Adjustable substrate conveying device

Abstract

The utility model discloses an adjustable substrate conveying device which comprises a bottom plate, a fixed side plate is arranged on one side of the bottom plate, two parallel Y-direction electric sliding rails are arranged on the bottom plate, and a sliding sleeve is rotationally installed on a movable side plate; driving belt wheels are arranged on the side, close to the fixed side plate, of the surface of the hexagonal shaft and the side, close to the movable side plate, of the surface of the sliding sleeve correspondingly, and driven belt wheels matched with the driving belt wheels are rotationally installed at the end of the fixed side plate and the end of the movable side plate correspondingly. The driving belt wheel and the driven belt wheel are in transmission connection through a belt, and the belt is used for conveying a substrate; the Y-direction electric sliding rail can drive the electric sliding block to move in the Y direction, meanwhile, the movable side plate is driven to move in the Y direction along the hexagonal shaft, and the distance between the movable side plate and the fixed side plate is adjusted, so that the distance between the two belts is adjusted, the two belts can convey substrates with different widths conveniently, and practicability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate conveying, in particular to an adjustable substrate conveying device. Background Art

[0002] In the semiconductor manufacturing process, chip packaging technology is an important part of the entire process. In the chip packaging process, it is inevitable to transport the substrate and other operations. The existing technology usually uses a substrate conveying device to transport the substrate.

[0003] The substrate conveying device generally comprises a conveying platform, on which a plurality of conveying rollers are arranged at intervals, and a conveying shaft of each conveying roller is provided with a plurality of rollers at intervals along the axial direction; a driving component synchronously drives a plurality of conveying shafts arranged on the platform to rotate, so as to drive the substrates arranged above the plurality of conveying shafts to move, thereby realizing the automatic conveying of the substrates;

[0004] The existing substrate conveying device can only be used for substrates of one width. Since the widths of substrates are different, different substrate conveying devices need to be used for substrates of different widths. Therefore, the present application proposes an adjustable substrate conveying device. Utility Model Content

[0005] The purpose of the utility model is to provide an adjustable substrate conveying device to solve the problems raised in the above background technology.

[0006] To achieve the above object, the utility model provides the following technical solution: an adjustable substrate conveying device, comprising a bottom plate, a fixed side plate is provided on one side of the bottom plate, two parallel Y-direction electric slide rails are provided on the bottom plate, an electric slider is slidably mounted on the Y-direction electric slide rail, and a movable side plate is provided on the electric slider;

[0007] A hexagonal shaft penetrating the movable side plate is rotatably mounted on one end of the fixed side plate, a sliding sleeve is sleeved on a position of the hexagonal shaft corresponding to the movable side plate, and the sliding sleeve is rotatably mounted on the movable side plate;

[0008] A driving pulley is provided on one side of the hexagonal shaft surface close to the fixed side plate and on one side of the sliding sleeve surface close to the movable side plate. A driven pulley cooperating with the driving pulley is rotatably mounted on the end of the fixed side plate and the end of the movable side plate. The driving pulley and the driven pulley are connected by a belt transmission, and the belt is used to transport the substrate.

[0009] Wherein, the Y-axis electric slide rail is vertically arranged between the fixed side plate.

[0010] Wherein, a driving motor is arranged on the outer side of the fixed side plate, and the output end of the driving motor is fixedly connected to the end of the hexagonal shaft.

[0011] Among them, a belt anti-slip pulley is rotatably installed on the side of the fixed side plate near the driving pulley, and a belt anti-slip pulley is rotatably installed on the side of the movable side plate near the driving pulley. The belt anti-slip pulley is used to prevent the belt from falling off the driving pulley.

[0012] Wherein, substrate transition pinch wheels are rotatably mounted on the ends of the fixed side plate and the movable side plate, the substrate transition pinch wheels are located directly above the driven pulley, and a space for substrate transportation is formed between the substrate transition pinch wheels and the belt.

[0013] Among them, the surface of the bottom plate is located on both sides of the movable side plate, and a Z-direction slide rail is slidably installed on the Z-direction slide rail. A T-shaped connecting plate that can slide up and down is provided on the top of the T-shaped connecting plate. A horizontal plate that passes through the movable side plate is provided on the top of the T-shaped connecting plate. A substrate suction plate is provided on the side of the surface of the horizontal plate located between the movable side plate and the fixed side plate.

[0014] Wherein, the surface of the movable side plate is penetrated with upper and lower movable grooves cooperating with the horizontal plate, and the horizontal plate can move up and down along the upper and lower movable grooves.

[0015] Wherein, clamping cylinders are provided at positions on the surface of the bottom plate corresponding to the four corners of the horizontal plate, and the output ends of the clamping cylinders are fixedly connected to the lower surface of the horizontal plate.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] The utility model can drive the electric slider to move in the Y direction through the Y-direction electric slide rail, and at the same time drive the movable side plate to move in the Y direction along the hexagonal axis, adjust the distance between the movable side plate and the fixed side plate, thereby adjusting the distance between the two belts, making it convenient for the two belts to transport substrates of different widths, thereby improving practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall axonometric structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the axonometric structure of the hidden substrate suction plate of the utility model;

[0020] Figure 3 for Figure 2 A schematic diagram of the enlarged structure of the middle part A;

[0021] Figure 4 for Figure 2 The enlarged structural diagram of the middle B part;

[0022] Figure 5 for Figure 2 Schematic diagram of the enlarged structure of part C in the middle.

[0023] In the figure: 1. Y-axis electric slide rail; 2. driving pulley; 3. electric slider; 4. hexagonal shaft; 5. sliding sleeve; 6. belt anti-slip pulley; 7. movable side plate; 8. substrate transition clamping wheel; 9. clamping cylinder; 10. Z-axis slide rail; 11. T-type connecting plate; 12. horizontal plate; 13. substrate suction plate; 14. belt; 15. driven pulley; 16. upper and lower movable grooves; 17. fixed side plate. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0025] See also Figure 1-5 The utility model provides a technical solution: an adjustable substrate conveying device, comprising a bottom plate, through which the substrate conveying device is installed on a work surface or a rack, a fixed side plate 17 is provided on one side of the bottom plate, two parallel Y-direction electric slide rails 1 are provided on the bottom plate, an electric slider 3 is slidably installed on the Y-direction electric slide rail 1, and a movable side plate 7 is provided on the electric slider 3. The electric slider 3 can be driven to slide in the Y direction by the Y-direction electric slide rail 1, and the electric slider 3 drives the movable side plate 7 to move in the Y direction, so as to adjust the distance between the movable side plate 7 and the fixed side plate 17;

[0026] A hexagonal shaft 4 penetrating the movable side plate 7 is rotatably mounted on one end of the fixed side plate 17, a sliding sleeve 5 is sleeved on the position of the hexagonal shaft 4 corresponding to the movable side plate 7, the sliding sleeve 5 is rotatably mounted on the movable side plate 7, the hexagonal shaft 4 is rotatably connected to the fixed side plate 17, the hexagonal shaft 4 is rotatably connected to the movable side plate 7 through the sliding sleeve 5, and the hexagonal shaft 4 can slide along the center of the sliding sleeve 5, when the movable side plate 7 moves along the Y direction with the electric slider 3, the movable side plate 7 drives the sliding sleeve 5 to move along the hexagonal shaft 4, so as to adjust the distance between the movable side plate 7 and the fixed side plate 17;

[0027] Further, after the distance between the movable side plate 7 and the fixed side plate 17 is adjusted, in order to improve the stability of the position of the movable side plate 7, a locking bolt can be threadedly installed on the sliding sleeve 5, and the sliding sleeve 5 can be locked on the hexagonal shaft 4 by tightening the locking bolt;

[0028] A driving pulley 2 is provided on the side of the surface of the hexagonal shaft 4 close to the fixed side plate 17 and on the side of the surface of the sliding sleeve 5 close to the movable side plate 7. A driven pulley 15 cooperating with the driving pulley 2 is rotatably installed at the end of the fixed side plate 17 and the end of the movable side plate 7. The driving pulley 2 and the driven pulley 15 are connected by a belt 14 for transmission. The belt 14 is used to convey the substrate. A driving motor is provided on the outer side of the fixed side plate 17. The output end of the driving motor is fixedly connected to the end of the hexagonal shaft 4. The hexagonal shaft 4 is driven to rotate by the driving motor. During the rotation of the hexagonal shaft 4, the hexagonal shaft 4 drives the two driving pulleys 2 to rotate synchronously, and then drives the two belts 14 to transmit synchronously. The substrate to be conveyed is placed on the belt 14, and the substrate is conveyed by the transmission belt 14.

[0029] Among them, the Y-direction electric slide rail 1 is vertically arranged with the fixed side plate 17, and the fixed side plate 17 is arranged along the X direction. When the substrate is transported, the substrate is transported along the X direction. By adjusting the position of the movable side plate 7 in the Y direction, the distance between the movable side plate 7 and the fixed side plate 17 can be adjusted, so as to facilitate the transportation of substrates of different widths.

[0030] Among them, a belt anti-slip pulley 6 is rotatably installed on the side of the fixed side plate 17 near the driving pulley 2, and a belt anti-slip pulley 6 is rotatably installed on the side of the movable side plate 7 near the driving pulley 2. The belt anti-slip pulley 6 is used to prevent the belt 14 from falling off the driving pulley 2. The belt anti-slip pulley 6 is close to the driving pulley 2, and the belt anti-slip pulley 6 is attached to the belt 14 on the periphery of the driving pulley 2. When the driving pulley 2 drives the belt 14 to transmit, the belt 14 will also drive the belt anti-slip pulley 6 to rotate, and the belt 14 is limited by the belt anti-slip pulley 6 to prevent the belt 14 from falling off the driving pulley 2.

[0031] Among them, the ends of the fixed side plate 17 and the movable side plate 7 are both rotatably installed with substrate transition clamping wheels 8, and the substrate transition clamping wheels 8 are located directly above the driven pulley 15. A space for substrate transportation is formed between the substrate transition clamping wheels 8 and the belt 14. When the active pulley 2 drives the belt 14 to transmit, the belt 14 will transmit around the active pulley 2 and the driven pulley 15. When the belt 14 drives the substrate forward, the substrate will pass through the space between the belt 14 and the substrate transition clamping wheels 8. The substrate is limited by the substrate transition clamping wheels 8 to prevent the substrate from jumping during the transportation process. Since the substrate transition clamping wheels 8 are rotatably installed, during the transmission of the substrate, even if the substrate transition clamping wheels 8 contact the substrate surface, the substrate transition clamping wheels 8 will also rotate relative to the substrate surface, which will not affect the forward transportation of the substrate.

[0032] Among them, when the substrate is transported to the specified position and needs to be laminated, in order to prevent the substrate position from moving, a Z-direction slide rail 10 is provided on both sides of the movable side plate 7 on the surface of the bottom plate, and a T-shaped connecting plate 11 that can slide up and down is slidably installed on the Z-direction slide rail 10. A transverse plate 12 that penetrates the movable side plate 7 is provided on the top of the T-shaped connecting plate 11. A substrate suction plate 13 is provided on the side of the surface of the transverse plate 12 located between the movable side plate 7 and the fixed side plate 17. The T-shaped connecting plate 11 can slide in the vertical direction along the Z-direction slide rail 10, thereby driving the transverse plate 12 and the substrate suction plate 13 to move in the vertical direction. An upper and lower movable groove 16 that cooperates with the transverse plate 12 is provided on the surface of the movable side plate 7. The transverse plate 12 can move up and down along the upper and lower movable grooves 16. The bottom plate surface is provided with a clamping cylinder 9 at the four corners corresponding to the transverse plate 12, and the output end of the clamping cylinder 9 is fixedly connected to the lower surface of the transverse plate 12;

[0033] When the substrate is transported to the designated position and needs to be laminated, the pressing cylinder 9 can push the horizontal plate 12 to move upward along the Z-direction slide rail 10, thereby pushing the substrate suction plate 13 to move upward, and push the substrate suction plate 13 to contact the substrates on the two belts 14, lift up the substrates side by side, and absorb the substrates to ensure that the position of the substrates will not move during lamination;

[0034] A hollow cavity is provided inside the substrate suction plate 13, and adsorption holes that penetrate the hollow cavity are evenly opened on the surface of the substrate suction plate 13. A vacuum pump is provided on the bottom plate, and the vacuum pump is connected to the hollow cavity through a spiral hose. The air in the hollow cavity is extracted by the vacuum pump, and then an adsorption force is generated on the surface of the substrate suction plate 13, so as to adsorb the substrate;

[0035] When the pressing cylinder 9 pushes the horizontal plate 12 to move upward, the upper and lower movable grooves 16 provided on the surface of the movable side plate 7 provide space for the movement of the horizontal plate 12, and the upper and lower movable grooves 16 can also ensure that the movable side plate 7 can move along the Y direction;

[0036] When the horizontal plate 12 is close to the bottom edge of the upper and lower movable grooves 16, the substrate suction plate 13 is located below the substrate being conveyed, and the substrate suction plate 13 will not contact the lower surface of the substrate. When the horizontal plate 12 is close to the top edge of the upper and lower movable grooves 16, the upper surface of the substrate suction plate 13 is higher than the upper surface of the belt 14, and the substrate suction plate 13 lifts up and adsorbs the conveyed substrate. In the process of the clamping cylinder 9 pushing the horizontal plate 12 and the substrate suction plate 13 upward, until the substrate suction plate 13 lifts up and adsorbs the substrate on the belt 14, the height dimensions of the upper and lower movable grooves 16 exceed the movable range of the horizontal plate 12.

[0037] Working principle: When in use, the Y-direction electric slide rail 1 can drive the electric slider 3 to slide in the Y direction, and the electric slider 3 drives the movable side plate 7 to move in the Y direction, so as to adjust the distance between the movable side plate 7 and the fixed side plate 17, thereby adjusting the distance between the two belts 14, so as to facilitate the two belts 14 to transport substrates of different widths. When the substrate is transported to the specified position and needs to be bonded, the clamping cylinder 9 can push the cross plate 12 to move upward along the Z-direction slide rail 10, thereby pushing the substrate suction plate 13 to move upward, and push the substrate suction plate 13 to contact the substrates on the two belts 14, lift the substrates side by side, and adsorb the substrates to ensure that the position of the substrates will not move during bonding.

[0038] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

Claims

1. An adjustable substrate conveying device, comprising a bottom plate, a fixed side plate (17) is provided on one side of the bottom plate, and two parallel Y-direction electric slide rails (1) are provided on the bottom plate, characterized in that: An electric slider (3) is slidably mounted on the Y-axis electric slide rail (1), and a movable side plate (7) is provided on the electric slider (3); A hexagonal shaft (4) penetrating the movable side plate (7) is rotatably mounted on one end of the fixed side plate (17); a sliding sleeve (5) is sleeved on a position of the hexagonal shaft (4) corresponding to the movable side plate (7); and the sliding sleeve (5) is rotatably mounted on the movable side plate (7); A driving pulley (2) is provided on the side of the surface of the hexagonal shaft (4) close to the fixed side plate (17) and a side of the surface of the sliding sleeve (5) close to the movable side plate (7). A driven pulley (15) cooperating with the driving pulley (2) is rotatably mounted on the ends of the fixed side plate (17) and the movable side plate (7). The driving pulley (2) and the driven pulley (15) are connected by a belt (14) for transmission, and the belt (14) is used to transport the substrate.

2. The adjustable substrate conveying device according to claim 1, characterized in that: The Y-direction electric slide rail (1) is vertically arranged between the fixed side plate (17).

3. The adjustable substrate conveying device according to claim 1, characterized in that: A driving motor is disposed on the outside of the fixed side plate (17), and an output end of the driving motor is fixedly connected to the end of the hexagonal shaft (4).

4. The adjustable substrate conveying device according to claim 1, characterized in that: A belt anti-slip pulley (6) is rotatably mounted on the side of the fixed side plate (17) near the driving pulley (2), and a belt anti-slip pulley (6) is rotatably mounted on the side of the movable side plate (7) near the driving pulley (2). The belt anti-slip pulley (6) is used to prevent the belt (14) from falling off the driving pulley (2).

5. The adjustable substrate conveying device according to claim 1, characterized in that: The ends of the fixed side plate (17) and the movable side plate (7) are both rotatably mounted with substrate transition clamping wheels (8), the substrate transition clamping wheels (8) are located directly above the driven pulley (15), and a space for substrate transportation is formed between the substrate transition clamping wheels (8) and the belt (14).

6. The adjustable substrate conveying device according to claim 1, characterized in that: The surface of the bottom plate is located on both sides of the movable side plate (7) and is provided with a Z-direction slide rail (10). A T-shaped connecting plate (11) that can slide up and down is slidably installed on the Z-direction slide rail (10). The top of the T-shaped connecting plate (11) is provided with a horizontal plate (12) that passes through the movable side plate (7). The surface of the horizontal plate (12) is located between the movable side plate (7) and the fixed side plate (17) and is provided with a substrate suction plate (13).

7. The adjustable substrate conveying device according to claim 6, characterized in that: The surface of the movable side plate (7) is penetrated by upper and lower movable grooves (16) which cooperate with the transverse plate (12), and the transverse plate (12) can move up and down along the upper and lower movable grooves (16).

8. The adjustable substrate conveying device according to claim 6, characterized in that: A clamping cylinder (9) is provided at the positions of the bottom plate surface corresponding to the four corners of the horizontal plate (12), and the output end of the clamping cylinder (9) is fixedly connected to the lower surface of the horizontal plate (12).

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