Heating chamber storage device and defoaming system

Abstract

The utility model discloses a heating chamber storage device and a defoaming system, the heating chamber storage device comprises a shell, at least one support and at least one laminate, the interior of the shell is hollow to form a cavity, and the cavity is used for accommodating a product to be subjected to heat treatment; the supports are used for bearing the shelf boards, each support comprises two sub-supports which are arranged in pairs in the width direction of the cavity, the two sub-supports are fixed to the inner wall of the shell in the width direction, and each sub-support is arranged in the length direction of the cavity; the shelf plates are used for partitioning the cavity into independent sub-cavities and bearing the product to be subjected to heat treatment, each sub-cavity independently accommodates the product to be subjected to heat treatment, and the two ends, in the width direction, of each shelf plate are detachably connected with the two sub-supports respectively. The heating chamber storage device can be compatible with products of various sizes and is convenient to disassemble and assemble.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a heating chamber placement device and a defoaming system. Background Art

[0002] In the semiconductor industry, the bonding between adhesive materials and solid flat media is often involved. Due to the characteristics of the adhesive material itself and the influence of molecules in the air, bubbles are very likely to form on the bonding surface. Bubbles will affect the appearance of the product and may even greatly reduce the product performance, especially for optical devices. After bonding, they need to be de-bubbled before re-processing. The common way to de-bubble is to place the product in a heating chamber for heating and pressurization. In the heating chamber of the de-bubble system, there needs to be a storage device for holding the product. The existing storage devices are drawer-type and fixed-type. However, these two types of storage devices can only be customized according to the specific product specification requirements, are not compatible with products of various sizes, and are difficult to disassemble and assemble. Utility Model Content

[0003] The technical problem to be solved by the embodiments of the utility model is to provide a heating chamber storage device and a defoaming system. The heating chamber storage device can be compatible with products of various sizes and is easy to disassemble and assemble.

[0004] In order to solve the above technical problems, the utility model provides a heating chamber storage device, the heating chamber storage device comprises: an outer shell, at least one bracket and at least one layer plate, wherein the interior of the outer shell is hollow to form a chamber, and the chamber is used to accommodate the product to be heat treated; the bracket is used to carry the layer plate, each of the brackets comprises two sub-brackets arranged in a pair along the width direction of the chamber, the two sub-brackets are respectively fixed on the inner wall of the outer shell along the width direction, and each of the sub-brackets is arranged along the length direction of the chamber; the layer plate is used to partition the chamber into independent sub-chambers and carry the product to be heat treated, each sub-chamber independently accommodates the product to be heat treated, and each of the layer plates is detachably connected to the two sub-brackets at both ends along the width direction.

[0005] In a feasible implementation, the sub-bracket is provided with at least one limiting hole, the layer plate is provided with at least two limiting members, and the limiting hole and the limiting members are detachably connected to detachably connect the layer plate and the bracket.

[0006] In a feasible implementation, the sub-bracket has a supporting surface, which is parallel to the plane where the width direction and the length direction are located, the limiting hole is opened on the supporting surface, and the limiting member passes through the limiting hole along the height direction of the chamber.

[0007] In a feasible implementation, the limiting member is arranged below the layer plate along the height direction.

[0008] In a feasible implementation, the limiting hole includes a first hole and a second hole that are connected, the first hole and the second hole are arranged along the length direction, the aperture of the second hole is larger than the aperture of the first hole, the second hole is used for disassembling and assembling the limiting member, and the first hole is used for limiting the limiting member; the limiting member includes a first part and a second part connected along the height direction and away from the direction of the layer plate, the diameter of the second part is larger than the diameter of the first part, the first part passes through the first hole, and the second part is used to limit the connection between the layer plate and the sub-bracket along the height direction.

[0009] In a feasible implementation, the diameter of the first hole is slightly larger than the diameter of the first portion, the diameter of the second hole is larger than the diameter of the second portion, and the diameter of the first hole is smaller than the diameter of the second portion.

[0010] In a feasible implementation, the heating chamber storage device includes at least two of the brackets and at least one shelf, the two brackets are arranged along the height direction of the chamber, and each of the shelf is detachably connected to the bracket so that the position of the shelf in the chamber along the height direction of the chamber can be adjusted.

[0011] In a feasible implementation, the sub-bracket has at least two of the limiting holes, the layer plate is provided with at least four of the limiting members, two of the limiting holes are arranged on the sub-bracket along the length direction and are symmetrically distributed along the width direction, and the limiting members are arranged corresponding to the limiting holes.

[0012] In a feasible implementation, the limiting member is fixed to the layer plate by welding.

[0013] Correspondingly, the utility model also provides a defoaming system, comprising a heating chamber placement device as described in any one of the above items.

[0014] The implementation of this utility model has the following beneficial effects:

[0015] In the heating chamber storage device provided in the embodiment of the present application, the layer plate divides the chamber into independent sub-chambers, and the layer plate and the sub-bracket are detachably connected, so that the space in the chamber of the heating chamber storage device for accommodating the product to be heat-treated is variable. Therefore, the heating chamber storage device provided in the embodiment of the present application can be adapted to products of different sizes. In addition, the layer plate and the sub-bracket are detachably connected, so that when adjusting the sub-chamber space, the layer plate does not need to disassemble too much structure, but only needs to disassemble the connection between the layer plate and the bracket, and the disassembly range is small, which is convenient for disassembly.

[0016] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings herein are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application, and do not constitute improper limitations on the present application.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of a heating chamber storage device shown in one embodiment of the utility model;

[0019] Figure 2 yes Figure 1 The three-dimensional structure diagram of the layer plate of the heating chamber storage device is shown;

[0020] Figure 3 yes Figure 1 A top view of the sub-bracket of the heating chamber storage device is shown.

[0021] Reference numerals in the figure: 100 - heating chamber storage device;

[0022] 110-housing; 111-top plate, 112-bottom plate, 113-first side plate, 114-second side plate, 115-through hole; 120-sub-bracket; 121-support surface, 122-connecting piece, 123-limiting hole, 1231-first hole, 1232-second hole; 130-layer plate; 140-limiting piece, 141-first part, 142-second part. DETAILED DESCRIPTION

[0023] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0024] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0026] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0027] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0028] Please refer to Figures 1 to 3 , Figure 1 It is a three-dimensional structural schematic diagram of a heating chamber storage device 100 shown in an embodiment of the utility model; Figure 2 yes Figure 1 The three-dimensional structure of the layer plate 130 of the heating chamber storage device 100 is shown; Figure 3 yes Figure 1A top view of the sub-bracket 120 of the heating chamber storage device 100 is shown. The embodiment of the present application provides a heating chamber storage device 100. The heating chamber storage device 100 includes: a shell 110, three brackets and a layer plate 130. Among them, the interior of the shell 110 is hollow to form a chamber, and the chamber is used to accommodate the product to be heat treated. According to this embodiment, the shell 110 may include two groups of four wall surfaces arranged in pairs, namely a top plate 111 and a bottom plate 112 arranged in pairs along the chamber height direction Z, and a first side plate 113 and a second side plate 114 arranged along the chamber width direction X. A hollow chamber is formed between the top plate 111, the bottom plate 112, the first side plate 113 and the second side plate 114. The cross-section of the chamber may be square or rectangular. Through holes 115 may also be provided on the four side walls to better transfer the heat of the heating chamber so that the products in the chamber are evenly heated. In order to better illustrate the heating chamber storage device 100 provided in the present application, a rectangular coordinate system is established with the width direction X of the chamber of the heating chamber storage device 100 as the X-axis, the length direction Y of the chamber as the Y-axis, and the height direction Z of the chamber as the Z-axis.

[0029] The bracket is used to carry the layer plate 130. Each of the brackets includes two sub-brackets 120 arranged in pairs along the width direction X of the chamber. The two sub-brackets 120 are respectively fixed to the inner wall of the shell 110 along the width direction X. Each sub-bracket 120 is arranged along the length direction Y of the chamber. Specifically, the sub-bracket 120 is fixed to the first side plate 113 and the second side plate 114 of the shell 110. The length of the sub-bracket 120 is the same as or slightly smaller than the length of the first side plate 113 or the second side plate 114. In this way, the sub-bracket 120 can best play the role of carrying the layer plate 130, and at the same time will not protrude from the chamber, thereby ensuring the coordination of the overall structure of the device.

[0030] The layer plate 130 is used to separate the chamber into independent sub-chambers. Each sub-chamber independently accommodates the product to be heat treated. Each of the two ends of the layer plate 130 along the width direction X is detachably connected to the two sub-brackets 120. When the layer plate 130 is fixedly connected to the bracket, the layer plate 130 is used to carry the product to be heat treated. The layer plate 130 has a platform parallel to the XY plane, which is used to carry the product to be heat treated. The product to be heat treated can be the product itself, or it can be a carrier or a material box carrying the product. Here, each sub-chamber independently accommodates the product to be heat treated, which can be understood as each sub-chamber can accommodate a product or a material box or a carrier. Accordingly, in this embodiment, a layer plate 130 can separate the chamber into two sub-chambers, and two products or two material boxes or two carriers can be accommodated in the chamber. One of the products or material boxes or carriers is placed on the layer plate 130, and the other product or material box or carrier can be placed on the bottom plate 112 of the chamber.

[0031] In the heating chamber storage device 100 provided in the embodiment of the present application, the layer plate 130 divides the chamber into independent sub-chambers, and the layer plate 130 and the sub-bracket 120 are detachably connected, so that the space in the chamber of the heating chamber storage device 100 for accommodating the product to be heat-treated is variable, and therefore, the heating chamber storage device 100 provided in the embodiment of the present application can be adapted to products of different sizes. In addition, the layer plate 130 and the sub-bracket 120 are detachably connected, so that when adjusting the sub-chamber space, the layer plate 130 does not need to disassemble too much structure, and only needs to disassemble the connection between the layer plate 130 and the bracket, and the disassembly range is small, which is convenient for disassembly.

[0032] Furthermore, if Figure 1As shown, the three brackets are arranged along the height direction Z of the chamber. And they are evenly arranged along the height direction Z, and the chamber is evenly divided into four sections along the height direction Z. Each of the layer plates 130 is detachably connected to the bracket so that the position of the layer plate 130 in the chamber along the height direction Z of the chamber can be adjusted. In this way, the heating chamber storage device 100 provided in the embodiment of the present application can adapt to at least four specifications of products. Specifically, when the layer plate 130 is completely removed from the bracket, the chamber can be used for a product of any specification that can be placed in the chamber, and the product can be directly placed on the bottom plate 112 of the chamber, and the height of the product can be any height lower than the height of the chamber. The maximum size of the product specification that the chamber can accommodate is defined as the first specification here. When the layer plate 130 is fixed to the bottom bracket of the three brackets, a product of the second specification can be placed between the layer plate 130 and the bottom plate 112, and a product of the third specification can be placed between the layer plate 130 and the top plate 111. When the layer plate 130 is fixed to the middle bracket of the three brackets, the layer plate 130 divides the chamber into two identical sub-chambers, and the fourth specification of products can be placed between the layer plate 130 and the bottom plate 112, and the fourth specification of products can also be placed between the layer plate 130 and the top plate 111. The second specification, the third specification and the fourth specification mentioned here all refer to the specifications of the maximum size of the product that can be accommodated in the sub-chamber.

[0033] The number of brackets and layers 130 of the heating chamber storage device 100 provided in the present application is not limited to three brackets and one layer 130. As an example, the heating chamber storage device 100 may also have three brackets and three layers 130 evenly arranged along the height direction Z, and then the corresponding heating chamber storage device 100 can accommodate four products of the second specification. Similarly, the number of brackets and layers 130 of the heating chamber storage device 100 can be set according to actual needs or product specifications, which will not be repeated here.

[0034] The brackets and the layer plates 130 of the heating chamber storage device 100 provided in the present application are not limited to be uniformly distributed along the height direction Z. As an example, when the heating chamber storage device 100 has multiple brackets, the spacing between the brackets along the height direction Z can be reasonably distributed according to the specifications of the product or the specifications of the chamber of the housing 110 itself, for example, gradually increasing from top to bottom, so that the adaptability of the heating chamber storage device 100 to products of different specifications can be further improved.

[0035] refer to Figures 1 to 3, the sub-bracket 120 has two limiting holes 123. The layer plate 130 is provided with four limiting members 140. Each limiting hole 123 is detachably connected to each limiting member 140 to detachably connect the layer plate 130 to the bracket. When the layer plate 130 is placed on the bracket, the limiting member 140 is fixed in the limiting hole 123. Furthermore, the two limiting holes 123 are arranged on the sub-bracket 120 along the length direction Y, and are symmetrically distributed along the width direction X, and the limiting members 140 are arranged corresponding to the limiting holes 123. In this way, a multi-point fit is formed between the limiting holes 123 and the limiting members 140, and limiting and fixing can be performed in multiple directions to ensure the stability of the connection between the layer plate 130 and the sub-bracket 120.

[0036] The above number of limiting holes 123 is not limited on the sub-bracket 120 of the heating chamber storage device 100 provided in the present application, and the above number of limiting members 140 is not limited on the layer plate 130. As another example, the sub-bracket 120 of the heating chamber storage device 100 may also have only one limiting hole 123, and the corresponding layer plate 130 may have only two limiting members 140. In this way, the fixed connection and disassembly of the limiting hole 123 and the limiting member 140 can also be achieved. With only one limiting hole 123, fewer points need to be positioned when the layer plate 130 and the sub-bracket 120 are docked, which can facilitate installation and disassembly to a certain extent. As another example, the sub-bracket 120 of the heating chamber storage device 100 may also have only two or more limiting holes 123, such as three or four limiting holes 123. The corresponding layer plate 130 has a corresponding number of limiting members 140, such as six or eight limiting members 140. In this way, the fixed connection and disassembly of the limiting hole 123 and the limiting member 140 can also be achieved. With multiple limiting holes 123, there are more points to be positioned when the layer plate 130 and the sub-bracket 120 are docked, which can improve the stability of the connection between the layer plate 130 and the sub-bracket 120 to a certain extent. For example, when the heating chamber storage device 100 is loaded with products to be heat-treated and needs to be moved, the reliability of the overall movement of the device can be improved.

[0037] Further, refer to Figures 1 to 3 , the sub-bracket 120 has a support surface 121. The support surface 121 is parallel to the plane where the width direction X and the length direction Y are located. The limiting hole 123 is opened on the support surface 121, and the limiting member 140 passes through the limiting hole 123 along the height direction Z of the chamber. In this way, the support surface 121 can play the role of supporting the layer plate 130 and also limit the layer plate 130.

[0038] In a feasible implementation, the sub-bracket 120 may further include a connector 122, wherein the connector 122 is fixedly connected to the support surface 121 and the connector 122 is fixedly connected to the first side surface or the second side surface. The connector 122 directly and fixedly connects the support surface 121 to the housing 110.

[0039] Further, refer to Figure 2 , the stopper 140 is arranged below the layer plate 130 along the height direction Z. In this way, the upper part of the layer plate 130 can be maintained as a continuous flat platform, which can accommodate products with a larger bottom area.

[0040] Further, refer to Figures 1 to 3 The position-limiting hole 123 includes a first hole 1231 and a second hole 1232 that are connected. The first hole 1231 and the second hole 1232 are arranged along the length direction Y. The diameter of the second hole 1232 is larger than the diameter of the first hole 1231. The second hole 1232 is used for disassembling and assembling the position-limiting member 140. The first hole 1231 is used for limiting the position of the position-limiting member 140. The position-limiting member 140 includes a first portion 141 and a second portion 142 that are connected along the height direction Z and away from the layer board 130. The diameter of the second portion 142 is larger than the diameter of the first portion 141. The first portion 141 passes through the first hole 1231. The second portion 142 is used for limiting the connection between the layer board 130 and the sub-bracket 120 along the height direction Z.

[0041] Thus, when the layer plate 130 is installed with the bracket, the second part 142 can be inserted into the second hole 1232 along the height direction Z, and then the layer plate 130 is moved along the length direction Y to move the first part 141 into the first hole 1231. Accordingly, when the layer plate 130 is disassembled with the bracket, the first part 141 is first moved from the first hole 1231 to the second hole 1232 along the length direction Y, and then the second part 142 is removed from the second hole 1232 along the height direction Z. Both disassembly and assembly are very simple, which is conducive to wide application.

[0042] The limiting hole 123 and the limiting member 140 of the heating chamber storage device 100 provided in the present application are not limited to the above structure. As an example, the limiting member 140 can also be a similar locking hook structure. After the limiting member 140 extends into the limiting hole 123 along the height direction Z, it moves a distance along the length direction Y, and the locking hook part of the limiting member 140 moves to the bottom of the layer plate 130, which can also realize the connection limiting of the layer plate 130 and the sub-bracket 120 along the height direction Z.

[0043] Further, refer to Figures 1 to 3The diameter of the first hole 1231 is slightly larger than the diameter of the first part 141, the diameter of the second hole 1232 is larger than the diameter of the second part 142, and the diameter of the first hole 1231 is smaller than the diameter of the second part 142. In this way, the first hole 1231 can limit the first part 141 in the horizontal direction, and the second part 142 can limit the first part 141 in the height direction Z, so that the layer board 130 is fixedly connected to the bracket to ensure the stability of the connection.

[0044] In a feasible implementation, the material of the stopper 140 can be a high temperature resistant metal, such as carbon steel, die steel, alloy steel or stainless steel. These metal materials are resistant to high temperatures and can withstand the high temperature environment of the heating chamber. At the same time, these metal structures are stable and have good weather resistance, which is conducive to extending the service life of the heating chamber storage device 100.

[0045] In a feasible implementation, the position-limiting member 140 may be a screw. Screws are easy to obtain and low in cost. Selecting screws as the position-limiting member 140 can reduce the production cost of the heating chamber storage device 100, which is conducive to wide application.

[0046] Furthermore, the stopper 140 is fixed to the layer plate 130 by welding. Welding directly combines metal atoms to form a continuous and rigid connection, thereby enhancing the integrity of the structure. This connection method reduces the gap between components and improves the ability to resist deformation under external forces. The strength of the welded joint can often match or exceed the strength of the substrate, making the entire structure both strong and relatively light. The high density of welding can ensure that the welded structure meets the requirements of air tightness and water tightness, so that the device itself has high consistency and can withstand harsh environments. Welding can easily connect different shapes, sizes and even different materials, and the operation is simple and convenient for production operations. The welding speed is fast and cost-effective, which is suitable for mass production and customization needs. In addition, the welding has a high degree of automation, and production efficiency can be improved by manipulators, robots, etc. The connection formed by welding is relatively permanent and stable, and is suitable for scenarios requiring long-term stable connections. Compared with traditional connection methods such as riveting, welding can simplify structural design, reduce the number of components, and improve the integrity and reliability of the structure.

[0047] Accordingly, the embodiment of the present application also provides a debubbling system. The debubbling system includes a heating chamber storage device as described in any one of the above items. The debubbling system provided in the embodiment of the present application can realize debubbling treatment of products of different specifications by setting a heating chamber storage device that is compatible with products of multiple specifications. There is no need to change the structure of the heating chamber. The size of the chamber for accommodating the product can be changed by adjusting the position of the detachable layer plate, thereby being compatible with products of different specifications, which is conducive to a wide range of applications.

[0048] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0049] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A heating chamber storage device, characterized in that: The heating chamber storage device comprises: a housing, at least one bracket and at least one layer plate, wherein: The interior of the shell is hollow to form a chamber, and the chamber is used to accommodate the product to be heat treated; The bracket is used to carry the layer plate, each of the brackets includes two sub-brackets arranged in pairs along the width direction of the chamber, the two sub-brackets are respectively fixed to the inner wall of the shell along the width direction, and each sub-bracket is arranged along the length direction of the chamber; The layer plate is used to separate the chamber into independent sub-chambers and carry the products to be heat treated. Each sub-chamber independently accommodates the products to be heat treated. Both ends of each layer plate along the width direction are detachably connected to two sub-brackets.

2. The heating chamber storage device according to claim 1, characterized in that: The sub-bracket is provided with at least one limiting hole, the layer plate is provided with at least two limiting members, and the limiting hole and the limiting members are detachably connected to detachably connect the layer plate and the bracket.

3. The heating chamber storage device according to claim 2, characterized in that: The sub-bracket has a supporting surface, which is parallel to the plane where the width direction and the length direction are located. The limiting hole is opened on the supporting surface, and the limiting member passes through the limiting hole along the height direction of the chamber.

4. The heating chamber storage device according to claim 3, characterized in that: The limiting member is arranged below the layer plate along the height direction.

5. The heating chamber storage device according to claim 4, characterized in that: The limiting hole comprises a first hole and a second hole that are connected, the first hole and the second hole are arranged along the length direction, the aperture of the second hole is larger than the aperture of the first hole, the second hole is used for disassembling and assembling the limiting member, and the first hole is used for limiting the position of the limiting member; The limiting member includes a first part and a second part connected along the height direction and away from the layer plate, the diameter of the second part is larger than the diameter of the first part, the first part passes through the first hole, and the second part is used to limit the connection between the layer plate and the sub-bracket along the height direction.

6. The heating chamber storage device according to claim 5, characterized in that: The diameter of the first hole is slightly larger than the diameter of the first portion, the diameter of the second hole is larger than the diameter of the second portion, and the diameter of the first hole is smaller than the diameter of the second portion.

7. The heating chamber storage device according to claim 1, characterized in that: The heating chamber storage device includes at least two brackets and at least one layer plate, the two brackets are arranged along the height direction of the chamber, and each layer plate is detachably connected to the bracket so that the position of the layer plate in the chamber along the height direction of the chamber can be adjusted.

8. The heating chamber storage device according to claim 2, characterized in that: The sub-bracket has at least two limiting holes, the layer plate is provided with at least four limiting members, two limiting holes are arranged along the length direction on the sub-bracket and are symmetrically distributed along the width direction, and the limiting members are arranged corresponding to the limiting holes.

9. The heating chamber storage device according to claim 2, characterized in that: The limiting member is fixed to the layer plate by welding.

10. A defoaming system, characterized in that: It comprises a heating chamber storage device as described in any one of claims 1-9.

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