Indexing table and thinning machine

Abstract

The utility model discloses an indexing table and a thinning machine, and relates to the technical field of semiconductor processing, the indexing table comprises a rack, a rotary table, a rotating shaft and a gear motor, the rotary table is movably arranged on the rack, and the rotary table is used for bearing a wafer to be processed; the rotating shaft penetrates through the rack and is rotationally connected with the rack, and the upper end part of the rotating shaft is connected with the rotary table; the gear motor is arranged below the rotating shaft, and an output shaft of the gear motor is connected with the lower end of the rotating shaft. According to the technical scheme provided by the utility model, the technical effects of reducing the occupied space of the indexing table, reducing the mounting and debugging difficulty of the driving assembly of the indexing table and improving the rotating stability of the indexing table can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a dividing table and a thinning machine. Background Art

[0002] During the processing of wafers, it is necessary to thin the wafers. Specifically, the wafer to be processed is first placed on a dividing table, and then the dividing table is rotated to thin the wafer on the dividing table. In the prior art, the driving motor of the dividing table is arranged outside the frame, and then the driving connection is made through a synchronous belt to realize the rotation of the dividing table. There are problems such as large space occupation, inconvenient installation and debugging, and unstable rotation. Utility Model Content

[0003] The main purpose of the utility model is to provide a dividing table and a thinning machine, aiming to reduce the space occupied by the dividing table, reduce the difficulty of installing and debugging the driving components of the dividing table, and improve the stability of the rotation of the dividing table.

[0004] To achieve the above-mentioned purpose, the indexing table proposed in the utility model includes a frame, a turntable, a rotating shaft and a reduction motor. The turntable is arranged above the frame, and the turntable is used to carry the wafer to be processed; the rotating shaft passes through the frame and is rotatably connected to the frame, and the upper end of the rotating shaft is connected to the turntable; the reduction motor is arranged below the rotating shaft, and the output shaft of the reduction motor is connected to the lower end of the rotating shaft.

[0005] In one embodiment, the turntable is movable along the axial direction of the rotating shaft, and the indexing table further comprises an air flotation component, which is disposed between the frame and the turntable to form an air film between the turntable and the air flotation component.

[0006] In one embodiment, the air flotation assembly includes a plurality of air flotation pads, and the plurality of air flotation pads are evenly spaced along the circumference of the turntable.

[0007] In one embodiment, each of the air floating cushions is a circular air floating cushion.

[0008] In one embodiment, the number of the air floating pads is six.

[0009] In one embodiment, the rotating shaft is rotatably connected to the frame via a bearing.

[0010] In one embodiment, the reduction motor is fixed in the frame via a motor base.

[0011] In one embodiment, the rotating shaft is rotatably connected to the frame via a bearing, and the outer ring of the bearing is fixedly connected to the motor base via a fastener.

[0012] In one embodiment, the fastener comprises a plurality of locking bolts.

[0013] The utility model also provides a thinning machine, comprising the above-mentioned indexing table.

[0014] In the technical solution provided by the utility model, the reduction motor is arranged below the rotating shaft, and the output shaft of the reduction motor is connected to the lower end of the rotating shaft. The reduction motor directly drives the rotating shaft to rotate, and the rotating shaft drives the turntable to rotate, thereby eliminating the transmission component. The drive component of the turntable is simple, which can reduce the space occupied by the dividing table, reduce the difficulty of installation and debugging of the drive component of the dividing table, and also improve the stability of the rotation of the dividing table. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0016] Figure 1 A three-dimensional diagram of an embodiment of a dividing table provided by the utility model;

[0017] Figure 2 A schematic diagram of the distribution of the air flotation cushion provided by the utility model;

[0018] Figure 3 for Figure 1 Cross-sectional view of .

[0019] Description of Figure Numbers:

[0020] 100. Indexing table; 1. Frame; 2. Turntable; 3. Rotating shaft; 4. Speed ​​reducer motor; 5. Air cushion; 6. Bearing; 7. Motor seat; 8. Locking bolt.

[0021] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0024] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0025] During the processing of wafers, it is necessary to thin the wafers. Specifically, the wafer to be processed is first placed on a dividing table, and then the dividing table is rotated to thin the wafer on the dividing table. In the prior art, the driving motor of the dividing table is arranged outside the frame, and then the driving connection is made through a synchronous belt to realize the rotation of the dividing table. There are problems such as large space occupation, inconvenient installation and debugging, and unstable rotation.

[0026] Based on this, the utility model proposes a dividing table and a thinning machine, which can reduce the space occupied by the dividing table, reduce the difficulty of installing and debugging the driving components of the dividing table, and can also improve the stability of the rotation of the dividing table. Figure 1 A three-dimensional diagram of an embodiment of a dividing table provided by the utility model; Figure 2 A schematic diagram of the distribution of the air flotation cushion provided by the utility model; Figure 3 for Figure 1 Cross-sectional view of .

[0027] See also Figure 1 and Figure 3 In one embodiment of the utility model, the indexing table 100 includes a frame 1, a turntable 2, a rotating shaft 3 and a reduction motor 4. The turntable 2 is arranged above the frame 1, and the turntable 2 is used to carry the wafer to be processed; the rotating shaft 3 passes through the frame 1 and is rotatably connected to the frame 1, and the upper end of the rotating shaft 3 is connected to the turntable 2; the reduction motor 4 is arranged below the rotating shaft 3, and the output shaft of the reduction motor 4 is connected to the lower end of the rotating shaft 3.

[0028] In the technical solution provided by the utility model, the reduction motor 4 is arranged below the rotating shaft 3, and the output shaft of the reduction motor 4 is connected to the lower end of the rotating shaft 3. The reduction motor 4 directly drives the rotating shaft 3 to rotate, and the rotating shaft 3 drives the turntable 2 to rotate, thereby eliminating the transmission component. The drive component of the turntable 2 is simple, which can reduce the space occupied by the dividing table 100, reduce the difficulty of installation and debugging of the drive component of the dividing table 100, and also improve the stability of the rotation of the dividing table 100.

[0029] In an embodiment of the utility model, the turntable 2 can move along the axial direction of the rotating shaft 3, and the indexing table 100 also includes an air flotation component, which is arranged between the frame 1 and the turntable 2 to form an air film between the turntable 2 and the air flotation component. The air flotation component forms an air film between the turntable 2 and the air flotation component, and the turntable 2 and the air flotation component are not in contact, which can reduce the friction resistance of the turntable 2 rotation, and the air film provides support force for the turntable 2, which can improve the smoothness of the turntable 2 rotation, and further improve the smoothness and precision of the indexing table 100 rotation. It can be understood that the turntable 2 can move axially along the rotating shaft 3, and the rotating shaft 3 can drive the turntable 2 to rotate; the turntable 2 can move axially along the rotating shaft 3 so that the turntable 2 can fit the air flotation component or move upward to separate from the air flotation component. The rotating shaft 3 can be provided with a locking piece to limit the axial upward movement distance of the turntable 2 along the rotating shaft 3. The locking piece can be a locking nut, and the locking nut is threadedly connected to the rotating shaft 3.

[0030] In the embodiments of the present invention, please refer to Figure 2 The air flotation assembly includes a plurality of air flotation pads 5, which are evenly spaced along the circumference of the turntable 2. By blowing air onto the turntable 2 through the plurality of air flotation pads 5 evenly spaced along the circumference of the turntable 2, an air film is formed between the turntable 2 and the air flotation assembly, which can provide a more uniform air flotation support force.

[0031] In the embodiment of the utility model, each of the air floating cushions 5 is a circular air floating cushion 5. The circular air floating cushion 5 can reduce the production cost while ensuring the air floating support force.

[0032] In the embodiment of the utility model, the air floating cushions 5 are set to six. Six circular air floating cushions 5 are used to provide air floating support for the turntable 2, which is a more suitable number of air floating cushions 5. The six circular air floating cushions 5 are evenly spaced along the circumference of the turntable 2, which can reduce production costs while ensuring air floating support.

[0033] In the embodiment of the utility model, the rotating shaft 3 is rotatably connected to the frame 1 through a bearing 6. The rotating shaft 3 and the frame 1 are rotatably connected through the bearing 6, which has a simple structure, and the rotating shaft 3 rotates smoothly and stably relative to the turntable 2.

[0034] In an embodiment of the utility model, the reduction motor 4 is fixed in the frame 1 through a motor seat 7. By fixing the reduction motor 4 in the frame 1 through the motor seat 7, the stability of the reduction motor 4 installation can be improved, which is conducive to reducing vibration and noise.

[0035] In the embodiment of the utility model, the rotating shaft 3 is rotatably connected to the frame 1 through the bearing 6, and the outer ring of the bearing 6 is fixedly connected to the motor seat 7 through a fastener. The outer ring of the bearing 6 is fixedly connected to the motor seat 7 through a fastener, which can further improve the stability of the structure and improve the stability of the rotation of the indexing table 100.

[0036] In an embodiment of the utility model, the fastener includes a plurality of locking bolts 8. The outer ring of the bearing 6 is fixedly connected to the motor by using a plurality of locking bolts 8, which has a simple structure and a stable connection. It can be understood that the plurality of locking bolts 8 are arranged at intervals along the circumference of the bearing 6.

[0037] The utility model also proposes a thinning machine, which includes a dividing table 100. The specific structure of the dividing table 100 refers to the above embodiment. Since the thinning machine adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0038] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A dividing table, characterized in that: include: frame; A turntable, which is disposed above the frame and is used to carry the wafer to be processed; a rotating shaft, the rotating shaft passes through the frame and is rotatably connected to the frame, and the upper end of the rotating shaft is connected to the turntable; and A reduction motor is arranged below the rotating shaft, and an output shaft of the reduction motor is connected to the lower end of the rotating shaft.

2. The indexing table according to claim 1, characterized in that: The turntable can move along the axial direction of the rotating shaft. The indexing table also includes an air flotation component, which is arranged between the frame and the turntable to form an air film between the turntable and the air flotation component.

3. The indexing table according to claim 2, characterized in that: The air flotation assembly includes a plurality of air flotation pads, and the plurality of air flotation pads are evenly spaced along the circumference of the turntable.

4. The indexing table according to claim 3, characterized in that: Each of the air flotation cushions is a circular air flotation cushion.

5. The indexing table according to claim 4, characterized in that: The number of the air flotation pads is six.

6. The indexing table according to claim 1, characterized in that: The rotating shaft is rotatably connected to the frame via a bearing.

7. The indexing table according to claim 1, characterized in that: The reduction motor is fixed in the frame via a motor seat.

8. The indexing table according to claim 7, characterized in that: The rotating shaft is rotatably connected to the frame via a bearing, and the outer ring of the bearing is fixedly connected to the motor seat via a fastener.

9. The indexing table according to claim 8, characterized in that: The fastener includes a plurality of locking bolts.

10. A thinning machine, characterized in that: Comprising an indexing table as claimed in any one of claims 1 to 9.

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