Vacuum box for flash curing equipment

Abstract

The utility model discloses a vacuum box for flash curing equipment, which relates to the technical field of semiconductor processing equipment, and comprises a box body, two pressure relief pipes are arranged on the outer side of the box body in a penetrating manner, two movable pipes are arranged between the two pressure relief pipes, and the two movable pipes are symmetrically arranged; and connecting seats of semicircular structures are fixedly arranged at the two ends of the movable pipes correspondingly, the connecting seats are fixedly connected with one end of a pressure relief pipe through bolts, and filter cotton is arranged between the two movable pipes. The pressure relief pipes are arranged on the outer side of the box body, the movable pipe is arranged between the two pressure relief pipes, the filter cotton is arranged in the movable pipe, and the filter holes are formed in the filter cotton, so that external air can enter the box body through the movable pipe and the pressure relief pipes when the interior of the box body is subjected to pressure relief, and in the process, the pressure in the box body is reduced. And the filter cotton can filter dust in the air through the filter holes, so that the dust is prevented from entering the box body to influence the semiconductor device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a vacuum box for flash curing equipment. Background Art

[0002] With the development of technology, current semiconductor devices are usually stacked structures, such as self-luminous displays, top-incident photodetectors, image sensors, and solar cells. When manufacturing semiconductor devices with stacked structures, a solution method is usually used. The film layer of the semiconductor device formed by the solution method may have residual solvent, and the semiconductor device needs to be placed in a vacuum process chamber to remove the residual solvent. The existing method of removing solvent is called vacuum flash evaporation process, which is to place the semiconductor device in the process chamber, and then evacuate the process chamber to remove the residual solvent. In the prior art, the semiconductor device is placed in a vacuum box for flash evaporation.

[0003] However, there are some problems in the use of existing vacuum boxes. After the semiconductor devices are processed, the vacuum box needs to be depressurized. During the depressurization process, the outside air enters the vacuum box, and the dust in the air will adhere to the surface of the device after entering the vacuum box, affecting the subsequent processing of the device.

[0004] Therefore, it is necessary to invent a flash curing device with a vacuum box to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a vacuum box for flash curing equipment to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum box for flash curing equipment, comprising a box body, two pressure relief pipes are arranged through the outer side of the box body, two movable pipes are arranged between the two pressure relief pipes, the two movable pipes are arranged in a semicircular structure, and the two movable pipes are arranged symmetrically, both ends of the movable pipes are fixedly provided with connecting seats of a semicircular structure, and the connecting seat is fixedly connected to one end of the pressure relief pipe by bolts, a filter cotton is arranged between the two movable pipes, the filter cotton is arranged in a cylindrical structure, and a plurality of filter holes are arranged through the inside of the filter cotton, the plurality of filter holes are distributed in a ring array, and the filter holes are arranged in an "S"-shaped structure, a fixing block with a conical structure is fixedly arranged in the middle part of the inner side of the movable pipe, an extension pipe is fixedly arranged in the middle part of the outer side of the movable pipe, an air intake pipe is fixedly arranged at one end of the extension pipe by bolts, and a valve is fixedly arranged in the middle part of the air intake pipe.

[0007] Preferably, a box cover is provided above the box body, and a hinge is provided between the box body and the box cover.

[0008] Preferably, a sealing ring is provided on the upper surface of the box body, and a groove corresponding to the sealing ring is provided on the side where the box body and the box cover are close to each other.

[0009] Preferably, a buckle seat is fixedly provided on the outer side of the box body, and a connecting buckle corresponding to the buckle seat is fixedly provided on the outer side of the box cover.

[0010] Preferably, a handle is fixedly provided at the middle portion of the outer side wall of the box cover.

[0011] Preferably, an observation window is provided through the middle of the upper surface of the box cover.

[0012] Technical effects and advantages of the utility model:

[0013] 1. The utility model arranges a pressure relief pipe on the outside of the box, a movable pipe is arranged between the two pressure relief pipes, a filter cotton is arranged inside the movable pipe, and a filter hole is arranged inside the filter cotton. When the pressure inside the box is relieved, the outside air can enter the box through the movable pipe and the pressure relief pipe. In this process, the filter cotton can filter the dust in the air through the filter hole to prevent the dust from entering the box and affecting the semiconductor devices;

[0014] 2. The utility model arranges a box cover on the top of the box body, a buckle seat is arranged on the outer side of the box body, and a connecting buckle is arranged on the outer side of the box cover. The buckle seat cooperates with the connecting buckle to achieve the connection and fixation between the box body and the box cover. A sealing ring is arranged between the box body and the box cover. The setting of the sealing ring can improve the sealing effect between the box body and the box cover, thereby ensuring the smooth progress of the flash evaporation operation inside the box body. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] Figure 2 It is a schematic diagram of the closed state of the overall structure of the utility model.

[0017] Figure 3 It is a schematic diagram of the movable tube structure of the utility model.

[0018] In the figure: 1. box body; 2. box cover; 3. pressure relief pipe; 4. movable pipe; 5. connecting seat; 6. filter cotton; 7. filter hole; 8. fixing block; 9. extension pipe; 10. air inlet pipe; 11. valve; 12. hinge; 13. sealing ring; 14. buckle seat; 15. connecting buckle; 16. handle; 17. observation window. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] The utility model provides Figure 1-3 A vacuum box for flash curing equipment shown in the figure comprises a box body 1, two pressure relief pipes 3 are arranged through the outer side of the box body 1, two movable pipes 4 are arranged between the two pressure relief pipes 3, the two movable pipes 4 are arranged in a semicircular structure, and the two movable pipes 4 are arranged symmetrically;

[0021] In addition, both ends of the movable tube 4 are fixedly provided with a connecting seat 5 of a semicircular structure, and the connecting seat 5 is fixedly connected to one end of the pressure relief tube 3 by bolts. The two movable tubes 4 can be assembled after being installed between the two pressure relief tubes 3. A filter cotton 6 is arranged between the two movable tubes 4. The filter cotton 6 is arranged in a cylindrical structure, and a plurality of filter holes 7 are arranged in the interior of the filter cotton 6. The plurality of filter holes 7 are distributed in a ring array, and the filter holes 7 are arranged in an "S"-shaped structure. When the air moves in the filter holes 7 inside the filter cotton 6, since the filter holes 7 are arranged in an "S"-shaped structure, the dust in the air collides with the inner wall of the filter hole 7 to complete the filtration of the dust in the air.

[0022] Moreover, a fixed block 8 with a conical structure is fixedly arranged in the middle of the inner side of the movable tube 4. The setting of the fixed block 8 can guide the air to ensure that the air can enter the movable tube 4. An extension tube 9 is fixedly arranged in the middle of the outer side of the movable tube 4. An air intake pipe 10 is fixedly arranged at one end of the extension tube 9 by bolts, and a valve 11 is fixedly arranged in the middle of the air intake pipe 10. The valve 11 can control the outside air to enter the interior of the box body 1 to control the pressure relief process.

[0023] At the same time, a box cover 2 is arranged above the box body 1, and a hinge 12 is arranged between the box body 1 and the box cover 2. A sealing ring 13 is arranged on the upper surface of the box body 1. A groove corresponding to the sealing ring 13 is opened on the side where the box body 1 and the box cover 2 are close to each other. The setting of the sealing ring 13 can improve the sealing effect between the box body 1 and the box cover 2;

[0024] Furthermore, a snap seat 14 is fixedly provided on the outer side of the box body 1, a connecting buckle 15 corresponding to the snap seat 14 is fixedly provided on the outer side of the box cover 2, a handle 16 is fixedly provided on the middle part of the outer wall of the box cover 2, and an observation window 17 is provided through the middle part of the upper surface of the box cover 2. The setting of the observation window 17 facilitates the staff to observe the working conditions inside the box body 1.

[0025] Working principle of this utility model:

[0026] When the device is in use, the box body 1 and the box cover 2 can be connected and fixed by the connecting buckle 15 and the snap seat 14. The air inside the box body 1 can be extracted by a vacuum pump to create a vacuum environment. After the flash evaporation operation inside the box body 1 is completed, the valve 11 can be opened to allow the outside air to pass through the air inlet pipe 10, the extension pipe 9, the movable pipe 4 and the pressure relief pipe 3 under the action of air pressure to enter the inside of the box body 1, thereby achieving a pressure relief effect. In addition, the air passes through the filter cotton 6 in the process of passing through the movable pipe 4. When the air moves in the filter hole 7 inside the filter cotton 6, since the filter hole 7 is set to an "S" shape structure, the dust in the air collides with the inner wall of the filter hole 7 to complete the filtration of the dust in the air, thereby preventing the dust from entering the inside of the box body 1.

[0027] Finally, it should be noted that the above is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A vacuum box for flash curing equipment, comprising a box body (1), characterized in that: Two pressure relief pipes (3) are provided through the outer side of the box body (1), two movable pipes (4) are provided between the two pressure relief pipes (3), the two movable pipes (4) are both provided with a semicircular structure, and the two movable pipes (4) are symmetrically provided, both ends of the movable pipes (4) are fixedly provided with a connecting seat (5) with a semicircular structure, and the connecting seat (5) is fixedly connected to one end of the pressure relief pipe (3) by means of bolts, a filter cotton (6) is provided between the two movable pipes (4), and the filter cotton (6) is provided The movable tube (4) is a cylindrical structure, and a plurality of filter holes (7) are provided inside the filter cotton (6), the plurality of filter holes (7) are distributed in a ring array, and the filter holes (7) are provided in an "S"-shaped structure. A fixing block (8) with a conical structure is fixedly provided in the middle of the inner side of the movable tube (4), an extension tube (9) is fixedly provided in the middle of the outer side of the movable tube (4), an air intake pipe (10) is fixedly provided at one end of the extension tube (9) by means of bolts, and a valve (11) is fixedly provided in the middle of the air intake pipe (10).

2. A vacuum box for flash curing equipment according to claim 1, characterized in that: A box cover (2) is arranged above the box body (1), and a hinge (12) is arranged between the box body (1) and the box cover (2).

3. A vacuum box for flash curing equipment according to claim 2, characterized in that: A sealing ring (13) is provided on the upper surface of the box body (1), and a groove corresponding to the sealing ring (13) is provided on the side where the box body (1) and the box cover (2) are close to each other.

4. A vacuum box for flash curing equipment according to claim 3, characterized in that: A buckle seat (14) is fixedly provided on the outer side of the box body (1), and a connecting buckle (15) corresponding to the buckle seat (14) is fixedly provided on the outer side of the box cover (2).

5. The vacuum box for flash curing equipment according to claim 4, characterized in that: A handle (16) is fixedly provided in the middle of the outer side wall of the box cover (2).

6. The vacuum box for flash curing equipment according to claim 5, characterized in that: An observation window (17) is provided through the middle of the upper surface of the box cover (2).

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