Coated evaporation boat

Abstract

The coating evaporation boat comprises a film material boat, a baffle plate and a cover plate, wherein the film material boat, the baffle plate and the cover plate are mutually independent; the film material boat is provided with a bottom wall, two first walls and two second walls, and the bottom wall, the two first walls and the two second walls define a containing cavity; the baffle is provided with a shielding piece, two connecting pieces and two lap joint pieces, the shielding piece is used for forming gaps with the second walls, and the lap joint pieces are used for being in lap joint with the corresponding first walls from the upper portion. The cover plate is provided with a main body part and two clamping parts, and the main body part is provided with a plurality of openings penetrating in the vertical direction; the main body part is at least supported on the top surfaces of the two second walls, covers at least one part of the whole shielding piece, the whole two connecting pieces and the two lap joint pieces from the upper part, wholly seals the opening and the gap of the accommodating cavity from the upper part and is separated from the shielding piece, and the projections of the plurality of openings in the vertical direction are positioned in the whole periphery of the shielding piece; and the two clamping parts are respectively clamped on the two second walls from the outer sides and seal the gaps between the shielding sheet and the second walls together with the main body part.

Description

Technical Field

[0001] The present disclosure relates to the field of vacuum coating, and more specifically to a coating evaporation boat. Background Art

[0002] During the vacuum evaporation coating process, some special materials such as zinc sulfide, zinc selenide, ytterbium fluoride, magnesium fluoride, etc. will produce splashing during the evaporation process. This splashing will form larger particles or impurities that are deposited on the surface of the optical lens, forming film material points. The diameter of this film material point can reach the millimeter level, which will cause fatal damage to the imaging effect of the optical lens. The current conventional improvement plan is to prefer high-purity film materials to reduce or avoid splashing during evaporation caused by excessive impurities in the film material, but the price of this higher purity film material is also higher, which will increase the production cost greatly.

[0003] US Patent Document US6237529B1 discloses a thermal physical vapor deposition source, which uses a shell for holding evaporated material, a top plate with multiple openings for evaporation covering the open opening of the shell, a baffle plate disposed in the shell and spaced below the top plate, and multiple separate support members fixed between the baffle plate and the top plate. The patent sets a baffle plate so that the evaporated material passes through the gap between the baffle plate and the shell on the side and enters between the baffle plate and the top plate, and then the evaporated material passes through the multiple openings of the top plate to be coated, thereby reducing or avoiding splashing caused by the evaporated material.

[0004] In US6237529B1, when assembling a thermal physical vapor deposition source, it is necessary to first fix the baffle and the top plate together through a plurality of supporting members, and then assemble the fixed baffle, top plate and a plurality of supporting members onto the shell, which makes the assembly operation inconvenient.

[0005] In US6237529B1, when the baffle needs to be replaced or maintained, since the baffle and the top plate are fixed together by multiple supporting members, the top plate, multiple supporting members and the baffle need to be handled together, so the maintenance and replacement of the baffle is inconvenient.

[0006] Furthermore, Chinese patent document CN1922339A discloses a vapor deposition source, which uses an open container for holding evaporated material, a cover with multiple openings, and a baffle that can be placed in the container independently of the cover. The cover and the baffle can be directly supported on two opposite inclined walls of the container, or the cover and the baffle are supported in the container by respective corresponding upright extensions. When the cover and the baffle are directly supported on two opposite inclined walls of the container, the baffle has poor stability under the impact of evaporated material and splashed particles; when the baffle is supported in the container by an upright extension, the upright extension also has poor stability under the impact of evaporated material and splashed particles, which leads to poor stability of the baffle. Utility Model Content

[0007] In view of the problems existing in the background technology, an object of the present disclosure is to provide a coating evaporation boat, which can facilitate the assembly and disassembly of the baffle while reducing the splashing caused by the evaporated material and can also improve the stability of the baffle during the coating evaporation process.

[0008] The cover plate has a bottom wall, two first walls opposite to each other in a first direction, and two second walls opposite to each other in a second direction, the first direction and the second direction being perpendicular to each other, the bottom wall, the two first walls and the two second walls forming a receiving chamber which is closed at the bottom, closed in the circumference and has an open top, the receiving chamber is used to receive the film material for coating evaporation; the cover plate has a shielding sheet, two connecting sheets and two overlapping sheets, the shielding sheet is used to be placed in the receiving chamber and form a gap between the second walls when the cover plate is assembled to the film material boat, the two connecting sheets are respectively connected to the opposite sides of the shielding sheet and extend upward from the shielding sheet, each connecting sheet is connected between the shielding sheet and the corresponding overlapping sheet, and each overlapping sheet is used to overlap the corresponding first wall from above when the cover plate is assembled to the film material boat; the cover plate has a main body and The two clamping parts and the main body are provided with multiple openings that pass through in the up-down direction. The main body is used to at least support on the top surfaces of the two second walls when the cover plate is assembled to the assembled membrane boat and baffle, cover the entire shielding plate, the entire two connecting plates and at least a part of the two overlapping plates from above, and completely close the opening of the receiving cavity and the gap formed between the shielding plate and each second wall from above, and be spaced apart from the shielding plate in the up-down direction. The positions of the multiple openings on the main body are configured so that when the cover plate is assembled to the assembled membrane boat and baffle, the projections of the multiple openings in the up-down direction are located within the entire periphery of the shielding plate. The two clamping parts are bent downward from both sides of the second direction of the main body, and the two clamping parts are used to clamp on the two second walls of the membrane boat from the outside when the cover plate is assembled to the assembled membrane boat and baffle, and close the gap formed between the shielding plate and each second wall together with the main body.

[0009] The beneficial effects of the present disclosure are as follows.

[0010] In the coating evaporation boat according to the present disclosure, when the film material contained in the containing chamber evaporates, because the positions of the multiple openings on the main body are configured so that when the cover plate is assembled to the assembled film material boat and the baffle plate, the projections of the multiple openings in the upper and lower directions are located within the entire periphery of the shielding sheet, the generated splashes will not come out directly through the openings of the main body of the cover plate, but most of the particles of the generated splashes will be blocked by the shielding sheet of the baffle plate, and the steam generated by the film material will overflow from the gap formed between the shielding sheet of the baffle plate and the second walls to between the main body of the cover plate and the shielding sheet of the baffle plate and pass through the main body of the cover plate The coating is evaporated through the openings of the main body of the cover plate. Even if a small part of the splashing particles that are not blocked by the blocking sheets of the baffle plate enter between the main body of the cover plate and the blocking sheets of the baffle plate through the gap between the blocking sheets of the baffle plate and the second walls, they will be blocked by the non-opening parts of the main body of the cover plate due to the deflection effect and bounce back and forth between the non-opening parts of the main body of the cover plate and the blocking sheets of the baffle plate. As a result, very few splashing particles come out of the multiple openings of the main body of the cover plate, thereby reducing the splashing caused by the film material, reducing the defects caused by the film material points, and improving the coating yield.

[0011] Compared with US6237529B1, in the coating evaporation boat according to the present disclosure, the film boat, the baffle plate and the cover plate are independent of each other, and the assembly and disassembly of the baffle plate need to be facilitated.

[0012] Compared with CN1922339A, in the coating evaporation boat according to the present invention, each overlapping piece of the baffle is overlapped on the corresponding first wall from above when the baffle is assembled on the film material boat, and each overlapping piece is not in the receiving cavity, thereby preventing each overlapping piece from being affected by the impact of the evaporated film material and splashed particles in the receiving cavity. The two clamping parts of the cover plate are respectively clamped on the two second walls of the film material boat from the outside, and the baffle is firmly fixed on the receiving cavity of the film material boat, thereby improving the stability of the baffle during the film material coating evaporation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is an exploded perspective view of a coating evaporation boat according to the present disclosure.

[0014] Figure 2 yes Figure 1 A partial assembly diagram of the membrane boat is shown in FIG. 1 , wherein the baffle is assembled to the membrane boat.

[0015] Figure 3 is Figure 2 3D view of the assembly of the coating evaporation boat based on FIG. 1 , where the cover plate is assembled on the assembled baffle plate and film material boat.

[0016] The reference numerals are described as follows:

[0017] 100 coating evaporation boat 21 shielding sheet

[0018] D1 first direction 22 connecting piece

[0019] D2 second direction 23 overlap piece

[0020] D3 up and down direction CL1 first center line

[0021] 1 Film boat CL2 second center line

[0022] 11 Bottom wall G clearance

[0023] 12 First wall 3 cover plate

[0024] 13 Second wall 31 Main body

[0025] 14 protruding wall 311 opening

[0026] S receiving cavity 32 clamping part

[0027] O Opening 33 Extension

[0028] 2 Baffle DETAILED DESCRIPTION

[0029] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0030] Reference Figures 1 to 3 According to the present disclosure, the coating evaporation boat 100 includes a film material boat 1 , a baffle 2 and a cover plate 3 .

[0031] The film boat 1 , the baffle plate 2 and the cover plate 3 are independent of each other.

[0032] The film boat 1 has a bottom wall 11, two first walls 12 opposite to each other in a first direction D1, and two second walls 13 opposite to each other in a second direction D2. The first direction D1 and the second direction D2 are transversely intersected. The bottom wall 11, the two first walls 12 and the two second walls 13 form a receiving cavity S which is closed at the bottom, closed circumferentially and has an opening O at the upper end. The receiving cavity S is used to receive the film material for coating evaporation.

[0033] The baffle plate 2 has a shielding piece 21, two connecting pieces 22 and two overlapping pieces 23. The shielding piece 21 is used to be placed in the receiving cavity S when the baffle plate 2 is assembled on the membrane boat 1 and form a gap G with each second wall 13. The two connecting pieces 22 are respectively connected to the opposite sides of the shielding plate 2 and extend upward from the shielding plate 2. Each connecting piece 22 is connected between the shielding piece 21 and the corresponding overlapping piece 23. Each overlapping piece 23 is used to overlap the corresponding first wall 12 from above when the baffle plate 2 is assembled on the membrane boat 1.

[0034] The cover plate 3 has a main body 31 and two clamping parts 32. The main body 31 is provided with a plurality of openings 311 extending through the upper and lower directions D3. The main body 31 is used to at least support the top surfaces of the two second walls 13 when the cover plate 3 is assembled to the assembled film boat 1 and the baffle plate 2, cover the entire shielding sheet 21, the entire two connecting sheets 22 and at least a part of the two lap sheets 23 from above, and completely close the opening O of the receiving cavity S from above as well as the gap G formed between the shielding sheet 21 and each second wall 13, and be spaced apart from the shielding sheet 21 in the upper and lower directions D3. The positions of the multiple openings 311 on the main body 31 are configured so that when the cover plate 3 is assembled to the assembled film boat 1 and the baffle 2, the projections of the multiple openings 311 in the up and down direction D3 are located within the entire periphery of the shielding sheet 21. The two clamping portions 32 are bent downward from both sides of the second direction D2 of the main body 31. The two clamping portions 32 are used to clamp onto the two second walls 13 of the film boat 1 from the outside when the cover plate 3 is assembled to the assembled film boat 1 and the baffle 2, and together with the main body 31, close the gap G formed between the shielding sheet 21 and each second wall 13.

[0035] In the coating evaporation boat 100 according to the present disclosure, when the film material contained in the containing chamber S evaporates, because the positions of the plurality of openings 311 on the main body 31 are configured so that when the cover plate 3 is assembled to the assembled film material boat 1 and the baffle plate 2, the projections of the plurality of openings 311 in the up-down direction D3 are located within the entire periphery of the shielding sheet 21, the generated splashes will not directly come out through the openings 311 of the main body 31 of the cover plate 3, but most of the particles of the generated splashes are blocked by the shielding sheet 21 of the baffle plate 2, and the steam generated by the film material overflows from the gap G formed between the shielding sheet 21 of the baffle plate 2 and each second wall 13 to between the main body 31 of the cover plate 3 and the shielding sheet 21 of the baffle plate 2 and passes through the main body 31 of the cover plate 3. The sputtered particles that are not blocked by the shielding sheets 21 of the baffle 2 will enter between the main body 31 of the cover plate 3 and the shielding sheets 21 of the baffle 2 through the gap G between the shielding sheets 21 of the baffle 2 and the second walls 13. Due to the deflection effect, they will be blocked by the part without openings 311 of the main body 31 of the cover plate 3 and bounce back and forth between the part without openings 311 of the main body 31 of the cover plate 3 and the shielding sheets 21 of the baffle 2. As a result, very few sputtered particles will come out of the multiple openings 311 of the main body 31 of the cover plate 3, thereby reducing the splashing caused by the film material, reducing the defects caused by the film material points, and improving the coating yield.

[0036] Compared with US6237529B1, in the coating evaporation boat 100 according to the present disclosure, the film boat 1, the baffle 2 and the cover plate 3 are independent of each other, and the assembly and disassembly of the baffle need to be facilitated.

[0037] Compared with CN1922339A, in the coating evaporation boat 100 according to the present disclosure, each overlapping piece 23 of the baffle plate 2 is overlapped on the corresponding first wall 12 from above when the baffle plate 2 is assembled on the film material boat 1, and each overlapping piece 23 is not in the receiving chamber S, so as to avoid the overlapping pieces 23 being affected by the impact of the evaporated film material and the splashed particles in the receiving chamber S. The two clamping parts 32 of the cover plate 3 are respectively clamped on the two second walls 13 of the film material boat 1 from the outside, and the baffle plate 2 is firmly fixed on the receiving chamber S of the film material boat 1, thereby improving the stability of the baffle during the film material coating evaporation process.

[0038] In the coating evaporation boat 100 according to the present disclosure, for example, the first direction D1 is a left-right direction, the second direction D2 is a front-back direction, and the first direction D1 and the second direction D2 are perpendicular to each other.

[0039] Reference Figures 1 to 3 The film boat 1 further includes two protruding walls 14, which are bent from the two first walls 12 and extend along the first direction D1; each lap piece 23 of the baffle 2 is also used to be attached to the corresponding protruding wall 14 from above when the baffle 2 is assembled to the film boat 1. The stability of the lap piece 23 of the baffle 2 can be increased by providing the protruding wall 14 and attaching the corresponding protruding wall 14 from above when the baffle 2 is assembled to the film boat 1.

[0040] In one example, the film boat 1 is a single piece formed by bending a single sheet. This can avoid the risk of leakage caused by forming the bottom wall 11, the two first walls 12, and the two second walls 13 separately and then connecting them together. In an alternative example, the film boat 1 is a single piece formed by stamping and bending a single sheet. The shape of the film boat 1 is, for example, Figures 1 to 3 It can be a rectangular parallelepiped or a cube.

[0041] Likewise, in one example, the baffle 2 is an integral single piece formed by bending a single sheet.

[0042] like Figure 1 As shown, in one example, the size of the shielding sheet 21 in the second direction D2 is smaller than the size of each overlapping sheet 23 in the second direction D2. The difference between the size of the shielding sheet 21 in the second direction D2 and the size of each overlapping sheet 23 in the second direction D2 can be determined according to actual conditions. For example, the difference between the size of the shielding sheet 21 in the second direction D2 and the size of each overlapping sheet 23 in the second direction D2 is 1-2 cm. In one example, the size of each overlapping sheet 23 in the second direction D2 is equal to the size of each first wall 12 in the second direction D2.

[0043] like Figure 1As shown, in one example, the size of the shielding sheet 21 in the second direction D2 is equal to the size of each connecting sheet 22 in the second direction D2, thereby simplifying the manufacturing of the shielding sheet 21 and the two connecting sheets 22.

[0044] like Figure 1 As shown, in one example, the size of the shielding sheet 21 in the first direction D1 is equal to the distance between the two first walls 12 in the first direction D1.

[0045] like Figure 1 As shown in an example, the baffle 2 is mirror-symmetrical with respect to a first center line CL1 extending along the first direction D1; the baffle 2 is mirror-symmetrical with respect to a second center line CL2 extending along the second direction D2. Figure 1 The first direction D1 shown is rotated 180 degrees for use, which improves the convenience of assembly operation.

[0046] Likewise, in one example, the cover plate 3 is an integral single piece formed by bending a single sheet.

[0047] like Figures 1 to 3 As shown, a plurality of openings 311 are arranged in a two-dimensional array. The shape of the openings 311 is, for example, but not limited to, circular, elliptical, triangular, rectangular, etc. The size of the openings 311 can be determined according to actual conditions. For example, each opening 311 is a circular hole with a diameter of 0.1-2.5 mm.

[0048] The distance between the main body 31 of the cover plate 3 and the shielding sheet 21 in the vertical direction D3 is preferably such that the evaporated film material vapor flows smoothly and increases the degree of the splashing particles bouncing back and forth between the portion of the main body 31 of the cover plate 3 without the opening 311 and the shielding sheet 21 of the baffle 2. For example, the distance between the main body 31 of the cover plate 3 and the shielding sheet 21 in the vertical direction D3 is 5-10 mm.

[0049] The size of the clamping portion 32 of the cover plate 3 in the first direction D1 is as short as possible, provided that the clamping portion 32 together with the main body 31 closes the gap G formed between the shielding sheet 21 and each second wall 13. For example, the size of the clamping portion 32 of the cover plate 3 in the first direction D1 exceeds the size of the second wall 13 in the first direction D1 by 4-8 mm. Similarly, the size of the clamping portion 32 of the cover plate 3 in the second direction D2 is as short as possible, provided that the two clamping portions 32 are respectively clamped on the two second walls 13 of the film boat 1 from the outside when the cover plate 3 is assembled to the assembled film boat 1 and the baffle 2, so as to save material costs.

[0050] like Figures 1 to 3As shown, in one example, the cover plate 3 further has two extensions 33, which extend outward from both sides of the first direction D1 of the main body 31, respectively, and the two extensions 33 are used to be attached to the two lap pieces 23 of the baffle 2 when the cover plate 3 is assembled to the assembled film boat 1 and the baffle 2. The stability of the lap pieces 23 of the baffle 2 can be increased by providing the two extensions 33 and by the two extensions 33 being attached to the two lap pieces 23 of the baffle 2 when the cover plate 3 is assembled to the assembled film boat 1 and the baffle 2.

[0051] In one example, the film boat 1 is a conductive film boat, the baffle 2 is a conductive baffle, and the cover plate 3 is a conductive cover plate; the film boat 1 is used for electrical heating, and the baffle 2 and the cover plate 3 are used for simultaneous electrical heating. Because the film boat 1, the baffle 2 and the cover plate 3 are all conductive, they conduct heat to each other, making the film boat 1 heat and evaporate the film material therein more efficiently. The electrically heated baffle 2 and cover plate 3 can maintain their own temperature. Even if a small portion of the splashing particles that are not blocked by the shielding sheet 21 of the baffle 2 enter between the main body 31 of the cover plate 3 and the shielding sheet 21 of the baffle 2 through the gap G between the shielding sheet 21 of the baffle 2 and each second wall 13 and bounce back and forth between the part of the main body 31 of the cover plate 3 without openings 311 and the shielding sheet 21 of the baffle 2, the splashing particles that bounce and contact the electrically heated baffle 2 and cover plate 3 are evaporated again, so that fewer or even no sputtering particles come out of the multiple openings 311 of the main body 31 of the cover plate 3, thereby further reducing or avoiding defects caused by film material points and improving the coating yield. When the membrane boat 1, baffle 2 and cover plate 3 are electrically heated, the two protruding walls 14 of the membrane boat 1 can be used as positive and negative electrodes to connect to the power supply, the two overlapping pieces 23 of the aforementioned baffle 2 can be used as positive and negative electrodes to connect to the power supply, and the two extending parts 33 of the cover plate 3 can be used as positive and negative electrodes to connect to the power supply.

[0052] The materials of the membrane boat 1, baffle 2, and cover plate 3 are, for example, but not limited to, molybdenum, tungsten, copper, iron, etc. When the membrane boat 1, baffle 2, and cover plate 3 are each formed of a single sheet, the thickness of the sheet is as small as possible while satisfying the structural strength, for example, a 0.1-0.3 mm molybdenum sheet is used.

[0053] The membrane material may be, but is not limited to, zinc sulfide, zinc selenide, ytterbium fluoride, magnesium fluoride and the like.

[0054] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A coating evaporation boat, characterized in that: It comprises a membrane boat (1), a baffle (2) and a cover plate (3), The membrane boat (1), the baffle plate (2) and the cover plate (3) are independent of each other; The film material boat (1) comprises a bottom wall (11), two first walls (12) opposite to each other in a first direction (D1), and two second walls (13) opposite to each other in a second direction (D2); the first direction (D1) and the second direction (D2) intersect each other transversely; the bottom wall (11), the two first walls (12) and the two second walls (13) form a receiving chamber (S) which is closed at the bottom and circumferentially and has an opening (O) at the top; the receiving chamber (S) is used to receive the film material to be evaporated by coating; The baffle plate (2) comprises a shielding piece (21), two connecting pieces (22) and two overlapping pieces (23); the shielding piece (21) is used to be placed in the receiving cavity (S) and form a gap (G) with each second wall (13) when the baffle plate (2) is assembled on the film boat (1); the two connecting pieces (22) are respectively connected to the opposite sides of the shielding plate (2) and extend upward from the shielding plate (2); each connecting piece (22) is connected between the shielding piece (21) and the corresponding overlapping piece (23); each overlapping piece (23) is used to overlap the corresponding first wall (12) from above when the baffle plate (2) is assembled on the film boat (1); The cover plate (3) comprises a main body (31) and two clamping parts (32). The main body (31) is provided with a plurality of openings (311) penetrating along the up-down direction (D3). The main body (31) is used to at least support on the top surfaces of the two second walls (13) when the cover plate (3) is assembled on the assembled film boat (1) and the baffle plate (2), cover the entire shielding sheet (21), the entire two connecting sheets (22) and at least a part of the two overlapping sheets (23) from above, completely close the opening (O) of the receiving cavity (S) from above and the gap (G) formed between the shielding sheet (21) and each second wall (13), and be spaced apart from the shielding sheet (21) in the up-down direction (D3). The positions of the multiple openings (311) on the main body (31) are configured so that when the cover plate (3) is assembled to the assembled membrane boat (1) and the baffle (2), the projections of the multiple openings (311) in the up and down directions (D3) are located within the entire periphery of the shielding sheet (21); the two clamping portions (32) are bent downward from both sides of the second direction (D2) of the main body (31); the two clamping portions (32) are used to clamp onto the two second walls (13) of the membrane boat (1) from the outside when the cover plate (3) is assembled to the assembled membrane boat (1) and the baffle (2), and to close the gap (G) formed between the shielding sheet (21) and each second wall (13) together with the main body (31).

2. The coating evaporation boat according to claim 1, characterized in that: The film boat (1) further comprises two protruding walls (14), wherein the two protruding walls (14) are respectively bent from the two first walls (12) and extend along the first direction (D1); Each overlapping piece (23) of the baffle (2) is also used to be attached to the corresponding protruding wall (14) from above when the baffle (2) is assembled on the membrane boat (1).

3. The coating evaporation boat according to claim 1, characterized in that: The membrane boat (1) is an integrated single piece formed by bending and connecting single sheets.

4. The coating evaporation boat according to claim 1, characterized in that: The baffle (2) is an integrated single piece formed by bending a single sheet.

5. The coating evaporation boat according to claim 1, characterized in that: The size of the shielding sheet (21) in the first direction (D1) is equal to the distance between the two first walls (12) in the first direction (D1); The size of the shielding sheet (21) in the second direction (D2) is smaller than the size of each overlapping sheet (23) in the second direction (D2); The size of the shielding sheet (21) in the second direction (D2) is equal to the size of each connecting sheet (22) in the second direction (D2); The size of each overlapping piece (23) in the second direction (D2) is equal to the size of each first wall (12) in the second direction (D2).

6. The coating evaporation boat according to claim 4, characterized in that: The baffle (2) is mirror-symmetrical relative to a first center line (CL1) extending along a first direction (D1); The baffle (2) is mirror-symmetrical relative to a second center line (CL2) extending along the second direction (D2).

7. The coating evaporation boat according to claim 1, characterized in that: The cover plate (3) is an integrated single piece formed by bending a single sheet of material.

8. The coating evaporation boat according to claim 1, characterized in that: The plurality of openings (311) are arranged in a two-dimensional array.

9. The coating evaporation boat according to claim 1, characterized in that: The cover plate (3) also has two protruding portions (33). The two extensions (33) extend outward from both sides of the first direction (D1) of the main body (31), and the two extensions (33) are used to be respectively attached to the two overlapping pieces (23) of the baffle (2) when the cover plate (3) is assembled to the assembled membrane boat (1) and baffle (2).

10. The coating evaporation boat according to claim 1, characterized in that: The film boat (1) is a conductive film boat, the baffle (2) is a conductive baffle, and the cover plate (3) is a conductive cover plate; The film boat (1) is used for electrically heating, and the baffle (2) and the cover plate (3) are used for electrically heating at the same time.

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