Furnace tube air inlet device and furnace tube equipment
By designing an intake pipe structure with inner and outer sleeves in the intake device of the ALD furnace pipe equipment, the problem of uneven temperature and pressure difference of reaction gas is solved, and the uniformity of wafer film thickness in the reaction chamber is improved.
Patent Information
- Application Number
- CN202421661813.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-12
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-07-12
AI Technical Summary
In the existing ALD furnace tube equipment, after the reaction gas enters the intake pipe from the bottom, there is uneven temperature difference and pressure difference, resulting in uneven film thickness on the wafer in the reaction chamber, and poor uniformity between and within the sheets.
A furnace pipe air intake device is designed, including first and second air intake branches arranged longitudinally, the lower end of the second air intake branch is connected to the air intake port, and a plurality of first air holes are provided on the pipe wall of the first air intake branch. The reaction gas first passes upward from the lower end of the second air intake branch to the upper end, and then enters the first air intake branch and sprays from the first air hole to the inside of the reaction chamber from top to bottom.
By providing an intake pipe structure with inner and outer mutually arranged in the air intake device in the reaction chamber, heating can be performed before the reaction gas is introduced, temperature uniformity can be improved, and the reaction gas flow rate can be increased by increasing the top pressure difference, reducing the concentration step drop rate, thereby improving inter-sheet and in-sheet uniformity.
Smart Images
Figure CN222770952U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a furnace tube air intake device and furnace tube equipment. Background Art
[0002] Existing ALD furnace tube equipment usually adopts the bottom air intake method to provide reaction gas to the reaction chamber. Among them, a vertical air intake pipe is provided in the reaction chamber, and a plurality of air holes arranged along the axial direction are provided on the side wall of the air intake pipe. The reaction gas enters the air intake pipe from the bottom, and in the process of flowing upward along the air intake pipe, it is ejected from each air hole into the reaction chamber for processing.
[0003] In the above-mentioned air intake method, after the reaction gas enters the air intake pipe from the bottom, it will be directly ejected from the air holes located at the lower position first, and then go up along the air intake pipe and be ejected from the air holes at the upper position in sequence. Since the temperature of the reaction gas is relatively low when it just enters the bottom of the air intake pipe, and when it reaches the top of the air intake pipe, it has been heated to a certain extent in the reaction chamber, there will be a certain temperature difference when the reaction gas is ejected from the air holes at different upper and lower positions. As the temperature increases, the average energy of the reactants in the reaction gas will increase, causing more ordinary molecules to become activated molecules, thereby promoting the reaction. This causes the problem of uneven reaction on the wafers located at different upper and lower positions in the reaction chamber, and the thickness of the film grown on the wafer at the bottom of the reaction chamber is thinner than the thickness of the film grown on the wafer at the top of the reaction chamber.
[0004] In addition, since the reaction gas is first introduced from the bottom, when the reaction gas reaches the pores at the top, the pressure difference will be smaller than that at the bottom. Under the same flow area, the smaller the pressure difference, the slower the flow rate, so that the flow rate of the reaction gas ejected from the top pores will be lower than the flow rate of the reaction gas ejected from the bottom pores. At the same time, since the exhaust port is usually located on the opposite side of the bottom of the reaction chamber, the airflow direction of the reaction gas ejected from the top pores presents a parabolic shape, resulting in a higher step-down rate of concentration of the reaction gas at the edge and center of the wafer, resulting in poor uniformity of film thickness on the wafer.
[0005] The existence of the above phenomenon causes the dual problems of poor wafer-to-wafer uniformity (WTW) and poor intra-wafer uniformity (WIW) on the film thickness of the wafer surface in the reaction chamber. Utility Model Content
[0006] The purpose of the utility model is to overcome the above-mentioned defects in the prior art and provide a furnace tube air intake device and furnace tube equipment.
[0007] To achieve the above purpose, the technical solution of the utility model is as follows:
[0008] The utility model provides a furnace pipe air intake device, comprising:
[0009] An air intake pipe is arranged at one side of the reaction chamber, and the air intake pipe includes a first air intake branch pipe and a second air intake branch pipe which are longitudinally arranged and connected. The lower end of the second air intake branch pipe is connected to an air inlet arranged on the reaction chamber. A plurality of first air holes which are arranged axially and connected to the interior of the reaction chamber are provided on the pipe wall of the first air intake branch pipe. The upper end of the first air intake branch pipe is connected to the interior of the second air intake branch pipe at the upper end of the second air intake branch pipe.
[0010] Further, the first air inlet branch pipe is arranged in the second air inlet branch pipe, the lower end of the first air inlet branch pipe and the upper end of the second air inlet branch pipe are closed ends, and a plurality of second air holes arranged along the axial direction are provided on the tube wall of the second air inlet branch pipe, and the first air holes are correspondingly connected with the second air holes, so that the first air holes are connected with the interior of the reaction chamber through the second air holes.
[0011] Further, each of the first air holes is communicated with the corresponding second air holes through a third air intake branch pipe, and the first air intake branch pipe is connected to the second air intake branch pipe through the third air intake branch pipe.
[0012] Further, the diameters of the second intake branch pipe, the first intake branch pipe and the third intake branch pipe are reduced successively; and / or, the lengths of the second intake branch pipe, the first intake branch pipe and the third intake branch pipe are reduced successively; and / or, the third intake branch pipe is arranged horizontally.
[0013] Furthermore, the first intake branch pipe and the second intake branch pipe are coaxially or eccentrically arranged.
[0014] Further, there is a first distance between the tube wall of the first intake branch pipe and the tube wall of the second intake branch pipe, there is a second distance between the upper end of the first intake branch pipe and the upper end of the second intake branch pipe, and the first distance is smaller than the second distance.
[0015] Furthermore, the aperture of the first pore is equal to or different from the aperture of the second pore.
[0016] Furthermore, it also includes a fourth air intake branch pipe, the lower end of the second air intake branch pipe is connected to the first end of the fourth air intake branch pipe, and the second end of the fourth air intake branch pipe serves as the air intake port.
[0017] The utility model also provides a furnace tube device, comprising a reaction chamber, in which the furnace tube air intake device is arranged.
[0018] Furthermore, an exhaust port is provided on the reaction chamber, and the exhaust port is located on the other side of the reaction chamber opposite to the air inlet pipe of the furnace tube air inlet device, and the setting height of the exhaust port on the reaction chamber is lower than the setting height of the lowest first air hole on the air inlet pipe.
[0019] It can be seen from the above technical scheme that the utility model arranges an air intake pipe including a first air intake branch pipe and a second air intake branch pipe connected to each other in the longitudinal direction in the reaction chamber, arranges a plurality of first air holes connected to the interior of the reaction chamber on the pipe wall of the first air intake branch pipe, connects the lower end of the second air intake branch pipe to the air inlet, and connects the upper end of the first air intake branch pipe to the interior of the second air intake branch pipe at the upper end of the second air intake branch pipe. When the reaction gas is introduced into the air inlet, the reaction gas first passes upward from the lower end of the second air intake branch pipe to the upper end of the second air intake branch pipe, and then enters the first air intake branch pipe from the upper end of the first air intake branch pipe connected to the second air intake branch pipe, and is discharged from the air inlet from top to bottom. The first air hole sprays toward the interior of the reaction chamber, so that the reaction gas can be heated for a certain period of time inside the reaction chamber during the process of passing upward from the lower end of the second air inlet branch pipe to the upper end of the second air inlet branch pipe. Therefore, when the reaction gas is further passed to the bottom of the first air inlet branch pipe, the reaction rate is slow due to the lower temperature as in the past, thereby improving the uniformity between sheets. At the same time, by allowing the reaction gas to be first sprayed from the first air hole located at the top of the first air inlet branch pipe, the pressure difference at the top can be increased, so that the flow rate of the reaction gas there is increased, thereby reducing the step-down rate of the reaction gas concentration in the horizontal direction of the top, thereby improving the uniformity within the sheet. In addition, by disposing the first air inlet branch pipe in the second air inlet branch pipe to form an inner and outer nested structure, the air can be first taken in through the second air inlet branch pipe (outer pipe) and then exhausted through the first air inlet branch pipe (inner pipe). When performing the gas purge step of the ALD process, the reaction gas can be completely taken away by the purge gas, which can eliminate the problem of residual reaction gas in the air inlet pipe, thereby avoiding pollution problems caused by unclean purge. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 The present invention is a schematic structural diagram of a furnace tube air intake device according to a preferred embodiment of the present invention.
[0021] Figure 2 The utility model is a structural schematic diagram of a furnace tube device according to a preferred embodiment of the present invention. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.
[0023] The specific implementation of the utility model is further described in detail below in conjunction with the accompanying drawings.
[0024] refer to Figure 1-Figure 2 The furnace tube air intake device of the utility model comprises an air intake pipe 20 arranged at one side (the left side in the figure) of the reaction chamber 10 .
[0025] The air inlet pipe 20 is disposed longitudinally in the reaction chamber 10. The air inlet pipe 20 includes a first air inlet branch pipe 23 and a second air inlet branch pipe 24. The first air inlet branch pipe 23 and the second air inlet branch pipe 24 are disposed longitudinally; and the first air inlet branch pipe 23 and the second air inlet branch pipe 24 are connected.
[0026] The reaction chamber 10 is provided with an air inlet 11 ; the lower end 243 of the second air inlet branch pipe is connected to the air inlet 11 .
[0027] A plurality of first air holes 231 are provided on the wall of the first air inlet branch pipe 23; the first air holes 231 are arranged axially on the wall of the first air inlet branch pipe 23 and communicate with the interior of the reaction chamber 10. In addition, the upper end 232 of the first air inlet branch pipe is communicated with the interior of the second air inlet branch pipe 24 at the upper end 242 of the second air inlet branch pipe.
[0028] In some embodiments, the first air intake branch pipe 23 is axially arranged in the second air intake branch pipe 24, forming an air intake pipe composite structure in which an inner pipe (first air intake branch pipe 23) and an outer pipe (second air intake branch pipe 24) are nested. That is, the air intake pipe 20 is an inner and outer double-layer air intake pipe structure. Therefore, the overall length of the air intake pipe 20 in the reaction chamber 10 will not be significantly increased.
[0029] The upper end 232 of the first air inlet branch pipe is an open end, and the lower end 233 of the first air inlet branch pipe is a closed end. The upper end 242 of the second air inlet branch pipe is a closed end, and the lower end 243 of the second air inlet branch pipe is an open end. In this way, when the reaction gas introduced from the air inlet 11 reaches the upper end 242 of the second air inlet branch pipe from the lower end 243 of the second air inlet branch pipe, it is blocked by the closed upper end of the second air inlet branch pipe 24 and is guided to enter the upper end 232 of the first air inlet branch pipe instead, and the reaction gas entering the first air inlet branch pipe 23 is prevented from entering the second air inlet branch pipe 24 again from the lower end 233 of the first air inlet branch pipe.
[0030] A plurality of second air holes 241 are provided on the wall of the second air inlet branch pipe 24; each second air hole 241 is arranged axially on the wall of the second air inlet branch pipe 24 and communicates with the interior of the reaction chamber 10. The first air holes 231 on the inner first air inlet branch pipe 23 and the second air holes 241 on the outer second air inlet branch pipe 24 are arranged correspondingly and communicated, so that the first air holes 231 are communicated with the interior of the reaction chamber 10 through the second air holes 241. The reaction gas entering the first air inlet branch pipe 23 from the upper end flows from each first air hole 231 to the corresponding second air hole 241 from top to bottom, and finally sprays into the interior of the reaction chamber 10 through the second air holes 241 to provide reaction gas for the process.
[0031] It is worth noting that by providing the second air inlet branch 24, the reaction gas can be heated by the temperature inside the reaction chamber 10 during the process of rising in the second air inlet branch 24. In this way, when the reaction gas flows downward to the bottom of the first air inlet branch 23, the excessive temperature difference of the reaction gas between the top and the bottom can be improved. At the same time, the pressure difference at the top position can be relatively increased, so that the flow rate of the reaction gas at this position is increased.
[0032] In some embodiments, the lower end 233 of the first intake branch pipe and the upper end 242 of the second intake branch pipe are arc-shaped closed ends.
[0033] refer to Figure 1-Figure 2 In some embodiments, a third air intake branch pipe 22 is further included. Each first air hole 231 is connected to the corresponding second air hole 241 through the third air intake branch pipe 22. In other words, the first air hole 231 is an end hole formed on the tube wall of the first air intake branch pipe 23 at the inner end of the third air intake branch pipe 22, and the second air hole 241 is another end hole formed on the tube wall of the second air intake branch pipe 24 at the outer end of the third air intake branch pipe 22. Thus, the first air hole 231 is connected to the corresponding second air hole 241 through the third air intake branch pipe 22, thereby preventing the reaction gas output from the first air hole 231 from leaking into the second air intake branch pipe 24.
[0034] Furthermore, the first air intake branch pipe 23 is fixedly connected to the second air intake branch pipe 24 through the third air intake branch pipe 22. That is, the third air intake branch pipe 22 is bridged on the pipe wall of the first air intake branch pipe 23 and the second air intake branch pipe 24, so that the first air intake branch pipe 23 is axially suspended inside the second air intake branch pipe 24 and is fixed. In this way, there is no need to set an additional connection structure between the first air intake branch pipe 23 and the second air intake branch pipe 24, thereby minimizing the impact on the rising airflow.
[0035] In some embodiments, the diameters of the second intake branch pipe 24 , the first intake branch pipe 23 , and the third intake branch pipe 22 decrease in sequence.
[0036] In some embodiments, the lengths of the second intake branch pipe 24 , the first intake branch pipe 23 , and the third intake branch pipe 22 decrease in sequence.
[0037] In some embodiments, the third gas inlet branch pipe 22 is disposed horizontally so that the reaction gas is sprayed into the reaction chamber 10 along a horizontal direction.
[0038] In some embodiments, the first intake branch pipe 23 and the second intake branch pipe 24 are coaxially arranged.
[0039] In some embodiments, the first intake branch pipe 23 and the second intake branch pipe 24 are arranged on different axes (not on the same axis).
[0040] In some embodiments, the tube wall of the first air intake branch pipe 23 and the tube wall of the second air intake branch pipe 24 are separated by a first distance L1, and the upper end 232 of the first air intake branch pipe and the upper end 242 of the second air intake branch pipe are separated by a second distance L2. The first distance L1 is smaller than the second distance L2 to ensure that when the reaction gas passes through the gap between the second air intake branch pipe 24 and the first air intake branch pipe 23 from the bottom to the top, there is sufficient rotation space so that it can be more easily introduced into the upper end 232 of the first air intake branch pipe.
[0041] In some embodiments, the aperture of the first air hole 231 is equal to the aperture of the second air hole 241 .
[0042] In some embodiments, the aperture of the first air hole 231 and the aperture of the second air hole 241 are not equal.
[0043] In some embodiments, the third intake branch pipe 22 is formed by a nozzle. The first air hole 231 is an inlet of the nozzle disposed on the wall of the first intake branch pipe 23 , and the second air hole 241 is a nozzle of the nozzle disposed on the wall of the second intake branch pipe 24 .
[0044] refer to Figure 1-Figure 2. In some embodiments, a fourth air inlet branch 21 is further included. The fourth air inlet branch 21 is horizontally arranged in the reaction chamber 10 and is located below the second air inlet branch 24. The first end of the fourth air inlet branch 21 is connected to the lower end 243 of the second air inlet branch, and the second end (the left end in the figure) of the fourth air inlet branch 21 is connected to the cavity wall of the reaction chamber 10 as the air inlet 11. The reaction gas introduced from the air inlet 11 flows upward along the fourth air inlet branch 21 through the lower end 243 of the second air inlet branch to reach the upper end 242 of the second air inlet branch, and then is guided into the upper end 232 of the first air inlet branch under the action of pressure, and continues to flow to the lower end 233 (bottom) of the first air inlet branch. In this process, the reaction gas is output from the first air hole 231 to the second air hole 241 through the third air inlet branch 22 from top to bottom, and finally ejected from the second air hole 241 to the inside of the reaction chamber 10.
[0045] In some embodiments, the first intake branch pipe 23, the second intake branch pipe 24, the third intake branch pipe 22 and the fourth intake branch pipe 21 include but are not limited to circular pipes.
[0046] In some embodiments, the fourth air intake branch pipe 21 and the second air intake branch pipe 24 are transitionally connected by a bend pipe 25. The closed lower end of the first air intake branch pipe 23 is located above the upper tube wall of the fourth air intake branch pipe 21, and has a third spacing L3 in the vertical direction between the closed lower end and the lower tube wall of the bend pipe 25. The third spacing L3 is greater than the first spacing L1 and the second spacing L2 to ensure smoothness when the reaction gas passes into the lower end of the second air intake branch pipe 24.
[0047] The following is a further detailed description of a furnace tube device of the utility model through specific implementation modes and in combination with the accompanying drawings.
[0048] refer to Figure 1-Figure 2 A furnace tube device of the utility model comprises a reaction chamber 10, in which the furnace tube air intake device of the utility model is arranged.
[0049] In some embodiments, the reaction chamber 10 is provided with an exhaust port 12. The exhaust port 12 is located on the other side of the reaction chamber 10 (the right side in the figure) opposite to the air inlet pipe 20 of the furnace pipe air inlet device. In addition, the setting height of the exhaust port 12 in the axial direction of the reaction chamber 10 is lower than the setting height of the first air hole 231 (second air hole 241) located at the lowest position on the air inlet pipe 20.
[0050] The gas inlet 11 is used to introduce reaction gas, and the gas outlet 12 is used to discharge by-products in the process.
[0051] The furnace tube device may be used to perform an ALD thin film deposition process on a multi-layer processing object, such as a wafer, loaded in the reaction chamber 10 , but is not limited thereto.
[0052] Depend on Figure 1-Figure 2 It can be seen that the reaction gas introduced from the air inlet 11 will be passively heated for a certain period of time inside the reaction chamber 10 under the heat conduction of the temperature inside the reaction chamber 10 during the process of flowing upward along the fourth air inlet branch 21 through the lower end 243 of the second air inlet branch to the upper end of the second air inlet branch 24. In this way, when the reaction gas subsequently flows downward from the upper end 232 of the first air inlet branch to the bottom of the first air inlet branch 23, the reaction gas temperature will not be low when it reaches the bottom, thereby improving the situation where the temperature difference of the reaction gas between the top and the bottom is too large. In addition, the reaction gas is ejected from the first air hole 231 on the first air inlet branch 23 to the second air hole 241 from top to bottom, which can relatively increase the pressure difference at the top position, increase the flow rate of the reaction gas there, and make the airflow direction of the reaction gas ejected from the top air hole (reference Figure 2 The curve with an arrow in the middle) remains relatively straight above the wafer to avoid presenting a parabolic shape, thereby reducing the step-down rate of the reaction gas concentration in the horizontal direction of the top and improving the uniformity of the reaction gas concentration in the horizontal direction of the top.
[0053] In addition, the use of the inner and outer double-layer air inlet pipe 20 of the utility model and the above-mentioned air intake method can eliminate the dead corners inside the air inlet pipe 20. When performing the gas purge step of the ALD process, the reaction gas can be completely taken away by the purge gas, thereby preventing the reaction gas from remaining in the air inlet pipe 20 and eliminating problems such as particle contamination caused by unclean purge.
[0054] In summary, the utility model arranges an air intake pipe 20 including a first air intake branch pipe 23 and a second air intake branch pipe 24 connected to each other in the longitudinal direction in the reaction chamber 10, arranges a plurality of first air holes 231 connected to the interior of the reaction chamber 10 on the tube wall of the first air intake branch pipe 23, connects the lower end 243 of the second air intake branch pipe to the air intake port 11, and connects the upper end 232 of the first air intake branch pipe to the interior of the second air intake branch pipe 24 at the upper end 242 of the second air intake branch pipe. When the reaction gas is introduced into the air intake port 11, the reaction gas is first introduced upward from the lower end 243 of the second air intake branch pipe to the upper end 242 of the second air intake branch pipe, and then enters the first air intake branch pipe 23 from the upper end 232 of the first air intake branch pipe connected to the interior of the second air intake branch pipe 24, and then flows from the upper end 232 of the first air intake branch pipe connected to the interior of the second air intake branch pipe 24 to the lower end 243 of the second air intake branch pipe. The first air hole 231 is ejected into the reaction chamber 10 through the second air hole 241. In this way, the reaction gas can be heated for a certain period of time in the reaction chamber 10 during the process of passing upward from the lower end 243 of the second air inlet branch pipe to the upper end 242 of the second air inlet branch pipe. Therefore, when the reaction gas is further passed into the bottom of the first air inlet branch pipe 23, the reaction rate is slow due to the lower temperature as in the past, thereby improving the uniformity between the sheets. At the same time, by ejecting the reaction gas from the first air hole 231 located at the top of the first air inlet branch pipe 23 through the second air hole 241, the pressure difference at the top can be increased, so that the flow rate of the reaction gas there is increased, thereby reducing the step-down rate of the reaction gas concentration in the horizontal direction of the top, thereby improving the uniformity within the sheet.
[0055] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.
Claims
1. A furnace tube air intake device, characterized in that: include: An air intake pipe is arranged at one side of the reaction chamber, and the air intake pipe includes a first air intake branch pipe and a second air intake branch pipe which are longitudinally arranged and connected. The lower end of the second air intake branch pipe is connected to an air inlet arranged on the reaction chamber. A plurality of first air holes which are arranged axially and connected to the interior of the reaction chamber are provided on the pipe wall of the first air intake branch pipe. The upper end of the first air intake branch pipe is connected to the interior of the second air intake branch pipe at the upper end of the second air intake branch pipe.
2. The furnace tube air intake device according to claim 1, characterized in that: The first air inlet branch pipe is arranged in the second air inlet branch pipe, the lower end of the first air inlet branch pipe and the upper end of the second air inlet branch pipe are closed ends, a plurality of second air holes arranged along the axial direction are provided on the tube wall of the second air inlet branch pipe, the first air holes are correspondingly connected with the second air holes, so that the first air holes are connected with the interior of the reaction chamber through the second air holes.
3. The furnace tube air intake device according to claim 2, characterized in that: Each of the first air holes is communicated with the corresponding second air holes through a third air intake branch pipe, and the first air intake branch pipe is connected to the second air intake branch pipe through the third air intake branch pipe.
4. The furnace tube air intake device according to claim 3, characterized in that: The diameters of the second intake branch pipe, the first intake branch pipe and the third intake branch pipe are reduced successively; and / or, the lengths of the second intake branch pipe, the first intake branch pipe and the third intake branch pipe are reduced successively; and / or, the third intake branch pipe is arranged horizontally.
5. The furnace tube air intake device according to claim 2, characterized in that: The first intake branch pipe and the second intake branch pipe are coaxially or eccentrically arranged.
6. The furnace tube air intake device according to claim 2, characterized in that: There is a first distance between the tube wall of the first intake branch pipe and the tube wall of the second intake branch pipe, and there is a second distance between the upper end of the first intake branch pipe and the upper end of the second intake branch pipe, and the first distance is smaller than the second distance.
7. The furnace tube air intake device according to claim 2, characterized in that: The aperture of the first pore is equal to or different from the aperture of the second pore.
8. The furnace tube air intake device according to claim 2, characterized in that: It also includes a fourth air intake branch pipe, the lower end of the second air intake branch pipe is connected to the first end of the fourth air intake branch pipe, and the second end of the fourth air intake branch pipe serves as the air intake port.
9. A furnace tube device, characterized in that: It comprises a reaction chamber, in which the furnace tube air intake device according to any one of claims 1 to 8 is arranged.
10. The furnace tube equipment according to claim 9, characterized in that: The reaction chamber is provided with an exhaust port, which is located at the other side of the reaction chamber opposite to the air inlet pipe of the furnace tube air inlet device, and the setting height of the exhaust port on the reaction chamber is lower than the setting height of the lowest first air hole on the air inlet pipe.