Automatic film thickness measuring instrument

Abstract

The utility model relates to the technical field of film thickness detection, and discloses an automatic film thickness measuring instrument, which comprises a working table, a support connected to the working table and a liftable detection mechanism arranged on the support and positioned above the working table. A driving mechanism used for driving the film to move in the length direction of the workbench is further arranged on one side of the support, a protruding block is arranged on the workbench, the top of the protruding block protrudes out of the upper surface of the workbench, the top of the protruding block is an arc face, the protruding block corresponds to the detection mechanism in an up-down mode, and the top of the protruding block is in point contact with the bottom of the detection mechanism. According to the utility model, the convex block with the cambered top is arranged on the workbench, and the top of the convex block protrudes out of the upper surface of the workbench, so that the bottom of the detection mechanism is in point contact with the top of the convex block, and a film is suspended from the workbench when being positioned on the convex block, so that the influence of dust on the workbench on a detection result can be well avoided; and the detection accuracy is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film thickness detection, in particular to an automatic film thickness gauge. Background Art

[0002] A film thickness gauge is an instrument used to measure the thickness of a film on the surface of a material. It usually measures the thickness of a film through optical principles, radiation principles, ultrasonic principles, and other principles, and is widely used in semiconductors, electronics, coatings, optical films, and other fields, and can be used for quality control, process monitoring, and research and development.

[0003] CN215893501U discloses an automatic detection and statistical device for the thickness of polyester film, comprising a base, a platform mounted on the base, a frame mounted on the platform, a roller rotatably mounted on the frame that fits the upper surface of the platform, an inductive sensor head close to the upper surface of the platform also mounted on the frame, a fixing clamp is connected along the right end of the platform, and a gap is left between the fixing clamp and the platform for passing the film.

[0004] The above technical solution uses the large friction generated when the sponge roller contacts the film to drive the film spline to slide. The sponge roller can be rotated at a set time interval by starting and stopping the motor or rotating at a speed. During the stop interval of the film spline, the inductive probe quickly contacts the film to measure the thickness, and the test value can be recorded in real time by a computer. However, the above technical solution cannot avoid the influence of dust on the platform on the test results. Even if the above technical solution states in the manual that "the inductive probe can use a flat measuring cap or a large arc measuring cap, which can be replaced according to the measurement requirements", the use of a large arc measuring cap can make the inductive side head contact the workbench point, but because the film is always attached to the upper surface of the workbench, it is also impossible to effectively avoid the influence of dust on the platform on the test results. Utility Model Content

[0005] The utility model aims to solve the above-mentioned problem and provides an automatic film thickness gauge. The film thickness gauge is provided with a convex block with an arc-shaped top on a workbench, and the top of the convex block protrudes from the upper surface of the workbench, so that the bottom of the detection mechanism and the top of the convex block are in point contact. When the film is located on the convex block, it is suspended from the workbench, which can effectively avoid the influence of dust on the workbench on the detection result, thereby improving the accuracy of the detection.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] An automatic film thickness gauge comprises a workbench and a bracket connected to the workbench. A liftable detection mechanism is arranged on the bracket and the detection mechanism is located above the workbench. A driving mechanism for driving the film to move along the length direction of the workbench is also arranged on one side of the bracket. A convex block is arranged on the workbench, the top of the convex block protrudes from the upper surface of the workbench, the top of the convex block is an arc surface, the convex block and the detection mechanism correspond to each other up and down, and the top of the convex block and the bottom of the detection mechanism are in point contact.

[0008] Compared with the prior art, the beneficial effects of the utility model are:

[0009] The utility model provides a convex block with an arc-shaped top on the workbench, and the top of the convex block protrudes from the upper surface of the workbench, so that the bottom of the detection mechanism and the top of the convex block are in point contact, and the film is suspended from the workbench when it is located on the convex block, which can effectively avoid the influence of dust on the workbench on the detection result and improve the accuracy of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 is a stereogram of the automatic film thickness gauge of Example 1;

[0011] Figure 2 is a front view of a workbench of the automatic film thickness gauge of Example 1;

[0012] Figure 3 is a schematic structural diagram of a bracket of an automatic film thickness gauge of Example 1;

[0013] Figure 4 yes Figure 3 The main view;

[0014] Figure 5 yes Figure 3 A top view of

[0015] Figure 6 Schematic diagram of the structure of the bump of the automatic thin film thickness gauge of Example 1.

[0016] The reference numerals are as follows:

[0017] Workbench 1; bracket 2; control console 3; protrusion 11; limit mechanism 12; groove 13; detection mechanism 21; drive mechanism 22; adjustment block 23; connecting plate 24; elastic component 25; stud 111; first rod body 121; second rod body 122; pneumatic telescopic rod 211; detection head 212; sensor 213; drive motor 221; transmission component 222; roller 223; connecting frame 224; flexible sleeve 2231. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Example 1

[0020] refer to Figures 1 to 6 An automatic film thickness gauge includes a workbench 1, a bracket 2 connected to the workbench 1, a liftable detection mechanism 21 is provided on the bracket 2, the detection mechanism 21 is located above the workbench 1, and a driving mechanism 22 for driving the film to move along the length direction of the workbench 1 is also provided on one side of the bracket 2. A convex block 11 is provided on the workbench 1, and the top of the convex block 11 protrudes from the upper surface of the workbench 1, and the top of the convex block 11 is an arc surface. The convex block 11 and the detection mechanism 21 correspond to each other up and down, and the top of the convex block 11 and the bottom of the detection mechanism 21 are in point contact.

[0021] In this design, the operator places the film on the workbench 1, and moves the film along the length direction of the workbench 1 through the driving mechanism 22. During the movement of the film, as the detection mechanism 21 rises and falls, the film is tested for thickness at multiple points. Specifically, when the driving mechanism 22 stops, that is, when the film is stationary, the detection mechanism 21 descends to measure the film thickness, and then the detection mechanism 21 is reset. The driving mechanism 22 continues to drive the film forward a certain distance according to the preset time, and then the above steps are repeated. The operator can set the number of tests per minute according to the actual situation to achieve multi-point thickness measurement of the film.

[0022] Moreover, in this solution, a bump 11 with an arc-shaped top is arranged on the workbench 1, and the top of the bump 11 protrudes from the upper surface of the workbench 1, so that the bottom of the detection mechanism 21 and the top of the bump 11 are in point contact. When the film is located on the bump 11, it is suspended from the workbench 1, which can effectively avoid the influence of dust on the workbench 1 on the detection result and improve the accuracy of the detection.

[0023] Preferably, the top of the bump 11 is a spherical crown structure, the bottom of the bump 11 is provided with a stud 111, the workbench 1 is provided with a groove 13 matching the bump 11, the groove 13 is provided with a threaded hole matching the stud 111 (not shown in the figure), and the bump 11 is detachably connected in the groove 13.

[0024] Specifically, the spherical crown structure can ensure that the upper surface of the bump 11 is a smooth surface, avoiding damage to the film when the film passes through; and the bump 11 is movably and detachably connected to the workbench 1 through the stud 111, which is convenient for the maintenance of the bump 11, and the bump 11 of different heights or different structures can be replaced according to different detection requirements.

[0025] As a further optimization of this embodiment, an adjustment block 23 is provided on the bracket 2 , and the detection mechanism 21 is detachably connected to the adjustment block 23 . The adjustment block 23 can adjust the position of the detection mechanism 21 along the width direction of the workbench 1 .

[0026] Specifically, by adding the adjustment block 23, the compatibility of the film thickness gauge can be improved, and the operator can choose to use different specifications of the detection mechanism 21, which can match the testing requirements of most films, sheets, tapes and other materials that need to be measured on the market, with good compatibility and a wide range of applications. Moreover, after replacing the detection mechanism 21 of different specifications, the adjustment block 23 can ensure that the detection mechanism 21 and the top of the protrusion 11 are in point contact.

[0027] In this embodiment, the detection mechanism 21 includes a pneumatic telescopic rod 211, a sensor 213, and a detection head 212. The pneumatic telescopic rod 211 is detachably connected to the adjustment block 23, and the sensor 213 and the detection head 212 are respectively connected to the top and bottom of the pneumatic telescopic rod 211.

[0028] In actual use, the operator can set the extension frequency of the pneumatic telescopic rod 211 to adjust the number of descents per minute of the detection head 212, and cooperate with the drive mechanism 22 to achieve multi-point thickness measurement. In a preferred embodiment, the sensor 213 can be a stroke sensor, which records the length of the film through the stroke sensor, and the thickness is measured once each time the film passes through the length.

[0029] Preferably, the driving mechanism 22 includes a driving motor 221, a transmission assembly 222, and a roller 223. The roller 223 is rotatably connected to the bracket 2. The driving motor 221 is connected to the bracket 2. The driving motor 221 is connected to the roller 223 through the transmission assembly 222. When in use, the driving motor 221 drives the transmission assembly 222 to move by rotating, and drives the roller 223 to rotate. The roller 223 can be used to roll up the film, or to press the film on the workbench 1 so that the film moves along the length direction of the workbench 1.

[0030] Furthermore, the driving mechanism 22 also includes a connecting frame 224, and the roller 223 is rotatably connected to the connecting frame 224. The connecting frame 224 is hinged on one side of the bracket 2. The bracket 2 is also provided with a horizontally arranged connecting plate 24 and an elastic component 25 connected to the bottom of the connecting plate 24. The lower end of the elastic component 25 is connected to the top of the connecting frame 224.

[0031] It should be noted here that the elastic component 25 can be a spring; if the film is rolled up, the outer diameter of the roller 223 will become larger due to the thickness of the film, and the hinged connecting frame 224 can adapt to this change well. The connecting frame 224 can swing upward as the outer diameter of the roller 223 changes. At the same time, under the action of the elastic component 25, it can provide downward pressure for the roller 223, press the film tightly on the workbench 1, and also facilitate the removal of the wound film after the thickness measurement is completed.

[0032] If the film is moved along the length direction of the workbench 1 by pressing the film onto the workbench 1 , the spring is mainly used to provide downward pressure for the roller 223 , pressing the film onto the workbench 1 , and driving the film forward by the rotation of the roller 223 .

[0033] Optionally, the transmission assembly 222 is a synchronous pulley assembly, the driving motor 221 is connected to the driving wheel of the synchronous pulley assembly, and the roller 223 is connected to the driven wheel of the synchronous pulley assembly. The synchronous pulley assembly has been disclosed in Chinese patent CN109236960A, so the structure of the synchronous pulley assembly is not described in detail in this embodiment. The synchronous pulley assembly can provide efficient power transmission because the driving wheel and the driven wheel can transmit power more effectively under the action of the belt, reducing energy loss.

[0034] Preferably, a soft sleeve 2231 is further included, and the soft sleeve 2231 is sleeved on the roller 223. The soft sleeve 2231 can make the roller 223 and the film in soft contact, so as to prevent the roller 223 from damaging the film.

[0035] In this embodiment, a limiting mechanism 12 is also provided at one end of the workbench 1. The limiting mechanism 12 includes a horizontally arranged first rod body 121 and two vertically arranged second rod bodies 122. The first rod body 121 is connected to one end of the workbench 1, and the second rod body 122 is slidably connected to the first rod body 121. A gap is provided between the second rod bodies 122 for the film to pass through. The second rod body 122 can adjust the size of the gap along the length direction of the first rod body 121.

[0036] In actual use, the operator can adjust the gap between the second rods 122 along the length direction of the first rods 121 to match the gap with the width of the film, thereby ensuring the stability of the film moving along the length direction of the workbench 1 .

[0037] More preferably, a control console 3 is further provided at the bottom of the workbench 1 , and the control console 3 is electrically connected to an external computer device and transmits the detection result of the film in real time.

[0038] When in use, the operator can control the detection mechanism 21 and the driving mechanism 22 through the console 3, and can also adjust the parameters of the detection mechanism 21 and the driving mechanism 22. By electrically connecting the console 3 and the external computer device, the operator can observe the detection results of the film in real time on the external computer device.

[0039] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements or modifications without departing from the principle of the present invention. These improvements or modifications should also be regarded as within the protection scope of the present invention.

Claims

1. An automatic film thickness gauge, comprising a workbench, a bracket connected to the workbench, a detection mechanism that can be raised and lowered is provided on the bracket, the detection mechanism is located above the workbench, and a driving mechanism for driving the film to move along the length direction of the workbench is also provided on one side of the bracket, characterized in that: A convex block is arranged on the workbench, the top of the convex block protrudes from the upper surface of the workbench, the top of the convex block is an arc surface, the convex block corresponds to the detection mechanism up and down, and the top of the convex block is in point contact with the bottom of the detection mechanism.

2. The automatic film thickness gauge according to claim 1, characterized in that: The top of the protrusion is a spherical crown structure, the bottom of the protrusion is provided with a stud, the workbench is provided with a groove matching the protrusion, the groove is provided with a threaded hole matching the stud, and the protrusion is detachably connected in the groove.

3. The automatic film thickness gauge according to claim 1, characterized in that: The bracket is provided with an adjustment block, the detection mechanism is detachably connected to the adjustment block, and the adjustment block can adjust the position of the detection mechanism along the width direction of the workbench.

4. The automatic film thickness gauge according to claim 3, characterized in that: The detection mechanism includes a pneumatic telescopic rod, a sensor, and a detection head. The pneumatic telescopic rod is detachably connected to the adjustment block. The sensor and the detection head are respectively connected to the top and bottom of the pneumatic telescopic rod. The adjustment block can adjust the position of the telescopic rod along the width direction of the workbench.

5. The automatic film thickness gauge according to claim 1, characterized in that: The driving mechanism comprises a driving motor, a transmission assembly, and a roller. The roller is rotatably connected to the bracket. The driving motor is connected to the bracket. The driving motor is connected to the roller via the transmission assembly.

6. The automatic film thickness gauge according to claim 5, characterized in that: The driving mechanism also includes a connecting frame, the roller is rotatably connected to the connecting frame, the connecting frame is hinged on one side of the bracket, and the bracket is also provided with a horizontally arranged connecting plate and an elastic component connected to the bottom of the connecting plate, and the lower end of the elastic component is connected to the top of the connecting frame.

7. The automatic film thickness gauge according to claim 5, characterized in that: The transmission assembly is a synchronous belt pulley assembly, the driving motor is connected to the driving wheel of the synchronous belt pulley assembly, and the rotating roller is connected to the driven wheel of the synchronous belt pulley assembly.

8. The automatic film thickness gauge according to claim 5, characterized in that: It also includes a soft sleeve, which is sleeved on the rotating roller.

9. The automatic film thickness gauge according to claim 1, characterized in that: A limiting mechanism is also provided at one end of the workbench, and the limiting mechanism includes a horizontally arranged first rod and two vertically arranged second rods, the first rod is connected to one end of the workbench, the second rod is slidably connected to the first rod, and a gap is provided between the second rods for the film to pass through, and the second rod can adjust the size of the gap along the length direction of the first rod.

10. The automatic film thickness gauge according to claim 1, characterized in that: A control console is also provided at the bottom of the workbench. The control console is electrically connected to an external computer device and transmits the detection result of the film in real time.

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