Cover type annealing furnace with heat insulation and heat preservation functions

Abstract

The utility model discloses a hood-type annealing furnace with heat insulation and heat preservation functions, which comprises a furnace platform, a plurality of uniformly distributed support columns are arranged at the lower end of the furnace platform, an inner furnace hood is arranged at the top end of the furnace platform and connected with the furnace platform through a driving mechanism, an outer furnace hood is sleeved on the outer wall of the inner furnace hood, a burner is arranged on one side of the outer furnace hood, and the burner is connected with the furnace platform through a driving mechanism. A heat discharge pipe is arranged on one side of the outer furnace cover, and a heat preservation groove is formed in the inner furnace cover. The furnace cover has the beneficial effects that the heat preservation groove is formed in the inner furnace cover, after heating is completed, gas in the heat preservation groove is pumped out to enable the heat preservation groove to be vacuum, the heat preservation and heat insulation effects are achieved, the inner furnace cover can be rapidly lifted or closed by arranging the driving mechanism, and workers can replace materials conveniently; and the driving mechanism is driven by a servo motor without manually lifting the furnace cover, so that the use is convenient and labor-saving.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to a hood-type annealing furnace with heat insulation and heat preservation functions. Background Art

[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. Thermal treatments are designed for different effects. Wafers can be heated to activate dopants, convert thin films to thin films or to the wafer substrate interface, densely deposit thin films, change the state of growing thin films, repair implanted damage, move dopants or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] The existing bell-type annealing furnace needs to lift the annealing furnace cover through external equipment when loading and unloading materials, which is inconvenient to operate and affects the efficiency of material replacement.

[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0005] In view of the problems in the related technology, the utility model proposes a hood-type annealing furnace with heat insulation and heat preservation functions to overcome the above technical problems existing in the existing related technology.

[0006] To this end, the specific technical solutions adopted by the utility model are as follows:

[0007] A hood-type annealing furnace with heat insulation and heat preservation functions comprises a furnace table, a plurality of evenly distributed support columns are arranged at the lower end of the furnace table, an inner furnace cover is arranged at the top of the furnace table, the inner furnace cover is connected to the furnace table through a driving mechanism, an outer furnace cover is sleeved on the outer wall of the inner furnace cover, a burner is arranged on one side of the outer furnace cover, a heat exhaust pipe is arranged on one side of the outer furnace cover, and a heat preservation groove is opened in the inner furnace cover.

[0008] Preferably, an air pump is provided on one side of the top of the furnace, and the air pump is connected to the insulation tank through an air filling pipe. An exhaust pump is provided on one side of the top of the furnace, and the exhaust pump is connected to the insulation tank through an exhaust pipe.

[0009] Preferably, shock-absorbing pads are provided at the bottom ends of several evenly distributed support columns.

[0010] Preferably, an annular sealing groove is provided at the bottom end of the inner furnace cover, and an annular sealing gasket matching the annular sealing groove is provided at the top end of the furnace platform.

[0011] Preferably, the driving mechanism includes a driving box provided at the bottom end of the furnace table, a transversely arranged rotating rod is provided in the driving box, a symmetrically arranged screw rod is provided at the top end of the driving box, a symmetrically arranged bevel gear 1 is provided at the outer wall fixing sleeve of the rotating rod, the bottom ends of the two groups of screw rods are provided with bevel gear 2 meshing with the bevel gear 1, the top ends of the two groups of screw rods extend to the outside of the driving box and both pass through the furnace table and the inner furnace cover, the outer wall fixing sleeve of the rotating rod is provided with bevel gear 3, a servo motor is provided at the bottom end of the driving box, and the driving end of the servo motor is provided with bevel gear 4 matching the bevel gear 3.

[0012] Preferably, the screw rod is connected to the drive box via a bearing, a through hole matching the screw rod is provided at the top of the furnace platform, and a threaded hole matching the screw rod is provided at the bottom of the inner furnace cover.

[0013] Preferably, a plurality of evenly distributed guide rods penetrating the inner furnace cover are provided on the top of the furnace platform, and a plurality of evenly distributed heat dissipation holes are provided on one side of the drive box.

[0014] Preferably, a filter screen matching the heat dissipation hole is provided in the heat dissipation hole.

[0015] The beneficial effects of the utility model are as follows: by opening a heat preservation groove in the inner furnace cover, the gas in the heat preservation groove is extracted to make it vacuum after heating is completed, so that it has the effect of heat preservation and heat insulation; by setting a driving mechanism, the inner furnace cover can be quickly lifted or closed, which is convenient for personnel to replace materials; and the driving mechanism is driven by a servo motor without the need for personnel to manually lift the furnace cover, which is convenient and labor-saving to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the overall structure of a bell-type annealing furnace with heat insulation and heat preservation functions according to an embodiment of the utility model;

[0018] Figure 2 It is a top view of a bell-type annealing furnace with heat insulation and heat preservation function according to an embodiment of the utility model;

[0019] Figure 3 This is a front view of a bell-type annealing furnace with heat insulation function according to an embodiment of the utility model;

[0020] Figure 4It is a cross-sectional view of an inner furnace cover and an outer furnace cover in a bell-type annealing furnace with heat insulation and heat preservation function according to an embodiment of the utility model;

[0021] Figure 5 yes Figure 4 A local enlarged schematic diagram of the middle A;

[0022] Figure 6 It is a cross-sectional view of a driving box in a hood-type annealing furnace with heat insulation and heat preservation functions according to an embodiment of the utility model.

[0023] In the figure:

[0024] 1. Furnace table; 2. Support column; 3. Inner furnace cover; 4. Outer furnace cover; 5. Burner; 6. Heat exhaust pipe; 7. Insulation tank; 8. Gas pump; 9. Gas pipe; 10. Air pump; 11. Air exhaust pipe; 12. Shock pad; 13. Annular sealing groove; 14. Annular sealing pad; 15. Drive box; 16. Turning rod; 17. Screw rod; 18. Bevel gear one; 19. Bevel gear two; 20. Bevel gear three; 21. Servo motor; 22. Bevel gear four; 23. Heat dissipation hole. DETAILED DESCRIPTION

[0025] To further illustrate each embodiment, the present invention provides drawings, which are part of the disclosure of the present invention and are mainly used to illustrate the embodiments. They can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, ordinary technicians in the field should be able to understand other possible implementation methods and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0026] According to an embodiment of the utility model, a bell-type annealing furnace with heat insulation and heat preservation functions is provided.

[0027] Embodiment 1;

[0028] like Figure 1-6 As shown, a hood-type annealing furnace with heat insulation and heat preservation functions according to an embodiment of the utility model comprises a furnace table 1, a plurality of evenly distributed support columns 2 are provided at the lower end of the furnace table 1, an inner furnace cover 3 is provided at the top of the furnace table 1, the inner furnace cover 3 is connected to the furnace table 1 through a driving mechanism, an outer furnace cover 4 is provided on the outer wall of the inner furnace cover 3, a burner 5 is provided on one side of the outer furnace cover 4, a heat exhaust pipe 6 is provided on one side of the outer furnace cover 4, and a heat preservation groove 7 is opened in the inner furnace cover 3.

[0029] Embodiment 2:

[0030] like Figure 1-6As shown, a bell-type annealing furnace with heat insulation and heat preservation function according to an embodiment of the utility model comprises a furnace platform 1, wherein the lower end of the furnace platform 1 is provided with a plurality of evenly distributed support columns 2, the top end of the furnace platform 1 is provided with an inner furnace cover 3, the inner furnace cover 3 is connected to the furnace platform 1 through a driving mechanism, the outer wall of the inner furnace cover 3 is provided with an outer furnace cover 4, one side of the outer furnace cover 4 is provided with a burner 5, one side of the outer furnace cover 4 is provided with a heat exhaust pipe 6, and the inner furnace cover 3 is provided with a heat preservation groove 7. An air pump 8 is provided on one side of the top end of the furnace platform 1, and the air pump 8 is connected to the heat preservation groove 7 through an air pipe 9, and an air extraction pump 10 is provided on one side of the top end of the furnace platform 1, and the air extraction pump 10 is connected to the heat preservation groove 7 through an air extraction pipe 11. Shock-absorbing pads 12 are provided at the bottom ends of the evenly distributed support columns 2. An annular sealing groove 13 is provided at the bottom end of the inner furnace cover 3, and an annular sealing pad 14 matching the annular sealing groove 13 is provided at the top end of the furnace platform 1. When heating is performed, the inside of the insulation tank 7 is first inflated by the gas pump 8 and the gas pipe 9, and then the inside of the outer furnace cover 4 is heated by the burner 5. When the temperature inside the inner furnace cover 3 rises, the gas inside the insulation tank 7 is extracted by the exhaust pump 10 and the exhaust pipe 11. At this time, the insulation tank 7 is in a vacuum state. By opening a insulation tank in the inner furnace cover, the gas in the insulation tank is extracted after heating to make it vacuum, so that it has the effect of heat preservation and heat insulation.

[0031] Embodiment three;

[0032] like Figure 1-6As shown, a hood-type annealing furnace with heat insulation and heat preservation functions according to an embodiment of the utility model comprises a furnace table 1, a plurality of evenly distributed support columns 2 are provided at the lower end of the furnace table 1, an inner furnace cover 3 is provided at the top of the furnace table 1, the inner furnace cover 3 is connected to the furnace table 1 through a driving mechanism, an outer furnace cover 4 is provided on the outer wall of the inner furnace cover 3, a burner 5 is provided on one side of the outer furnace cover 4, a heat exhaust pipe 6 is provided on one side of the outer furnace cover 4, and a heat preservation groove 7 is opened in the inner furnace cover 3. The driving mechanism includes a driving box 15 provided at the bottom end of the furnace table 1, a rotating rod 16 arranged transversely in the driving box 15, a screw rod 17 arranged symmetrically in the top end of the driving box 15, a symmetrically arranged helical gear 1 18 arranged on the outer wall fixed sleeve of the rotating rod 16, a helical gear 2 19 meshing with the helical gear 1 18 arranged on the bottom ends of two groups of screw rods 17, the top ends of the two groups of screw rods 17 extend to the outside of the driving box 15 and both pass through the furnace table 1 and the inner furnace cover 3, a helical gear 3 20 arranged on the outer wall fixed sleeve of the rotating rod 16, a servo motor 21 arranged at the bottom end of the driving box 15, and a helical gear 4 22 matching the helical gear 3 20 arranged at the driving end of the servo motor 21. The screw rod 17 is connected to the driving box 15 through a bearing, a through hole matching the screw rod 17 is provided at the top end of the furnace table 1, and a threaded hole matching the screw rod 17 is provided at the bottom end of the inner furnace cover 3. The top of the furnace platform 1 is provided with a plurality of evenly distributed guide rods that penetrate the inner furnace cover 3, and one side of the drive box 15 is provided with a plurality of evenly distributed heat dissipation holes 23. A filter screen matching the heat dissipation hole 23 is provided. When it is necessary to replace materials, the personnel start the servo motor 21 to drive the bevel gear 4 22 to rotate, the bevel gear 4 22 drives the bevel gear 3 20 to rotate, the bevel gear 3 20 drives the rotating rod 16 to rotate, the rotating rod 16 drives the two sets of bevel gears 1 18 to rotate, the bevel gear 1 18 drives the bevel gear 2 19 to rotate, the bevel gear 2 19 drives the screw rod 17 to rotate, the screw rod 17 is threadedly connected with the inner furnace cover 3, and the inner furnace cover 3 is guided and limited by the guide rod, and when the screw rod 17 rotates, it drives the inner furnace cover 3 to move upward, and the inner furnace cover can be quickly lifted or closed by setting a driving mechanism, which is convenient for personnel to replace materials, and the driving mechanism is driven by the servo motor without the need for personnel to manually lift the furnace cover, which is convenient and labor-saving to use.

[0033] In actual application, when heating, firstly, the inside of the heat preservation tank 7 is inflated by the gas pump 8 and the gas pipe 9, and then the inside of the outer furnace cover 4 is heated by the burner 5. When the temperature inside the inner furnace cover 3 rises, the gas inside the heat preservation tank 7 is extracted by the exhaust pump 10 and the exhaust pipe 11. At this time, the heat preservation tank 7 is in a vacuum state. By opening a heat preservation tank in the inner furnace cover, the gas in the heat preservation tank is extracted to make it vacuum after heating, so that it has the effect of heat preservation and heat insulation. When it is necessary to replace the material, the personnel starts the servo motor 21 to drive the bevel gear four 22 to rotate, and the bevel gear The four 22 drives the bevel gear three 20 to rotate, the bevel gear three 20 drives the rotating rod 16 to rotate, the rotating rod 16 drives the two sets of bevel gears 18 to rotate, the bevel gear one 18 drives the bevel gear two 19 to rotate, the bevel gear two 19 drives the screw rod 17 to rotate, the screw rod 17 is threadedly connected with the inner furnace cover 3, and the inner furnace cover 3 is guided and limited by the guide rod, when the screw rod 17 rotates, it drives the inner furnace cover 3 to move upward, and by setting up a driving mechanism, the inner furnace cover can be quickly lifted or closed, which is convenient for personnel to replace materials, and the driving mechanism is driven by a servo motor without the need for personnel to manually lift the furnace cover, which is convenient and labor-saving to use.

[0034] In summary, with the help of the above-mentioned technical scheme of the utility model, by opening an insulation tank in the inner furnace cover, the gas in the insulation tank is extracted to make it vacuum after heating is completed, so that it has the effect of heat preservation and heat insulation. By setting a driving mechanism, the inner furnace cover can be quickly lifted or closed, which is convenient for personnel to replace materials. The driving mechanism is driven by a servo motor and does not require personnel to manually lift the furnace cover, which is convenient and labor-saving to use.

[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A bell-type annealing furnace with heat insulation function, characterized in that: The invention comprises a furnace platform (1), wherein a plurality of evenly distributed support columns (2) are provided at the lower end of the furnace platform (1), an inner furnace cover (3) is provided at the top end of the furnace platform (1), the inner furnace cover (3) is connected to the furnace platform (1) via a driving mechanism, an outer furnace cover (4) is sleeved on the outer wall of the inner furnace cover (3), a burner (5) is provided on one side of the outer furnace cover (4), a heat exhaust pipe (6) is provided on one side of the outer furnace cover (4), and a heat preservation groove (7) is provided in the inner furnace cover (3).

2. The bell-type annealing furnace with heat insulation function according to claim 1, characterized in that: An air pump (8) is provided on one side of the top of the furnace (1), and the air pump (8) is connected to the heat preservation tank (7) through an air filling pipe (9). An air extraction pump (10) is provided on one side of the top of the furnace (1), and the air extraction pump (10) is connected to the heat preservation tank (7) through an air extraction pipe (11).

3. The bell-type annealing furnace with heat insulation function according to claim 1, characterized in that: A shock-absorbing pad (12) is provided at the bottom end of a plurality of evenly distributed support columns (2).

4. The bell-type annealing furnace with heat insulation function according to claim 1, characterized in that: An annular sealing groove (13) is provided at the bottom end of the inner furnace cover (3), and an annular sealing gasket (14) matching the annular sealing groove (13) is provided at the top end of the furnace platform (1).

5. The bell-type annealing furnace with heat insulation function according to claim 1, characterized in that: The driving mechanism comprises a driving box (15) provided at the bottom end of the furnace table (1), a rotating rod (16) arranged transversely in the driving box (15), a symmetrically arranged screw rod (17) provided at the top end of the driving box (15), a symmetrically arranged bevel gear 1 (18) provided on the outer wall fixing sleeve of the rotating rod (16), a bevel gear 2 (19) meshing with the bevel gear 1 (18) provided at the bottom end of two groups of the screw rods (17), the top ends of the two groups of the screw rods (17) extend outside the driving box (15) and both pass through the furnace table (1) and the inner furnace cover (3), a bevel gear 3 (20) provided on the outer wall fixing sleeve of the rotating rod (16), a servo motor (21) provided at the bottom end of the driving box (15), and a bevel gear 4 (22) matching the bevel gear 3 (20) provided at the driving end of the servo motor (21).

6. The bell-type annealing furnace with heat insulation function according to claim 5, characterized in that: The screw rod (17) is connected to the drive box (15) via a bearing, a through hole matching the screw rod (17) is provided at the top end of the furnace platform (1), and a threaded hole matching the screw rod (17) is provided at the bottom end of the inner furnace cover (3).

7. The bell-type annealing furnace with heat insulation function according to claim 6, characterized in that: The top of the furnace platform (1) is provided with a plurality of evenly distributed guide rods that penetrate the inner furnace cover (3), and one side of the drive box (15) is provided with a plurality of evenly distributed heat dissipation holes (23).

8. The bell-type annealing furnace with heat insulation function according to claim 7, characterized in that: The heat dissipation hole (23) is provided with a filter screen matching the heat dissipation hole (23).

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