Wafer ejector pin mechanism for wafer sorting machine

By inserting rubber vibration damping parts and adding detection mechanisms into the thimble mechanism of the wafer sorter, the vibration problems caused by the increase in the running rate of the traditional thimble mechanism are solved, and a more efficient wafer ejection and a safer operating state are achieved.

CN222801785UActive Publication Date: 2025-04-25厦门特仪科技有限公司
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Patent Information

Application Number
CN202420837045.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-22
Publication Date
2025-04-25
Estimated Expiration
2034-04-22

AI Technical Summary

Technical Problem

After the wafer thimble mechanism used in traditional wafer sorting machines has obvious vibration problems after increasing the operating speed, resulting in the chip position deviation or falling off, affecting the ejection efficiency.

Method used

A wafer thimble mechanism for wafer sorting machines is designed. By inserting a rubber vibration-absorbing member on the moving parts and fixing the inner end of the thimble rod into the fixing hole of the vibration-absorbing member, the vibration amount transmitted to the thimble rod is reduced. At the same time, a detection mechanism is added to monitor the operating status of the thimble rod to prevent interference and reminder signals.

Benefits of technology

It effectively solves the vibration problems caused by the increase in operating speed, improves the chip ejection efficiency, and improves the operational safety.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a wafer ejector pin mechanism for a wafer sorting machine, which comprises a fixed part, a support plate, a plurality of ejector pins and a plurality of ejector pins, the movable part is movably mounted on the support plate, an extension spring is fixedly mounted between the movable part and the fixed part, a mounting part is arranged on the outer side of the movable part in a step shape, and an embedding groove is formed in the position, on the inner side of the mounting part, of the movable part in an inwards-concave mode; the vibration reduction piece is fixedly embedded in the embedding groove; the inner end of the ejector pin rod piece is screwed to the mounting part, and the inner end part of the ejector pin rod piece is fixedly inserted into the fixing hole of the vibration reduction piece; the ejector pin driving mechanism comprises a driving motor and a driving cam, and the side edge of the driving cam abuts against the inner end of the moving part; and the detection mechanism comprises an insulation fixing piece installed on the outer side of the ejector pin rod piece, and the periphery of the insulation fixing piece is fixedly sleeved with a conductor. According to the utility model, the vibration problem caused by the increase of the running speed can be effectively solved, so that the ejection efficiency of the wafer is improved.
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Description

Technical Field

[0001] The utility model relates to a component mechanism for a wafer sorting machine, in particular to a wafer ejector pin mechanism for a wafer sorting machine. Background Art

[0002] The chip sorting machine needs to sort the different electronic data chips that have passed the test. Hundreds or thousands of chips with different data are attached to a substrate, and multiple substrates are placed vertically in a substrate slot. During the sorting process, the qualified chips are effectively transported to the location of the material transfer mechanism through the movement of the substrate, and then the corresponding chip is ejected by the corresponding ejector mechanism, so that it is adsorbed by the suction nozzle of the material transfer mechanism, and the qualified chip is transferred to the substrate on the other side through the rotation of the material transfer mechanism.

[0003] The driving mechanism of the wafer ejector mechanism of the traditional wafer sorting machine mainly adopts a screw drive mechanism or a cylinder drive mechanism, which has high driving stability and can effectively and stably eject the wafer, but its operating speed is relatively slow. In order to improve the operating speed of the wafer ejector mechanism, the ejector fixing seat is limited by a spring, and then the driving motor drives the driving cam to drive the ejector fixing seat back and forth, so as to drive the ejector rod to quickly eject the wafer, thereby greatly improving the operating speed of the wafer ejector mechanism. However, in the process of stretching the spring and cooperating with the driving cam to quickly push, the operation of the wafer ejector mechanism will have obvious vibration, resulting in the hidden danger of wafer position deviation when ejecting the wafer. In severe cases, it may even cause the wafer to fall off before being adsorbed in place.

[0004] Therefore, the purpose of the present invention is to design a wafer ejector mechanism for a wafer sorting machine that can effectively solve the vibration problem caused by the increase in operating speed, so that the wafer ejector mechanism that is quickly pushed by the stretching of the spring and the driving cam can be implemented, thereby improving the ejection efficiency of the wafer. Summary of the invention

[0005] In view of the technical problems existing in the above-mentioned prior art, the utility model provides a wafer ejector pin mechanism for a wafer sorting machine, which can effectively solve the technical problems existing in the above-mentioned prior art.

[0006] The technical solution of the utility model is:

[0007] A wafer ejector mechanism for a wafer sorting machine, comprising:

[0008] A fixing member, fixedly mounted on a corresponding workbench, wherein a corresponding support plate is adjustable on one side of the fixing member;

[0009] A moving member is movably mounted on the support plate, a corresponding tension spring is fixedly mounted between the moving member and the fixed member, a corresponding mounting portion is provided in a stepped shape on the outer side of the moving member, and a corresponding mounting groove is provided inwardly on the moving member inside the mounting portion;

[0010] A vibration damping member is fixedly embedded in the embedding groove, and a fixing hole facing the mounting portion is arranged on the outer side of the vibration damping member;

[0011] An ejector rod, the inner end of which is screwed to the mounting portion of the moving member, and the inner end of which passes through the mounting portion and is fixedly inserted into the fixing hole of the vibration damping member;

[0012] The ejector drive mechanism comprises a drive motor fixedly mounted on the support plate, and a drive cam fixedly mounted on the output shaft end of the drive motor, wherein the side edge of the drive cam abuts against the inner end of the moving member;

[0013] The detection mechanism comprises an insulating fixing piece fixedly mounted on the outside of the ejector rod, a circle of corresponding conductor is fixedly sleeved on the periphery of the insulating fixing piece, and the conductor is connected to an external weak power source through a corresponding wire.

[0014] The vibration damping member is a rubber vibration damping member, and the inner end of the ejector rod is fixedly inserted into the fixing hole of the vibration damping member by interference fit.

[0015] The insulating fixing piece is provided with a corresponding filling groove, in which a plurality of corresponding damping particles are filled, and a limiting ring plate for blocking the damping particles is installed and sealed at the notch of the filling groove.

[0016] The ejector rod is symmetrically provided with a group of corresponding limiting platforms at positions corresponding to the insulating fixing piece. The insulating fixing piece is fixed to the ejector rod by corresponding locking bolts, and the rod end of the locking bolt abuts against the limiting platform of the ejector rod; the conductor adopts a coil spring arranged in a ring shape.

[0017] A corresponding guide rail is fixedly mounted on the fixing member, a movable slider matched with the guide rail is fixedly connected to the support plate, and the support plate is fixedly connected to the piston rod end of the corresponding regulating cylinder.

[0018] A corresponding guide slide block is fixedly mounted on the support plate, and a movable guide rail matched with the guide slide block is fixedly mounted on the movable member.

[0019] A corresponding fixing plate is fixedly connected to one side of the fixing member, and the fixing plate is fixed to the corresponding workbench by corresponding mounting bolts.

[0020] The fixed part and the movable part are respectively fixedly connected with corresponding spring limiting rods, and the two ends of the tension spring are respectively fixedly installed on the spring limiting rods.

[0021] The movable member is rotatably mounted with a corresponding guide bearing at a position corresponding to the driving cam, and the outer ring of the guide bearing abuts against the driving cam.

[0022] The outer end of the ejector rod is detachably mounted with a corresponding tightening portion by means of a threaded connection, and a circle of corresponding limiting convex edges is arranged on the inner side of the tightening portion.

[0023] Advantages of the utility model:

[0024] 1) The utility model has a mounting portion arranged in a stepped shape on the outer side of the moving part, and an embedding groove is arranged inwardly on the moving part inside the mounting portion. On this basis, the vibration damping part is installed in the embedding groove by embedding. After the inner end of the ejector rod is screwed to the mounting portion of the moving part, the inner end of the ejector rod passes through the mounting portion of the moving part and is fixedly inserted into the fixing hole of the vibration damping part. By setting the vibration damping part, the limiting and fixing effect of the ejector rod can be significantly improved, and the vibration amount transmitted to the ejector rod can be reduced, and the vibration of the ejector rod can be reduced, so as to effectively solve the vibration problem caused by the increase in the operating speed, so that the wafer ejector mechanism that is stretched by the tension spring and quickly pushed by the driving cam can be implemented, thereby improving the ejection efficiency of the wafer of the utility model.

[0025] 2) The utility model further adds a detection mechanism, which includes an insulating fixture fixedly installed on the outside of the ejector rod, and a circle of corresponding conductors is fixedly sleeved on the outer periphery of the insulating fixture, and the conductors are connected to the external weak power supply through corresponding wires. This is because, during the operation of the ejector rod, there is a possibility of interference with other mechanisms. Through the setting of the detection mechanism, when its conductor touches other parts of the sorting machine, the current is conducted, and it can be judged that the operation of the ejector rod is interfered, so as to form a warning signal, thereby improving the operation safety of the utility model.

[0026] 3) The insulating fixing of the utility model is provided with a filling groove, in which a plurality of damping particles are filled, and a limiting ring plate for blocking the damping particles is installed at the notch of the filling groove. The friction energy dissipation between the damping particles can also significantly improve the vibration reduction effect of the pressing end of the ejector rod, thereby further improving the stability of the utility model when the wafer is quickly ejected.

[0027] 4) The movable part of the utility model is rotatably installed with a guide bearing at a position corresponding to the driving cam, and the outer ring of the guide bearing abuts against the driving cam. Through the intervention of the guide bearing, the rotational connection stability between the movable part and the driving cam can be effectively improved, thereby improving the practical effect of the utility model.

[0028] 5) The outer end of the ejector rod of the utility model is detachably mounted with a tightening part by means of a threaded connection, and a circle of corresponding limiting convex edges is arranged on the inner side of the tightening part. Before assembling the insulating fixture, the tightening part can be removed in advance to facilitate the assembly operation of the insulating fixture; after the insulating fixture is assembled, the tightening part can be assembled in place, and at this time, under the limitation of the limiting convex edge, the limiting effect of the insulating fixture can be further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of the utility model.

[0030] Figure 2 It is a structural schematic diagram of another side of the utility model.

[0031] Figure 3 It is a structural schematic diagram of a movable part provided with an embedding groove.

[0032] Figure 4 It is a structural diagram of the detection mechanism.

[0033] Figure 5 A cross-sectional view of the detection mechanism.

[0034] In the accompanying drawings: a fixing part 1, a support plate 2, a moving part 3, a mounting portion 301, a mounting groove 302, a tension spring 4, a vibration damping part 5, a ejector rod 6, an ejector drive mechanism 7, a drive motor 701, a drive cam 702, a detection mechanism 8, an insulating fixing part 801, a conductor 802, damping particles 9, a limiting ring plate 10, a limiting platform 11, a guide rail 12, a moving slider 13, an adjusting cylinder 14, a guide slider 15, a moving guide rail 16, a fixing plate 17, a spring limiting rod 18, a guide bearing 19, a tightening part 20, and a limiting convex edge 21. DETAILED DESCRIPTION

[0035] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the accompanying drawings:

[0036] refer to Figure 1-5 , a wafer ejector mechanism for a wafer sorting machine, comprising:

[0037] A fixing member 1 is fixedly mounted on a corresponding workbench, and a corresponding support plate 2 is adjustable on one side of the fixing member 1;

[0038] The movable member 3 is movably mounted on the support plate 2, a corresponding tension spring 4 is fixedly mounted between the movable member 3 and the fixed member 1, a corresponding mounting portion 301 is provided in a stepped shape on the outer side of the movable member 3, and a corresponding embedding groove 302 is provided inwardly on the movable member 3 inside the mounting portion 301;

[0039] The vibration damping member 5 is fixedly embedded in the embedding groove 302, and a fixing hole facing the mounting portion 301 is provided on the outer side of the vibration damping member 5;

[0040] The inner end of the ejector rod 6 is screwed to the mounting portion 301 of the moving member 3, and the inner end thereof passes through the mounting portion 301 and is fixedly inserted into the fixing hole of the vibration damping member 5;

[0041] The ejector drive mechanism 7 comprises a drive motor 701 fixedly mounted on the support plate 2, and a drive cam 702 fixedly mounted on the output shaft end of the drive motor 701, wherein the side edge of the drive cam 702 abuts against the inner end of the moving member 3;

[0042] The detection mechanism 8 comprises an insulating fixture 801 fixedly mounted on the outside of the ejector rod 6. The outer periphery of the insulating fixture 801 is fixedly sleeved with a circle of corresponding conductor 802. The conductor 802 is connected to an external weak power source through a corresponding wire.

[0043] The utility model is provided with a mounting portion 301 in a stepped shape on the outer side of the moving part 3, and an embedding groove 302 is provided on the moving part 3 inside the mounting portion 301. On this basis, the vibration damping member 5 is installed in the embedding groove 302 by embedding. After the inner end of the ejector rod 6 is screwed to the mounting portion 301 of the moving part 3, the inner end of the ejector rod 6 passes through the mounting portion 301 of the moving part 3 and is fixedly inserted into the fixing hole of the vibration damping member 5. By setting the vibration damping member 5, the limiting and fixing effect of the ejector rod 6 can be significantly improved, and the vibration amount transmitted to the ejector rod 6 can be reduced, and the vibration of the ejector rod 6 can be reduced, so that the vibration problem caused by the increase in the running speed can be effectively solved, so that the wafer ejector mechanism that is stretched by the stretching spring 4 and quickly pushed by the driving cam 702 can be implemented, thereby improving the ejection efficiency of the wafer of the utility model.

[0044] The present invention is further provided with a detection mechanism 8, which includes an insulating fixing member 801 fixedly mounted on the outside of the ejector rod 6, and a corresponding conductor 802 is fixedly sleeved on the outer periphery of the insulating fixing member 801, and the conductor 802 is connected to an external weak power source through a corresponding wire. This is because, during the operation of the ejector rod 6, there is a possibility of interference with other mechanisms. The present invention sets up the detection mechanism 8, and when its conductor 802 touches other parts of the sorting machine, the current is conducted, and it can be judged that the operation of the ejector rod 6 is interfered, so as to form a warning signal, thereby improving the operation safety of the present invention.

[0045] The vibration damping member 5 is a rubber vibration damping member, and the inner end of the ejector rod 6 is fixedly inserted into the fixing hole of the vibration damping member 5 by interference fit.

[0046] The insulating fixing member 801 is provided with a corresponding filling groove, in which a plurality of corresponding damping particles 9 are filled, and a limiting ring plate 10 for blocking the damping particles 9 is installed and sealed at the notch of the filling groove.

[0047] By consuming friction energy between the damping particles 9, the vibration reduction effect on the pressing end of the ejector rod 6 can be significantly improved, thereby further improving the stability of the utility model when quickly ejecting the wafer.

[0048] The ejector rod 6 is symmetrically provided with a group of corresponding limiting platforms 11 at positions corresponding to the insulating fixing member 801. The insulating fixing member 801 is fixed to the ejector rod 6 by corresponding locking bolts, and the rod end of the locking bolt abuts against the limiting platform 11 of the ejector rod 6. The conductor 802 adopts a coil spring arranged in a ring shape.

[0049] A corresponding guide rail 12 is fixedly mounted on the fixing member 1, a movable slider 13 adapted to the guide rail 12 is fixedly connected to the support plate 2, and the support plate 2 is fixedly connected to the piston rod end of the corresponding regulating cylinder 14. By adjusting the extension amount of the piston rod of the regulating cylinder 14, the specific position of the support plate 2 can be controlled to adapt to the ejection distance of materials of different specifications.

[0050] The support plate 2 is fixedly mounted with a corresponding guide slider 15, and the movable member 3 is fixedly mounted with a movable guide rail 16 adapted to the guide slider 15. A corresponding fixing plate 17 is fixedly connected to one side of the fixing member 1, and the fixing plate 17 is fixed to the corresponding workbench by corresponding mounting bolts. The fixing member 1 and the movable member 3 are respectively fixedly mounted with corresponding spring limiting rods 18, and both ends of the tension spring 4 are respectively fixedly mounted on the spring limiting rods 18.

[0051] The moving member 3 is rotatably mounted with a corresponding guide bearing 19 at a position corresponding to the driving cam 702, and the outer ring of the guide bearing 19 abuts against the driving cam 702. Through the intervention of the guide bearing 19, the rotational connection stability between the moving member 3 and the driving cam 702 can be effectively improved, thereby improving the practical effect of the utility model.

[0052] The outer end of the ejector rod 6 is detachably mounted with a corresponding pressing part 20 by means of a threaded connection, and a circle of corresponding limiting convex edges 21 are arranged on the inner side of the pressing part 20. Before assembling the insulating fixture 801, the pressing part 20 can be removed in advance to facilitate the assembly operation of the insulating fixture 801; after the insulating fixture 801 is assembled, the pressing part 20 can be assembled in place, and at this time, under the limitation of the limiting convex edge 21, the limiting effect of the insulating fixture 801 can be further improved.

[0053] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A wafer ejector mechanism for a wafer sorting machine, characterized in that: include: A fixing member (1) is fixedly mounted on a corresponding workbench, and a corresponding support plate (2) is adjustable on one side of the fixing member (1); A movable member (3) is movably mounted on the support plate (2); a corresponding tension spring (4) is fixedly mounted between the movable member (3) and the fixed member (1); a corresponding mounting portion (301) is provided in a stepped shape on the outer side of the movable member (3); and a corresponding mounting groove (302) is provided in a concave shape on the movable member (3) inside the mounting portion (301); A vibration damping member (5) is fixedly mounted in the mounting groove (302), and a fixing hole facing the mounting portion (301) is provided on the outer side of the vibration damping member (5); An ejector rod (6), the inner end of which is screwed to the mounting portion (301) of the moving member (3), and the inner end of which passes through the mounting portion (301) and is fixedly inserted into the fixing hole of the vibration damping member (5); The ejector drive mechanism (7) comprises a drive motor (701) fixedly mounted on the support plate (2), and a drive cam (702) fixedly mounted on the output shaft end of the drive motor (701), wherein the side edge of the drive cam (702) abuts against the inner end of the moving member (3); The detection mechanism (8) comprises an insulating fixing member (801) fixedly mounted on the outside of the ejector rod (6), wherein a circle of corresponding conductor (802) is fixedly sleeved on the periphery of the insulating fixing member (801), and the conductor (802) is connected to an external weak power source via a corresponding wire.

2. A wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: The vibration damping member (5) is a rubber vibration damping member, and the inner end portion of the ejector rod (6) is fixedly inserted into the fixing hole of the vibration damping member (5) by means of interference fit.

3. The wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: The insulating fixing member (801) is provided with a corresponding filling groove, the filling groove is filled with a plurality of corresponding damping particles (9), and a limiting ring plate (10) for blocking the damping particles (9) is installed and sealed at the notch of the filling groove.

4. A wafer ejector mechanism for a wafer sorting machine according to claim 3, characterized in that: The ejector rod (6) is symmetrically provided with a group of corresponding limiting platforms (11) at positions corresponding to the insulating fixing member (801); the insulating fixing member (801) is fixed to the ejector rod (6) by corresponding locking bolts, and the rod end of the locking bolt abuts against the limiting platform (11) of the ejector rod (6); the conductor (802) adopts a spiral spring arranged in a ring shape.

5. The wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: A corresponding guide rail (12) is fixedly mounted on the fixing member (1), a movable slider (13) adapted to the guide rail (12) is fixedly connected to the support plate (2), and the support plate (2) is fixedly connected to the piston rod end of the corresponding regulating cylinder (14).

6. The wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: A corresponding guide slide block (15) is fixedly mounted on the support plate (2), and a movable guide rail (16) adapted to the guide slide block (15) is fixedly mounted on the movable member (3).

7. The wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: A corresponding fixing plate (17) is fixedly connected to one side of the fixing member (1), and the fixing plate (17) is fixed to a corresponding workbench by corresponding mounting bolts.

8. The wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: The fixed member (1) and the movable member (3) are respectively fixedly connected with corresponding spring limiting rods (18), and both ends of the tension spring (4) are respectively fixedly mounted on the spring limiting rods (18).

9. The wafer ejector mechanism for a wafer sorting machine according to claim 1, characterized in that: The movable member (3) is rotatably mounted with a corresponding guide bearing (19) at a position corresponding to the driving cam (702), and the outer ring of the guide bearing (19) abuts against the driving cam (702).

10. The wafer ejector mechanism for a wafer sorting machine according to claim 4, characterized in that: The outer end of the ejector rod (6) is detachably mounted with a corresponding tightening portion (20) by means of a threaded connection, and a circle of corresponding limiting convex edges (21) is provided on the inner side of the tightening portion (20).