High-frequency high-pressure electromagnetic valve

Abstract

The utility model relates to the technical field of electromagnetic valves, in particular to a high-frequency and high-pressure electromagnetic valve which comprises a valve body, a magnetic conductive shell, a valve nozzle, a magnetism isolating pipe, a static iron core and a movable iron core, the magnetic conductive shell is perpendicularly connected with the valve body, a coil is arranged in the magnetic conductive shell, the magnetism isolating pipe is arranged in the middle of the magnetic conductive shell, and one end of the magnetism isolating pipe is connected with the valve body; a hollow assembling cavity is formed in the middle of the magnetism isolating pipe, the valve nozzle is fixedly arranged in the valve body, the outer axial surface of the valve nozzle is arranged in the assembling cavity, the static iron core and the movable iron core are arranged in the assembling cavity, the end, facing the valve body, of the movable iron core is in butt joint with the valve nozzle, and the other end of the movable iron core is connected with the static iron core. Wherein magnetic isolation cloth is arranged in the assembly cavity, the magnetic isolation cloth is wound and attached to the inner side wall, opposite to the outer axial surface of the movable iron core, of the assembly cavity, and the movable iron core slides relative to the magnetic isolation cloth in the axis direction of the assembly cavity. The requirement for a small-flow use state is met, pressure impact is reduced, the pressure of a working cavity is rapidly and accurately controlled, and the use performance and service life of the electromagnetic valve are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of electromagnetic valves, in particular to a high-frequency and high-pressure electromagnetic valve. Background Art

[0002] A solenoid valve is an automated control element that uses electromagnetic force to control the flow of fluids such as gases and liquids. On chip packaging equipment, high-pressure nitrogen medium needs to be introduced into the working chamber to form a small flow of high-pressure gas. A high-frequency switching solenoid valve is required to compensate for the pressure drop caused by the loss of high-pressure nitrogen in the working chamber.

[0003] In the related technology, a pilot-operated solenoid valve is usually used. The moving iron core moves first to pass the pilot air into the working chamber. After the pressure is balanced, the valve mouth is opened to achieve large-flow ventilation, forming two step-by-step actions, resulting in a large movement stroke and a low switching frequency. This results in a long response time, which makes it difficult to meet the purpose of quickly and accurately controlling the pressure in the working chamber. In addition, since the moving iron core and the solenoid valve need to be opened successively when the power is turned on and off, direct friction is generated between the moving iron core and the magnetic isolation tube, and the friction area is also large, which affects the product performance and service life.

[0004] The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the present invention, and should not be regarded as an admission or any form of implication that the information constitutes the prior art known to those skilled in the art. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a high-frequency and high-pressure electromagnetic valve, which can quickly and accurately control the pressure of the working chamber and ensure the use performance and service life of the electromagnetic valve.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a high-frequency and high-pressure solenoid valve, comprising: a valve body, a magnetic conductive shell, a valve nozzle, a magnetic isolation tube, a static iron core and a moving iron core, the magnetic conductive shell and the valve body are vertically connected to each other, a coil is arranged inside the magnetic conductive shell, and the magnetic isolation tube is arranged in the middle of the magnetic conductive shell, and one end is connected to the valve body;

[0007] A hollow assembly cavity is provided in the middle of the magnetic isolation tube, the valve nozzle is fixedly arranged in the valve body, and the outer axial surface is arranged in the assembly cavity, the static iron core and the moving iron core are both arranged in the assembly cavity, and the moving iron core is located at one end facing the valve body and docked with the valve nozzle, and the other end is connected to the static iron core;

[0008] Among them, a magnetic isolation cloth is arranged in the assembly cavity, and the magnetic isolation cloth is wrapped and attached to the inner side wall of the assembly cavity and arranged opposite to the outer axial surface of the moving iron core, and the moving iron core slides with the magnetic isolation cloth along the axial direction of the assembly cavity.

[0009] Furthermore, a through flow port is provided in the middle of the valve nozzle, a first sealing gasket is provided on the end surface of the moving iron core facing the valve nozzle, and the first sealing gasket is arranged in contact with the end of the flow port.

[0010] Furthermore, an air inlet and an air outlet are respectively provided on two opposite sides of the valve body, the air outlet is butt-jointed with an end of the flow port away from the first sealing gasket, and a second sealing gasket is sleeved on an end of the valve mouth away from the moving iron core, and the second sealing gasket is arranged opposite to the air inlet.

[0011] Furthermore, a baffle is provided on the end surface of the valve mouth facing away from the second sealing gasket, and the end of the magnetic isolation cloth extends and is abutted against the end surface of the baffle facing away from the valve mouth.

[0012] Furthermore, the moving iron core includes a first section and a second section, the first section is arranged to abut against the valve nozzle, the first section is hollowly provided with a sliding cavity, the second section shrinks toward one end of the first section and is slidably arranged in the sliding cavity, and the first sealing gasket is arranged at the bottom of the sliding cavity.

[0013] Furthermore, a through connecting cavity is provided in the middle of the second section, and a connecting component is provided in the connecting cavity. One end of the connecting component is fixedly connected to an end of the first sealing gasket away from the flow port, and the other end extends out of the connecting cavity and is abutted against the end face of the static iron core.

[0014] Furthermore, the connecting assembly includes an upper ejector pin, an elastic member and a lower ejector block. The upper ejector pin is arranged in the connecting cavity and abuts against the end surface of the static iron core. The elastic member is arranged in the sliding cavity and fixedly connected to the first sealing gasket. The two ends of the elastic member are respectively abutted against one end of the upper ejector pin and the lower ejector block that are opposite to each other.

[0015] Furthermore, an elastic gasket is sleeved on the outer side wall of the magnetic isolation tube, and the elastic gasket is located between the gap formed by the magnetic conductive shell and the magnetic isolation tube.

[0016] Furthermore, the elastic gasket is wavy in shape.

[0017] Furthermore, sealing rings are provided between the magnetic isolation tube and the valve body and between the static iron core and the magnetic conductive shell, and two sealing rings are provided.

[0018] The beneficial effects of the utility model are as follows: the utility model fixes the valve mouth on the valve body, and when the solenoid valve is working, the valve body does not perform an opening action, thereby meeting the use status requirements of small flow rates, reducing the pressure impact on the internal cavity, and being conducive to quickly and accurately controlling the pressure of the working chamber. The overall structure is a direct-acting structure, which reduces the movement stroke of the valve. Under the covering and separation effect of the magnetic isolation cloth, the direct friction between the moving iron core and the magnetic isolation tube is reduced, and wear is reduced, thereby ensuring the use performance and service life of the solenoid valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 This is a structural schematic diagram of a high-frequency and high-pressure solenoid valve in an embodiment of the utility model;

[0021] Figure 2 A top view of a high-frequency and high-pressure solenoid valve in an embodiment of the utility model;

[0022] Figure 3 for Figure 2 Sectional view at AA in the middle;

[0023] Figure 4 for Figure 3 The enlarged view of point A in the middle;

[0024] Figure 5 It is a schematic diagram of the structure of the moving iron core in the embodiment of the utility model.

[0025] Figure numerals: 1, valve body; 1a, air inlet; 1b, air outlet; 2, magnetic conductive shell; 2a, coil; 3, valve mouth; 3a, flow port; 3b, second sealing gasket; 4, magnetic isolation tube; 5, static iron core; 6, moving iron core; 6a, first sealing gasket; 61, first division; 61a, sliding cavity; 62, second division; 62a, connecting cavity; 63, upper ejector pin; 64, elastic member; 65, lower ejector block; 7, magnetic isolation cloth; 8, baffle; 9, elastic gasket; 10, sealing ring. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0029] like Figures 1 to 5 The high-frequency and high-pressure solenoid valve shown comprises: a valve body 1, a magnetic shell 2, a valve nozzle 3, a magnetic isolation tube 4, a static iron core 5 and a moving iron core 6, the magnetic shell 2 and the valve body 1 are vertically connected to each other, a coil 2a is arranged inside the magnetic shell 2, and the magnetic isolation tube 4 is arranged in the middle of the magnetic shell 2, and one end is connected to the valve body 1;

[0030] A hollow assembly cavity is provided in the middle of the magnetic isolation tube 4, the valve nozzle 3 is fixedly arranged in the valve body 1, and the outer axial surface is arranged in the assembly cavity, the static iron core 5 and the moving iron core 6 are both arranged in the assembly cavity, and the moving iron core 6 is located at one end facing the valve body 1 and docked with the valve nozzle 3, and the other end is connected to the static iron core 5;

[0031] A magnetic isolation cloth 7 is provided in the assembly cavity, and the magnetic isolation cloth 7 is wrapped and attached to the inner side wall of the assembly cavity and the outer axial surface of the moving iron core 6. The moving iron core 6 slides with the magnetic isolation cloth 7 along the axial direction of the assembly cavity.

[0032] The utility model fixes the valve mouth 3 on the valve body 1. When the solenoid valve is working, the valve body 1 does not perform an opening action, thereby meeting the use status requirements of small flow rates and reducing the pressure impact on the internal cavity, which is conducive to quickly and accurately controlling the pressure of the working chamber. The overall structure is a direct-acting structure, which reduces the movement stroke of the valve. Under the covering and separation effect of the magnetic isolation cloth 7, the direct friction between the moving iron core 6 and the magnetic isolation tube 4 is reduced, and wear is reduced, thereby ensuring the use performance and service life of the solenoid valve.

[0033] It should be noted that the magnetic isolation cloth 7 can be made of smooth glass fiber with a thickness of 0.1 to 0.15 mm, has a low friction coefficient, good working performance, and good insulation performance. By arranging the magnetic isolation cloth 7 in the assembly cavity, the outer wall of the moving iron core 6 is completely covered to block the direct friction between the moving iron core 6 and the magnetic isolation tube 4, thereby ensuring the safe operation of the solenoid valve and improving its service life.

[0034] On the basis of the above embodiment, a through flow port 3a is provided in the middle of the valve mouth 3, and a first sealing gasket 6a is provided on the end face of the moving iron core 6 facing the valve mouth 3, and the first sealing gasket 6a is abutted against the end of the flow port 3a; when the coil 2a of the solenoid valve is energized, the moving iron core 6 is attracted and moves along the magnetic isolation cloth 7 toward one end of the static iron core 5, thereby realizing the opening effect of the solenoid valve. At this time, the valve mouth 3 does not open with the movement of the moving iron core 6, but is only connected to the air path of the valve body 1 through the flow port 3a, and operates at a small flow rate, thereby reducing the pressure shock to the internal cavity.

[0035] It should be noted that the aperture of the small hole flow channel where the flow port 3a on the valve nozzle 3 abuts against the first sealing gasket 6a can be set to 0.1-0.5 mm.

[0036] On the basis of the above embodiment, the valve body 1 is provided with an air inlet 1a and an air outlet 1b on two opposite sides, the air outlet 1b is butt-jointed with the end of the flow port 3a away from the first sealing gasket 6a, the end of the valve mouth 3 away from the moving iron core 6 is sleeved with a second sealing gasket 3b, and the second sealing gasket 3b is arranged opposite to the air inlet 1a; by reasonably arranging the air inlet 1a and the air outlet 1b, the flow resistance of the gas in the valve body 1 can be reduced, and the efficiency of the entire system can be improved, and by arranging the second sealing gasket 3b, a sealing effect is formed on the air inlet 1a, ensuring that the gas will not directly pass through the air inlet 1a and the valve mouth 3 into the air outlet 1b, thereby ensuring the sealing performance and the use effect of small flow.

[0037] On the basis of the above embodiment, a baffle 8 is arranged on the end surface of the valve mouth 3 facing away from the second sealing gasket 3b, and the end of the magnetic isolation cloth 7 is extended and abutted against the end surface of the baffle 8 facing away from the valve mouth 3; by arranging the baffle 8 to abut against the magnetic isolation cloth 7, it is ensured that the magnetic isolation cloth 7 can form a complete covering and bonding effect on the outer side surface of the moving iron core 6, avoiding direct friction with the magnetic isolation tube 4, and extending the service life.

[0038] On the basis of the above embodiment, the moving iron core 6 includes a first division 61 and a second division 62. The first division 61 is arranged to abut against the valve mouth 3. The first division 61 is hollowly provided with a sliding cavity 61a. The second division 62 shrinks toward one end of the first division 61 and is slidably provided in the sliding cavity 61a. The first sealing gasket 6a is provided at the bottom of the sliding cavity 61a. The sliding cavity 61a hollowly provided in the first division 61 allows the second division 62 to slide therein, thereby ensuring that the electromagnetic valve can be opened during the movement of the moving iron core 6, and also ensuring that the moving iron core 6 maintains a sealing effect during movement.

[0039] On the basis of the above embodiment, a through connecting cavity 62a is provided in the middle of the second division 62, and a connecting assembly is provided in the connecting cavity 62a, one end of the connecting assembly is fixedly connected to the end of the first sealing gasket 6a away from the flow port 3a, and the other end extends out of the connecting cavity 62a and is abutted against the end face of the static iron core 5; the existence of the connecting assembly provides additional structural support, which helps to maintain the stability of the working process of the first division 61 and the second division 62 of the moving iron core 6, and also facilitates the opening action of the flow port 3a on the valve mouth 3, thereby realizing a small flow working process.

[0040] On the basis of the above embodiment, the connecting assembly includes an upper ejector pin 63, an elastic member 64 and a lower ejector block 65. The upper ejector pin 63 is arranged in the connecting cavity 62a and is abutted against the end surface of the static iron core 5. The elastic member 64 is arranged in the sliding cavity 61a and is fixedly connected to the first sealing gasket 6a. The two ends of the elastic member 64 are respectively abutted against one end of the upper ejector pin 63 and the lower ejector block 65 that are arranged opposite to each other. The second section 62 of the moving iron core 6 is attracted and lifted by the electromagnetic force, and the upper ejector pin 63 is abutted against the end of the static iron core 5. The elastic member 64 moves downward relative to the moving iron core 6, so that the elastic member 64 forms a downward reaction force on the first division 61, so that the air inlet 1a and the air outlet 1b are connected, forming a small flow working state; after the second division 62 is released after power failure, the moving iron core 6 moves along the magnetic isolation cloth 7 toward the valve mouth 3 under the action of the elastic member 64 and its own weight, so that the first sealing gasket 6a and the valve mouth 3 on the valve body 1 form a sealing effect again, and the air inlet 1a and the air outlet 1b are in a disconnected state.

[0041] On the basis of the above embodiment, an elastic gasket 9 is further sleeved on the outer wall of the magnetic isolation tube 4. The elastic gasket 9 is located between the gap formed by the magnetic shell 2 and the magnetic isolation tube 4, filling the tiny gap between the magnetic shell 2 and the magnetic isolation tube 4, and is used to tighten the upper magnetic shell 2 to maintain an upward rebound force, prevent leakage, and improve the air tightness of the overall system.

[0042] Based on the above embodiment, the elastic gasket 9 is wavy; due to its shape characteristics, the wavy elastic gasket 9 can adaptively fill the gap between the magnetic conductive shell 2 and the magnetic isolation tube 4, and can maintain close contact regardless of how the gap size changes, thereby providing a better sealing effect.

[0043] On the basis of the above-mentioned embodiment, sealing rings 10 are arranged between the magnetic isolation tube 4 and the valve body 1 and between the static iron core 5 and the magnetic conductive shell 2, and two sealing rings 10 are arranged; the two sealing rings 10 provide double sealing protection, reduce the risk of internal leakage of the valve body 1, and ensure the reliability of the system after assembly.

[0044] The working process of the solenoid valve in the utility model is as follows: air is ventilated into the valve body 1 through the air inlet 1a. In the initial state of the solenoid valve, a sealing effect is formed between the first sealing gasket 6a and the valve mouth 3 arranged on the valve body 1. The coil 2a is energized to form an electromagnetic induction effect, so that the moving iron core 6 is attracted and lifted, and moves along the magnetic isolation cloth 7 toward one side of the static iron core 5, and drives the first sealing gasket 6a to separate from the flow port 3a on the valve mouth 3. The upper ejector pin 63 is abutted by the end of the static iron core 5 and moves downward relative to the moving iron core 6 to compress the elastic member 64, so that the elastic member 64 presses the first subsection 61. A downward reaction force is formed, so that the air inlet 1a and the air outlet 1b are connected, forming a working state with a small flow rate; when the coil 2a is powered off, the moving iron core 6 is released, and under the action of the elastic member 64 and its own weight, it moves along the magnetic isolation cloth 7 toward the side of the valve mouth 3, so that the first sealing gasket 6a and the valve mouth 3 on the valve body 1 form a sealing effect again, and the air inlet 1a and the air outlet 1b are in a disconnected state; after the solenoid valve is in the working state of small flow rate, the impact on the working chamber pressure at the rear end of the air outlet 1b is greatly reduced, and high-frequency switching can be achieved, thereby achieving the effect of accurately controlling the working chamber pressure.

[0045] Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the description are only for explaining the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which are within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A high frequency and high pressure solenoid valve, characterized in that: include: A valve body (1), a magnetic shell (2), a valve mouth (3), a magnetic isolation tube (4), a static iron core (5) and a moving iron core (6), wherein the magnetic shell (2) and the valve body (1) are vertically connected to each other, a coil (2a) is arranged inside the magnetic shell (2), and the magnetic isolation tube (4) is arranged in the middle of the magnetic shell (2), and one end of the magnetic isolation tube is connected to the valve body (1); A hollow assembly cavity is provided in the middle of the magnetic isolation tube (4), the valve mouth (3) is fixedly arranged in the valve body (1), and the outer axial surface is arranged in the assembly cavity, the static iron core (5) and the moving iron core (6) are both arranged in the assembly cavity, and the moving iron core (6) is located at one end facing the valve body (1) and is docked with the valve mouth (3), and the other end is connected to the static iron core (5); A magnetic isolation cloth (7) is provided in the assembly cavity. The magnetic isolation cloth (7) is wrapped around and attached to the inner side wall of the assembly cavity and arranged opposite to the outer axial surface of the moving iron core (6). The moving iron core (6) slides relative to the magnetic isolation cloth (7) along the axial direction of the assembly cavity.

2. The high-frequency and high-pressure solenoid valve according to claim 1, characterized in that: A through flow port (3a) is provided in the middle of the valve mouth (3), and a first sealing gasket (6a) is provided on the end surface of the moving iron core (6) facing the valve mouth (3), wherein the first sealing gasket (6a) is arranged in contact with the end of the flow port (3a).

3. The high-frequency and high-pressure solenoid valve according to claim 2, characterized in that: An air inlet (1a) and an air outlet (1b) are respectively arranged on two opposite sides of the valve body (1); the air outlet (1b) is butt-jointed with an end of the flow port (3a) facing away from the first sealing gasket (6a); an end of the valve mouth (3) facing away from the moving iron core (6) is sleeved with a second sealing gasket (3b); and the second sealing gasket (3b) is arranged opposite to the air inlet (1a).

4. The high-frequency and high-pressure solenoid valve according to claim 3, characterized in that: A baffle (8) is provided on the end surface of the valve mouth (3) facing away from the second sealing gasket (3b), and the end of the magnetic isolation cloth (7) extends and is abutted against the end surface of the baffle (8) facing away from the valve mouth (3).

5. The high-frequency and high-pressure solenoid valve according to claim 2, characterized in that: The moving iron core (6) includes a first section (61) and a second section (62), wherein the first section (61) is arranged in contact with the valve mouth (3), a sliding cavity (61a) is hollowly arranged in the first section (61), and the second section (62) shrinks toward one end of the first section (61) and is slidably arranged in the sliding cavity (61a), and the first sealing gasket (6a) is arranged at the bottom of the sliding cavity (61a).

6. The high-frequency and high-pressure solenoid valve according to claim 5, characterized in that: A through connection cavity (62a) is provided in the middle of the second section (62), and a connection component is provided in the connection cavity (62a). One end of the connection component is fixedly connected to an end of the first sealing gasket (6a) away from the flow port (3a), and the other end extends out of the connection cavity (62a) and is arranged to abut against the end face of the static iron core (5).

7. The high-frequency and high-pressure solenoid valve according to claim 6, characterized in that: The connecting assembly comprises an upper ejector pin (63), an elastic member (64) and a lower ejector block (65); the upper ejector pin (63) is arranged in the connecting cavity (62a) and is abutted against the end surface of the static iron core (5); the elastic member (64) is arranged in the sliding cavity (61a) and is fixedly connected to the first sealing gasket (6a); two ends of the elastic member (64) are respectively abutted against one end of the upper ejector pin (63) and the lower ejector block (65) which are arranged opposite to each other.

8. The high-frequency and high-pressure solenoid valve according to claim 1, characterized in that: An elastic gasket (9) is also sleeved on the outer wall of the magnetic isolation tube (4), and the elastic gasket (9) is located between the gap formed by the magnetic conductive housing (2) and the magnetic isolation tube (4).

9. The high-frequency and high-pressure solenoid valve according to claim 8, characterized in that: The elastic gasket (9) is wave-shaped.

10. The high-frequency and high-pressure solenoid valve according to claim 1, characterized in that: Sealing rings (10) are provided between the magnetic isolation tube (4) and the valve body (1) and between the static iron core (5) and the magnetic conductive shell (2), and two sealing rings (10) are provided.

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