Disassembling and assembling device for etching equipment and etching equipment

Abstract

The utility model provides a dismounting and mounting device for etching equipment and the etching equipment, the dismounting and mounting device is provided with a support frame, a dismounting and mounting mechanism and a lifting mechanism, the dismounting and mounting mechanism and the lifting mechanism are arranged on the support frame, the dismounting and mounting mechanism is connected with the support frame through the lifting mechanism, and the dismounting and mounting mechanism and the lifting mechanism are used for being mounted at an opening of the etching equipment through the support frame; the dismounting mechanism is used for being detachably and fixedly connected with a first isolation valve of the etching equipment; and the lifting mechanism is used for controlling the disassembly and assembly mechanism to move relative to the etching equipment after the disassembly and assembly mechanism is fixedly connected with the first isolation valve so as to disassemble and assemble the first isolation valve. By optimizing mounting and dismounting of the first isolation valve, the first isolation valve can be dismounted and mounted under the condition that a conveying cavity is not opened, the working time and labor of the first isolation valve are saved, the equipment reset time is shortened, the equipment utilization rate is increased, the labor cost is saved, the dust particle generation probability is reduced, and the cavity environment is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a disassembly and assembly device for etching equipment and the etching equipment. Background Art

[0002] In the field of integrated circuit manufacturing, dry etching is a common etching process. Dry etching is to pass a specific etching gas into the surface of the wafer placed in the reaction chamber. Under specific conditions, the etching gas reacts chemically with the material on the surface of the wafer to achieve the purpose of etching. During the etching process, wafer transportation is particularly important. If the transportation is unstable, it will affect the stability of the etching equipment production.

[0003] At present, during the dry etching process, the wafer is transferred through the robotic arm in the transfer chamber and the isolation valve between the transfer chamber and the process chamber to transfer the wafer to the process chamber for processing. Among them, the isolation valve (Gate) of the transfer chamber is an important part of the wafer transfer path, which plays an important role in isolating the process chamber from the transfer chamber, preventing the process chamber from contaminating the transfer chamber, and maintaining the stability of the chamber pressure. In daily production, this device requires regular maintenance. When maintaining this device, due to its installation location, the transfer chamber needs to be opened, and the operator enters the transfer chamber for disassembly and installation. Since this device is relatively heavy, it requires two people to disassemble and assemble together, which is easy to generate dust particles that affect the chamber environment. Since there is also a robotic arm in the chamber, the robotic arm is also easily damaged during operation due to the small space and the fact that the robotic arm is made of ceramic material.

[0004] Therefore, there is an urgent need for a disassembly and assembly device for etching equipment and etching equipment to improve the above problems. Utility Model Content

[0005] The utility model aims to provide a disassembly and assembly device for etching equipment and etching equipment, which can disassemble and assemble the first isolation valve without opening the transfer chamber, thereby improving the equipment utilization rate and reducing the probability of dust particle generation.

[0006] In a first aspect, the utility model provides a disassembly and assembly device for etching equipment, comprising: a support frame and a disassembly and assembly mechanism and a lifting mechanism arranged on the support frame;

[0007] The disassembly and assembly mechanism is connected to the support frame through the lifting mechanism, and the disassembly and assembly mechanism and the lifting mechanism are used to be installed at the opening of the etching device through the support frame;

[0008] The disassembly and assembly mechanism is used to be detachably fixedly connected to the first isolation valve of the etching device;

[0009] The lifting mechanism is used to control the movement of the disassembly and assembly mechanism relative to the etching device after the disassembly and assembly mechanism is fixedly connected to the first isolation valve, so as to disassemble and assemble the first isolation valve.

[0010] The beneficial effects of the utility model are as follows: by providing a support frame and a disassembly and assembly mechanism and a lifting mechanism provided on the support frame, the disassembly and assembly mechanism is connected to the support frame through the lifting mechanism, and the disassembly and assembly mechanism and the lifting mechanism are used to be installed at the opening of the etching device through the support frame; the disassembly and assembly mechanism is used to be detachably fixedly connected to the first isolation valve of the etching device; the lifting mechanism is used to control the movement of the disassembly and assembly mechanism relative to the etching device after the disassembly and assembly mechanism forms a fixed connection with the first isolation valve, so as to disassemble and assemble the first isolation valve. By optimizing the installation and disassembly of the first isolation valve, the first isolation valve can be disassembled and installed without opening the transfer chamber, saving its working time and manpower, reducing the equipment restart time, improving the equipment utilization rate, saving labor costs, reducing the probability of dust particle generation, and improving the chamber environment.

[0011] Optionally, the detachable connection is a threaded connection, a snap-fit ​​connection or a hoisting connection. The beneficial effect is that the threaded connection, the snap-fit ​​connection or the hoisting connection facilitates the disassembly and assembly of the first isolation valve, thereby improving the disassembly and assembly efficiency.

[0012] Optionally, the disassembly and assembly mechanism includes a rotary driver and a connecting screw;

[0013] One end of the connecting screw rod is connected to the output end of the rotary driver, and the other end cooperates with the threaded hole on the first isolation valve to disassemble and assemble the first isolation valve;

[0014] The rotary driver is used to drive the connecting screw to rotate so that the other end of the connecting screw is threadedly connected to the threaded hole. The beneficial effect is that the threaded connection has high stability and is easy to process.

[0015] Optionally, the disassembly and assembly mechanism includes a rotary driver, a connecting screw and a hook;

[0016] One end of the connecting screw is connected to the output end of the rotary driver, and the other end is connected to the hook;

[0017] The hook cooperates with the lifting ring on the first isolation valve to disassemble and assemble the first isolation valve;

[0018] The rotary driver is used to drive the hook to rotate through the connecting screw rod, so that the other end of the connecting screw rod forms a hoisting connection with the lifting ring through the hook. The beneficial effect is that by setting the hook and the lifting ring, the operation is simple and the first isolation valve with a relatively large weight can be carried.

[0019] Optionally, the lifting mechanism includes a first lifter, a transmission shaft and a sliding member;

[0020] The first lifter is fixed on the support frame;

[0021] The support frame is provided with a slide rail adapted to the slide member, and the slide member is slidably arranged on the slide rail;

[0022] The disassembly and assembly mechanism is fixed on the sliding member;

[0023] The output end of the first lifter is connected to the sliding member through the transmission shaft, and is used to control the sliding member to slide along the slide rail, so that the disassembly and assembly mechanism follows the movement of the sliding member to disassemble and assemble the first isolation valve. Its beneficial effect is that by setting the first lifter, the transmission shaft and the sliding member as the lifting mechanism, and fixing the disassembly and assembly mechanism on the sliding member, it is convenient for the first lifter to control the sliding member to slide and lift along the slide rail through the transmission shaft, so that the disassembly and assembly mechanism drives the first isolation valve to move synchronously, and the transmission shaft, the sliding member and the slide rail cooperate to ensure the stability of the first isolation valve when it is lifted and lowered, thereby reducing the generation of dust particles.

[0024] Optionally, there are multiple disassembly and assembly mechanisms, which are evenly distributed on the sliding member. The beneficial effect is that by arranging multiple disassembly and assembly mechanisms evenly distributed on the sliding member, the stability of the mobile first isolation valve can be further improved.

[0025] In a second aspect, the utility model provides an etching device, comprising a disassembly and assembly device of any possible combination of the first aspect, and a transmission module and a process module connected thereto;

[0026] A first isolation valve is provided between the transmission module and the process module;

[0027] The support frame of the disassembly and assembly device is installed at the connection between the transmission module and the process module, so that the disassembly and assembly mechanism and the lifting mechanism of the disassembly and assembly device are located at the opening of the etching equipment;

[0028] The disassembly and assembly mechanism is used to be detachably fixedly connected to the first isolation valve of the etching device;

[0029] The lifting mechanism is used to control the movement of the disassembly and assembly mechanism relative to the etching device after the disassembly and assembly mechanism is fixedly connected to the first isolation valve, so as to disassemble and assemble the first isolation valve.

[0030] The beneficial effect of the utility model is that by optimizing the installation and disassembly of the first isolation valve, the first isolation valve can be disassembled and installed without opening the transfer chamber, thereby saving working time and manpower, reducing equipment restart time, improving equipment utilization rate, saving labor costs, reducing the probability of dust particle generation, and improving the chamber environment.

[0031] Optionally, it also includes a fixed plate, a lifting rod and a second lifter;

[0032] The first isolation valve is arranged on the fixed plate, and the bottom of the fixed plate is connected to the output end of the second lifter through the lifting rod. The beneficial effect is that the disassembly and assembly efficiency of the first isolation valve can be improved by arranging the fixed plate, the lifting rod and the second lifter to cooperate with the disassembly and assembly device.

[0033] Optionally, a sealing ring is also included;

[0034] The sealing ring is installed at the opening in a detachable connection manner to form a seal with the first isolation valve. The beneficial effect is that the sealing ring can reduce leakage.

[0035] Optionally, it also includes wafer handlers, equipment front-end modules and airlocks;

[0036] The transmission module is connected to one end of the equipment front-end module through an airlock chamber, and the other end of the equipment front-end module is connected to the wafer handling machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic diagram of the structure of a disassembly and assembly device for etching equipment provided by an embodiment of the utility model;

[0038] Figure 2 A schematic diagram of the structure of the transmission module, the process module and their connection provided by an embodiment of the utility model;

[0039] Figure 3 A schematic diagram of the internal structure of the connection provided by the embodiment of the utility model;

[0040] Figure 4 A top view of a connection provided by an embodiment of the utility model;

[0041] Figure 5 A structural schematic diagram of another disassembly and assembly mechanism provided in an embodiment of the utility model;

[0042] Figure 6 A schematic structural diagram of an etching device provided in an embodiment of the utility model.

[0043] Description of reference numerals:

[0044] 1. Support frame; 2. Disassembly and assembly mechanism; 3. Lifting mechanism; 4. First isolation valve; 5. Fixed plate; 6. Lifting rod; 7. Second lifter; 8. Opening; 9. Connection; 10. Transfer module; 11. Process module; 12. Second isolation valve; 13. Wafer handler; 14. Equipment front-end module; 15. Airlock chamber;

[0045] 21. Rotation driver; 22. Connecting screw rod; 23. Hook;

[0046] 31. First lifter; 32. Transmission shaft; 33. Sliding member. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with general skills in the field to which the utility model belongs.

[0048] In view of the inconvenience of current image acquisition, the image simulation system provided by the utility model can effectively reduce the degree of dependence on the test environment scene and greatly improve work efficiency. The technical scheme in the embodiment of the utility model is described below in conjunction with the drawings in the embodiment of the utility model. Among them, in the description of the embodiment of the utility model, the terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to be used as a limitation of the utility model. As used in the specification and the appended claims of the utility model, the singular expressions "a", "said", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context. It should also be understood that in the following embodiments of the utility model, "at least one", "one or more" refers to one or more than two (including two). The term "and / or" is used to describe the association relationship of associated objects, indicating that three relationships can exist; for example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the front and back associated objects are in an "or" relationship.

[0049] Reference to "one embodiment" or "some embodiments" described in this specification means that one or more embodiments of the utility model include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the sentences "in one embodiment", "in some embodiments", "in some other embodiments", and "in some other embodiments" that appear in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways. The term "connection" includes direct connection and indirect connection, unless otherwise specified. "First" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.

[0050] In the embodiments of the present invention, "exemplarily" or "for example" is used to indicate an example, illustration or description. Any embodiment or design described as "exemplarily" or "for example" in the embodiments of the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of "exemplarily" or "for example" is intended to present the relevant concepts in a specific way.

[0051] In view of the problems existing in the existing technology, such as Figure 1-4As shown, the utility model provides a disassembly and assembly device for etching equipment, which comprises: a support frame 1 and a disassembly and assembly mechanism 2 and a lifting mechanism 3 arranged on the support frame 1 (such as by a fixed connection method such as welding or integral molding, or by a detachable connection method such as threading or clamping); the disassembly and assembly mechanism 2 is connected to the support frame 1 through the lifting mechanism 3, and the disassembly and assembly mechanism 2 and the lifting mechanism 3 are used to be installed at the opening 8 of the etching equipment through the support frame 1; the disassembly and assembly mechanism 2 is used to be detachably (the detachable connection is a threaded connection, a clamping connection or a hoisting connection) fixedly connected to the first isolation valve 4 of the etching equipment ; The lifting mechanism 3 is used to control the movement of the disassembly and assembly mechanism 2 relative to the etching equipment after the disassembly and assembly mechanism 2 forms a fixed connection with the first isolation valve 4, so as to disassemble and assemble the first isolation valve 4; the disassembly and assembly mechanism 2 includes a rotary driver 21 and a connecting screw 22; one end of the connecting screw 22 is connected to the output end of the rotary driver 21, and the other end cooperates with the threaded hole on the first isolation valve 4 to disassemble and assemble the first isolation valve 4; the rotary driver 21 is used to drive the connecting screw 22 to rotate, so that the other end of the connecting screw 22 forms a threaded connection with the threaded hole. The working principle of the disassembly and assembly device of the utility model is as follows: there are two situations when using it, one is to disassemble the isolation valve, and the other is to install the isolation valve. First, the support frame 1 is installed at the connection 9 of the transmission module 10 and the process module 11 of the etching equipment to be disassembled, so as to ensure that the disassembly and assembly mechanism 2 and the lifting mechanism 3 on the support frame 1 are located at the opening 8 of the etching equipment. The state of the disassembly and assembly device installed on the etching equipment is as shown in FIG. Figure 1When the first isolation valve 4 is disassembled, the lifting mechanism 3 works to control the connecting screw 22 to move downward, so that the connecting screw 22 gradually contacts the threaded hole on the first isolation valve 4. At this time, the rotary driver 21 works to drive the connecting screw 22 to screw into the threaded hole, thereby forming a threaded connection, that is, completing the fixed connection between the disassembly mechanism 2 and the first isolation valve 4. The rotary driver 21 stops working, and the lifting mechanism 3 works to control the first isolation valve 4 to rise through the disassembly mechanism 2, thereby lifting the first isolation valve 4 out of the chamber, and then the rotary driver 21 controls the connecting screw 22 to rotate in the opposite direction, thereby releasing the fixed connection and removing the first isolation valve 4, thereby completing the disassembly of the first isolation valve 4. When installing the first isolation valve 4, the lifting mechanism 3 works to control the connecting screw 22 to move upward until the bottom of the connecting screw 22 is outside the chamber. At this time, the rotary driver 21 works to drive the connecting screw 22 to screw into the threaded hole, thereby forming a threaded connection, that is, completing the fixed connection between the disassembly mechanism 2 and the first isolation valve 4. The rotary driver 21 stops working, and the lifting mechanism 3 works to control the first isolation valve 4 to descend through the disassembly mechanism 2, and move the first isolation valve 4 into the chamber. Then the rotary driver 21 controls the connecting screw 22 to rotate in the opposite direction, thereby releasing the fixed connection and completing the installation of the first isolation valve 4. By optimizing the installation and disassembly of the first isolation valve 4, the first isolation valve 4 can be disassembled and installed without opening the transfer chamber, saving its working time and manpower, reducing the equipment restart time, improving the equipment utilization rate, saving labor costs, reducing the probability of dust particle generation, and improving the chamber environment. It is worth noting that if Figure 3 As shown, in a conventional etching device, two isolation valves are usually provided at the connection point 9 between the transmission module 10 and the process module 11, one of which is the first isolation valve 4 (Gate) of the transmission module 10, and the other is the second isolation valve 12 (Shutter) of the process module 11. The utility model mainly utilizes a disassembly and assembly device to improve the disassembly and assembly of the first isolation valve 4 (Gate). It should be understood that the disassembly and assembly device can also be used in scenarios with similar structures in semiconductor equipment.

[0052] In other embodiments, Figure 5 As shown, the disassembly and assembly mechanism 2 includes a rotary driver 21, a connecting screw rod 22 and a hook 23; one end of the connecting screw rod 22 is connected to the output end of the rotary driver 21, and the other end is connected to the hook 23; the hook 23 cooperates with the lifting ring on the first isolation valve 4 to disassemble and assemble the first isolation valve 4; the rotary driver 21 is used to drive the hook 23 to rotate through the connecting screw rod 22, so that the other end of the connecting screw rod 22 forms a lifting connection with the lifting ring through the hook 23, which is simple to operate and can carry a first isolation valve 4 with a larger weight.

[0053] In some embodiments, in order to ensure the stability of the first isolation valve 4 during lifting and lowering, thereby reducing the generation of dust particles, as shown in FIG. Figure 1 As shown, the lifting mechanism 3 includes a first lifter 31 (such as a lifting cylinder or a motor), a transmission shaft 32 and a sliding member 33; the first lifter 31 is fixed on the support frame 1; the support frame 1 is provided with a slide rail (not shown) adapted to the sliding member 33, and the sliding member 33 is slidably arranged on the slide rail; the disassembly and assembly mechanism 2 is fixed on the sliding member 33; the output end of the first lifter 31 is connected to the sliding member 33 through the transmission shaft 32, which is used to control the sliding member 33 to slide along the slide rail, so that the disassembly and assembly mechanism 2 follows the movement of the sliding member 33 to disassemble and assemble the first isolation valve 4.

[0054] In some specific embodiments, in order to further improve the stability of the mobile first isolation valve 4, as Figure 1 As shown, the number of the disassembly and assembly mechanisms 2 is 2 (the specific number can be adjusted according to actual needs), and they are evenly distributed on the sliding member 33.

[0055] Based on the above disassembly and assembly device, Figure 6As shown, the utility model also provides an etching device, including the above-mentioned disassembly and assembly device, and a connected transmission module 10, a process module 11, a fixed plate 5, a lifting rod 6 and a second lifter 7; the first isolation valve 4 is arranged on the fixed plate 5, and the bottom of the fixed plate 5 is connected to the output end of the second lifter 7 (such as a lifting cylinder or a motor) through the lifting rod 6; a first isolation valve 4 is arranged between the transmission module 10 and the process module 11; the support frame 1 of the disassembly and assembly device is installed at the connection 9 of the transmission module 10 and the process module 11, so that the disassembly and assembly mechanism 2 and the lifting mechanism 3 of the disassembly and assembly device are located at the opening 8 of the etching device; the disassembly and assembly mechanism 2 is used for being detachably fixedly connected to the first isolation valve 4 of the etching device; the lifting mechanism 3 is used for controlling the movement of the disassembly and assembly mechanism 2 relative to the etching device after the disassembly and assembly mechanism 2 forms a fixed connection with the first isolation valve 4, so as to disassemble and assemble the first isolation valve 4. When disassembling the first isolation valve 4, first open the first isolation valve 4 through the second lifter 7, then open the cover plate at the opening 8, and use a long-handled screwdriver to remove the fixing screws on the first isolation valve 4 (used to fix the first isolation valve 4 on the fixing plate 5), and then install the support frame 1 of the disassembly and assembly device at the connection 9, and the lifting mechanism 3 works to control the connecting screw 22 to move downward, so that the connecting screw 22 gradually contacts the threaded hole on the first isolation valve 4 (that is, the screw hole of the fixing screw). At this time, the rotary driver 21 works to drive the connecting screw 22 to screw into the threaded hole, thereby forming a threaded connection, that is, completing the fixed connection between the disassembly and assembly mechanism 2 and the first isolation valve 4, and the rotary driver 21 stops working. The lifting mechanism 3 works to control the first isolation valve 4 to rise through the disassembly and assembly mechanism 2, thereby lifting the first isolation valve 4 out of the chamber, and then the rotary driver 21 controls the connecting screw 22 to rotate in the opposite direction, thereby releasing the fixed connection and removing the first isolation valve 4, thereby completing the disassembly of the first isolation valve 4. When installing the first isolation valve 4, the lifting mechanism 3 works to control the connecting screw 22 to move upward until the bottom of the connecting screw 22 is outside the chamber, and the rotary driver 21 works to drive the connecting screw 22 to be screwed into the threaded hole of the first isolation valve 4, thereby forming a threaded connection, that is, completing the fixed connection between the disassembly mechanism 2 and the first isolation valve 4, and the rotary driver 21 stops working, and the lifting mechanism 3 works to control the first isolation valve 4 to descend through the disassembly mechanism 2, and the first isolation valve 4 is moved into the chamber and placed on the fixed plate 5, and then the rotary driver 21 controls the connecting screw 22 to rotate in the opposite direction, thereby releasing the fixed connection, and a long-handled screwdriver is used to screw the fixing screw into the threaded hole to fix the first isolation valve 4, and the disassembly device is removed, and the cover plate at the opening 8 is fixed to the sealing ring (not shown) with screws to ensure sealing, thereby reducing leakage, and thus completing the installation of the first isolation valve 4.By optimizing the installation and disassembly of the first isolation valve 4, the first isolation valve 4 can be disassembled and installed without opening the transfer chamber, saving working time and manpower, reducing equipment restart time, improving equipment utilization rate, saving labor costs, reducing the probability of dust particle generation, and improving the chamber environment.

[0056] In some embodiments, Figure 6 As shown, the etching equipment also includes a wafer loader and unloader 13, an equipment front-end module 14 and an airlock chamber 15; the transmission module 10 is connected to one end of the equipment front-end module 14 through the airlock chamber 15, and the other end of the equipment front-end module 14 is connected to the wafer loader and unloader 13.

[0057] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A disassembly and assembly device for etching equipment, characterized in that: include: A support frame and a disassembly and assembly mechanism and a lifting mechanism arranged on the support frame; The disassembly and assembly mechanism is connected to the support frame through the lifting mechanism, and the disassembly and assembly mechanism and the lifting mechanism are used to be installed at the opening of the etching device through the support frame; The disassembly and assembly mechanism is used to be detachably fixedly connected to the first isolation valve of the etching device; The lifting mechanism is used to control the movement of the disassembly and assembly mechanism relative to the etching device after the disassembly and assembly mechanism is fixedly connected to the first isolation valve, so as to disassemble and assemble the first isolation valve.

2. The disassembly and assembly device according to claim 1, characterized in that: The detachable connection is a threaded connection, a snap-fit ​​connection or a hoisting connection.

3. The disassembly and assembly device according to claim 2, characterized in that: The disassembly and assembly mechanism comprises a rotary driver and a connecting screw; One end of the connecting screw rod is connected to the output end of the rotary driver, and the other end cooperates with the threaded hole on the first isolation valve to disassemble and assemble the first isolation valve; The rotary driver is used to drive the connecting screw to rotate so that the other end of the connecting screw is threadedly connected to the threaded hole.

4. The disassembly and assembly device according to claim 2, characterized in that: The disassembly and assembly mechanism comprises a rotary driver, a connecting screw and a hook; One end of the connecting screw is connected to the output end of the rotary driver, and the other end is connected to the hook; The hook cooperates with the lifting ring on the first isolation valve to disassemble and assemble the first isolation valve; The rotary driver is used to drive the hook to rotate through the connecting screw rod, so that the other end of the connecting screw rod forms a hoisting connection with the hoisting ring through the hook.

5. The disassembly and assembly device according to claim 1, characterized in that: The lifting mechanism comprises a first lifter, a transmission shaft and a sliding member; The first lifter is fixed on the support frame; The support frame is provided with a slide rail adapted to the slide member, and the slide member is slidably arranged on the slide rail; The disassembly and assembly mechanism is fixed on the sliding member; The output end of the first lifter is connected to the sliding member through the transmission shaft, and is used to control the sliding member to slide along the slide rail, so that the disassembly and assembly mechanism follows the movement of the sliding member to disassemble and assemble the first isolation valve.

6. The disassembly and assembly device according to claim 5, characterized in that: The number of the disassembly and assembly mechanisms is multiple and evenly distributed on the sliding member.

7. An etching device, characterized in that: It comprises the disassembly and assembly device as described in any one of claims 1 to 6, and a transmission module and a process module connected thereto; A first isolation valve is provided between the transmission module and the process module; The support frame of the disassembly and assembly device is installed at the connection between the transmission module and the process module, so that the disassembly and assembly mechanism and the lifting mechanism of the disassembly and assembly device are located at the opening of the etching equipment; The disassembly and assembly mechanism is used to be detachably fixedly connected to the first isolation valve of the etching device; The lifting mechanism is used to control the movement of the disassembly and assembly mechanism relative to the etching device after the disassembly and assembly mechanism is fixedly connected to the first isolation valve, so as to disassemble and assemble the first isolation valve.

8. The etching device according to claim 7, characterized in that: Also included is a fixed plate, a lifting rod, and a second lifter; The first isolation valve is arranged on the fixed disk, and the bottom of the fixed disk is connected to the output end of the second lifter through the lifting rod.

9. The etching device according to claim 7, characterized in that: Also includes a sealing ring; The sealing ring is installed at the opening in a detachable connection manner to form a seal with the first isolation valve.

10. The etching device according to claim 7, characterized in that: It also includes wafer handlers, equipment front-end modules and airlocks; The transmission module is connected to one end of the equipment front-end module through an airlock chamber, and the other end of the equipment front-end module is connected to the wafer handling machine.

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