Electromagnetic wave attenuation assembly and MPCVD device

Abstract

The utility model relates to the technical field of electromagnetic wave attenuation, in particular to an electromagnetic wave attenuation assembly and an MPCVD device, the electromagnetic wave attenuation assembly comprises a first attenuation piece, the first attenuation piece comprises a first cylinder, a second cylinder and a third cylinder, the second cylinder is sleeved on the first cylinder, and the third cylinder is sleeved on the second cylinder. The second cylinder is sleeved with the third cylinder, the lower end face of the first cylinder, the lower end face of the second cylinder and the lower end face of the third cylinder are flush, the length of the second cylinder is smaller than the length of the first cylinder and the length of the third cylinder, and the electromagnetic wave attenuation assembly is small in size and beneficial to electromagnetic wave attenuation. The MPCVD device comprises the electromagnetic wave attenuation assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of electromagnetic wave attenuation, and in particular to an electromagnetic wave attenuation component and an MPCVD device. Background Art

[0002] Electromagnetic waves are usually divided into seven basic types, but they are all different manifestations of the same phenomenon. In order of decreasing wavelength or increasing frequency, common names are: radio waves, microwaves, infrared, visible light, ultraviolet, X-rays and gamma rays. Microwaves refer to electromagnetic waves with a frequency of 300MHz to 300GHz, and are the abbreviation for a limited frequency band in radio waves.

[0003] Microwave plasma chemical vapor deposition is an advanced method for preparing high-quality diamond films today. This method requires a microwave plasma chemical vapor deposition device (hereinafter referred to as MPCVD device). The MPCVD device introduces the microwaves generated by the microwave generator into the reaction chamber through a waveguide transmission system, and introduces a mixed gas of methane and hydrogen. Under the excitation of microwaves, a glow discharge is generated in the reaction chamber, which ionizes the molecules of the reaction gas and generates plasma, which is deposited on the sample stage to obtain a diamond film.

[0004] The phenomenon that electromagnetic wave energy weakens along the transmission path is called attenuation.

[0005] The electromagnetic wave attenuation components in the prior art are relatively large in size, which is not conducive to the miniaturization of the equipment. Utility Model Content

[0006] The purpose of the utility model is to overcome the deficiencies of the prior art and provide an electromagnetic wave attenuation component which is small in size and is conducive to electromagnetic wave attenuation.

[0007] Another object of the present invention is to provide an MPCVD device, which adopts the above-mentioned electromagnetic wave attenuation component.

[0008] The purpose of the utility model is achieved through the following technical solutions:

[0009] An electromagnetic wave attenuation component includes a first attenuation component, which includes a first cylinder, a second cylinder and a third cylinder. The second cylinder is sleeved on the first cylinder, and the third cylinder is sleeved on the second cylinder. The lower end surface of the first cylinder, the lower end surface of the second cylinder and the lower end surface of the third cylinder are flush, and the length of the second cylinder is smaller than the length of the first cylinder and the length of the third cylinder.

[0010] Furthermore, it also includes a second attenuation member, which includes a fourth cylinder and a fifth cylinder, the fifth cylinder is sleeved on the fourth cylinder, the upper end surface of the fourth cylinder is flush with the upper end surface of the fifth cylinder, and the length of the fourth cylinder is smaller than the length of the fifth cylinder; the fourth cylinder is sleeved on the first cylinder, the fifth cylinder is sleeved on the third cylinder, and the upper end surface of the third cylinder is abutted against the lower end surface of the fourth cylinder.

[0011] Furthermore, it also includes a third attenuation member, the third attenuation member includes a sixth cylinder, the sixth cylinder is sleeved on the third cylinder, and the lower end surface of the fifth cylinder is in contact with the upper end surface of the sixth cylinder.

[0012] Furthermore, it also includes a first partition, which includes a seventh cylinder and an eighth cylinder, the eighth cylinder is sleeved on the seventh cylinder, the upper end surface of the seventh cylinder is flush with the upper end surface of the eighth cylinder, and the length of the eighth cylinder is smaller than the length of the seventh cylinder; the seventh cylinder is sleeved on the first cylinder, and the third cylinder is sleeved on the seventh cylinder.

[0013] Furthermore, it also includes a second partition, which includes a ninth cylinder, a tenth cylinder and an eleventh cylinder, the tenth cylinder is sleeved on the ninth cylinder, the eleventh cylinder is sleeved on the tenth cylinder, the lower end surface of the ninth cylinder and the lower end surface of the tenth cylinder are flush with the lower end surface of the eleventh cylinder, and the length of the tenth cylinder is greater than the length of the ninth cylinder and the length of the eleventh cylinder; the tenth cylinder is sleeved on the third cylinder, and the fifth cylinder is sleeved on the tenth cylinder.

[0014] Furthermore, the dielectric constant of the first attenuation element is ε1, the dielectric constant of the second attenuation element is ε2, the dielectric constant of the third attenuation element is ε3, and ε1≠ε2; or ε1≠ε3; or ε2≠ε3; or ε1≠ε2≠ε3.

[0015] Furthermore, the material of the first attenuation member is a first ceramic, the material of the second attenuation member is polytetrafluoroethylene, and the material of the third attenuation member is a second ceramic.

[0016] Furthermore, the inner wall and outer wall of the first cylinder are provided with a metal coating, the upper end surface and lower end surface of the second cylinder are provided with a metal coating, and the inner wall and outer wall of the third cylinder are provided with a metal coating.

[0017] Furthermore, the first separator and the second separator are made of metal.

[0018] An MPCVD device comprises the electromagnetic wave attenuation component.

[0019] The utility model has the following advantages:

[0020] The cross-section of the first attenuation element is in a "U" shape, which reduces the volume while extending the attenuation path of the electromagnetic wave, is more conducive to the attenuation of the electromagnetic wave, and reduces the temperature of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solution of the implementation of the utility model, the following is a brief introduction to the drawings required for use in the implementation. It should be understood that the following drawings only show certain embodiments of the utility model, and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can also be obtained based on these drawings without creative work.

[0022] Figure 1 It is a cross-sectional schematic diagram of the electromagnetic wave attenuation component of the utility model;

[0023] Figure 2 It is a cross-sectional schematic diagram of the first attenuation element of the utility model;

[0024] Figure 3 It is a cross-sectional schematic diagram of the second attenuation member of the utility model;

[0025] Figure 4 It is a cross-sectional schematic diagram of the third attenuation element of the utility model;

[0026] Figure 5 It is a cross-sectional schematic diagram of the first partition of the utility model;

[0027] Figure 6 It is a cross-sectional schematic diagram of the second partition of the utility model;

[0028] Figure 7 It is a cross-sectional schematic diagram of the MPCVD device of the utility model;

[0029] Figure 8 for Figure 7 The enlarged schematic diagram of the middle part;

[0030] Fig. 9 This is a simulation diagram of the attenuation performance of the electromagnetic wave attenuation component of the utility model;

[0031] In the figure: 1-first attenuation member, 11-first cylinder, 12-second cylinder, 13-third cylinder, 2-second attenuation member, 21-fourth cylinder, 22-fifth cylinder, 3-third attenuation member, 31-sixth cylinder, 4-first partition member, 41-seventh cylinder, 42-eighth cylinder, 5-second partition member, 51-ninth cylinder, 52-tenth cylinder, 53-eleventh cylinder, 6-inner conductor, 7-reaction chamber, 8-waveguide tube, 9-sample stage. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the implementation of the utility model clearer, the technical solution in the implementation of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation of the utility model. Obviously, the described implementation is only a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0034] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0035] In the present utility model, unless otherwise clearly specified and limited, the first feature being above or below the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being above, above, and above the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the horizontal length of the first feature is higher than the second feature. The first feature being below, below, and below the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the horizontal length of the first feature is smaller than the second feature.

[0036] like Figures 1 to 6As shown, an electromagnetic wave attenuation component includes a first attenuation member 1, wherein the first attenuation member 1 includes a first cylinder 11, a second cylinder 12 and a third cylinder 13, wherein the second cylinder 12 is sleeved on the first cylinder 11, and the third cylinder 13 is sleeved on the second cylinder 12, the lower end faces of the first cylinder 11 and the second cylinder 12 are flush with the lower end faces of the third cylinder 13, the length of the second cylinder 12 is less than the length of the first cylinder 11 and the length of the third cylinder 13, and the length of the third cylinder 13 is less than the length of the first cylinder 11, and the first attenuation member 1 can be integrally formed, or each cylinder can be made separately and then assembled, and the one-piece forming of the present embodiment; the first cylinder 11, the second cylinder 12 and the third cylinder 13 make the cross-section of the first attenuation member 1 present two side-by-side "U" shapes, which reduces the volume of the attenuation member while extending the transmission path of the electromagnetic wave, that is, extending the attenuation path of the electromagnetic wave, thereby facilitating the attenuation of the electromagnetic wave.

[0037] Furthermore, in order to further attenuate electromagnetic waves, a second attenuation member 2 is further included. The second attenuation member 2 includes a fourth cylinder 21 and a fifth cylinder 22. The fifth cylinder 22 is sleeved on the fourth cylinder 21. The upper end surface of the fourth cylinder 21 is flush with the upper end surface of the fifth cylinder 22. The length of the fourth cylinder 21 is less than the length of the fifth cylinder 22. The second attenuation member 2 can be integrally formed or each cylinder can be separately manufactured and then assembled. In this embodiment, the fourth cylinder 2 The fourth cylinder 21 and the fifth cylinder 22 are sleeved on the first cylinder 11 and spaced from the first cylinder 11, the fifth cylinder 22 is sleeved on the third cylinder 13 and spaced from the third cylinder 13, the upper end surface of the third cylinder 13 abuts against the lower end surface of the fourth cylinder 21; the fourth cylinder 21 and the fifth cylinder 22 make the cross-section of the second attenuation member 2 present a positive and negative "7" shape, which reduces the volume of the attenuation member and prolongs the transmission path of the electromagnetic wave, that is, prolongs the attenuation path of the electromagnetic wave, which is beneficial to the attenuation of the electromagnetic wave.

[0038] Furthermore, in order to further extend the attenuation path of the electromagnetic wave and thus be more conducive to the attenuation of the electromagnetic wave, a third attenuation component 3 is also included, and the third attenuation component 3 includes a sixth cylinder 31, and the sixth cylinder 31 is sleeved on the third cylinder 13 and spaced apart from the third cylinder 13, and the lower end face of the fifth cylinder 22 abuts against the upper end face of the sixth cylinder 31.

[0039] Furthermore, in order to allow electromagnetic waves to be transmitted and attenuated along a specific path, a first partition 4 is also included, and the first partition 4 includes a seventh cylinder 41 and an eighth cylinder 42. The eighth cylinder 42 is sleeved on the seventh cylinder 41, and the upper end surface of the seventh cylinder 41 is flush with the upper end surface of the eighth cylinder 42. The length of the eighth cylinder 42 is less than the length of the seventh cylinder 41. The first partition 4 can be integrally formed, or each cylinder can be made separately and then assembled. The present embodiment is integrally formed; the seventh cylinder 41 is sleeved on the first cylinder 11, and the third cylinder 13 is sleeved on the seventh cylinder 41. The lower end surface of the eighth cylinder 42 abuts against the upper end surface of the fourth cylinder 21.

[0040] Furthermore, in order to allow electromagnetic waves to be transmitted and attenuated along a specific path, a second separator 5 is also included, and the second separator 5 includes a ninth cylinder 51, a tenth cylinder 52 and an eleventh cylinder 53. The tenth cylinder 52 is sleeved on the ninth cylinder 51, and the eleventh cylinder 53 is sleeved on the tenth cylinder 52. The lower end surface of the ninth cylinder 51 and the lower end surface of the tenth cylinder 52 are flush with the lower end surface of the eleventh cylinder 53. The length of the tenth cylinder 52 is greater than the length of the ninth cylinder 51 and the length of the eleventh cylinder 53. The second separator 5 can be integrally formed, or each cylinder can be made separately and then assembled. The embodiment is integrally formed; the tenth cylinder 52 is sleeved on the third cylinder 13, and the fifth cylinder 22 is sleeved on the tenth cylinder 52. The lower end surface of the second cylinder 12 abuts against the upper end surface of the ninth cylinder 51, and the lower end surface of the sixth cylinder 31 abuts against the upper end surface of the eleventh cylinder 53.

[0041] Furthermore, the dielectric constants of the attenuation elements are not equal, and the frequency bands of the electromagnetic waves that they can attenuate are also not equal. In order to attenuate electromagnetic waves with a wider frequency band, the dielectric constant of the first attenuation element 1 is ε1, the dielectric constant of the second attenuation element 2 is ε2, and the dielectric constant of the third attenuation element 3 is ε3, wherein ε1≠ε2; or ε1≠ε3; or ε2≠ε3; or ε1≠ε2≠ε3; that is, in order to attenuate electromagnetic waves with a wider frequency band, the dielectric constants of the first attenuation element 1 and the second attenuation element 2 are not equal; or the dielectric constants of the first attenuation element 1 and the third attenuation element 3 are not equal; or the dielectric constants of the second attenuation element 2 and the third attenuation element 3 are not equal; or the dielectric constants of the first attenuation element 1, the second attenuation element 2 and the third attenuation element 3 are not equal to each other.

[0042] Furthermore, the material of the first attenuation member 1 is a first ceramic, the material of the second attenuation member 2 is polytetrafluoroethylene, and the material of the third attenuation member 3 is a second ceramic; it should be particularly pointed out that the main components of ceramics are silicon, aluminum, and oxygen, and the proportions of the components are different, and the dielectric constants of the ceramics are also different, that is, although the first ceramic and the second ceramic are both ceramics, their dielectric constants may not be equal.

[0043] Furthermore, in order to further allow electromagnetic waves to be transmitted and attenuated along a specific path, the inner wall and outer wall of the first cylinder 11 are provided with a metal coating, the upper end face and lower end face of the second cylinder 12 are provided with a metal coating, and the inner wall and outer wall of the third cylinder 13 are provided with a metal coating.

[0044] Furthermore, in order to further allow the electromagnetic waves to be transmitted and attenuated along a specific path, the first separator 4 and the second separator 5 are made of metal.

[0045] like Figure 7 and Figure 8 As shown, an MPCVD device includes the electromagnetic wave attenuation component, and the MPCVD device includes a sample stage 9 arranged in a reaction chamber 7, the sample stage 9 is connected to an inner conductor 6, and the inner conductor 6 passes through a waveguide tube 8 and is inserted into a first cylinder 11 of the electromagnetic wave attenuation component, the upper end surface of the first cylinder 11 faces the waveguide tube 8, and the waveguide tube 8 is sleeved on a fifth cylinder 22.

[0046] A part of the electromagnetic waves in the waveguide 8 is transmitted toward the reaction chamber 7 for preparing the diamond film; the other part is transmitted in the opposite direction of the reaction chamber 7. If this part of the electromagnetic waves (hereinafter referred to as reverse electromagnetic waves) cannot be attenuated in time, the temperature of the MPCVD device will increase.

[0047] The MPCVD device of the utility model comprises a first partition 4, a second partition 5, an inner conductor 6 and a waveguide tube 8 made of metal, which constrain the transmission path of the reverse electromagnetic wave. The reverse electromagnetic wave can only be transmitted from one end of the "U"-shaped structure of the first attenuation member 1 to the other end, and then from one end of the "7"-shaped structure of the second attenuation member 2 to the other end, and finally to the third attenuation member 3. The path is tortuous in a limited space, which reduces the volume of the electromagnetic wave attenuation component and extends the attenuation path of the electromagnetic wave to the greatest extent, and finally causes it to be attenuated in the above transmission path, thereby avoiding the temperature increase of the MPCVD device. Moreover, the dielectric constants of the first attenuation member 1, the second attenuation member 2 and the third attenuation member 3 are not equal to each other, so that the attenuation of electromagnetic waves with a wider bandwidth can be achieved, such as Fig. 9As shown, the electromagnetic wave attenuation component of the utility model can effectively attenuate electromagnetic waves with a frequency of 2.41 GHz to 2.43 GHz, and its electromagnetic wave attenuation frequency band is relatively wide (20 MHz), exceeding the electromagnetic wave attenuation frequency band of the electromagnetic wave attenuation component in the prior art.

[0048] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. An electromagnetic wave attenuation component, comprising a first attenuation element (1), characterized in that: The first attenuation member (1) comprises a first cylinder (11), a second cylinder (12) and a third cylinder (13); the second cylinder (12) is sleeved on the first cylinder (11), and the third cylinder (13) is sleeved on the second cylinder (12); the lower end surfaces of the first cylinder (11), the second cylinder (12) and the third cylinder (13) are flush with each other; and the length of the second cylinder (12) is shorter than the length of the first cylinder (11) and the length of the third cylinder (13).

2. The electromagnetic wave attenuation component according to claim 1, characterized in that: The invention also comprises a second attenuation member (2), the second attenuation member (2) comprising a fourth cylinder (21) and a fifth cylinder (22), the fifth cylinder (22) being sleeved on the fourth cylinder (21), the upper end surface of the fourth cylinder (21) being flush with the upper end surface of the fifth cylinder (22), and the length of the fourth cylinder (21) being shorter than the length of the fifth cylinder (22); the fourth cylinder (21) being sleeved on the first cylinder (11), the fifth cylinder (22) being sleeved on the third cylinder (13), the upper end surface of the third cylinder (13) being in contact with the lower end surface of the fourth cylinder (21).

3. The electromagnetic wave attenuation component according to claim 2, characterized in that: It also comprises a third attenuation member (3), the third attenuation member (3) comprising a sixth cylinder (31), the sixth cylinder (31) being sleeved on the third cylinder (13), the lower end surface of the fifth cylinder (22) being in contact with the upper end surface of the sixth cylinder (31).

4. The electromagnetic wave attenuation component according to claim 3, characterized in that: The invention also comprises a first partition (4), wherein the first partition (4) comprises a seventh cylinder (41) and an eighth cylinder (42), wherein the eighth cylinder (42) is sleeved on the seventh cylinder (41), the upper end surface of the seventh cylinder (41) is flush with the upper end surface of the eighth cylinder (42), and the length of the eighth cylinder (42) is shorter than the length of the seventh cylinder (41); the seventh cylinder (41) is sleeved on the first cylinder (11), and the third cylinder (13) is sleeved on the seventh cylinder (41).

5. The electromagnetic wave attenuation component according to claim 4, characterized in that: The invention also comprises a second partition (5), wherein the second partition (5) comprises a ninth cylinder (51), a tenth cylinder (52) and an eleventh cylinder (53), wherein the tenth cylinder (52) is sleeved on the ninth cylinder (51), and the eleventh cylinder (53) is sleeved on the tenth cylinder (52), the lower end surface of the ninth cylinder (51) and the lower end surface of the tenth cylinder (52) are flush with the lower end surface of the eleventh cylinder (53), and the length of the tenth cylinder (52) is greater than the length of the ninth cylinder (51) and the length of the eleventh cylinder (53); the tenth cylinder (52) is sleeved on the third cylinder (13), and the fifth cylinder (22) is sleeved on the tenth cylinder (52).

6. The electromagnetic wave attenuation component according to claim 5, characterized in that: The first separator (4) and the second separator (5) are made of metal.

7. The electromagnetic wave attenuation component according to any one of claims 3 to 6, characterized in that: The dielectric constant of the first attenuation element (1) is ε1, the dielectric constant of the second attenuation element (2) is ε2, the dielectric constant of the third attenuation element (3) is ε3, and ε1≠ε2; or ε1≠ε3; or ε2≠ε3; or ε1≠ε2≠ε3.

8. The electromagnetic wave attenuation component according to claim 7, characterized in that: The material of the first attenuation component (1) is a first ceramic, the material of the second attenuation component (2) is polytetrafluoroethylene, and the material of the third attenuation component (3) is a second ceramic.

9. The electromagnetic wave attenuation component according to claim 7, characterized in that: The inner wall and the outer wall of the first cylinder (11) are provided with a metal coating, the upper end surface and the lower end surface of the second cylinder (12) are provided with a metal coating, and the inner wall and the outer wall of the third cylinder (13) are provided with a metal coating.

10. An MPCVD device, characterized in that: An electromagnetic wave attenuation component comprising the electromagnetic wave attenuation component according to any one of claims 1 to 9.

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