Rotary transmission mechanism and die bonding equipment

Abstract

The utility model relates to the technical field of die bonding equipment, and particularly discloses a rotary type conveying mechanism and die bonding equipment, the rotary type conveying mechanism comprises a plurality of rotary type linear feeding assemblies arranged at intervals, a fixed type linear feeding assembly is arranged between two adjacent rotary type linear feeding assemblies, and the rotary type linear feeding assemblies are connected with a rotary driving mechanism; the rotary type linear feeding assembly has the feeding state that the feeding direction of the rotary type linear feeding assembly is parallel to the feeding direction of the fixed type linear feeding assembly after the rotary type linear feeding assembly is driven by the rotary driving mechanism. And in the discharging state, after being driven by the rotary driving mechanism, the feeding mechanism rotates until the feeding direction is perpendicular to the feeding direction of the fixed linear feeding assembly. The rotary conveying mechanism and the die bonding equipment provided by the utility model can effectively solve the problem that the existing conveying mechanism needs to use a feeding manipulator to feed the bracket, so that the size is large.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal bonding equipment, in particular to a rotary transmission mechanism and crystal bonding equipment. Background Art

[0002] The crystal bonding equipment includes a conveying mechanism for conveying a bracket, a crystal bonding platform, a loading robot for transferring the bracket from the conveying mechanism to the crystal bonding platform, a crystal supply mechanism for providing chips, and a bonding mechanism in the bracket for transferring the chip from the crystal supply mechanism to the crystal bonding platform.

[0003] The existing conveying mechanisms are all conveyor belts, which can only transport the brackets in a fixed direction and cannot transfer the brackets to the crystal bonding platform. Therefore, a loading robot is required to transfer the brackets from the conveying mechanism to the crystal bonding platform.

[0004] The loading robot occupies a lot of space, which is not conducive to the miniaturization design of the crystal bonding equipment. Therefore, it is necessary to improve the existing transmission mechanism to solve the problem that the loading robot is required to load the bracket, resulting in a larger volume.

[0005] The above information disclosed in this Background section is included only for enhancement of understanding of the background of the present disclosure and therefore it may contain information that does not form the prior art that is currently known to a person of ordinary skill in the art. Utility Model Content

[0006] One purpose of the utility model is to provide a rotary conveying mechanism and a crystal bonding device, which can effectively solve the problem that the existing conveying mechanism needs to use a loading robot to load the bracket, resulting in a large volume.

[0007] To achieve the above purpose, on the one hand, the utility model provides a rotary transmission mechanism, comprising a plurality of rotary linear feeding assemblies arranged at intervals, a fixed linear feeding assembly is arranged between two adjacent rotary linear feeding assemblies, and the rotary linear feeding assembly is connected to a rotary driving mechanism;

[0008] Among them, the rotary linear feeding component has a feeding state in which the feeding direction is parallel to the feeding direction of the fixed linear feeding component after being driven by the rotary driving mechanism; and has a discharging state in which the feeding direction is perpendicular to the feeding direction of the fixed linear feeding component after being driven by the rotary driving mechanism.

[0009] Optionally, the fixed linear feeding assembly and the rotary linear feeding assembly both include a conveyor belt bracket, an upper conveyor belt installed on the upper part of the conveyor belt bracket, and a lower conveyor belt installed on the lower part of the conveyor belt bracket;

[0010] Wherein, the driving end of the rotary driving mechanism is connected to the conveyor belt support of the rotary linear feeding assembly.

[0011] Optionally, a feeding linear drive mechanism is also included, and a driving end of the feeding linear drive mechanism is connected to the rotary drive mechanism for driving the rotary drive mechanism to move up and down.

[0012] Optionally, it also includes a feed conveyor belt, a discharge conveyor belt, and a discharge linear drive mechanism for driving the discharge conveyor belt to move up and down;

[0013] Wherein, each of the fixed linear feeding components and each of the rotating linear feeding components are located between the feed conveyor belt and the discharge conveyor belt, and the feed conveyor belt, the discharge conveyor belt and the fixed linear feeding components have the same feeding direction.

[0014] Optionally, the conveyor belt support is provided with guiding inclined surfaces at positions corresponding to the upper conveyor belt and the lower conveyor belt.

[0015] On the other hand, a crystal bonding device is provided, comprising any of the above-mentioned rotary transmission mechanisms;

[0016] Each of the rotary linear feeding components of the rotary transmission mechanism is correspondingly provided with a die bonding platform, a die supply mechanism for providing chips, and a bonding mechanism for transferring the chips from the die supply mechanism to a bracket of the die bonding platform.

[0017] Optionally, a bidirectional conveyor belt is provided between the rotary linear feeding assembly and the corresponding crystal bonding platform.

[0018] Optionally, the die-bonding platform includes a platform body and a platform linear drive mechanism for driving the platform body to reciprocate;

[0019] The driving direction of the platform linear driving mechanism is parallel to the feeding direction of the fixed linear feeding assembly.

[0020] The beneficial effect of the utility model is that it provides a rotary conveying mechanism and a crystal bonding device, which can realize the bracket transfer operation between the rotary conveying mechanism and the crystal bonding platform through the coordinated action of the rotary drive mechanism and the rotary linear feeding assembly, without the need to use a robot, so it can effectively solve the problem that the existing conveying mechanism needs to use a loading robot to load the bracket, resulting in a larger volume. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0022] Figure 1 A schematic diagram of the structure of a die bonding device provided in an embodiment;

[0023] Figure 2 A schematic diagram of the structure of a rotary transmission mechanism provided in an embodiment;

[0024] Figure 3 A schematic diagram of the structure of a rotary linear feeding assembly provided in an embodiment;

[0025] Figure 4 for Figure 1 A local enlarged schematic diagram of the middle A;

[0026] Figure 5 A schematic structural diagram of the guide ramp provided in an embodiment.

[0027] In the figure:

[0028] 1. Feed conveyor belt;

[0029] 2. Discharging conveyor belt;

[0030] 3. Discharging linear drive mechanism;

[0031] 4a, front-end rotary linear feeding assembly; 4b, rear-end rotary linear feeding assembly; 401, conveyor belt bracket; 4011, guide slope; 402, upper conveyor belt; 403, lower conveyor belt;

[0032] 5. Fixed linear feeding assembly;

[0033] 6. Feeding linear drive mechanism;

[0034] 7. Crystal bonding platform; 701. Platform body; 702. Platform linear drive mechanism; 8. Crystal supply mechanism;

[0035] 9. Bonding agency;

[0036] 10. Rotation drive mechanism. DETAILED DESCRIPTION

[0037] In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the embodiment described below is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] In the description of the present utility model, it is to be understood that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be a centrally arranged component at the same time.

[0039] In addition, terms such as "long", "short", "inside" and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings and are only used to facilitate the description of the present invention. They do not indicate or imply that the device or component referred to must have this specific direction or operate with a specific direction structure, and should not be understood as a limitation of the present invention.

[0040] The present invention will be described in detail below in conjunction with the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0041] The utility model provides a rotary conveying mechanism and a crystal fixing device, which are suitable for the application scenario of fixing a chip to a bracket. The utility model can effectively solve the problem that the existing conveying mechanism needs to use a loading robot to load the bracket, resulting in a large volume.

[0042] Example 1

[0043] See also Figure 1 The crystal bonding equipment provided in this embodiment includes a rotary transmission mechanism.

[0044] Among them, see Figure 2 The rotary conveying mechanism includes a feed conveyor belt 1, a discharge conveyor belt 2, and a discharge linear drive mechanism 3 that drives the discharge conveyor belt 2 to move up and down. Among them, a plurality of rotary linear feeding components are arranged at intervals between the feed conveyor belt 1 and the discharge conveyor belt 2, and a fixed linear feeding component 5 is arranged between two adjacent rotary linear feeding components, and the rotary linear feeding component is connected to a rotary drive mechanism 10. Among them, the feed conveyor belt 1, the discharge conveyor belt 2 and the fixed linear feeding component 5 have the same feeding direction.

[0045] In this embodiment, the fixed linear feeding assembly 5 and the rotary linear feeding assembly both include a conveyor belt bracket 401 , an upper conveyor belt 402 installed on the upper part of the conveyor belt bracket 401 , and a lower conveyor belt 403 installed on the lower part of the conveyor belt bracket 401 .

[0046] The driving end of the rotary drive mechanism 10 is connected to the conveyor belt support 401 of the rotary linear feeding assembly so that the upper conveyor belt 402 and the lower conveyor belt 403 rotate simultaneously.

[0047] See also Figure 3 The rotary conveying mechanism also includes a feeding linear drive mechanism 6, the driving end of which is connected to the rotary drive mechanism 10, for driving the rotary drive mechanism 10 to drive the rotary linear feeding assembly to move up and down, so that the upper conveyor belt 402 or the lower conveyor belt 403 is flush with the crystal bonding platform 7.

[0048] The rotary linear feeding component has a feeding state in which the feeding direction is parallel to the feeding direction of the fixed linear feeding component 5 after being driven by the rotary driving mechanism 10; and has a discharging state in which the feeding direction is perpendicular to the feeding direction of the fixed linear feeding component 5 after being driven by the rotary driving mechanism 10.

[0049] Furthermore, each of the rotary linear feeding components of the rotary conveying mechanism is correspondingly provided with a crystal bonding platform 7, a crystal supply mechanism 8 for providing chips, and a bonding mechanism 9 for transferring the chips from the crystal supply mechanism 8 to the bracket of the crystal bonding platform 7.

[0050] In this embodiment, the number of fixed linear feeding components 5 is one, and the number of rotary linear feeding components is two. For the convenience of introduction, the two rotary linear feeding components are respectively referred to as "front end rotary linear feeding component 4a" and "rear end rotary linear feeding component 4b".

[0051] Optionally, in this embodiment, the fixed linear feeding assembly 5 and the rotary linear feeding assembly are both double-layer conveyor belt structures.

[0052] See also Figure 4 In this embodiment, the conveyor belt bracket 401 is provided with a guide slope 4011 at the position corresponding to the upper conveyor belt 402 and the lower conveyor belt 403, so that the bracket can enter the upper conveyor belt 402 and the lower conveyor belt 403.

[0053] At the beginning, each of the rotary linear feeding components is in a feeding state, and the feeding conveyor belt 1 is flush with each of the upper conveyor belts 402. The working process of the crystal bonding equipment provided in this embodiment is as follows:

[0054] S10: the bracket enters the rotary conveying mechanism through the feeding conveyor belt 1; during this period, the fixed linear feeding assembly 5 and the rotary linear feeding assembly continue to convey the bracket forward until the frontmost bracket is conveyed to the rear end rotary linear feeding assembly 4b closest to the discharging conveyor belt 2, and the fixed linear feeding assembly 5 and the rotary linear feeding assembly stop feeding forward;

[0055] S20: The rotary drive mechanism 10 drives the corresponding rotary linear feeding assembly to rotate to a discharging state, so as to send the unbonded bracket to the bonding platform 7 or to recover the bonded bracket from the bonding platform 7;

[0056] Taking the front rotary linear feeding assembly 4a as an example, step S20 can be refined as follows:

[0057] S201: The rotary drive mechanism 10 drives the front rotary linear feeding assembly 4a to rotate 90°;

[0058] S202: the feeding linear drive mechanism 6 drives the lower conveyor belt 403 to move to be flush with the crystal bonding platform 7; then, the crystal bonding platform 7 feeds the crystal-bonded bracket into the lower conveyor belt 403 of the front rotary linear feeding assembly 4a;

[0059] S203: the feeding linear drive mechanism 6 drives the upper conveyor belt 402 to move to be flush with the crystal bonding platform 7; then, the upper conveyor belt 402 of the front rotary linear feeding assembly 4a feeds the unbonded bracket into the crystal bonding platform 7 to complete the crystal bonding;

[0060] S203: The rotary drive mechanism 10 drives the rotary linear feeding assembly to rotate 90° and restore the feeding state, and then the feeding linear drive mechanism 6 drives the upper conveyor belt 402 to move to be flush with the feeding conveyor belt 1;

[0061] During this process, the bonding mechanism 9 transfers the chip from the crystal supply mechanism 8 to the bracket of the crystal bonding platform 7 to complete a new round of crystal bonding;

[0062] It should be noted that the working mode of the rear rotary linear feeding assembly 4b is the same as that of the front rotary linear feeding assembly 4a, so it is not repeated. It can be understood that the front rotary linear feeding assembly 4a and the rear rotary linear feeding assembly 4b and other rotary linear feeding assemblies perform the crystal bonding operation together, which is conducive to improving the crystal bonding efficiency.

[0063] Optionally, the die-bonding platform 7 includes a platform body 701 and a platform linear drive mechanism 702 for driving the platform body 701 to reciprocate; the driving direction of the platform linear drive mechanism 702 is parallel to the feeding direction of the fixed linear feeder assembly 5. The platform linear drive mechanism 702 drives the platform body 701 to move left and right, and the feeding linear drive mechanism 6 drives the rotary linear feeder assembly to move up and down, so that the rotary linear feeder assembly can be aligned with the platform body 701.

[0064] Optionally, if the distance between the rotary linear feeding assembly and the corresponding crystal bonding platform 7 is far, a bidirectional conveyor belt can be set between the rotary linear feeding assembly and the corresponding crystal bonding platform 7 to realize the bracket transfer operation between the rotary linear feeding assembly and the crystal bonding platform 7 through the bidirectional conveyor belt.

[0065] S30: The rotary linear feeding assembly sends the crystal-bonded stent downstream through the fixed linear feeding assembly 5;

[0066] Specifically,

[0067] The feed conveyor belt 1 delivers the bracket (not bonded) originally located on the feed conveyor belt 1 to the upper conveyor belt 402 of the front rotary linear feed assembly 4a.

[0068] The lower conveyor belt 403 of the front rotary linear feeding assembly 4a delivers the crystal-bonded bracket just received from the crystal bonding platform 7 to the lower conveyor belt 403 of the fixed linear feeding assembly 5. The upper conveyor belt 402 of the fixed linear feeding assembly 5 delivers the bracket (not crystal-bonded) originally located on the upper conveyor belt 402 of the fixed linear feeding assembly 5 to the upper conveyor belt 402 of the rear rotary linear feeding assembly 4b.

[0069] The discharge linear drive mechanism 3 drives the discharge conveyor belt 2 to move to be flush with the lower conveyor belt 403 of the rear rotary linear feeding assembly 4b, and the lower conveyor belt 403 of the rear rotary linear feeding assembly 4b delivers the bracket (with solid crystal) originally located on the rear rotary linear feeding assembly 4b to the discharge conveyor belt 2;

[0070] S40: The discharging linear drive mechanism 3 drives the discharging conveyor belt 2 to move to be flush with the downstream conveyor belt, and the discharging conveyor belt 2 delivers the crystal-bonded bracket to the downstream conveyor belt to complete the discharging.

[0071] In summary, the rotary transmission mechanism and die bonding equipment provided in this embodiment have the following beneficial effects:

[0072] ① The support transfer operation between the rotary conveying mechanism and the solid crystal platform 7 can be realized by the cooperation of the rotary driving mechanism 10 and the rotary linear feeding assembly, without the need to use a manipulator, so it can effectively solve the problem that the existing conveying mechanism needs to use a loading manipulator to load the support, resulting in a large volume;

[0073] ② Both the fixed linear feeding assembly 5 and the rotary linear feeding assembly are double-layer conveyor belt structures. The rotary linear feeding assembly can simultaneously pick up and collect materials in one rotation operation, which is beneficial to improving the efficiency.

[0074] Example 2

[0075] In the crystal bonding equipment provided in this embodiment, the fixed linear feeding assembly and the rotary linear feeding assembly are both single-layer conveyor belt structures.

[0076] At the beginning, each of the rotary linear feeding components is in a feeding state. The working process of the die bonding device provided in this embodiment is as follows:

[0077] S10: The bracket enters the rotary conveying mechanism through the feeding conveyor belt; during this period, the fixed linear feeding assembly and the rotary linear feeding assembly continue to convey the bracket forward until the frontmost bracket is conveyed to the rear end rotary linear feeding assembly closest to the discharging conveyor belt, and the fixed linear feeding assembly and the rotary linear feeding assembly stop feeding forward;

[0078] S20: The rotary drive mechanism drives the corresponding rotary linear feeding assembly to rotate to a discharging state, so as to send the unbonded bracket to the bonding platform or to recover the bonded bracket from the bonding platform;

[0079] Taking the front-end rotary linear feeding assembly as an example, step S20 can be refined as follows:

[0080] S201: The rotary drive mechanism drives the front rotary linear feeding assembly to rotate 90 degrees, so that the front rotary linear feeding assembly rotates to a discharging state and faces the die bonding platform;

[0081] S202: The rotary linear feeding assembly conveys the bracket to the die bonding platform;

[0082] S203: The bonding mechanism transfers the chip from the wafer supply mechanism to the bracket of the wafer bonding platform to complete the wafer bonding;

[0083] S204: The crystal bonding platform sends the bracket back to the front rotary linear feeding assembly, and the rotary driving mechanism drives the rotary linear feeding assembly to rotate 90° and resume the feeding state;

[0084] The working mode of the rear rotary linear feeding assembly is the same as that of the front rotary linear feeding assembly, so it is not repeated. It should be noted that the rear rotary linear feeding assembly and the front rotary linear feeding assembly and other rotary linear feeding assemblies perform the crystal bonding operation together, which is conducive to improving the crystal bonding efficiency.

[0085] S30: The rotary linear feeding component sends the crystal-bonded bracket to the downstream through the fixed linear feeding component;

[0086] Specifically,

[0087] The feed conveyor belt sends the bracket (without solid crystal) originally on the feed conveyor belt to the front rotary linear feed assembly.

[0088] The front rotary linear feeding assembly sends the bracket (with solid crystal) originally located on the front rotary linear feeding assembly to the fixed linear feeding assembly.

[0089] The fixed linear feeding assembly sends the bracket (not bonded) originally located on the fixed linear feeding assembly to the rear rotary linear feeding assembly.

[0090] The rear rotary linear feeding assembly sends the bracket (with solid crystal) originally located on the rear rotary linear feeding assembly to the discharge conveyor belt;

[0091] Subsequently, the discharging conveyor belt delivers the crystal-bonded bracket to the discharging conveyor belt, and the discharging conveyor belt delivers the crystal-bonded bracket to the outside.

[0092] Compared with the crystal bonding equipment of Example 1, the rotary conveying mechanism and crystal bonding equipment provided in this embodiment have the following beneficial effects: both the rotary linear feeding assembly and the fixed linear feeding assembly are single-layer conveyor belt structures with simple structure and low cost.

[0093] It should be noted that the linear drive mechanism mentioned in the present invention can be a cylinder, a hydraulic cylinder, an electric cylinder or a motor screw linear module, etc., and the rotary drive mechanism mentioned can be a brushed motor, a brushless motor, or a rotary cylinder, etc. The present invention does not limit the specific structural forms of the linear drive mechanism and the rotary drive mechanism.

[0094] It should be understood that although this specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation mode may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

[0095] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A rotary transmission mechanism, characterized in that: It comprises a plurality of rotary linear feeding assemblies arranged at intervals, a fixed linear feeding assembly (5) being arranged between two adjacent rotary linear feeding assemblies, and the rotary linear feeding assemblies being connected to a rotary driving mechanism (10); The rotary linear feeding assembly has a feeding state in which the feeding direction is parallel to the feeding direction of the fixed linear feeding assembly (5) after being driven by the rotary driving mechanism (10); and a discharging state in which the feeding direction is perpendicular to the feeding direction of the fixed linear feeding assembly (5) after being driven by the rotary driving mechanism (10).

2. The rotary transmission mechanism according to claim 1, characterized in that: The fixed linear feeding assembly (5) and the rotary linear feeding assembly both comprise a conveyor belt support (401), an upper conveyor belt (402) installed on the upper part of the conveyor belt support (401), and a lower conveyor belt (403) installed on the lower part of the conveyor belt support (401); Wherein, the driving end of the rotary drive mechanism (10) is connected to the conveyor belt support (401) of the rotary linear feeding assembly.

3. The rotary transmission mechanism according to claim 2, characterized in that: It also comprises a feeding linear drive mechanism (6), wherein a driving end of the feeding linear drive mechanism (6) is connected to the rotary drive mechanism (10) and is used to drive the rotary drive mechanism (10) to move up and down.

4. The rotary transmission mechanism according to claim 3, characterized in that: It also includes a feeding conveyor belt (1), a discharging conveyor belt (2), and a discharging linear drive mechanism (3) for driving the discharging conveyor belt (2) to move up and down; Wherein, each of the fixed linear feeding components (5) and each of the rotating linear feeding components are located between the feed conveyor belt (1) and the discharge conveyor belt (2), and the feed conveyor belt (1), the discharge conveyor belt (2) and the fixed linear feeding components (5) have the same feeding direction.

5. The rotary transmission mechanism according to claim 2, characterized in that: The conveyor belt support (401) is provided with guiding inclined surfaces (4011) at positions corresponding to the upper conveyor belt (402) and the lower conveyor belt (403).

6. A die bonding device, characterized in that: A rotary transmission mechanism comprising any one of claims 1 to 5; Each of the rotary linear feeding components of the rotary transmission mechanism is correspondingly provided with a crystal bonding platform (7), a crystal supply mechanism (8) for providing chips, and a bonding mechanism (9) for transferring the chips from the crystal supply mechanism (8) to a bracket of the crystal bonding platform (7).

7. The die bonding device according to claim 6, characterized in that: A bidirectional conveyor belt is provided between the rotary linear feeding assembly and the corresponding crystal bonding platform (7).

8. The die bonding device according to claim 6, characterized in that: The crystal bonding platform (7) comprises a platform body (701) and a platform linear driving mechanism (702) for driving the platform body (701) to reciprocate; The driving direction of the platform linear driving mechanism (702) is parallel to the feeding direction of the fixed linear feeding component (5).

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