Wafer transfer device

Abstract

The utility model discloses a wafer transfer device, comprising a manipulator used for taking and placing a wafer, the manipulator comprising a pedestal; the recognition mechanism is used for recognizing the posture of a wafer and comprises a support, an inductor and a driving part, the support is connected with the base in a sliding mode, the inductor is connected with the support, the driving part is arranged on one side wall of the base and connected with the support, and the recognition mechanism is used for recognizing the posture of the wafer. And the driving piece is used for driving the bracket to move towards or away from the wafer on the base so as to drive the sensor to synchronously move back and forth. The occupied space of the whole equipment can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a wafer transfer device. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its raw material is silicon. As the feature size of semiconductors becomes smaller and smaller, its processing technology becomes more and more complicated, and the processing and measurement equipment becomes more and more advanced, the precision requirements for wafer processing are becoming more and more stringent. Specialized mechanical equipment is required to grab the wafer. The most common mechanical equipment is the manipulator. In one application scenario, the manipulator transfers the wafer between the wafer box and the wafer boat.

[0003] When a robot grabs a wafer from a wafer box or a wafer boat, it needs to first identify the posture of the wafer in the wafer box or the wafer boat so that the subsequent robot can grab it more accurately.

[0004] However, in the prior art, the manipulator and the recognition device are separate structures, which takes up a large area. At the same time, the relative positions of the manipulator and the recognition device will move. After the recognition device recognizes the posture of the wafer, the manipulator will still have grasping errors when grasping.

[0005] Therefore, it is necessary to provide a wafer transfer device to solve the above problems existing in the prior art. Utility Model Content

[0006] The utility model aims to provide a wafer transfer device, which can effectively reduce the occupied space of the overall equipment.

[0007] To achieve the above purpose, the technical solution of the utility model is as follows:

[0008] A wafer transfer device, comprising:

[0009] A robot arm, the robot arm is used to take and place wafers, and the robot arm includes a base;

[0010] An identification mechanism is used to identify the posture of the wafer. The identification mechanism includes a bracket, a sensor and a driving member. The bracket is slidably connected to the base, the sensor is connected to the bracket, and the driving member is arranged on a side wall of the base and connected to the bracket. The driving member is used to drive the bracket to move toward or away from the wafer on the base, thereby driving the sensor to make synchronous reciprocating motion.

[0011] The beneficial effects of the wafer transfer device of the present invention are as follows: when the identification mechanism is in use, the bracket drives the sensor to slide on the base to the identification position, and the identification mechanism performs corresponding identification on the wafer. After the identification mechanism completes the identification task, the bracket drives the sensor to slide on the base to a set position closer to the manipulator, and at the same time, reset is also achieved. In this way, when the identification mechanism is not working, it maintains a compact structural layout with the manipulator, effectively reducing the occupied space of the overall equipment. At the same time, the bracket is set on the base to realize setting the identification mechanism and the manipulator as an integrated structure. The identification mechanism and the manipulator are equivalent to sharing a common base, which can effectively avoid the relative position of the identification mechanism and the manipulator from changing arbitrarily, thereby ensuring that the manipulator can accurately grasp the wafer according to the identified posture of the wafer, reducing the error in grasping the wafer, greatly improving production efficiency, and saving production costs.

[0012] Furthermore, the identification mechanism further includes a limiter assembly, which is disposed on the other side wall of the base and connected to the bracket, and is used to limit the bracket from moving toward or away from the wafer on the base. The beneficial effect is that when the bracket moves toward or away from the wafer on the base, the limiter assembly is used to limit the range of motion of the bracket, thereby preventing the bracket from moving too much.

[0013] Furthermore, the limit assembly includes a connecting rod, a slider, a fixed block and a fixed rod, the two fixed blocks are fixedly arranged on the other side wall of the base, the fixed rod is arranged between the two fixed blocks, the slider is slidably connected to the fixed rod, one end of the connecting rod is connected to the slider, and the other end is connected to the bracket. Its beneficial effect is that when the bracket slides on the base, it will drive the slider to slide along the fixed rod, and when the bracket drives the sensor to move to the set identification position, that is, when the bracket drives the sensor to move in the direction away from the manipulator, the slider will abut against one of the fixed blocks to limit the slider and the bracket from continuing to slide, and prevent the bracket from moving too much in the direction away from the manipulator; when the bracket drives the sensor to slide in the direction close to the manipulator, that is, when the bracket drives the sensor to reset, the slider will abut against another fixed block to limit the slider and the bracket from continuing to slide, and prevent the bracket from moving too much in the direction close to the manipulator.

[0014] Furthermore, the driving member includes a cylinder, which includes a piston rod as a driving end and a cylinder body, the cylinder body is fixedly arranged on a side wall of the base, and the piston rod is connected to one end of the split bracket.

[0015] Further, the bracket includes a first split frame, a second split frame and a connecting piece, one end of the connecting piece is connected to the first split frame, and the other end of the connecting piece is connected to the second split frame. The connecting piece is arranged at the bottom end of the base, and the first split frame and the second split frame are relatively arranged on two side walls of the base.

[0016] Furthermore, one end of the first split frame is connected to the driving member, and the other end of the first split frame is connected to the sensor. The driving member drives the first split frame to move toward or away from the wafer, thereby driving the sensor to perform synchronous reciprocating motion.

[0017] Furthermore, the manipulator also includes a support member and N end effectors, wherein N is a positive integer, and the N end effectors are connected to the support member, and the support member is slidably disposed on the base.

[0018] Furthermore, a base slide groove is provided at the upper end of the base, and the support member is driven to make a reciprocating motion in the base slide groove.

[0019] Furthermore, a first side slide groove and a second side slide groove are respectively provided on both side walls of the base, driving the first split frame to perform reciprocating motion in the first side slide groove, and the first split frame drives the second split frame to perform synchronous reciprocating motion in the second side slide groove through a connecting piece.

[0020] Furthermore, the N end effectors are arranged between the first split frame and the second split frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the structure of a wafer transfer device according to an embodiment of the utility model;

[0022] Figure 2 It is a schematic diagram of an identification mechanism of an embodiment of the utility model being arranged on a base;

[0023] Figure 3 for Figure 2 Schematic diagram of observation along direction A;

[0024] Figure 4 for Figure 2 Schematic diagram of the observation along direction B.

[0025] In the figure: 1, bracket; 11, first split frame; 12, second split frame; 2, connecting member; 3, sensor; 4, driving member; 5, limit assembly; 51, connecting rod; 52, slider; 53 fixed block; 54, fixed rod; 6, base; 7, end effector; 8, support member. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0027] The specific implementation of the utility model is further described in detail below in conjunction with the accompanying drawings.

[0028] like Figure 1-Figure 4 As shown, an embodiment of the utility model provides a wafer transfer device, including: a manipulator and a recognition mechanism. The manipulator is used to pick up and place wafers. The recognition mechanism is used to recognize the posture of the wafer. The posture of the wafer is the angle of the wafer, the distance between two adjacent wafers, etc. After the recognition mechanism recognizes that the wafer is in a graspable posture, the manipulator is driven to grasp the wafer, so that the wafer in a normal posture can be accurately grasped.

[0029] The manipulator includes a base 6, which serves as a carrier. The identification mechanism includes a bracket 1, a sensor 3 and a driving member 4. The bracket 1 is slidably connected to the base 6, that is, the bracket 1 slides relative to the base 6, thereby connecting the identification mechanism and the manipulator into an integrated structure. Specifically, the bracket 1 is connected to the base 6 through a slide rail and slides within a certain stroke. The installation of the entire bracket 1 has certain requirements for the overall horizontality of the base 6, so as to ensure the accuracy of the manipulator during execution. The sensor 3 is connected to the bracket 1, that is, when the bracket 1 is driven, the bracket 1 drives the sensor 3 to move synchronously. The driving member 4 is arranged on a side wall of the base 6 and connected to the bracket 1. The driving member 4 is used to drive the bracket 1 to move toward or away from the wafer on the base 6, thereby driving the sensor 3 to move back and forth synchronously. The bracket 1 of the identification mechanism is installed on the base 6 of the manipulator, that is, it is set as an integrated structure, which greatly saves the occupied space of the overall equipment and saves production costs. Sensor 3 includes an optical fiber sensor, which can identify the placement position and placement status of the wafer, whether the wafer is evenly and equidistantly placed in each slot in the wafer box, and whether it is stacked. If it is in an abnormal situation, the robot arm stops executing the grasping action; when there is no abnormal situation, the robot arm executes the grasping action.

[0030] like Figure 1As shown, in some embodiments of the utility model, the manipulator includes a support member 8 and N end effectors 7. N is a positive integer, and the N end effectors 7 are connected to the support member 8, and the support member 8 is slidably disposed on the base 6. For example, N is five, that is, five end effectors 7 grab five wafers. When the manipulator is working, the five end effectors 7 are driven on the base 6 to move toward the wafer, thereby grabbing the wafer; after grabbing the wafer, the five end effectors 7 move away from the wafer on the base 6, thereby placing the grabbed wafer in another wafer box or other location.

[0031] When the sensor 3 is carried by the bracket 1 to move toward the wafer, the sensor 3 identifies the posture of the wafer in the wafer box or wafer boat. After the identification is completed, that is, it is recognized that the parallel spacing between the upper and lower wafers in the box or slot is normal, the thickness of the wafer is normal, there is no cross-slot, and there is no overlap, which is a normal situation, the bracket 1 carries the sensor 3 to move away from the wafer, that is, reset. After the reset is completed, when the robot is driven to move toward or away from the wafer, the five end effectors 7 take and place the wafers in the wafer box or wafer boat. If it is recognized that the wafer is in an abnormal situation, the sensor 3 will send an alarm signal, and the robot will stop the grasping action.

[0032] like Figure 4 As shown, in some embodiments of the utility model, the identification mechanism further includes a limit assembly 5. The limit assembly 5 is disposed on the other side wall of the base 6 and is connected to the bracket 1. The limit assembly 5 is used to limit the movement of the bracket 1 on the base 6 toward or away from the wafer, that is, the limit assembly ensures that the bracket 1 can only move in the length direction of the base 6, and during the movement of the bracket 1, the relative manipulator will not shake. When the bracket 1 moves back and forth, the limit assembly 5 enables the bracket 1 to move more smoothly.

[0033] like Figure 4 As shown, in some embodiments of the utility model, the limit assembly 5 includes a connecting rod 51, a slider 52, a fixed block 53 and a fixed rod 54. The two fixed blocks 53 are fixedly arranged on the other side wall of the base 6. The fixed rod 54 is arranged between the two fixed blocks 53. The slider 52 is slidably connected to the fixed rod 54. One end of the connecting rod 51 is connected to the slider 52, and the other end is connected to the bracket 1. The design of the combined structure of the connecting rod 51, the slider 52, the fixed block 53 and the fixed rod 54 enables the bracket 1 to move only along the side wall of the base 6, and the stroke of the movement of the bracket 1 is adapted to the length of the fixed rod 54, and at the same time, during the movement, no shaking will occur relative to the manipulator. For example, the connecting rod 51 is L-shaped, which is convenient for connection with the bracket 1 and the slider 52.

[0034] like Figure 3As shown, in some embodiments of the utility model, the driving member 4 includes a cylinder. The cylinder includes a piston rod as a driving end and a cylinder body. The cylinder body is fixedly arranged on a side wall of the base 6, and the piston rod is connected to one end of the bracket 1. For example, when compressed air enters the cylinder body, the piston rod is pushed to move toward the wafer, driving the bracket 1 to move toward the wafer, thereby driving the sensor 3 to move toward the wafer, and identifying the posture of the wafer in the wafer box or the wafer boat, and when the slider 52 moves to the fixed block 53, the displacement of the bracket 1 on the base 6 is limited, that is, the movement stroke of the bracket 1 is adapted to the length of the fixed rod 54. When the compressed air is removed, the piston rod drives the bracket 1 to perform a reset movement, thereby driving the sensor 3 to perform a reset movement.

[0035] like Figure 2-Figure 4 As shown, in some embodiments of the utility model, the bracket 1 includes a first split frame 11, a second split frame 12 and a connector 2. One end of the connector 2 is connected to the first split frame 11, and the other end of the connector 2 is connected to the second split frame 12. The connector 2 is arranged at the bottom end of the base 6. The first split frame 11 and the second split frame 12 are relatively arranged on the two side walls of the base 6. The shape of the first split frame 11 and the second split frame 12 includes a triangular shape, which can improve the stability of the bracket 1. The first split frame 11, the second split frame 12 and the connector 2 are all installed on the base 6, that is, they are designed as an integrated structure, so that the identification mechanism and the manipulator are an integrated structure, as a whole device, which effectively reduces the occupied space of the device.

[0036] like Figure 3 As shown, in some embodiments of the utility model, one end of the first split frame 11 is connected to the driving member 4, and the other end of the first split frame 11 is connected to the sensor 3. For example, a piston rod is connected to the first split frame 11, and the piston rod is used to drive the first split frame 11 to move toward or away from the wafer, thereby driving the sensor 3 to move back and forth synchronously. The first split frame 11 and the driving member 4 are arranged on the same side wall of the base 6. One end of the connecting rod 51 is connected to the slider 52, and the other end is connected to the second split frame 12, that is, the second split frame 12 and the limit assembly 5 are arranged on the same side wall of the base 6.

[0037] The piston rod drives the first split frame 11 to move. When the first split frame 11 drives the sensor 3 to move toward the wafer, the sensor 3 identifies the posture of the wafer in the wafer box or wafer boat. After identifying that the wafer does not have an abnormal posture, the first split frame 11 moves the sensor 3 away from the wafer, that is, resets. After the reset is completed, when the manipulator is driven to move toward or away from the wafer, the end effector 7 takes and places the wafer in the wafer box or wafer boat. If it is identified that the wafer is in an abnormal state, the sensor 3 will send an alarm signal, and the manipulator will stop the grabbing action.

[0038] like Figure 1 As shown, in some embodiments of the present invention, a base slideway is provided at the upper end of the base 6. The driving support member 8 moves back and forth in the base slideway. The length of the base slideway is adapted to the stroke of the support member 8.

[0039] like Figure 3 and Figure 4 As shown, in some embodiments of the present invention, a first side slide groove and a second side slide groove are respectively provided on the two side walls of the base 6. The first split frame 11 is driven to make a reciprocating motion in the first side slide groove, and the first split frame 11 drives the second split frame 12 to make a synchronous reciprocating motion in the second side slide groove through the connecting member 2. The lengths of the first slide groove and the second slide groove are adapted to the stroke of the bracket 1.

[0040] like Figure 1 As shown, in some embodiments of the present invention, N end effectors 7 are arranged between the first split frame 11 and the second split frame 12. Then, the N end effectors 7 do not interfere with the actions of placing and taking wafers and the recognition mechanism does not interfere with the actions of recognizing wafers, and the area of ​​the overall equipment is reduced, thereby improving production efficiency.

[0041] In summary, the utility model sets the bracket in the identification mechanism and the base of the manipulator as an integrated structure. When the identification mechanism is used, the bracket drives the sensor to slide on the base close to the wafer box or wafer boat. After the identification mechanism completes the identification task, the bracket is reset. In this way, the structure is compact and can effectively reduce the occupied space of the overall equipment. At the same time, the bracket is set on the base so that the identification mechanism and the manipulator both move relative to the base, so that the relative displacement between the identification mechanism and the manipulator will not produce deviations, avoiding errors between the identification mechanism and the manipulator, thereby ensuring that the manipulator can accurately grasp the wafer according to the identified posture of the wafer, reducing the error of grasping the wafer, greatly improving production efficiency, and saving production costs.

[0042] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A wafer transfer device, characterized in that: include: A robot arm, the robot arm is used to take and place wafers, and the robot arm includes a base; An identification mechanism is used to identify the posture of the wafer. The identification mechanism includes a bracket, a sensor and a driving member. The bracket is slidably connected to the base, the sensor is connected to the bracket, and the driving member is arranged on a side wall of the base and connected to the bracket. The driving member is used to drive the bracket to move toward or away from the wafer on the base, thereby driving the sensor to make synchronous reciprocating motion.

2. The wafer transfer device according to claim 1, characterized in that: The identification mechanism further includes a limit assembly, which is disposed on the other side wall of the base and connected to the bracket, and is used to limit the movement of the bracket on the base toward or away from the wafer.

3. The wafer transfer device according to claim 2, characterized in that: The limiting assembly includes a connecting rod, a slider, a fixed block and a fixed rod, the two fixed blocks are fixedly arranged on the other side wall of the base, the fixed rod is arranged between the two fixed blocks, the slider is slidably connected to the fixed rod, one end of the connecting rod is connected to the slider, and the other end is connected to the bracket.

4. The wafer transfer device according to claim 1, characterized in that: The driving member comprises a cylinder, and the cylinder comprises a piston rod as a driving end and a cylinder body, the cylinder body is fixedly arranged on a side wall of the base, and the piston rod is connected to one end of the bracket.

5. The wafer transfer device according to claim 1, characterized in that: The bracket includes a first split frame, a second split frame and a connecting piece, one end of the connecting piece is connected to the first split frame, and the other end of the connecting piece is connected to the second split frame. The connecting piece is arranged at the bottom end of the base, and the first split frame and the second split frame are arranged on two side walls of the base opposite to each other.

6. The wafer transfer device according to claim 5, characterized in that: One end of the first split frame is connected to the driving member, and the other end of the first split frame is connected to the sensor. The driving member drives the first split frame to move toward or away from the wafer, thereby driving the sensor to perform synchronous reciprocating motion.

7. The wafer transfer device according to claim 5, characterized in that: The manipulator further includes a support member and N end effectors, wherein N is a positive integer, and the N end effectors are connected to the support member, and the support member is slidably disposed on the base.

8. The wafer transfer device according to claim 7, characterized in that: A base slide groove is arranged at the upper end of the base, and the support member is driven to make a reciprocating motion in the base slide groove.

9. The wafer transfer device according to claim 5, characterized in that: The two side walls of the base are respectively provided with a first side slide groove and a second side slide groove, driving the first split frame to make a reciprocating motion in the first side slide groove, and the first split frame drives the second split frame to make a synchronous reciprocating motion in the second side slide groove through a connecting piece.

10. The wafer transfer device according to claim 7, characterized in that: The N end effectors are arranged between the first split frame and the second split frame.

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