Edge grinding device suitable for MEMS chip

Abstract

The edge grinding device suitable for the MEMS chip comprises a fixed base, a sliding groove is formed in one side of the fixed base, a sliding block is connected to the sliding groove in a sliding mode, a fixed sliding plate is connected to the sliding block, a first fixed support is connected to the fixed sliding plate, a rotating motor is connected to the outer side of the top end of the first fixed support, and the rotating motor is connected to the outer side of the top end of the first fixed support. A rotating motor is connected to one side of the fixing base, a rotating fixing plate is connected to a driving shaft of the rotating motor, a suction cup is connected to the rotating fixing plate, a second fixing support is connected to the other side of the fixing base, and a polishing assembly used for product chamfer polishing is connected to the second fixing support. The polishing device can improve the working efficiency of polishing.

Description

Technical Field

[0001] The utility model relates to the technical field of chip processing, in particular to an edge grinding device suitable for MEMS chips. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Silicon is the most influential semiconductor material in various applications. During the production process of silicon wafers, the outer edges of the silicon wafers need to be chamfered. This process requires the use of chamfering and edge grinding machines to meet the use requirements of semiconductor silicon wafers.

[0003] After searching, the patent: an edge grinding device for chip production and processing (CN202122816664.3), the grinding component includes a component housing, a limit component, a rotating shaft, a grinding block, a sleeve outer cylinder and a limit docking groove, wherein the limit component is fixed on both sides of the inner end of the component housing, the rotating shaft is fixed on the middle side of the upper end of the component housing, the sleeve outer cylinder is sleeved on the upper side of the lower end of the rotating shaft, and the limit docking groove is opened on the middle side of the lower end of the rotating shaft. However, the above device still has some defects when used, and the angle cannot be adjusted, resulting in the inability to perform high-precision grinding.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a new structure of edge grinding device suitable for MEMS chips, making it more valuable for industrial use. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide an edge grinding device suitable for MEMS chips.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A grinding device suitable for a MEMS chip, comprising a fixed base, a slide groove is provided on one side of the fixed base, a slider is slidably connected to the slide groove, a fixed slide plate is connected to the slide plate, a first fixed bracket is connected to the fixed slide plate, a rotating motor is connected to the outer side of the top of the first fixed bracket, a rotating fixed plate is connected to the driving shaft of the rotating motor, a suction cup is connected to the rotating fixed plate, a second fixed bracket is connected to the other side of the fixed base, and a grinding component for product chamfering is connected to the second fixed bracket;

[0008] The grinding assembly includes a grinding motor and a grinding disc, a fixed cross bar is connected to the top of the second fixed bracket, the fixed cross bar is connected to the first adjustment fixing plate and the second adjustment fixing plate for adjusting the angle of the grinding motor, the first adjustment fixing plate and the second adjustment fixing plate are both arc-shaped structures, and guide grooves are opened at the central axes of the first adjustment fixing plate and the second adjustment fixing plate along the arc structure, guide blocks are connected in the guide grooves, guide connecting plates are connected between the guide blocks, the grinding motor is connected at the center of the guide connecting plates, the grinding disc is connected to the driving shaft of the grinding motor, the angle adjustment motor is connected to the guide connecting plate, the driving shaft of the angle adjustment motor is connected to an adjusting gear, and the fixed cross bar is connected to an adjusting rack meshing with the adjusting gear.

[0009] Preferably, in the edge grinding device suitable for a MEMS chip, a dust cover is connected to the fixed base.

[0010] Preferably, in the edge grinding device suitable for a MEMS chip, the fixed cross bar is connected to the second fixed bracket via a rotating shaft.

[0011] Preferably, in the edge grinding device suitable for a MEMS chip, the bottom of the fixed cross bar is connected to a support bar.

[0012] Preferably, in the edge grinding device suitable for a MEMS chip, the support rod is a support rod of a telescopic structure, an adjustment hole is formed on the support rod of the telescopic structure, and a fixing bolt is connected in the adjustment hole.

[0013] Preferably, in the edge grinding device suitable for a MEMS chip, the curvature of the first adjustment fixing plate and the second adjustment fixing plate is in a range of 0° to 60°.

[0014] By means of the above solution, the utility model has at least the following advantages:

[0015] The utility model can realize multi-angle grinding, ensure the accuracy of product grinding, and at the same time the utility model can adjust the product to make the grinding position of the product more accurate, improve the accuracy of grinding, reduce the problem of rework, and thus improve the purpose of work efficiency.

[0016] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of the utility model;

[0019] Figure 2 It is a structural schematic diagram of the grinding assembly of the utility model;

[0020] Figure 3 It is a structural schematic diagram of the rotating fixed plate and the suction cup of the utility model. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0023] Example

[0024] like Figure 1 , Figure 2 and Figure 3 As shown, a grinding device suitable for a MEMS chip comprises a fixed base 1, a slide groove 3 is provided on one side of the fixed base 1, a slider is slidably connected to the slide groove 3, a fixed slide plate 4 is connected to the slider, a first fixed bracket 5 is connected to the fixed slide plate 4, a rotating motor 6 is connected to the outer side of the top of the first fixed bracket 5, a rotating fixed plate 7 is connected to the driving shaft of the rotating motor 6, a suction cup 8 is connected to the rotating fixed plate 7, a second fixed bracket 9 is connected to the other side of the fixed base 1, and a grinding assembly 10 for product chamfering is connected to the second fixed bracket 9;

[0025] The grinding assembly 10 includes a grinding motor 101 and a grinding disc 102, a fixed cross bar 103 is connected to the top of the second fixed bracket 9, and the fixed cross bar 103 is connected to a first adjustment fixing plate 104 and a second adjustment fixing plate 105 for adjusting the angle of the grinding motor, the first adjustment fixing plate 104 and the second adjustment fixing plate 105 are both in an arc structure, and a guide groove 106 is opened at the central axis of the first adjustment fixing plate 104 and the second adjustment fixing plate 105 along the arc structure, and a guide block is connected in the guide groove 106, and a guide connecting plate 107 is connected between the guide blocks, and the center of the guide connecting plate 107 is connected to the grinding motor 101, the grinding disc 102 is connected to the driving shaft of the grinding motor 101, and the guide connecting plate 107 is connected to an angle adjustment motor 108, and the driving shaft of the angle adjustment motor 108 is connected to an adjustment gear 109, and the fixed cross bar 103 is connected to an adjustment rack 110 meshing with the adjustment gear.

[0026] The fixed base 1 of the present invention is connected with a dust cover 2.

[0027] The fixed cross bar 103 of the present invention is connected to the second fixed bracket 9 via a rotating shaft, wherein the bottom of the fixed cross bar 103 is connected to a support rod 111, and the support rod 111 is a support rod of a telescopic structure, and an adjustment hole is opened on the support rod of the telescopic structure, and a fixing bolt is connected in the adjustment hole. The above structure can further adjust the angle of the grinding assembly to meet the grinding requirements of different products.

[0028] The working principle of the utility model is as follows:

[0029] During the specific work, after opening the dust cover, the product is placed on the suction cup to adsorb the product, and then the fixed slide will bring the product to the specified position (the position set by technical personnel in this field). After the movement is completed, since the position where the operator places the product will deviate, the rotating motor is used to make appropriate adjustments to adjust the position where the product is to be polished and finally polishing is carried out.

[0030] In the above process, according to the different chamfers that need to be polished, the angle of the polishing motor is adjusted by the angle adjustment motor, so as to better polish the product.

[0031] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0032] In the description of this application, it should be noted that the terms "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0033] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or vertical, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0034] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. An edge grinding device suitable for MEMS chips, characterized in that: The invention comprises a fixed base (1), a slide groove (3) is provided on one side of the fixed base (1), a slider is slidably connected to the slide groove (3), a fixed slide plate (4) is connected to the slider, a first fixed bracket (5) is connected to the fixed slide plate (4), a rotating motor (6) is connected to the outer side of the top end of the first fixed bracket (5), a rotating fixed plate (7) is connected to the driving shaft of the rotating motor (6), a suction cup (8) is connected to the rotating fixed plate (7), a second fixed bracket (9) is connected to the other side of the fixed base (1), and a grinding assembly (10) for chamfering products is connected to the second fixed bracket (9); The grinding assembly (10) comprises a grinding motor (101) and a grinding disc (102); a fixed cross bar (103) is connected to the top of the second fixed bracket (9); a first adjustment fixing plate (104) and a second adjustment fixing plate (105) for adjusting the angle of the grinding motor are connected to the fixed cross bar (103); the first adjustment fixing plate (104) and the second adjustment fixing plate (105) are both in an arc-shaped structure; guide grooves (104) are provided at the central axis of the first adjustment fixing plate (104) and the second adjustment fixing plate (105) along the arc-shaped structure. 06), a guide block is connected in the guide groove (106), a guide connecting plate (107) is connected between the guide blocks, a grinding motor (101) is connected at the center of the guide connecting plate (107), a grinding disc (102) is connected to the driving shaft of the grinding motor (101), an angle adjustment motor (108) is connected to the guide connecting plate (107), an adjustment gear (109) is connected to the driving shaft of the angle adjustment motor (108), and an adjustment rack (110) meshing with the adjustment gear is connected to the fixed cross bar (103).

2. The edge grinding device suitable for MEMS chip according to claim 1, characterized in that: The fixed base (1) is connected to a dust cover (2).

3. The edge grinding device suitable for MEMS chip according to claim 1, characterized in that: The fixed cross bar (103) is connected to the second fixed bracket (9) via a rotating shaft.

4. An edge grinding device suitable for MEMS chips according to claim 1 or 3, characterized in that: The bottom of the fixed cross bar (103) is connected to a support bar (111).

5. The edge grinding device suitable for MEMS chip according to claim 4, characterized in that: The support rod (111) is a support rod of a telescopic structure, an adjustment hole is provided on the support rod of the telescopic structure, and a fixing bolt is connected in the adjustment hole.

6. The edge grinding device suitable for MEMS chip according to claim 1, characterized in that: The curvature of the first adjustment fixing plate (104) and the second adjustment fixing plate (105) is between 0° and 60°.

Images