Coil support, radio frequency matching circuit assembly and semiconductor manufacturing equipment

Abstract

The utility model provides a coil support, a radio frequency matching circuit assembly and a semiconductor manufacturing device. The coil support comprises at least two fixing columns; a plurality of fixing grooves are formed in the fixing column, the multiple fixing grooves are arranged at intervals in the axial direction of the fixing column, and the fixing grooves are used for allowing coils to penetrate through; the axial distance between every two adjacent fixing grooves in any fixing column is equal. And a heat insulation layer is at least arranged at the contact part of the fixing groove and the coil. According to the configuration, the at least two fixing columns are arranged, so that only one side of the coil is prevented from being stressed, and uniform stress of the coil is ensured; the axial distance between every two adjacent fixing grooves in any fixing column is equal, so that the distance between the coils is fixed. Meanwhile, at least the contact part of the fixing groove and the coil is provided with the heat insulation layer, so that when the coil power is increased and the temperature rises, the coil support is not easy to deform, the output power of the radio frequency circuit is ensured to be stable, the power transmission efficiency is effectively improved, and the semiconductor production efficiency is further improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a coil support, a radio frequency matching circuit component and semiconductor manufacturing equipment. Background Art

[0002] In the semiconductor manufacturing process, the PVD (Physical Vapor Deposition) process is often used in the deposition process, which is to use IMP (Ionized Metal Plasma) to sputter and deposit metal targets. During the deposition process, the sputtered metal ions will be further excited to form a high-density plasma, making the deposition process more efficient and uniform. The IMP Ti cavity in the deposition machine contains an RF matching circuit, which is located between the antenna and the RF output terminal. When working normally, it can match the impedance between the RF power supply and the load, ensuring that the RF power supply can effectively transfer energy to the load to achieve maximum power transmission and system efficiency, prevent the RF signal from losing energy during transmission, and also provide the system with input and output matching that meets the requirements to ensure the stability of the reflected power of the RF matching circuit.

[0003] The structure of the existing coil support is as follows Figures 1 to 3 As shown, when the coil is fixed to the coil bracket, only one side is connected to the coil bracket, which makes the overall force of the coil uneven and the fixing effect is poor. At the same time, the material of the coil bracket is engineering plastic. When the power of the signal generator in the RF matching circuit increases, the coil power will also increase, and the temperature of the coil will rise accordingly. The coil will heat the first fixing part and the second fixing part, causing both to deform. At this time, the fixing effect on the coil changes, resulting in a change in the spacing of the coils, affecting the stability of the RF matching circuit power, and failing to achieve input and output matching of the RF matching circuit.

[0004] Based on this, how to enhance the fixing effect of the coil bracket and reduce the deformation of the coil bracket due to temperature increase, thereby changing the coil spacing and affecting the stability of the RF matching circuit power has become a technical problem that technical personnel in this field need to solve. Utility Model Content

[0005] The purpose of the utility model is to provide a coil bracket, a radio frequency matching circuit component and a semiconductor manufacturing device to solve the problem that the existing coil bracket has a poor fixing effect and is easily deformed due to temperature increase, thereby changing the coil spacing and affecting the stability of the radio frequency matching circuit power.

[0006] In order to achieve the above-mentioned object, the utility model provides a coil support, comprising: at least two fixing columns;

[0007] The fixing column is provided with a plurality of fixing grooves, which are arranged at intervals along the axial direction of the fixing column, and the fixing grooves are used for the coils to pass through;

[0008] The axial distances between two adjacent fixing grooves in any one of the fixing columns are equal; and a heat insulation layer is provided at least at the contact portion between the fixing groove and the coil.

[0009] Optionally, the fixing column includes a first fixing member and a second fixing member, the first fixing member is connected to the second fixing member, and the fixing groove is opened on a side wall of the first fixing member and / or a side wall of the second fixing member.

[0010] Optionally, the fixing groove is opened on the side wall of the first fixing member, and the first fixing member is provided with a side wall of the fixing groove and connected to the second fixing member; the fixing groove is opened on the side wall of the second fixing member, and the second fixing member is provided with a side wall of the fixing groove and connected to the first fixing member.

[0011] Optionally, the fixing groove is formed on side walls of the first fixing member and the second fixing member, and the side wall of the first fixing member provided with the fixing groove is connected to the side wall of the second fixing member provided with the fixing groove.

[0012] Optionally, an axial position of the fixing groove on the first fixing member matches an axial position of the fixing groove on the second fixing member.

[0013] Optionally, the coil support further includes a base, and one end of the fixing column along its own axial direction is connected to the base; at least two fixing columns are arranged at intervals along the circumference of the base.

[0014] In order to achieve the above object, the utility model also provides a radio frequency matching circuit assembly, including: a radio frequency matching circuit module, a radio frequency output module and an antenna.

[0015] The RF matching circuit module is respectively connected to the antenna and the RF output module, and is used to match the impedance between the RF power supply and the load;

[0016] The RF matching circuit module includes a signal generator, a coil and the coil bracket as described above; the signal generator is connected to the RF output module through the coil; the coil is wound on the coil bracket to form a multi-turn coil, and any turn of the coil is sequentially inserted into one of the fixing slots of each of the fixing columns according to a preset order.

[0017] Optionally, on the same fixing column, two adjacent turns of the coil are respectively inserted into two adjacent fixing grooves.

[0018] Optionally, on the same fixing column, two adjacent turns of the coil are respectively inserted into two fixing slots, and at least one fixing slot is spaced between the two fixing slots.

[0019] In order to achieve the above object, the utility model also provides a semiconductor manufacturing equipment, including the radio frequency matching circuit component as described above.

[0020] Compared with the coil support in the prior art, the coil support, radio frequency matching circuit assembly and semiconductor manufacturing equipment provided by the present application have the following advantages:

[0021] The coil bracket provided in the present application is provided with at least two fixing columns, and the coil is inserted into the fixing grooves on the fixing columns, thereby avoiding the coil being stressed on only one side and ensuring that the coil is stressed evenly; and the axial distances between two adjacent fixing grooves on any fixing column are equal, so that the spacing between the coils is fixed; at the same time, a heat insulation layer is provided at least at the contact portion between the fixing groove and the coil, so that when the coil power increases and the temperature rises, the coil bracket is not easily deformed, which can ensure the stability of the output power of the radio frequency circuit, effectively improve the power transmission efficiency, and thus improve the semiconductor production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a coil support in the prior art;

[0023] Figure 2 It is a structural side view of a coil support in the prior art;

[0024] Figure 3 It is a top view of the structure of a coil support in the prior art;

[0025] Figure 4 A schematic diagram of the structure of a coil support provided in an embodiment of the utility model;

[0026] Figure 5 A structural front view of a first coil support provided by an embodiment of the utility model;

[0027] Figure 6 A structural front view of a second coil support provided by an embodiment of the utility model;

[0028] Figure 7 A structural front view of a third coil support provided by an embodiment of the utility model;

[0029] The description of each reference numeral is as follows:

[0030] 10-fixing column; 100-fixing slot; 101-first fixing member; 102-second fixing member;

[0031] 20-coil; 30-base; 40-fastener;

[0032] 50-support member; 60-mounting hole;

[0033] X-axis direction. DETAILED DESCRIPTION

[0034] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0035] As used in this specification, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the term "at least two" is generally used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which include not only the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. The terms "upper", "lower", "top" and "bottom" are generally relative position relationships arranged in the direction of gravity; the terms "vertical, vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal, horizontal plane direction" generally refers to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0036] The purpose of the utility model is to provide a coil bracket, a radio frequency matching circuit component and a semiconductor manufacturing device to solve the problem that the existing coil bracket has a poor fixing effect and is easily deformed due to temperature increase, thereby changing the coil spacing and affecting the stability of the radio frequency matching circuit power.

[0037] Please refer to Figures 1 to 3 As can be understood by those skilled in the art, the existing coil support is only provided with one support member 50, and the support member 50 is provided with a mounting hole 60 for the coil 20 to pass through. The size of the mounting hole 60 is adapted to the size of the coil 20, and the coil 20 is sequentially passed through the mounting hole 60 along the axial direction of the support member 50, forming a structure as shown in FIG. Figure 1 The multi-turn coil 20 is shown, but only one side of the coil 20 is connected to the support member 50. Therefore, the force on the coil 20 is uneven, and the spacing between each turn of the coil 20 is prone to change. When the power of the coil 20 increases and heat is generated, since the coil bracket is made of engineering plastic, it is easy to deform when heated, which further affects the fixing effect of the coil bracket, resulting in the spacing between each turn of the coil 20 changing, reducing the stability of the output power of the coil 20, and further affecting the production efficiency and product yield of the semiconductor. Based on this, the present embodiment provides a coil bracket, a radio frequency matching circuit component and a semiconductor manufacturing equipment, wherein a plurality of fixing columns are arranged so that the coil bracket can stably fix the coil, and at the same time, a heat insulation layer is arranged at the contact portion between the coil and the fixing column to avoid deformation of the bracket caused by the increase in coil temperature, thereby ensuring the stability of the coil output power.

[0038] Please refer to Figure 4 The utility model provides a coil bracket, including: at least two fixed columns 10; a plurality of fixed grooves 100 are arranged on the fixed columns 10, and the plurality of fixed grooves 100 are arranged at intervals along the axial direction X of the fixed columns 10, and the fixed grooves 100 are used for the coil 20 to pass through; the axial distance between two adjacent fixed grooves 100 in any fixed column 10 is equal; and a heat insulation layer is provided at least at the contact portion between the fixed groove 100 and the coil 20 (not shown in the figure). It should be noted that the axial distance between two adjacent fixed grooves 100 in any fixed column 10 refers to the distance between two adjacent fixed grooves 100 in any fixed column 10 on the axial direction X of the fixed column 10. Figure 4In the illustrated example, the coil support includes two fixing posts 10, which are respectively arranged on both sides of the coil 20. The coil 20 is sequentially inserted into the fixing slots 100 of the two fixing posts 10 to form a multi-turn coil 20, wherein each turn of the coil 20 is connected to the two fixing posts 10, that is, both sides of each turn of the coil 20 are supported by the fixing posts 10, so that the entire coil 20 can remain stable; at the same time, a heat insulation layer is provided at least at the contact portion between the fixing slot 100 and the coil 20. In this embodiment, the heat insulation layer can be made of a ceramic material, which can be arranged as a layered structure and at least coated on the outer surface of the contact portion between the fixing slot 100 and the coil 20, or the entire fixing post 10 can be made of a ceramic material. It can be understood by those skilled in the art that the ceramic material is an insulator with high thermal stability, good wear resistance and corrosion resistance. In the process of contacting with the coil 20, it can ensure that it is non-conductive and does not affect the output power of the coil 20, and it can also insulate heat when the coil 20 is heated, so that the coil support does not deform, further ensuring the stability of the coil 20.

[0039] With such configuration, by setting at least two fixing columns 10, the coil 20 is inserted into the fixing groove 100 on the fixing column 10, thereby avoiding that only one side of the coil 20 is subjected to force, and ensuring that the coil 20 is subjected to uniform force; and the axial distances between two adjacent fixing grooves 100 on any fixing column 10 are equal, so that the spacing between the coils 20 is fixed; at the same time, a heat insulation layer is set at least at the contact part between the fixing groove 100 and the coil 20, so that when the power of the coil 20 increases and the temperature rises, the coil bracket is not easy to deform, and the output power stability of the radio frequency circuit can be ensured.

[0040] Please refer to Figure 4 and Figure 5 The fixing column 10 includes a first fixing member 101 and a second fixing member 102, the first fixing member 101 is connected to the second fixing member 102, and the fixing groove 100 is opened on the side wall of the first fixing member 101 and / or the side wall of the second fixing member 102. It should be noted that Figure 4 and Figure 5 In the illustrated example, the first fixing member 101 and the second fixing member 102 are connected by a fastener 40. Specifically, the first fixing member 101 and the second fixing member 102 may be provided with a threaded structure, and the fastener 40 is inserted into the threaded structure to connect the first fixing member 101 and the second fixing member 102. In other embodiments, the first fixing member 101 and the second fixing member 102 may also be connected by snapping or bonded with a high temperature resistant adhesive, and those skilled in the art may configure this according to actual conditions.

[0041] Furthermore, the fixing groove 100 is provided on the side wall of the first fixing member 101, and the side wall of the first fixing member 101 provided with the fixing groove 100 is connected to the second fixing member 102; the fixing groove 100 is provided on the side wall of the second fixing member 102, and the side wall of the second fixing member 102 provided with the fixing groove 100 is connected to the first fixing member 101. It should be noted that when the fixing groove 100 is provided on only one fixing member, it is necessary to connect the side wall provided with the fixing groove 100 with the other fixing member to form a closed groove structure on all sides. After the coil 20 is inserted therein, the closed groove structure on all sides can limit the displacement of the coil 20, further enhancing the fixing effect of the fixing column 10 on the coil 20.

[0042] Furthermore, the fixing groove 100 is formed on the side walls of the first fixing member 101 and the second fixing member 102, and the side wall of the first fixing member 101 provided with the fixing groove 100 is connected to the side wall of the second fixing member 102 provided with the fixing groove 100. As a preferred embodiment, the axial position of the fixing groove 100 on the first fixing member 101 is matched with the axial position of the fixing groove 100 on the second fixing member 102. Figure 4 For example, it is only necessary to align the first fixing member 101 and the second fixing member 102 to complete the alignment of the fixing grooves 100 on the two fixing members, thereby achieving installation. It should be noted that when the fixing grooves 100 are respectively provided on the two fixing members, it is necessary to connect the two side walls with the fixing grooves 100 to form a complete fixing groove 100, and the fixing groove 100 is sealed on all sides, and the size of the formed fixing groove 100 is adapted to the size of the coil 20, thereby achieving the fixation between the coil 20 and the fixing column 10. Among them, in the actual working scene, when the power of the coil 20 increases and the temperature of the coil 20 rises, a thermal expansion and contraction effect will occur. Therefore, the size of the fixing groove 100 should be larger than the size of the coil 20.

[0043] As an optional embodiment, the coil support further comprises a base 30, and one end of the fixing column 10 along its own axial direction X is connected to the base 30; at least two fixing columns 10 are arranged at intervals along the circumference of the base 30. Figure 4 In the illustrated example, one end of the fixing column 10 is connected to the base 30, which may be a snap-fit ​​connection, or may be connected through a fastener 40 and a threaded structure, or may be glued using a high-temperature resistant adhesive. Those skilled in the art may reasonably configure the connection method between the fixing column 10 and the base 30 according to actual conditions.

[0044] The following will be combined Figures 5 to 7 , the arrangement of the fixing groove 100, the fixing column 10, the first fixing member 101, the second fixing member 102 and the base 30 is described.

[0045] exist Figure 5In the illustrated example, the base 30 is in the shape of a long strip, and the coil support includes two fixing columns 10, which are respectively arranged at the two ends of the long side of the base 30, and the fixing grooves 100 on the two fixing columns 10 are arranged one by one, and the corresponding two fixing grooves 100 are located on the same horizontal plane. At this time, after the coil 20 passes through the corresponding fixing grooves 100 on the two fixing columns 10 in sequence, the plane of the coil 20 formed is arranged parallel to the horizontal plane. And each fixing column 10 is formed by connecting a first fixing member 101 and a second fixing member 102, and the heights of the first fixing member 101 and the second fixing member 102 along their own axial direction X are equal. In other embodiments, the base 30 may also be cylindrical, and the two fixing columns 10 may also be distributed at intervals along the radial direction of the cylindrical base 30, and the heights of the first fixing member 101 and the second fixing member 102 along their own axial direction X may also be unequal, and the fixing column 10 may also be formed by only one fixing member, and the fixing groove 100 may be arranged in the central area of ​​the side of the fixing member.

[0046] exist Figure 6 In the illustrated example, the coil support includes two fixing columns 10, and the fixing grooves 100 on the two fixing columns 10 are arranged one by one, and the two corresponding fixing grooves 100 are located on different horizontal planes (i.e., the fixing grooves 100 on the two fixing columns 10 are arranged in a staggered manner). At this time, after the coil 20 is sequentially passed through the corresponding fixing grooves 100 on the two fixing columns 10, the plane of the formed coil 20 is set at an angle to the horizontal plane. Those skilled in the art can select the angle between the plane of the coil 20 and the horizontal plane according to actual needs, and this embodiment does not limit this.

[0047] exist Figure 7 In the illustrated example, the base 30 is cylindrical, and the coil support includes three fixing columns 10, which are evenly arranged along the circumference of the base 30, and the fixing grooves 100 on the three fixing columns 10 are arranged one by one, and the corresponding three fixing grooves 100 can be located on the same horizontal plane or on different horizontal planes. In other embodiments, the coil support may further include four or more fixing columns 10 to enhance the fixing effect of the coil support on the coil 20.

[0048] In another embodiment, the utility model further provides a radio frequency matching circuit assembly, including: a radio frequency matching circuit module, a radio frequency output module and an antenna, the radio frequency matching circuit module is respectively connected to the antenna and the radio frequency output module, and is used to match the impedance between the radio frequency power supply and the load; the radio frequency matching circuit module includes a signal generator, a coil 20 and a coil bracket as described above; the signal generator is connected to the radio frequency output module through the coil 20; the coil 20 is wound on the coil bracket to form a multi-turn coil 20, and any turn of the coil 20 is sequentially inserted into a fixing slot 100 of each fixing column 10 according to a preset order. In such a configuration, the coil 20 is fixed by using the above-mentioned coil bracket, so that the coil 20 is subjected to uniform force, and the consistency of the spacing between the coils 20 is maintained, thereby ensuring the stability of the output power of the radio frequency matching circuit and achieving the maximum power transmission efficiency. It should be noted that, with Figures 4 to 7 In the illustrated example, the coil support includes at least two fixing posts 10, and the fixing slots 100 on each fixing post 10 are arranged one by one. After the coil 20 is sequentially passed through a corresponding set of fixing slots 100 on each fixing post 10, a turn of the coil 20 is formed. The preset sequence can be clockwise or counterclockwise. After the coil 20 has sequentially passed through all the fixing slots 100 on the fixing post 10, the coil 20 is formed. Figure 4 The spiral multi-turn coil 20 is shown. It should be noted that the RF matching circuit provided in this embodiment is for reference only, and does not mean that the coil bracket can only be used for the RF matching circuit. As long as the circuit needs to ensure the stable spacing of the coil 20 and the stable reflected power, the above coil bracket can be used, and this embodiment does not limit this.

[0049] As an optional embodiment, on the same fixed column 10, two adjacent turns of the coil 20 are respectively inserted into two adjacent fixed slots 100. As another optional embodiment, on the same fixed column 10, two adjacent turns of the coil 20 are respectively inserted into two fixed slots 100, and at least one fixed slot 100 is spaced between the two fixed slots 100. Specifically, the coil 20 is sequentially inserted into the corresponding fixed slots 100 on each fixed column 10 along a predetermined order (clockwise or counterclockwise), and then returns to the fixed column 10 that is first passed through. At this time, the coil 20 can be inserted into adjacent fixed slots 100, or can be inserted into spaced fixed slots 100. The spaced fixed slots 100 can be spaced by one fixed slot 100, or by two fixed slots 100, or by multiple (more than two) fixed slots 100. The connection method of the coil 20 and the fixed column 10 can be determined by those skilled in the art based on comprehensive consideration of various aspects such as the function, number of turns, and length of the coil 20.

[0050] In another embodiment, the utility model also provides a semiconductor manufacturing equipment, including the RF matching circuit assembly as described above. In this way, by using the above-mentioned coil bracket to fix the coil 20, and being configured as a RF matching circuit, it is applied to the deposition equipment of semiconductor manufacturing, thereby ensuring the stability of the reflected power of the RF matching circuit and improving the efficiency of the semiconductor manufacturing process and the product yield. It should be noted that the above-mentioned coil bracket and the RF matching circuit assembly can be used in PVD processes, such as in the IMP Ti cavity in the Endura device. Of course, in other embodiments, the above-mentioned coil bracket and the RF matching circuit assembly can also be applied to other fields, such as ETC (Electronic Toll Collection, electronic toll collection system), railway locomotive vehicle identification and tracking, container identification, etc., and can be reasonably configured in combination with specific usage scenarios.

[0051] In summary, in the coil bracket, RF matching circuit assembly and semiconductor manufacturing equipment provided by the embodiments of the utility model, the coil bracket includes: at least two fixed columns; a plurality of fixed grooves are arranged on the fixed columns, and the plurality of fixed grooves are arranged at intervals along the axial direction of the fixed columns, and the fixed grooves are used for the coil to pass through; the axial distance between two adjacent fixed grooves in any fixed column is equal; and a heat insulation layer is provided at least at the contact position between the fixed groove and the coil.

[0052] With such a configuration, by providing at least two fixing columns and passing the coil through the fixing grooves on the fixing columns, it is avoided that only one side of the coil is subjected to force, thereby ensuring that the coil is subjected to uniform force; and the axial distances between two adjacent fixing grooves on any fixing column are equal, so that the spacing between the coils is fixed; at the same time, a heat insulation layer is provided at least at the contact portion between the fixing groove and the coil, so that when the coil power increases and the temperature rises, the coil bracket is not easily deformed, which can ensure the stability of the output power of the RF circuit, effectively improve the power transmission efficiency, and thus improve the semiconductor production efficiency.

[0053] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A coil support, characterized in that: include: At least two fixed columns; The fixing column is provided with a plurality of fixing grooves, which are arranged at intervals along the axial direction of the fixing column, and the fixing grooves are used for the coils to pass through; The axial distances between two adjacent fixing grooves in any one of the fixing columns are equal; and a heat insulation layer is provided at least at the contact portion between the fixing groove and the coil.

2. The coil support according to claim 1, characterized in that: The fixing column includes a first fixing member and a second fixing member, the first fixing member is connected to the second fixing member, and the fixing groove is opened on a side wall of the first fixing member and / or a side wall of the second fixing member.

3. The coil support according to claim 2, characterized in that: The fixing groove is opened on the side wall of the first fixing member, and the first fixing member is provided with a side wall of the fixing groove and connected to the second fixing member; the fixing groove is opened on the side wall of the second fixing member, and the second fixing member is provided with a side wall of the fixing groove and connected to the first fixing member.

4. The coil support according to claim 2, characterized in that: The fixing groove is formed on the side walls of the first fixing member and the second fixing member, and the side wall of the first fixing member provided with the fixing groove is connected to the side wall of the second fixing member provided with the fixing groove.

5. The coil support according to claim 4, characterized in that: The axial position of the fixing groove on the first fixing member matches the axial position of the fixing groove on the second fixing member.

6. The coil support according to claim 1, characterized in that: The coil support also includes a base, and one end of the fixing column along its own axial direction is connected to the base; at least two fixing columns are arranged at intervals along the circumference of the base.

7. A radio frequency matching circuit component, characterized in that: include: RF matching circuit module, RF output module and antenna, The RF matching circuit module is respectively connected to the antenna and the RF output module, and is used to match the impedance between the RF power supply and the load; The RF matching circuit module includes a signal generator, a coil and a coil bracket as described in any one of claims 1 to 6; the signal generator is connected to the RF output module through the coil; the coil is wound on the coil bracket to form a multi-turn coil, and any turn of the coil is sequentially inserted into one of the fixing grooves of each of the fixing columns according to a preset order.

8. The radio frequency matching circuit assembly according to claim 7, characterized in that: On the same fixing column, two adjacent turns of the coil are respectively inserted into two adjacent fixing grooves.

9. The radio frequency matching circuit assembly according to claim 7, characterized in that: On the same fixing column, two adjacent turns of the coil are respectively inserted into two fixing slots, and at least one fixing slot is spaced between the two fixing slots.

10. A semiconductor manufacturing equipment, characterized in that: It comprises the radio frequency matching circuit component as claimed in any one of claims 7 to 9.

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