Magnetic suction type air blow gun device

Abstract

The utility model provides a magnetic suction type air blow gun device. The magnetic suction type air blow gun device comprises a mother magnetic part and an air blow gun. The female magnetic part is fixedly arranged and provided with a vertical magnetic attraction face. The air blow gun comprises a gun body and a male magnetic part; the male magnetic piece is installed on one side of the gun body and provided with a vertical magnetic attraction face. When the air blow gun is stored, the magnetic attraction face of the male magnetic part and the magnetic attraction face of the female magnetic part are attracted together due to the acting force of opposite attraction. According to the magnetic suction type air blow gun device, the air blow gun can be easily stored and fixed to the preset position in a magnetic suction guide mode, collision and friction of the air blow gun are reduced, generation of particles such as dust is reduced, the cleanness of the working environment can be kept, and the possibility of secondary pollution is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor cleaning devices, and in particular to a magnetic air blowing gun device. Background Art

[0002] In the field of semiconductor production, particles have a crucial impact on product quality. Semiconductor devices are extremely precise, and any tiny particles may cause device performance degradation or even failure. Therefore, the semiconductor production environment has extremely strict control over particles to ensure product quality and reliability.

[0003] However, despite strict control measures, the activities of people and the operation of equipment in the production environment will inevitably generate dust and other particles. Once these particles adhere to the surface of semiconductor products, they may have a serious impact on product performance. Due to the high precision of semiconductor products, traditional contact cleaning methods (such as wiping) may damage the product and are therefore not suitable for cleaning semiconductor products.

[0004] At present, the semiconductor industry generally uses nitrogen guns to remove particles from the surface of products. Nitrogen guns spray clean nitrogen and use the impact force of the gas to blow particles away from the surface of the product, achieving non-contact cleaning. This method protects the integrity of the product and avoids the damage that may be caused by contact cleaning.

[0005] However, existing nitrogen gun products have some problems in practical applications. The metal hook fixing method of the nitrogen gun is easy to wear and generate dust, which will affect the cleaning effect after long-term use. When the nitrogen gun is put back on the hook after use, it is difficult to align the nitrogen gun, there is a risk of falling, and it also increases the possibility of generating dust and other particles. Utility Model Content

[0006] The purpose of the embodiment of the present application is to provide a magnetic air blow gun device, which can easily store and fix the air blow gun to a predetermined position through magnetic attraction and guidance, reduce the collision and friction of the air blow gun, reduce the generation of particles such as dust, help maintain the cleanliness of the working environment, and reduce the possibility of secondary pollution.

[0007] The present application provides a magnetic air blowing gun device, comprising a female magnetic component and an air blowing gun. The female magnetic component is fixedly arranged and has a vertical magnetic surface. The air blowing gun comprises a gun body and a male magnetic component; the male magnetic component is installed on one side of the gun body and has a vertical magnetic surface. When the air blowing gun is stored, the magnetic surface of the male magnetic component and the magnetic surface of the female magnetic component are adsorbed together due to the force of opposite attraction.

[0008] In an implementable solution, the female magnetic component includes a first low-dust-generating wear-resistant cover that is detachably and replaceably coated on the surface of its magnetic attraction surface, and / or the male magnetic component includes a second low-dust-generating wear-resistant cover that is detachably and replaceably coated on the surface of its magnetic attraction surface.

[0009] In an implementable solution, the female magnetic component includes a first female magnetic component and a second female magnetic component; the male magnetic component includes a first male magnetic component and a second male magnetic component; wherein, when the air blow gun is stored, the magnetic surface of the first male magnetic component and the magnetic surface of the first female magnetic component are adsorbed together due to the force of opposite attraction, and the magnetic surface of the second male magnetic component and the magnetic surface of the second female magnetic component are adsorbed together due to the force of opposite attraction at the same time.

[0010] In an implementable solution, the first female magnetic component and the second female magnetic component are both circular in shape; the first male magnetic component and the second male magnetic component are both circular in shape.

[0011] In an implementable solution, the first mother magnetic component and the second mother magnetic component have the same structure, and each includes a first circular shell, a first permanent magnet and a first low-dust-generating wear-resistant sleeve, a cavity is arranged inside the first circular shell and an external thread is arranged on the outer circumference, the first permanent magnet is arranged in the cavity of the first circular shell, and the first low-dust-generating wear-resistant sleeve cooperates with the outer circumferential thread of the first circular shell and covers the first permanent magnet; and / or

[0012] The first male magnetic component and the second male magnetic component have the same structure, and each includes a second circular shell, a second permanent magnet, and a second low-dust-generating wear-resistant sleeve. A cavity is arranged inside the second circular shell and an external thread is arranged on the outer circumference. The second permanent magnet is arranged in the cavity of the second circular shell, and the second low-dust-generating wear-resistant sleeve cooperates with the outer circumferential thread of the second circular shell and covers the second permanent magnet.

[0013] In an implementable solution, the first female magnetic component and the second female magnetic component are both in the shape of a bar; the first male magnetic component and the second male magnetic component are both in the shape of a bar.

[0014] In an implementable solution, the length extension direction of the first male magnetic component is perpendicular to the length extension direction of the second male magnetic component; the length extension direction of the first female magnetic component is perpendicular to the length extension direction of the second female magnetic component; the length extension direction of the first female magnetic component is consistent with the length extension direction of the first male magnetic component, and the length extension direction of the second female magnetic component is consistent with the length extension direction of the second male magnetic component.

[0015] In an practicable solution, the first mother magnetic component and the second mother magnetic component have the same structure, and each includes a first permanent magnetic component and a first low-dust-generating wear-resistant sleeve, the first permanent magnetic component is fixedly installed, and the first low-dust-generating wear-resistant sleeve at least wraps the magnetic attraction surface and side surface of the first permanent magnetic component; and / or

[0016] The first male magnetic component and the second male magnetic component have the same structure, each including a second permanent magnetic component and a second low-dust-generating wear-resistant sleeve. The second permanent magnetic component is installed on one side surface of the gun body, and the second low-dust-generating wear-resistant sleeve at least wraps the magnetic surface and side surface of the second permanent magnetic component.

[0017] In an implementable solution, the magnetic air blowing gun device includes a base plate, which is fixed vertically and the mother magnetic part is installed on the base plate.

[0018] In an implementable solution, the magnetic air blowing gun device further includes a position sensor, which is mounted on the substrate; wherein, when the male magnetic part and the female magnetic part of the air blowing gun complete the adsorption, the gun body is within the sensing range of the position sensor;

[0019] The magnetic air blowing gun device also includes a warning device, which is connected to the position sensor signal;

[0020] When the gun body of the air blowing gun enters the sensing range of the position sensor, the warning device sends out a first warning signal;

[0021] When the gun body of the air blowing gun does not enter the sensing range of the position sensor, the warning device sends out a second warning signal.

[0022] Compared with the prior art, the beneficial effects of this application include at least:

[0023] In the magnetic air blowing gun device of the present application, when the air blowing gun is stored, the staff only needs to move the male magnetic part of the air blowing gun closer to the direction of the female magnetic part, and the guidance and alignment adsorption can be automatically completed under the same-sex attraction force between the male magnetic part and the female magnetic part. Therefore, even if the air blowing gun is held in one hand, the guidance, adsorption and fixation can be successfully completed with the help of the same-sex attraction force between the male magnetic part and the female magnetic part, which simplifies the operation and helps the staff focus on the other hand to prevent the products and other items in the other hand from falling and being damaged.

[0024] At the same time, under the like-sex attraction force between the male magnetic part and the female magnetic part, the air blow gun can be stably stored in a predetermined position, preventing the air blow gun from generating unnecessary friction with other structures, reducing the generation of particles such as dust, helping to keep the working environment clean, and reducing the possibility of secondary pollution.

[0025] In a further solution, the magnetic parts are wrapped with a low-dust wear-resistant sleeve, which can reduce the amount of friction dust generated each time the magnetic attraction is aligned, and even if the low-dust wear-resistant sleeve is worn out later, only the low-dust wear-resistant sleeve needs to be replaced without replacing the entire air blow gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a structural diagram of a first magnetic air blowing gun device according to an embodiment of the present application;

[0028] Figure 2 for Figure 1 Schematic diagram of the state of the magnetic suction air blowing gun device during the alignment and adsorption;

[0029] Figure 3 for Figure 1 Explosion structure diagram of the medium blow gun;

[0030] Figure 4 for Figure 1 Exploded structure diagram of the middle mother magnetic suction part;

[0031] Figure 5 It is a structural diagram of a second magnetic air blowing gun device according to an embodiment of the present application;

[0032] Figure 6 for Figure 5 Schematic diagram of the state of the magnetic suction air blowing gun device during the alignment and adsorption;

[0033] Figure 7 for Figure 5 Explosion structure diagram of the medium blow gun;

[0034] Figure 8 for Figure 5 Exploded structure diagram of the middle mother magnetic component.

[0035] In the figure: 1. female magnetic component; 11. first female magnetic component; 12. second female magnetic component; 101. first low-dust-generating wear-resistant sleeve; 102. first circular shell; 103. first permanent magnet; 104. first permanent magnetic component; 2. air blow gun; 21. gun body; 22. male magnetic component; 221. first male magnetic component; 222. second male magnetic component; 201. second low-dust-generating wear-resistant sleeve; 202. second circular shell; 203. second permanent magnet; 204. second permanent magnetic component; 23. spiral telescopic tube; 3. substrate; 4. position sensor; 51. first signal light; 52. second signal light; 6. pipe joint. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0038] like Figure 1 and Figure 5 As shown, this embodiment provides a magnetic air blow gun device, which includes a mother magnetic component 1 and an air blow gun 2. The mother magnetic component 1 is fixedly arranged (for example, installed on a vertical wall or a board), and has a vertical magnetic surface. The air blow gun 2 includes a gun body 21 and a male magnetic component 22; the male magnetic component 22 is installed on one side of the gun body 21, and has a vertical magnetic surface. Among them, when the air blow gun 2 is stored, the magnetic surface of the male magnetic component 22 and the magnetic surface of the mother magnetic component 1 are adsorbed together due to the force of opposite attraction.

[0039] In the magnetic air blowing gun device of the present application, when the air blowing gun 2 is stored, the staff only needs to move the male magnetic part 22 of the air blowing gun 2 closer to the direction of the female magnetic part 1, and then the guidance and alignment adsorption can be automatically completed under the same-sex attraction force between the male magnetic part 22 and the female magnetic part 1. Therefore, even if the air blowing gun 2 is held in one hand, the guidance, adsorption and fixation can be successfully completed with the help of the same-sex attraction force between the male magnetic part 22 and the female magnetic part 1, which simplifies the operation and helps the staff focus on the other hand to prevent the products and other items in the other hand from falling and being damaged.

[0040] At the same time, under the like-sex attraction force between the male magnetic part 22 and the female magnetic part 1, the air blow gun 2 can be stably stored in a predetermined position, preventing the air blow gun 2 from generating unnecessary friction with other structures, reducing the generation of particles such as dust, etc., helping to keep the working environment clean and reducing the possibility of secondary pollution.

[0041] It should be noted that the magnetic attraction surface of the female magnetic component 1 is generally in the same shape as the magnetic attraction surface of the male magnetic component 22, so as to better achieve the magnetic attraction alignment process.

[0042] In this embodiment, if Figure 4 , Figure 8As shown, the mother magnetic member 1 may include a first low-dust-generating wear-resistant sleeve 101 which is covered on the surface of the magnetic attraction surface and is detachable and replaceable, and / or Figure 3 and Figure 6 As shown, the male magnetic member 22 may include a second low-dust-generating wear-resistant sleeve 201 that is detachably replaceable and covers the surface of the magnetic attraction surface thereof.

[0043] The first low-dust-generating wear-resistant sleeve 101 and the second low-dust-generating wear-resistant sleeve 201 may be protective sleeve structures made of polytetrafluoroethylene.

[0044] In the prior art, once the gun body is worn and dusty, the entire nitrogen gun needs to be replaced, which not only increases production costs but also increases the complexity of maintenance.

[0045] In the scheme of this embodiment, the magnetic parts are wrapped with a low-dust wear-resistant sleeve, which can reduce the amount of friction dust generated each time the magnetic attraction is aligned, and even if the low-dust wear-resistant sleeve is worn out in the later stage, it is only necessary to replace the low-dust wear-resistant sleeve without replacing the entire air blow gun 2.

[0046] In this embodiment, Figure 2 , Figure 5 As shown, the female magnetic component 1 may include a first female magnetic component 11 and a second female magnetic component 12. Correspondingly, the male magnetic component 22 may include a first male magnetic component 221 and a second male magnetic component 222. When the air blow gun 2 is stored, the magnetic surface of the first male magnetic component 221 and the magnetic surface of the first female magnetic component 11 are adsorbed together due to the force of opposite attraction, and the magnetic surface of the second male magnetic component 222 and the magnetic surface of the second female magnetic component 12 are adsorbed together due to the force of opposite attraction.

[0047] In this embodiment, Figure 2 , Figure 3 and Figure 4 As shown, the first female magnetic component 11 and the second female magnetic component 12 may both be circular in shape, and the first male magnetic component 221 and the second male magnetic component 222 may both be circular in shape.

[0048] Under the premise that the shape of magnetic parts is circular, Figure 4 As shown, the first mother magnetic component 11 and the second mother magnetic component 12 have the same structure and can each include a first circular shell 102, a first permanent magnet 103 and a first low-dust-generating wear-resistant sleeve 101. The first circular shell 102 is provided with a cavity inside and an external thread on the outer circumference. The first permanent magnet 103 is provided in the cavity of the first circular shell 102. The first low-dust-generating wear-resistant sleeve 101 cooperates with the outer circumferential thread of the first circular shell 102 and covers the first permanent magnet 103.

[0049] Furthermore, under the premise that the magnetic parts are all circular in shape, Figure 3As shown, the first male magnetic component 221 and the second male magnetic component 222 have the same structure and can each include a second circular shell 202, a second permanent magnet 203 and a second low-dust-generating wear-resistant sleeve 201. A cavity is arranged inside the second circular shell 202 and an external thread is arranged on the outer circumference. The second permanent magnet 203 is arranged in the cavity of the second circular shell 202. The second low-dust-generating wear-resistant sleeve 201 cooperates with the outer circumferential thread of the second circular shell 202 and covers the second permanent magnet 203.

[0050] In this embodiment, Figures 5 to 8 As shown, the first female magnetic component 11 and the second female magnetic component 12 may both be in the shape of a bar, and the first male magnetic component 221 and the second male magnetic component 222 may both be in the shape of a bar.

[0051] Furthermore, if Figure 6 As shown, the length extension direction of the first male magnetic member 221 and the length extension direction of the second male magnetic member 222 can be perpendicular, and the length extension direction of the first female magnetic member 11 and the length extension direction of the second female magnetic member 12 can be perpendicular. And the length extension direction of the first female magnetic member 11 is consistent with the length extension direction of the first male magnetic member 221, and the length extension direction of the second female magnetic member 12 is consistent with the length extension direction of the second male magnetic member 222. Through the cross-arranged strip magnetic members, the alignment guidance effect is more effective and the adsorption stability effect is better.

[0052] Under the premise that the magnetic parts are all in bar shape, Figure 8 As shown, the first mother magnetic component 11 and the second mother magnetic component 12 have the same structure, and can each include a first permanent magnetic component 104 and a first low-dust-generating wear-resistant sleeve 101. The first permanent magnetic component 104 is fixedly installed, and the first low-dust-generating wear-resistant sleeve 101 at least wraps the magnetic surface and side surfaces of the first permanent magnetic component 104.

[0053] Furthermore, under the premise that the magnetic parts are all in the shape of bars, Figure 7 As shown, the first male magnetic component 221 and the second male magnetic component 222 have the same structure, and may each include a second permanent magnetic component 204 and a second low-dust-generating wear-resistant sleeve 201. The second permanent magnetic component 204 is installed on one side surface of the gun body 21, and the second low-dust-generating wear-resistant sleeve 201 at least wraps the magnetic surface and side surface of the second permanent magnetic component 204.

[0054] In this embodiment, Figure 1 , Figure 5 As shown, the magnetic suction air blowing gun device may include a substrate 3 , which is vertically fixed and the mother magnetic component 1 is installed on the substrate 3 .

[0055] In this embodiment, Figure 1 , Figure 5As shown, the magnetic air blowing gun device may further include a position sensor 4 , which is mounted on the substrate 3 ; wherein, when the male magnetic component 22 of the air blowing gun 2 and the female magnetic component 1 complete adsorption, the gun body 21 is within the sensing range of the position sensor 4 .

[0056] In this embodiment, the magnetic air blowing gun device may further include a warning device, which is connected to the position sensor 4 by signal. When the gun body 21 of the air blowing gun 2 enters the sensing range of the position sensor 4, the warning device sends a first warning signal. When the gun body 21 of the air blowing gun 2 does not enter the sensing range of the position sensor 4, the warning device sends a second warning signal. The warning device may be a sound alarm, a light alarm, etc.

[0057] For example, in this embodiment, if Figure 1 , Figure 5 As shown, the warning device may include a first signal light 51 and a second signal light 52. When the gun body 31 of the air blowing gun 3 enters the sensing range of the position sensor 4, the first signal light 51 is on, and when the gun body 31 of the air blowing gun 3 does not enter the sensing range of the position sensor 4, the second signal light 52 is on.

[0058] In this embodiment, Figure 1 , Figure 5 As shown, a mounting hole may be provided at the bottom of the base plate 1, and a pipe joint 6 is sealed and installed in the mounting hole. The air blowing gun 2 may include a spiral telescopic tube 23, one end of which is connected to the air inlet on the gun body 21, and the other end of which is connected to one end of the pipe joint 6, and the other end of the pipe joint 6 is used to connect to the air supply device.

[0059] In this embodiment, the gas medium blown out by the air blowing gun 2 may be clean nitrogen.

[0060] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A magnetic air blowing gun device, characterized in that: include: A mother magnetic member (1) is fixedly arranged and has a vertical magnetic attraction surface; The air blowing gun (2) comprises a gun body (21) and a male magnetic component (22); the male magnetic component (22) is installed on one side of the gun body (21) and has a vertical magnetic attraction surface; When the air blowing gun (2) is stored, the magnetic attraction surface of the male magnetic component (22) and the magnetic attraction surface of the female magnetic component (1) are attracted together due to the force of oppositely charged species attracting each other.

2. The magnetic air blowing gun device according to claim 1, characterized in that: The mother magnetic component (1) comprises a first low-dust-generating wear-resistant sleeve (101) which is coated on the surface of the magnetic attraction surface and is detachable and replaceable, and / or The male magnetic component (22) comprises a second low-dust-generating wear-resistant sleeve (201) which is coated on the surface of its magnetic attraction surface and is detachable and replaceable.

3. The magnetic air blowing gun device according to claim 2, characterized in that: The mother magnetic component (1) comprises a first mother magnetic component (11) and a second mother magnetic component (12); The male magnetic component (22) comprises a first male magnetic component (221) and a second male magnetic component (222); When the air blowing gun (2) is stored, the magnetic attraction surface of the first male magnetic component (221) and the magnetic attraction surface of the first female magnetic component (11) are attracted together due to the force of opposite attraction, and the magnetic attraction surface of the second male magnetic component (222) and the magnetic attraction surface of the second female magnetic component (12) are attracted together due to the force of opposite attraction.

4. The magnetic air blowing gun device according to claim 3, characterized in that: The first mother magnetic component (11) and the second mother magnetic component (12) are both circular in shape; The first male magnetic component (221) and the second male magnetic component (222) are both circular in shape.

5. The magnetic air blowing gun device according to claim 4, characterized in that: The first mother magnetic component (11) and the second mother magnetic component (12) have the same structure, and each comprises a first circular shell (102), a first permanent magnet (103) and the first low-dust-generating wear-resistant sleeve (101); a cavity is arranged inside the first circular shell (102) and an external thread is arranged on the outer circumference; the first permanent magnet (103) is arranged in the cavity of the first circular shell (102); the first low-dust-generating wear-resistant sleeve (101) cooperates with the outer circumferential thread of the first circular shell (102) and covers the first permanent magnet (103); and / or The first male magnetic component (221) and the second male magnetic component (222) have the same structure, and each comprises a second circular shell (202), a second permanent magnet (203) and the second low-dust-generating wear-resistant sleeve (201); a cavity is arranged inside the second circular shell (202) and an external thread is arranged on the outer circumference; the second permanent magnet (203) is arranged in the cavity of the second circular shell (202); the second low-dust-generating wear-resistant sleeve (201) cooperates with the outer circumferential thread of the second circular shell (202) and covers the second permanent magnet (203).

6. The magnetic air blowing gun device according to claim 3, characterized in that: The first mother magnetic component (11) and the second mother magnetic component (12) are both in the shape of bars; The first male magnetic component (221) and the second male magnetic component (222) are both in the shape of a bar.

7. The magnetic air blowing gun device according to claim 6, characterized in that: The length extension direction of the first male magnetic component (221) is perpendicular to the length extension direction of the second male magnetic component (222); the length extension direction of the first female magnetic component (11) is perpendicular to the length extension direction of the second female magnetic component (12); The length extension direction of the first female magnetic component (11) is consistent with the length extension direction of the first male magnetic component (221), and the length extension direction of the second female magnetic component (12) is consistent with the length extension direction of the second male magnetic component (222).

8. The magnetic air blowing gun device according to claim 6, characterized in that: The first mother magnetic component (11) and the second mother magnetic component (12) have the same structure, and each comprises a first permanent magnetic component (104) and the first low-dust-generating wear-resistant sleeve (101), the first permanent magnetic component (104) is fixedly installed, and the first low-dust-generating wear-resistant sleeve (101) at least wraps around the magnetic attraction surface and side surfaces of the first permanent magnetic component (104); and / or The first male magnetic component (221) and the second male magnetic component (222) have the same structure, and each comprises a second permanent magnetic component (204) and a second low-dust-generating wear-resistant sleeve (201); the second permanent magnetic component (204) is mounted on a side surface of the gun body (21); and the second low-dust-generating wear-resistant sleeve (201) at least wraps around the magnetic attraction surface and side surface of the second permanent magnetic component (204).

9. The magnetic air blowing gun device according to any one of claims 1 to 8, characterized in that: The magnetic suction air blowing gun device comprises a base plate (3), the base plate (3) is vertically fixed, and the mother magnetic component (1) is mounted on the base plate (3).

10. The magnetic air blowing gun device according to claim 9, characterized in that: The magnetic suction air blowing gun device further comprises a position sensor (4), wherein the position sensor (4) is mounted on the substrate (3); wherein, when the male magnetic component (22) of the air blowing gun (2) and the female magnetic component (1) complete adsorption, the gun body (21) is within the sensing range of the position sensor (4); The magnetic air blowing gun device further comprises a warning device, wherein the warning device is connected to the position sensor (4) by signal; When the gun body (21) of the air blowing gun (2) enters the sensing range of the position sensor (4), the warning device sends out a first warning signal; When the gun body (21) of the air blowing gun (2) does not enter the sensing range of the position sensor (4), the warning device sends out a second warning signal.

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