the second carrying area 121.

[0064] The alignment of the first carrying area 111 and the second carrying area 121 indicates that the first carrying area 111 and the second carrying area 121 have the same position arrangement in the first direction X (when the first direction X is regarded as a direction parallel to the X-axis, the same position means the same coordinate on the X-axis). The flushness of the first carrying area 111 and the second carrying area 121 indicates that the first carrying area 111 and the second carrying area 121 have the same position arrangement in the second direction Y (when the second direction Y is regarded as a direction parallel to the Y-axis, the same position means the same coordinate on the Y-axis). Figure 2 The three first bearing areas 111 in the embodiment are marked as A, B, and C from front to back, respectively. Figure 2 The three second bearing areas 121 are marked as a, b, and c from front to back, respectively. The front represents the direction from the rear end 123 to the front end 122, and the rear represents the direction from the front end 122 to the rear end 123.

[0065] Before the sheet material 20 on the carrying fixture 40 needs to be transported outward, in the second direction Y, the upper surface of the carrying assembly 11 is located below the upper surface of the carrying member 12, and the first carrying area 111A is aligned with the second carrying area 121b, and the first carrying area 111B is aligned with the second carrying area 121c. The front end 122 of the carrying member 12 extends into the carrying fixture 40, and the sheet material 20 in the carrying fixture 40 moves downward under the external force and is placed on the second carrying area 121a. The carrying member 12 carrying the sheet material 20 moves from front to back relative to the carrying assembly 11, and the moving distance is the spacing between two adjacent second carrying areas 121, so that the first carrying area 111A is aligned with the second carrying area 121a.

[0066] When the first carrying area 111A is aligned with the second carrying area 121a, the carrying member 12 moves upward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from below the upper surface of the carrying member 12 to above the upper surface of the carrying member 12, so that the first carrying area 111A carries the sheet material 20 and separates the sheet material 20 from the second carrying area 121a.

[0067] After the first carrying area 111A carrying the sheet material 20 is separated from the second carrying area 121a, the carrying member 12 moves forward from the rear relative to the carrying assembly 11 until the front end 122 of the carrying member 12 is located in the carrying fixture 40 and the second carrying area 121b is aligned with the first carrying area 111A. At this time, the carrying member 12 moves downward along the second direction Y relative to the carrying assembly 11, so that the upper surface of the carrying assembly 11 moves from above the upper surface of the carrying member 12 to below the upper surface of the carrying member 12, and the sheet material 20 on the first carrying area 111A is placed on the second carrying area 121b until the carrying assembly 11 is separated from the sheet material 20. At the same time, another sheet material 20 in the carrying fixture 40 moves downward and is placed on the first carrying area 111a.

[0068] The carrier 12 carrying all the sheet materials 20 moves again from front to back relative to the carrier assembly 11, so that the first carrying area 111A is aligned with the second carrying area 121a, the first carrying area 111B is aligned with the second carrying area 121b, and the first carrying area 111C is aligned with the second carrying area 121c.

[0069] After the first carrying areas 111A, B, and C are aligned with the second carrying areas 121a, b, and c respectively, the carrying member 12 moves downward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from below the upper surface of the carrying member 12 to above the upper surface of the carrying member 12, so that the first carrying area 111A carries the sheet material 20 on the second carrying area 121a, and the first carrying area 111B carries the sheet material 20 on the second carrying area 121b, so that all the sheet materials 20 are separated from the carrying member 12.

[0070] After all the sheet materials 20 are separated from the carrier 12, the carrier 12 moves forward from the rear relative to the carrier assembly 11 until the front end 122 of the carrier 12 is located in the carrier fixture 40 and the second carrier area 121b is aligned with the first carrier area 111A. At this time, the carrier 12 moves downward along the second direction Y relative to the carrier assembly 11, so that the upper surface of the carrier assembly 11 moves from above the upper surface of the carrier 12 to below the upper surface of the carrier 12, and the sheet material 20 on the first carrier area 111A is placed on the second carrier area 121b until the carrier assembly 11 is separated from the sheet material 20. At the same time, another sheet material 20 in the carrier fixture 40 moves downward and is placed on the first carrier area 111a.

[0071] The carrier 12 carrying all the sheet materials 20 moves again from front to back relative to the carrier assembly 11, so that the first carrying area 111A is aligned with the second carrying area 121a, the first carrying area 111B is aligned with the second carrying area 121b, and the first carrying area 111C is aligned with the second carrying area 121c.

[0072] After the first carrying areas 111A, B, and C are aligned with the second carrying areas 121a, b, and c, respectively, the carrier 12 moves downward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from below the upper surface of the carrier 12 to above the upper surface of the carrier 12, so that the first carrying areas 111A, B, and C respectively carry the sheet material 20 on the carrier 12, and the carrier 12 is separated from all the sheet materials 20.

[0073] This cycle is repeated to achieve the conveyance of the sheet material 20 on the second supporting area 121a from front to back, and finally the sheet material 20 is located on the first supporting area 111c. The sheet material 20 on the first supporting area 111c is removed by external equipment, thereby achieving the purpose of the conveying device 10 conveying and unloading the sheet material 20 in the supporting tooling 40.

[0074] Before the sheet material 20 needs to be transferred into the carrying fixture 40, in the second direction Y, the upper surface of the carrying assembly 11 is higher than the upper surface of the carrying member 12, and the first carrying area 111C is aligned with the second carrying area 121c. The external device places the sheet material 20 on the first carrying area 111c, and the carrying member 12 moves downward relative to the carrying assembly 11 along the second direction Y, so that the upper surface of the carrying assembly 11 moves from above the upper surface of the carrying member 12 to below the upper surface of the carrying member 12, so that the first carrying area 111C carries the sheet material 20 and places it on the second carrying area 121c, and the first carrying area 111C is separated from the sheet material 20.

[0075] After the sheet material 20 is placed in the second carrying area 121c, the carrier 12 carrying the sheet material 20 moves from back to front relative to the carrying component 11, and the moving distance is the spacing between two adjacent second carrying areas 121, so that the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, and the front end 122 of the carrier 12 is located in the carrying tooling 40.

[0076] When the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, the carrying member 12 moves upward relative to the carrying assembly 11 along the second direction Y, so that the upper surface of the carrying assembly 11 moves from below the upper surface of the carrying member 12 to above the upper surface of the carrying member 12, and the first carrying area 111B carries the sheet material 20 on the second carrying area 121c, and the sheet material 20 is separated from the carrying member 12.

[0077] After the first carrying area 111B carries the sheet material 20 on the second carrying area 121c, the carrying member 12 moves from front to back relative to the carrying assembly 11 until the first carrying areas 111A, B, C are aligned with the second carrying areas 121a, b, c respectively.

[0078] The external equipment then places another sheet material 20 on the first carrying area 111C, and the carrying member 12 moves downward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from above the upper surface of the carrying member 12 to below the upper surface of the carrying member 12, so that the first carrying area 111C places the sheet material 20 on the second carrying area 121c, and the first carrying area 111C is separated from the sheet material 20, and the first carrying area 111B places the sheet material 20 on the second carrying area 121b, and the first carrying area 111B is separated from the sheet material 20.

[0079] When the sheet material 20 is placed in the second carrying area 121c and the second carrying area 121b, the carrier 12 carrying the sheet material 20 moves from back to front relative to the carrying component 11, so that the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b in the second direction Y, and the front end 122 of the carrier 12 is located in the carrying tooling 40.

[0080] When the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, the carrier 12 moves downward along the second direction Y relative to the carrier assembly 11, so that the upper surface of the carrier assembly 11 moves from below the upper surface of the carrier 12 to above the upper surface of the carrier 12, so that the first carrying area 111A carries the sheet material 20 on the second carrying area 121b, the first carrying area 111B carries the sheet material 20 on the second carrying area 121c, and the carrier 12 is separated from all the sheet materials 20.

[0081] The external device then places another sheet material 20 on the first carrying area 111C, and the carrying member 12 moves from front to back relative to the carrying assembly 11 until the first carrying areas 111A, B, C are aligned with the second carrying areas 121a, b, c in the second direction Y respectively.

[0082] The carrier 12 moves upward relative to the carrier assembly 11 along the second direction Y so that the upper surface of the carrier assembly 11 moves from above the upper surface of the carrier 12 to below the upper surface of the carrier 12, thereby placing the sheet material 20 carried by the carrier assembly 11 on the second carrying areas 121a, b, and c respectively, and separating the carrier assembly 11 from the sheet material 20.

[0083] When the sheet material 20 is placed in the second carrying areas 121a, b, c, the carrier 12 carrying the sheet material 20 moves from back to front relative to the carrying component 11, so that the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, and the front end 122 of the carrier 12 is located in the carrying tooling 40.

[0084] This cycle is repeated to achieve the goal of the sheet material 20 on the first carrying area 111C being transported from back to front in sequence and finally being located on the second carrying area 121a. The carrying tooling 40 then lifts the sheet material 20 on the second carrying area 121a, thereby achieving the purpose of the conveying device 10 conveying and loading the sheet material 20 into the carrying tooling 40.

[0085] In summary, the conveying device 10 of the present application realizes the movement of the sheet material 20 on multiple first load-bearing areas 111 one by one by lifting and translating in sequence. Compared with belt conveyor, it reduces the risk of debris generated by the friction of the belt when the sheet material 20 contacts the belt and adheres to the sheet material 20, which helps to improve the quality of the sheet material 20.

[0086] In some embodiments, see Figure 2 , Figure 4 and Figure 5 The bearing assembly 11 and / or the bearing member 12 is provided with a through hole 18, and the through hole 18 is connected to an external vacuum generating device. The first bearing area 111 and the second bearing area 121 are respectively provided with adsorption holes 15 connected to the through hole 18. The adsorption holes 15 form a negative pressure under the action of the external vacuum generating device. When the bearing assembly 11 or the bearing member 12 contacts with the sheet material 20, the adsorption holes 15 adsorb the sheet material 20, thereby helping to improve the stability of the bearing assembly 11 or the bearing member 12 in carrying the sheet material 20, so as to reduce the risk of relative sliding between the sheet material 20 and the bearing assembly 11 or the bearing member 12, thereby achieving the effect of improving the quality of the sheet material 20.

[0087] In other embodiments, the second direction Y is a direction intersecting the direction of gravity, the first direction X and the third direction Z both intersect the horizontal plane, and the adsorption holes 15 adsorb and fix the sheet material 20, so that the supporting component 11 and the supporting component 12 can stably support the sheet material 20 respectively.

[0088] In some embodiments, see Figures 2 to 3 The conveying device 10 also includes a protective layer 13, which is arranged on the upper surface of the first bearing area 111 and the second bearing area 121. The protective layer 13 is used to contact the sheet material 20 to reduce the contact wear between the sheet material 20 and the bearing assembly 11 and the bearing member 12, and reduce the risk of debris on the bearing assembly 11 and the bearing member 12 adhering to the sheet material 20, which helps to further improve the quality of the sheet material 20.

[0089] In some embodiments, the protection layer 13 is made of high temperature resistant and corrosion resistant organic or inorganic materials.

[0090] In some embodiments, the protective layer 13 is made of ceramics, which has a smooth surface, is resistant to high temperatures and corrosion, and has a certain hardness, thereby meeting the requirements of the first bearing area 111 and the second bearing area 121 for bearing the sheet material 20 .

[0091] In other embodiments, the protection layer 13 is made of quartz, PI, polyurethane, or epoxy resin.

[0092] In some embodiments, see Figure 5 The adsorption holes 15 pass through the protective layer 13 or are arranged around the outer side of the protective layer 13 .

[0093] In some embodiments, a protective film (not shown) is disposed on the surface of the protective layer 13 , and the surface damage of the sheet material 20 is reduced by the provision of the protective film.

[0094] In some embodiments, when the sheet material 20 is a silicon wafer, the protective film is made of silicon. The protective film is silicon powder attached to the surface of the protective layer 13. The contact between the silicon powder and the silicon wafer of the same material helps to reduce the risk of damage to the silicon wafer surface or adhesion of impurities.

[0095] In some embodiments, when the protective layer 13 is processed, there is no silicon powder attached to the surface of the protective layer 13. Multiple silicon wafers are contacted with the protective layer 13 in sequence, so that the silicon powder on the silicon wafers falls off and adheres to the surface of the protective layer 13, thereby achieving the effect of setting silicon powder on the protective layer 13.

[0096] In other embodiments, the protective film is an organic film adhered to the surface of the protective layer 13 .

[0097] In some embodiments, see Figures 2 to 3 The bearing assembly 11 includes a connecting rod 114 and at least two bearing rods 113, the bearing rods 113 are evenly spaced along the third direction, and the rear ends of the bearing rods 113 are respectively connected to the connecting rods 114, so as to realize the fixed setting of the bearing rods 113, the accommodating space 112 is located between two adjacent bearing rods 113, each first bearing area 111 spans the upper part of the accommodating space 112, and is located on the upper surface of the bearing rods 113 on both sides of the accommodating space 112, and at least part of the bearing member 12 is located in the projection of the accommodating space 112 in the second direction Y. When the sheet material 20 is transported, the first bearing areas 111 on both sides of the accommodating space 112 are used to support the two ends of the sheet material 20, or the second bearing area 121 is used to support the middle part of the sheet material 20, so as to help improve the stability of the bearing assembly 11 or the bearing member 12 in carrying the sheet material 20.

[0098] In other embodiments, the bearing rod 113 and the connecting rod 114 are integrally provided.

[0099] In some embodiments, the conveying device 10 further includes a reinforcing rib 14, which is located above the carrying bar 113 or below the carrying bar 113, and the middle portion of the reinforcing rib 14 is bent along the second direction Y in a direction away from the carrying bar 113 to form an escape space 141, which is connected to the accommodating space 112. Figures 2 to 3When the reinforcing rib 14 is located above the bearing rod 113, the middle of the reinforcing rib 14 arches upward to form an escape space 141. When the bearing assembly 11 moves relative to the bearing member 12, the escape space 141 accommodates the bearing member 12 to reduce the risk of interference between the reinforcing rib 14 and the bearing member 12.

[0100] In other embodiments, when the reinforcing rib 14 is located below the bearing rod 113 , the middle portion of the reinforcing rib 14 is recessed downward to form an escape space 141 .

[0101] In some embodiments, the reinforcing rib 14 has two opposite ends, and the two ends of the reinforcing rib 14 extend respectively along the second direction Y. One end of the reinforcing rib 14 is connected to the bearing rod 113 on one side of the accommodating space 112 in the third direction Z, and the other end of the reinforcing rib 14 is connected to the bearing rod 113 on the other side of the accommodating space 112 in the third direction Z, thereby helping to improve the stability of the two adjacent bearing rods 113.

[0102] In some embodiments, the reinforcing rib 14 is a rod-shaped component extending along the third direction Z. Both ends of the reinforcing rib 14 facing the bearing rod 113 are respectively connected to connecting blocks 142 , and one connecting block 142 is connected to one bearing rod 113 .

[0103] In some embodiments, the reinforcing rib 14 and the connecting block 142 are integrally formed.

[0104] In some embodiments, when the number of the accommodation space 112 is one, the reinforcing rib 14 is arranged in a U-shape. When the number of the accommodation space 112 is two, the reinforcing rib 14 is arranged in an M-shape.

[0105] In some embodiments, there are two supporting rods 113, and there is one accommodating space 112. Part of the supporting member 12 is arranged within the projection of the accommodating space 112. The supporting member 12 places a sheet material 20 in the supporting tooling 40, or transfers the sheet material 20 in the supporting tooling 40 to the outside.

[0106] In some embodiments, when a whole sheet of material 20 is divided into two halves, refer to Figure 3 There are three bearing rods 113, which are spaced apart along the third direction Z. There are two accommodating spaces 112. The number of bearing members 12 is the same as the number of accommodating spaces 112. A portion of a bearing member 12 is disposed within the projection of a accommodating space 112. Two bearing members 12 are used to respectively carry two half-sheets of sheet material 20 on the carrying tooling 40 or to respectively place the two half-sheets of sheet material 20 in the carrying tooling 40, thereby helping to improve the conveying efficiency of the conveying device 10 and achieving the effect of quickly processing two half-sheets of sheet material 20 by the photovoltaic material processing equipment.

[0107] In other embodiments, the two carriers 12 can also place the entire sheet material 20 in the carrier tooling 40 , or transfer the entire sheet material 20 in the carrier tooling 40 to the outside.

[0108] In other embodiments, the number of the accommodating spaces 112 is more than two, and the number of the carriers 12 is the same as the number of the accommodating spaces 112 .

[0109] In other embodiments, see Figure 6 The carrying component 11 includes a carrying rod 113, and the accommodating space 112 is located on one side of the carrying rod 113. The carrying rod 113 is arranged parallel to the carrying member 12. The first carrying area 111 contacts half of the sheet material 20, and the second carrying area 121 contacts the other half of the sheet material 20. The sheet material 20 is adsorbed through the adsorption holes 15, thereby achieving the effect that the carrying rod 113 and the carrying member 12 respectively stably carry the sheet material 20.

[0110] In some embodiments, see Figures 2 to 4 The conveying device 10 also includes a base 19, a lifting assembly 16 and a translation assembly 17. The lifting assembly 16 includes two lifting drivers 161 arranged at intervals, and the translation assembly 17 includes a driving member 173, a slide rail 172 and a slider 171. The lifting driver 161 and the driving member 173 are power devices such as cylinders, electric pushers, linear motors or screw modules that can output reciprocating forces.

[0111] In some embodiments, all the lifting drivers 161 are connected to the slider 171 and the carrier 12, the slider 171 is connected to the driving member 173, the slider 171 is also slidably connected to the slide rail 172, the slider 171 and the driving member 173 are respectively arranged on the base 19, the driving member 173 drives the slider 171 to slide on the slide rail 172, so that the slider 171 drives the lifting driver 161 and the carrier 12 to move horizontally relative to the carrier rod 113. When the first bearing area 111 is aligned with the second bearing area 121, the lifting driver 161 drives the carrier 12 to move up and down relative to the bearing rod 113, thereby achieving the effect of conveying the sheet material 20.

[0112] In some embodiments, all the lifting drivers 161 are arranged on the base 19 and are respectively connected to the slide rails 172. The slider 171 is connected to the driving member 173 and the supporting member 12. The slider 171 is slidably connected to the slide rail 172. The driving member 173 drives the slider 171 to slide on the slide rail 172, so that the slider 171 drives the supporting member 12 to move horizontally relative to the supporting rod 113. When the first supporting area 111 is aligned with the second supporting area 121, the lifting driver 161 drives the slider 171 and the supporting member 12 to move up and down relative to the supporting rod 113, thereby achieving the effect of conveying the sheet material 20.

[0113] For further information, see Figures 2 to 4 The lifting driver 161 is disposed on the base 19, and is connected to the middle load-bearing rod 113 among the three load-bearing rods 113. A mounting frame 191 is disposed on the base 19, and in the third direction Z, the mounting frame 191 is located on both sides of the lifting driver 161. The slide rail 172 and the driving member 173 are respectively connected to the mounting frame 191, and the slider 171 is slidably connected to the slide rail 172. The slider 171 is also connected to the driving member 173 and the load-bearing member 12. The driving member 173 drives the slider 171 to slide on the slide rail 172, so that the slider 171 drives the load-bearing member 12 to move horizontally relative to the load-bearing rod 113, and the lifting driver 161 drives the load-bearing rod 113 to move up and down relative to the load-bearing member 12. The load-bearing rod 113 and the load-bearing member 12 move synchronously, so as to improve the transmission efficiency of the transmission device 10.

[0114] In some embodiments, see Figure 4 The conveying device 10 further includes a position limiting device disposed on the translation assembly 17, the position limiting device including a baffle 174 and two photoelectric sensors 175, the baffle 174 is disposed on the slider 171, a portion of the baffle 174 can extend into the sensing area of ​​each photoelectric sensor 175, the two photoelectric sensors 175 are spaced apart on the slide rail 172, and the spacing between the two photoelectric sensors 175 is the spacing between two adjacent second bearing areas 121. When the slider 171 drives the bearing member 12 to move along the first direction X relative to the bearing assembly 11, the slider 171 synchronously drives the baffle 174 to move from the sensing area of ​​one of the photoelectric sensors 175 to the sensing area of ​​the other photoelectric sensor 175, and the photoelectric sensor 175 sends a feedback signal to the driving member 173 to stop the driving member 173, thereby improving the accuracy of the movement of the bearing member 12 along the first direction X.

[0115] In some embodiments, see Figure 2 and Figure 4 The base 19 is provided with a limit member 192, which is provided at the top of the mounting frame 191 and is located below all the bearing rods 113. In the third direction Z, the two ends of the limit member 192 extend from below the middle bearing rod 113 among the three bearing rods 113 to below the other two bearing rods 113. When the lifting driver 161 drives the bearing rods 113 to descend, so that the bearing member 12 carries the sheet material 20 on the bearing assembly 11, the limit member 192 limits the bearing rods 113 located on both sides among the three bearing rods 113 to limit the descending distance of the bearing rods 113, thereby achieving the effect of facilitating the lifting and resetting of the bearing rods 113.

[0116] The working process of the transmission device 10 of an embodiment of the present application is as follows:

[0117] Before the sheet material 20 on the carrying fixture 40 needs to be transported outward, in the second direction Y, the upper surface of the carrying assembly 11 is located below the upper surface of the carrying member 12, and the first carrying area 111A is aligned with the second carrying area 121b, and the first carrying area 111B is aligned with the second carrying area 121c. The front end 122 of the carrying member 12 extends into the carrying fixture 40, and the sheet material 20 in the carrying fixture 40 moves downward under the external force and is placed on the second carrying area 121a. The carrying member 12 carrying the sheet material 20 moves from front to back relative to the carrying assembly 11, and the moving distance is the spacing between two adjacent second carrying areas 121, so that the first carrying area 111A is aligned with the second carrying area 121a.

[0118] When the first carrying area 111A is aligned with the second carrying area 121a, the carrying member 12 moves upward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from below the upper surface of the carrying member 12 to above the upper surface of the carrying member 12, so that the first carrying area 111A carries the sheet material 20 and separates the sheet material 20 from the second carrying area 121a.

[0119] After the first carrying area 111A carrying the sheet material 20 is separated from the second carrying area 121a, the carrying member 12 moves forward from the rear relative to the carrying assembly 11 until the front end 122 of the carrying member 12 is located in the carrying fixture 40 and the second carrying area 121b is aligned with the first carrying area 111A. At this time, the carrying member 12 moves downward along the second direction Y relative to the carrying assembly 11, so that the upper surface of the carrying assembly 11 moves from above the upper surface of the carrying member 12 to below the upper surface of the carrying member 12, and the sheet material 20 on the first carrying area 111A is placed on the second carrying area 121b until the carrying assembly 11 is separated from the sheet material 20. At the same time, another sheet material 20 in the carrying fixture 40 moves downward and is placed on the first carrying area 111a.

[0120] The carrier 12 carrying all the sheet materials 20 moves again from front to back relative to the carrier assembly 11, so that the first carrying area 111A is aligned with the second carrying area 121a, the first carrying area 111B is aligned with the second carrying area 121b, and the first carrying area 111C is aligned with the second carrying area 121c.

[0121] After the first carrying areas 111A, B, and C are aligned with the second carrying areas 121a, b, and c respectively, the carrying member 12 moves downward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from below the upper surface of the carrying member 12 to above the upper surface of the carrying member 12, so that the first carrying area 111A carries the sheet material 20 on the second carrying area 121a, and the first carrying area 111B carries the sheet material 20 on the second carrying area 121b, so that all the sheet materials 20 are separated from the carrying member 12.

[0122] After all the sheet materials 20 are separated from the carrier 12, the carrier 12 moves forward from the rear relative to the carrier assembly 11 until the front end 122 of the carrier 12 is located in the carrier fixture 40 and the second carrier area 121b is aligned with the first carrier area 111A. At this time, the carrier 12 moves downward along the second direction Y relative to the carrier assembly 11, so that the upper surface of the carrier assembly 11 moves from above the upper surface of the carrier 12 to below the upper surface of the carrier 12, and the sheet material 20 on the first carrier area 111A is placed on the second carrier area 121b until the carrier assembly 11 is separated from the sheet material 20. At the same time, another sheet material 20 in the carrier fixture 40 moves downward and is placed on the first carrier area 111a.

[0123] The carrier 12 carrying all the sheet materials 20 moves again from front to back relative to the carrier assembly 11, so that the first carrying area 111A is aligned with the second carrying area 121a, the first carrying area 111B is aligned with the second carrying area 121b, and the first carrying area 111C is aligned with the second carrying area 121c.

[0124] After the first carrying areas 111A, B, and C are aligned with the second carrying areas 121a, b, and c respectively, the carrier 12 moves downward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from below the upper surface of the carrier 12 to above the upper surface of the carrier 12, so that the first carrying areas 111A, B, and C respectively carry the sheet material 20 on the carrier 12, and the carrier 12 is separated from all the sheet materials 20, and the external equipment then takes away the sheet material 20 on the first carrying area 111C.

[0125] Before the sheet material 20 needs to be transferred into the carrying fixture 40, in the second direction Y, the upper surface of the carrying assembly 11 is higher than the upper surface of the carrying member 12, and the first carrying area 111C is aligned with the second carrying area 121c. The external device places the sheet material 20 on the first carrying area 111c, and the carrying member 12 moves downward relative to the carrying assembly 11 along the second direction Y, so that the upper surface of the carrying assembly 11 moves from above the upper surface of the carrying member 12 to below the upper surface of the carrying member 12, so that the first carrying area 111C carries the sheet material 20 and places it on the second carrying area 121c, and the first carrying area 111C is separated from the sheet material 20.

[0126] After the sheet material 20 is placed in the second carrying area 121c, the carrier 12 carrying the sheet material 20 moves from back to front relative to the carrying component 11, and the moving distance is the spacing between two adjacent second carrying areas 121, so that the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, and the front end 122 of the carrier 12 is located in the carrying tooling 40.

[0127] When the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, the carrying member 12 moves upward relative to the carrying assembly 11 along the second direction Y, so that the upper surface of the carrying assembly 11 moves from below the upper surface of the carrying member 12 to above the upper surface of the carrying member 12, and the first carrying area 111B carries the sheet material 20 on the second carrying area 121c, and the sheet material 20 is separated from the carrying member 12.

[0128] After the first carrying area 111B carries the sheet material 20 on the second carrying area 121c, the carrying member 12 moves from front to back relative to the carrying assembly 11 until the first carrying areas 111A, B, C are aligned with the second carrying areas 121a, b, c respectively.

[0129] The external equipment then places another sheet material 20 on the first carrying area 111C, and the carrying member 12 moves downward along the second direction Y relative to the carrying component 11, so that the upper surface of the carrying component 11 moves from above the upper surface of the carrying member 12 to below the upper surface of the carrying member 12, so that the first carrying area 111C places the sheet material 20 on the second carrying area 121c, and the first carrying area 111C is separated from the sheet material 20, and the first carrying area 111B places the sheet material 20 on the second carrying area 121b, and the first carrying area 111B is separated from the sheet material 20.

[0130] When the sheet material 20 is placed in the second carrying area 121c and the second carrying area 121b, the carrier 12 carrying the sheet material 20 moves from back to front relative to the carrying component 11, so that the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, and the front end 122 of the carrier 12 is located in the carrying tooling 40.

[0131] When the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, the carrier 12 moves downward along the second direction Y relative to the carrier assembly 11, so that the upper surface of the carrier assembly 11 moves from below the upper surface of the carrier 12 to above the upper surface of the carrier 12, so that the first carrying area 111A carries the sheet material 20 on the second carrying area 121b, the first carrying area 111B carries the sheet material 20 on the second carrying area 121c, and the carrier 12 is separated from all the sheet materials 20.

[0132] The external device then places another sheet material 20 on the first carrying area 111C, and the carrying member 12 moves from front to back relative to the carrying assembly 11 until the first carrying areas 111A, B, C are aligned with the second carrying areas 121a, b, c respectively.

[0133] The carrier 12 moves upward relative to the carrier assembly 11 along the second direction Y so that the upper surface of the carrier assembly 11 moves from above the upper surface of the carrier 12 to below the upper surface of the carrier 12, thereby placing the sheet material 20 carried by the carrier assembly 11 on the second carrying areas 121a, b, and c respectively, and separating the carrier assembly 11 from the sheet material 20.

[0134] When the sheet material 20 is placed in the second carrying areas 121a, b, c, the carrier 12 carrying the sheet material 20 moves from back to front relative to the carrying component 11 so that the first carrying area 111B is aligned with the second carrying area 121c, and the first carrying area 111A is aligned with the second carrying area 121b, and the front end 122 of the carrier 12 is located in the carrying tooling 40.

[0135] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application and are not intended to limit the present application. As long as they are within the essential scope of the present application, appropriate changes and modifications to the above embodiments are within the scope disclosed in the present application.

Claims

1. A conveying device for conveying sheet materials, characterized in that: include: A bearing assembly, wherein the upper surface of the bearing assembly comprises at least two first bearing areas, the at least two first bearing areas are arranged along a first direction, the bearing assembly is provided with a receiving space, and the receiving space passes through all the first bearing areas along the first direction; A carrier, wherein the upper surface of the carrier comprises at least two second carrying areas, the at least two second carrying areas are arranged along the first direction, in the second direction, the projection of the accommodating space at least partially overlaps with the projection of the carrier, and the second direction is perpendicular to the first direction; The second bearing area is provided with adsorption holes, and the adsorption holes are configured to adsorb the sheet material; The carrier is configured to move relative to the carrier assembly along the first direction so that each of the second carrier areas located within the projection of the accommodating space is aligned with one of the first carrier areas; The supporting assembly is configured to move up and down relative to the supporting member along the second direction so that the upper surface of the supporting member can be higher or lower than the first supporting area, wherein when each of the second supporting areas is flush with one of the first supporting areas, the sheet material can be transferred between the second supporting area and the first supporting area.

2. The conveying device according to claim 1, characterized in that The number of the bearing members is more than two, and the bearing members are arranged in parallel along the third direction; The bearing assembly is provided with more than two accommodating spaces, the accommodating spaces are arranged in parallel along the third direction, and each of the bearings corresponds to one accommodating space; The first direction, the second direction and the third direction are perpendicular to each other.

3. The conveying device according to claim 1, characterized in that The bearing assembly comprises a connecting rod and at least two bearing rods, the bearing rods are arranged at equal intervals along the third direction, and at least two of the bearing rods are connected to the connecting rod; The accommodating space is located between two adjacent bearing bars, and at least a portion of the first bearing area is disposed on the upper surface of the bearing bar; The first direction, the second direction and the third direction are perpendicular to each other.

4. The conveying device according to claim 3, characterized in that The bearing assembly further comprises reinforcing ribs located above and / or below the bearing rod, wherein the middle portion of the reinforcing ribs is bent in the second direction away from the bearing rod to form an escape space, and the escape space is used to accommodate the bearing member.

5. The conveying device according to claim 1, characterized in that The conveying device further comprises a protective layer, which is disposed on a surface of the first bearing area and / or the second bearing area, and is used for contacting with the sheet material.

6. The conveying device according to claim 5, characterized in that The protective layer is made of ceramic; Silicon powder is arranged on the surface of the protective layer.

7. The conveying device according to claim 1, characterized in that Along the first direction, a distance between any adjacent second bearing regions is equal to a distance between any adjacent first bearing regions.

8. The conveying device according to claim 1, characterized in that The conveying device also includes a base, a lifting assembly and a translation assembly; The lifting assembly is installed between the bearing assembly and the base, and is used to drive the bearing assembly to move up and down relative to the bearing member and the base along the second direction; The translation assembly is connected to the bearing member and the base, and is used to drive the bearing member to move relative to the bearing assembly along the first direction.

9. The conveying device according to claim 8, characterized in that The transmission device also includes: A limiting member connected to the base, the limiting member is arranged below the bearing member, and the limiting member is used to limit the downward moving bearing assembly; A limit device is mounted to the translation assembly, and the limit device is configured to detect the position of the carrier.

10. The conveying device according to claim 1, characterized in that The conveying device also includes a base, a lifting assembly and a translation assembly; The bearing assembly is connected to the base, the lifting assembly is installed between the translation assembly and the base, the translation assembly is connected to the bearing member, the lifting assembly is used to drive the translation assembly and the bearing member to move up and down relative to the bearing assembly, and the translation assembly is used to drive the bearing member to move relative to the bearing assembly along the first direction; or The translation assembly and the bearing assembly are respectively connected to the base, and the lifting assembly is connected to the translation assembly and the bearing member. The translation assembly is used to drive the lifting assembly and the bearing member to move along the first direction relative to the bearing assembly, and the lifting assembly is used to drive the bearing member to move up and down relative to the bearing assembly along the second direction.

11. A photovoltaic material processing device, characterized in that: It comprises a carrying tool and a conveying device as described in any one of claims 1 to 10 above, wherein the carrying tool is used to carry a plurality of the sheet materials; The portion of the carrier located outside the projection of the accommodating space can extend into the carrier tooling.