Energy-saving humidifying device for electronic clean production equipment

Abstract

An energy-saving humidifying device for electronic clean production equipment comprises a main machine box body 1, a humidifying evaporation module and water spraying system 2, a circulating water tank and water supply system 3, a water inlet and supplementing system 4, an alarm system 5 and a water receiving disc 6, and the humidifying evaporation module and water spraying system 2 comprises a humidifying evaporation module 21 and a water spraying system 22. The circulating water tank and water supply system 3 comprises a circulating water tank 31 and a water supply system 32, the water inlet and supplement system 4 comprises a water inlet electromagnetic valve 41 and a water supplement floating ball 42, and the alarm system 5 comprises a high-low liquid level floating ball 51 and an audible and visual alarm 52; the water pan 6 is a drip-proof stainless steel water pan. After being humidified by the water film, clean air in a workshop becomes high-humidity air, and the high-humidity air passes through the high-efficiency filter unit with the fan and is fed into production equipment for humidification.

Description

Technical Field

[0001] The utility model relates to the technical field of energy-saving humidification, in particular to an energy-saving humidification device for electronic clean production equipment. Background Art

[0002] The utility model is used to improve the temperature and humidity problems inside the production equipment. In the absence of the utility model, the air at 22°C / 45%RH in the workshop is sucked into the equipment by the fan high-efficiency filter unit at the top of the production equipment. There are electrical mechanical components such as mechanical parts inside the equipment, which will generate heat when working, causing the temperature inside the equipment to rise to above 26°C. At this time, the relative humidity in the equipment is lower than 35%RH. The static electricity generated by the low humidity cannot meet the process requirements of the exposed silicon wafers or other electronic products inside the equipment for the production environment.

[0003] If the temperature in the workshop is treated to low temperature and high humidity, other areas of the workshop will not be able to meet the process requirements and the operating cost of the workshop air-conditioning system will increase. Utility Model Content

[0004] In order to solve the problems existing in the above-mentioned prior art, the utility model provides a device for energy-saving humidification of electronic clean production equipment, which humidifies the clean air in the workshop through a water film to become high-humidity air, which is then sent into the interior of the production equipment for humidification through a high-efficiency filter unit with a fan.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A device for energy-saving humidification of electronic clean production equipment, the device comprises a mainframe housing 1, the rear side of the mainframe housing 1 is hingedly connected with a flip-type inspection cover 7 through a hinge 101; after the inspection cover 7 is lifted, the humidification evaporation module and the water spraying system 2 can be taken out, which is convenient for maintenance;

[0007] The device includes a humidification evaporation module and a water sprinkling system 2. The humidification evaporation module and the water sprinkling system 2 include a humidification evaporation module 21 and a water sprinkling system 22. The humidification evaporation module 21 is a direct-discharge wet film humidifier with a saturation efficiency of 55%. The working principle of the direct-discharge wet film humidifier is as follows: the filtered water is sent to the sprinkling device at the top of the humidifier through a pipeline. While the water penetrates downward along the wet film material, it is absorbed by the wet film material to form a uniform water film. When dry air passes through the wet film material, the water molecules fully absorb the heat in the air and vaporize and evaporate, thereby increasing the humidity of the air and forming humid air.

[0008] The water sprinkling system 22 is a water sprinkling pipe installed inside the inspection upper flip cover 7 and arranged horizontally; the humidification evaporation module 21 and the water sprinkling system 22 are both connected to the water supply system 32 .

[0009] The device includes a circulating water tank and a water supply system 3, wherein the circulating water tank and the water supply system 3 include a circulating water tank 31 and a water supply system 32. The circulating water tank 31 is a hollow cavity structure made of stainless steel. The mainframe housing 1 is mounted on the top of the mainframe housing 1 through a buckle 102. The water supply system 32 is a micro water pump installed inside the cavity of the circulating water tank 31.

[0010] The device includes a water inlet and replenishment system 4, which includes a water inlet solenoid valve 41 and a water replenishment float 42. The water inlet solenoid valve 41 is connected to the user's water supply pipe, and the water inlet solenoid valve 41 is controlled by the high and low liquid level float 51 and the water replenishment float 42.

[0011] The device includes an alarm system 5 , which includes a high and low liquid level float 51 and an audible and visual alarm 52 ; the high and low liquid level float 51 is installed inside the cavity of the circulating water tank 31 , and the audible and visual alarm 52 is installed outside the main housing 1 .

[0012] The device includes a water receiving tray 6 , which is a drip-proof stainless steel water tray. The water receiving tray 6 is placed as a whole at the bottom of the circulating water tank 31 .

[0013] The utility model also has the following additional technical features:

[0014] As a further specific optimization of the technical solution of the utility model: the circulating water tank and the water supply system 3 are installed as a whole in the water receiving tray 6, the water inlet solenoid valve 41 is fixed at the bottom of the water receiving tray 6 and connected to the water replenishment float 42 of the water inlet replenishment system 4.

[0015] As a further specific optimization of the technical solution of the utility model: the alarm system 5 also includes a conventionally set high-sensitivity water leakage sensing line; the high-sensitivity water leakage sensing line is fixed in the water receiving tray 6 and arranged along the edge of the water receiving tray 6.

[0016] As a further specific optimization of the technical solution of the utility model: the device includes an air supply duct 8, which is fixedly installed and connected to the rear of the mainframe case 1, and the air outlet of the air supply duct 8 is directly buckled on the rear of the mainframe case 1, and the edge is sealed with a clean tape.

[0017] As a further specific optimization of the technical solution of the utility model: the device includes a control panel assembly 9, the control panel assembly 9 is installed on the outside of the main body case 1, and the control panel assembly 9 is electrically connected to the water supply system 32, the water inlet solenoid valve 41, the water replenishment float 42, the high and low liquid level float 51 and the sound and light alarm 52.

[0018] Compared with the prior art, the utility model has the following advantages:

[0019] The utility model can humidify the clean air in the workshop through the water film to change it into high-humidity air, and then send it into the interior of the production equipment for humidification through the high-efficiency filtering unit with a fan.

[0020] The utility model has the functions of energy-saving humidification, cooling, washing and purifying the air, and has the functions of automatic humidification, high water level alarm, automatic water replenishment, water leakage protection sound and light alarm, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the left structure of the utility model;

[0022] Figure 2 It is a schematic diagram of the right side structure of the utility model.

[0023] Explanation of the reference numerals: main housing 1, humidification evaporation module and water sprinkling system 2, circulating water tank and water supply system 3, water inlet and replenishment system 4, alarm system 5, water collecting tray 6, maintenance upper cover 7, air supply duct 8, control panel assembly 9. DETAILED DESCRIPTION

[0024] Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings.

[0025] Example 1

[0026] The device used for energy-saving humidification of electronic clean production equipment solves the long-standing problem that electronic product production equipment cannot achieve humidification, cooling and purification. Figure 1 and Figure 2 As shown:

[0027] The device comprises a mainframe housing 1, and a flip-type inspection cover 7 is hingedly connected to the rear side of the mainframe housing 1 through a hinge 101. After the inspection cover 7 is lifted, the humidification evaporation module and the water spraying system 2 can be taken out, which is convenient for maintenance.

[0028] The device includes a humidification evaporation module and a water sprinkling system 2. The humidification evaporation module and the water sprinkling system 2 include a humidification evaporation module 21 and a water sprinkling system 22. The humidification evaporation module 21 is a direct-discharge wet film humidifier with a saturation efficiency of 55%. The working principle of the direct-discharge wet film humidifier: the filtered water is sent to the water sprinkling device at the top of the humidifier through a pipeline. While the water penetrates downward along the wet film material, it is absorbed by the wet film material to form a uniform water film. When dry air passes through the wet film material, the water molecules fully absorb the heat in the air and vaporize and evaporate, which increases the humidity of the air and forms humid air.

[0029] The water spraying system 22 is a water spraying pipe installed inside the inspection upper flip cover 7 and arranged horizontally. The humidification evaporation module 21 and the water spraying system 22 are both connected to the water supply system 32. The utility model is equipped with a mature, stable, high-water-performance humidification evaporation module and a water spraying system 2 with a service life of more than 10 years and can be repeatedly cleaned and used. The saturation efficiency is 55% and the equipment resistance is less than 15Pa, which meets the working requirements of the high-efficiency fan filter unit.

[0030] The device includes a circulating water tank and a water supply system 3, which includes a circulating water tank 31 and a water supply system 32. The circulating water tank 31 is a hollow cavity structure made of stainless steel. The mainframe case 1 is installed on the top of the mainframe case 1 through a buckle 102. The water supply system 32 is a micro water pump installed inside the cavity of the circulating water tank 31.

[0031] The device includes a water inlet and replenishment system 4, which includes a water inlet solenoid valve 41 and a water replenishment float 42. The water inlet solenoid valve 41 is connected to the user's water supply pipe, and the water inlet solenoid valve 41 is controlled by the high and low liquid level float 51 and the water replenishment float 42. The utility model is a pure water circulating water specification, does not require drainage, and solves the problem of difficult drainage in the workshop.

[0032] The device includes an alarm system 5, which includes a high and low liquid level float 51 and an audible and visual alarm 52. The high and low liquid level float 51 is installed inside the cavity of the circulating water tank 31, and the audible and visual alarm 52 is installed outside the main body box 1. The utility model device is installed on the top of the production equipment, and a water receiving tray 6 is set at the bottom. A high-sensitivity water leakage sensing line and a high and low liquid level float 51 are built in, forming a dual safety control function.

[0033] The device includes a water receiving tray 6 , which is a drip-proof stainless steel water tray. The water receiving tray 6 is placed as a whole at the bottom of the circulating water tank 31 .

[0034] The circulating water tank and the water supply system 3 are integrally installed in the water receiving tray 6 , and the water inlet solenoid valve 41 is fixed at the bottom of the water receiving tray 6 and connected to the water replenishment float 42 of the water inlet replenishment system 4 .

[0035] The alarm system 5 also includes a conventionally arranged high-sensitivity water leakage sensing line, which is fixed in the water receiving tray 6 and arranged along the edge of the water receiving tray 6 .

[0036] The device includes an air supply duct 8, which is fixedly installed and connected to the rear of the mainframe case 1. The air outlet of the air supply duct 8 is directly buckled on the rear of the mainframe case 1, and the edge is sealed with a clean adhesive tape.

[0037] The device includes a control panel assembly 9, which is installed on the outside of the main chassis 1, and the control panel assembly 9 is electrically connected to the water supply system 32, the water inlet solenoid valve 41, the water replenishment float 42, the high and low liquid level float 51 and the sound and light alarm 52.

[0038] Example 2

[0039] The utility model can be applied to various production equipment that need to control the internal temperature and humidity of the equipment, such as photovoltaic cells, electronic products, semiconductor chips and other manufacturing fields.

[0040] The device is fixed above the production equipment and connected to the high-efficiency fan filter unit so that the inhaled air passes through the device first; pure water is connected to the solenoid valve of the device; the 3-pin plug configured by the device is connected to the power supply socket of the high-efficiency fan filter unit (power <20W).

[0041] The utility model can customize different sizes of the utility model products according to the actual equipment size and air volume of the user, and achieve energy-saving humidification, cooling, air washing and purification effects. It saves the operation and maintenance cost of the workshop air conditioning system, and can be started and stopped at any time according to the opening status of the production line. It has excellent energy-saving effects, ensures product quality, improves the yield rate, and improves the operating efficiency of the manufacturing industry.

[0042] The utility model humidifies, cools and washes the air sent into the workshop before sending it into the equipment; the utility model is installed at the entrance of the high-efficiency fan filter unit on the top of the production equipment, the user's pure water enters the circulating water tank through the solenoid valve, and the micro pump supplies the pure water to the dripping water system, and the evenly dripped pure water soaks the humidification evaporation module. At this time, the inhaled 22℃ / 45%RH workshop air is humidified and washed and purified by the water film (pure water forms a flowing water film on the surface of the humidification material to adsorb water-soluble ions in the air), forming low-temperature, high-humidity and clean air to be sent into the production equipment, so as to realize the controllable temperature and humidity inside the equipment; the humidification evaporation module with a 55% saturation efficiency can make the outlet air humidity <80%RH, so as to meet the filter element of the high-efficiency fan filter unit and the humidity requirements inside the equipment.

[0043] The above detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention but merely represents selected embodiments of the present invention.

Claims

1. A device for energy-saving humidification of electronic clean production equipment, the device comprising a main housing (1), characterized in that: The device comprises a humidification evaporation module and a water sprinkling system (2), wherein the humidification evaporation module and the water sprinkling system (2) comprise a humidification evaporation module (21) and a water sprinkling system (22), wherein the humidification evaporation module (21) is a direct-discharge wet film humidifier with a saturation efficiency of 55%; and the water sprinkling system (22) is a water sprinkling pipe installed inside the inspection upper flip cover (7) and arranged in a horizontal direction. The device comprises a circulating water tank and a water supply system (3), wherein the circulating water tank and the water supply system (3) comprise a circulating water tank (31) and a water supply system (32), wherein the water supply system (32) is a micro water pump installed inside the cavity of the circulating water tank (31); The device comprises a water inlet and replenishment system (4), the water inlet and replenishment system (4) comprising a water inlet solenoid valve (41) and a water replenishment float (42), the water inlet solenoid valve (41) is connected to a user's water supply pipe, and the water inlet solenoid valve (41) is controlled by a high and low liquid level float (51) and the water replenishment float (42); The device comprises an alarm system (5), wherein the alarm system (5) comprises a high and low liquid level float (51) and an audible and visual alarm (52); the high and low liquid level float (51) is installed inside the cavity of the circulating water tank (31), and the audible and visual alarm (52) is installed outside the main machine box (1); The device comprises a water receiving tray (6), wherein the water receiving tray (6) is a drip-proof stainless steel water tray, and the water receiving tray (6) is placed as a whole at the bottom of the circulating water tank (31).

2. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The circulating water tank and the water supply system (3) are integrally installed in a water receiving tray (6), and the water inlet solenoid valve (41) is fixed to the bottom of the water receiving tray (6) and connected to the water replenishment float (42) of the water inlet replenishment system (4).

3. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The alarm system (5) also includes a conventionally arranged high-sensitivity water leakage sensing line; the high-sensitivity water leakage sensing line is fixed in the water receiving tray (6) and arranged along the edge of the water receiving tray (6).

4. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The device comprises an air supply duct (8), which is fixedly installed and connected to the rear of the mainframe case (1), and the air outlet of the air supply duct (8) is directly buckled on the rear of the mainframe case (1), and the edge is sealed with clean adhesive tape.

5. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The device comprises a control panel assembly (9), wherein the control panel assembly (9) is mounted on the outside of a main housing (1), and the control panel assembly (9) is electrically connected to the water supply system (32), the water inlet solenoid valve (41), the water replenishment float (42), the high and low liquid level float (51) and the sound and light alarm (52).

6. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The rear side of the mainframe housing (1) is hingedly connected to a flip-type inspection upper cover (7) via a hinge (101).

7. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The humidification evaporation module (21) and the water spraying system (22) are both connected to the water supply system (32).

8. The device for energy-saving humidification of electronic clean production equipment according to claim 1, characterized in that: The circulating water tank (31) is a hollow cavity structure made of stainless steel, and the main engine housing (1) is mounted on the top of the main engine housing (1) via a buckle (102).

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