Feeding device for exposure machine

Abstract

The utility model provides a feeding device for an exposure machine, which comprises a bottom plate, an exposure machine arranged on the right side of the upper end of the bottom plate, a material box arranged on the left side of the upper end of the bottom plate, a first electric push rod arranged on the bottom wall of the material box, a material pushing plate arranged on the telescopic end of the first electric push rod, and a feeding mechanism arranged on the left side of the upper end of the bottom plate. And a feeding mechanism is arranged at the upper end of the bottom plate. According to the feeding device for the exposure machine, the unfolding distance of the suction cups on the two sides can be flexibly adjusted, the layout of the suction cups can be adjusted according to the sizes and the weights of different material plates, it is ensured that the material plates are evenly adsorbed, and the safety and the reliability of the feeding process are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of exposure machine feeding devices, in particular to a feeding device for an exposure machine. Background Art

[0002] The exposure machine is a precision equipment widely used in industries such as semiconductor manufacturing, printed circuit board (PCB) production, liquid crystal display (LCD) and touch screen. It is mainly used to accurately transfer patterns on photoresist or other photosensitive materials to substrates. In these processes, the exposure machine requires a precise and stable loading device to load and position the substrates or carriers to be processed. The suction cups on the existing loading devices of exposure machines cannot adjust the suction cup spacing according to the size of the material plate to achieve stable adsorption and loading.

[0003] For example, the utility model with announcement number CN211495988U discloses a loading device for an exposure machine, in which suction cups are evenly arranged on the bottom surface of a fixed plate. In this patent scheme, the material plate is adsorbed by the suction cups and then fed to the exposure machine. The suction cups cannot flexibly expand the distance between the suction cups on both sides according to the area of ​​the material plate to adapt to material plates of different sizes or shapes. The suction cups with fixed spacing cannot evenly cover the edges or effective contact areas of the material plate, resulting in uneven adsorption force, which increases the risk of the material plate falling during the loading process. Utility Model Content

[0004] In view of this, the utility model aims to address the deficiencies in the prior art and provides a loading device for an exposure machine, which can flexibly adjust the expansion distance of the suction cups on both sides and can adjust the suction cup layout according to the size and weight of different material plates to ensure that the material plates are evenly adsorbed, thereby improving the safety and reliability of the loading process.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is: a loading device for an exposure machine, comprising a base plate, an exposure machine is arranged on the right side of the upper end of the base plate, a material box is arranged on the left side of the upper end of the base plate, an electric push rod 1 is arranged on the bottom wall of the material box, a push plate is arranged on the telescopic end of the electric push rod 1, a loading mechanism is arranged on the left side of the upper end of the base plate, and a feeding mechanism is arranged on the upper end of the base plate. The feeding mechanism comprises a connecting frame arranged on the upper end of the base plate, a slider is arranged for sliding inside the connecting frame, an electric push rod 2 is arranged at the lower end of the slider, a screw rod is arranged for rotating inside the connecting frame, the slider is threadedly connected to the screw rod, a connecting plate is arranged on the telescopic end of the electric push rod 2, and the left and right sides of the connecting plate are respectively slidably connected with sliding frames, and two suction cups are respectively arranged at the lower ends of the two sliding frames. The upper ends of the frames are rotatably connected with connecting rods, and a rotating frame is rotatably connected between the rear sides of the two connecting rods. An electric drive unit 1 for driving the screw rod to rotate is arranged on the left side of the upper end of the connecting frame, and an electric drive unit 2 for driving the rotating frame to move is arranged on the upper end of the connecting plate. The electric drive unit 1 includes a motor arranged on the left side of the upper end of the connecting frame, and the output shaft of the motor is connected to the left end of the screw rod through a coupling. The electric drive unit 2 includes an electric push rod 3 arranged on the upper end of the connecting plate, and the telescopic end of the electric push rod 3 is connected to the rear end of the rotating frame. The feeding mechanism includes a frame arranged on the upper end of the bottom plate, and a plurality of rollers are rotatably connected inside the frame. The upper end of the bottom plate is provided with two electric push rods 4 corresponding to the front and rear positions, and push plates are arranged on the telescopic ends of the two electric push rods 4, and the two push plates are installed in conjunction with a frame.

[0006] As a further improvement of the utility model, a control panel is arranged at the upper end of the bottom plate, and the electric push rod 1, the electric push rod 2, the electric push rod 3, the electric push rod 4 and the motor are all electrically connected to the control panel.

[0007] As a further improvement of the utility model, mounting holes are provided at the four corners of the bottom plate.

[0008] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0009] First, by placing the material sheet on the pushing plate inside the material box, and then connecting the suction cup to the external air pump, and then by adjusting the operation of the electric push rod 1, the telescopic end drives the material sheet on the pushing plate to move upward, and then by adjusting the operation of the electric push rod 2, the telescopic end drives the suction cup on the connecting plate to move downward and contact the material sheet, and then by controlling the external air pump to open the vacuum and cooperate with the suction cup to suck up the material sheet, and then by adjusting the operation of the electric push rod 2, the suction cup loading plate moves upward, and then by adjusting the operation of the motor, the output shaft rotates to drive the screw to rotate, and then drives the slider to move, so that the material sheet moves to the upper end of the roller, and the material sheet is quickly loaded to the specified position.

[0010] Secondly, by turning off the air pump, the material sheet falls to the top of the roller, and then the electric push rod 2 is controlled to move upward, and then the push plate is driven to move by adjusting the telescopic end of the electric push rod 4, and the material sheet on the roller is pushed to the top of the exposure machine to quickly complete the feeding.

[0011] Thirdly, by regulating the operation of the electric push rod, the telescopic end drives the rotating frame to move forward, causing the connecting rod to expand, driving the suction cups on the sliding frame to move away from each other, and expanding the distance between the suction cups on both sides. This allows for more comprehensive and stable adsorption and loading of large material sheets, and the flexibly adjustable deployment distance of the suction cups on both sides. The suction cup layout can be adjusted according to the size and weight of different material sheets to ensure that the material sheets are evenly adsorbed, thereby improving the safety and reliability of the loading process.

[0012] Fourthly, the loading device can be installed and fixed through the mounting holes on the bottom plate, so that the loading device can run more stably. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0014] Figure 1 It is a structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the enlarged structure of point A of the utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the feeding mechanism of the utility model;

[0017] Figure 4 It is a front sectional structural schematic diagram of the utility model.

[0018] In the figure: 101, bottom plate; 102, mounting hole; 103, exposure machine; 104, material box; 105, electric push rod 1; 106, push plate; 201, motor; 202, slider; 203, screw rod; 204, connecting rod; 205, sliding frame; 206, electric push rod 2; 207, connecting plate; 208, suction cup; 209, rotating frame; 210, electric push rod 3; 211, connecting frame; 301, electric push rod 4; 302, push plate; 303, frame; 304, roller; 401, control panel. DETAILED DESCRIPTION

[0019] In order to better understand the present invention, the content of the present invention is further clearly described below in conjunction with the embodiments, but the protection content of the present invention is not limited to the following embodiments. In the following description, a large number of specific details are given in order to provide a more thorough understanding of the present invention. However, it is obvious to those skilled in the art that the present invention can be implemented without one or more of these details.

[0020] like Figure 1 , 2 As shown in Figures 3 and 4, a loading device for an exposure machine includes a base plate 101, an exposure machine 103 is arranged on the right side of the upper end of the base plate 101, a material box 104 is arranged on the left side of the upper end of the base plate 101, an electric push rod 105 is arranged on the bottom wall of the material box 104, a pushing plate 106 is arranged on the telescopic end of the electric push rod 105, a loading mechanism is arranged on the left side of the upper end of the base plate 101, and a feeding mechanism is arranged on the upper end of the base plate 101.

[0021] like Figure 1 , 2 As shown in , 3 and 4, the feeding mechanism includes a connecting frame 211 arranged at the upper end of the bottom plate 101, a slider 202 is slidably arranged inside the connecting frame 211, an electric push rod 206 is arranged at the lower end of the slider 202, a screw rod 203 is rotatably arranged inside the connecting frame 211, the slider 202 is threadedly connected to the screw rod 203, a connecting plate 207 is arranged on the telescopic end of the electric push rod 206, and sliding frames 205 are slidably connected to the left and right sides of the connecting plate 207, respectively, two suction cups 208 are arranged at the lower ends of the two sliding frames 205, and the upper ends of the two sliding frames 205 are rotatably connected to the connecting rod 203. 04, a rotating frame 209 is rotatably connected between the rear sides of the two connecting rods 204, an electric drive unit 1 for driving the screw rod 203 to rotate is arranged on the left side of the upper end of the connecting frame 211, and an electric drive unit 2 for driving the rotating frame 209 to move is arranged on the upper end of the connecting plate 207. The electric drive unit 1 includes a motor 201 arranged on the left side of the upper end of the connecting frame 211, and the output shaft of the motor 201 is connected to the left end of the screw rod 203 through a coupling. The electric drive unit 2 includes an electric push rod 3 210 arranged on the upper end of the connecting plate 207, and the telescopic end of the electric push rod 3 210 is connected to the rear end of the rotating frame 209.

[0022] like Figure 1 , 4 As shown, the feeding mechanism includes a frame 303 arranged at the upper end of the base plate 101, and a plurality of rollers 304 are rotatably connected inside the frame 303. Two electric push rods 301 corresponding to the front and rear positions are arranged at the upper end of the base plate 101, and push plates 302 are arranged on the telescopic ends of the two electric push rods 301. The two push plates 302 are installed in conjunction with a frame 303.

[0023] like Figure 1 As shown, a control panel 401 is disposed at the upper end of the base plate 101 , and the electric push rod 1 105 , the electric push rod 206 , the electric push rod 3 210 , the electric push rod 4 301 and the motor 201 are all electrically connected to the control panel 401 .

[0024] By placing the material sheet on the push plate 106 inside the material box 104, and then connecting the suction cup 208 to the external air pump, and then controlling the operation of the electric push rod 105 through the control panel 401, the telescopic end drives the material sheet on the push plate 106 to move upward, and then controlling the operation of the electric push rod 206 through the control panel 401, the telescopic end drives the suction cup 208 on the connecting plate 207 to move downward to contact the material sheet, and then controlling the external air pump to open the air pump to cooperate with the suction cup 208 to suck up the material sheet, and then controlling the operation of the electric push rod 206 through the control panel 401, so that The suction cup 208 loads the material plate upward, and then the control panel 401 is used to control the operation of the motor 201. The output shaft rotates to drive the screw 203 to rotate, and then drives the slider 202 to move, so that the material plate moves to the upper end of the roller 304. Then, by turning off the air pump, the material plate falls above the roller 304, and then the control panel 401 controls the electric push rod 206 to move upward. Then, the control panel 401 controls the electric push rod 4 301 to run the telescopic end to drive the push plate 302 to move, and the material plate on the roller 304 is pushed to the top of the exposure machine 103 to complete the feeding.

[0025] When it is necessary to load a sheet material with a larger area, the control panel 401 is used to control the operation of the electric push rod 3 210, and the telescopic end drives the rotating frame 209 to move forward, so that the connecting rod 204 expands, driving the suction cups 208 on the sliding frame 205 to move away from each other, thereby expanding the distance between the suction cups 208 on both sides, so that the large sheet material can be adsorbed and loaded more comprehensively and stably.

[0026] According to another embodiment of the present invention, Figure 1 As shown, four corners of the bottom plate 101 are provided with mounting holes 102 , and the loading device can be mounted and fixed through the mounting holes 102 on the bottom plate 101 .

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Other modifications or equivalent substitutions made to the technical solution of the utility model by ordinary technicians in this field should be included in the scope of the claims of the utility model as long as they do not depart from the spirit and scope of the technical solution of the utility model.

Claims

1. A loading device for an exposure machine, comprising a bottom plate (101), characterized in that: An exposure machine (103) is arranged on the right side of the upper end of the base plate (101), a material box (104) is arranged on the left side of the upper end of the base plate (101), an electric push rod (105) is arranged on the bottom wall of the material box (104), a push plate (106) is arranged on the telescopic end of the electric push rod (105), a loading mechanism is arranged on the left side of the upper end of the base plate (101), and a feeding mechanism is arranged on the upper end of the base plate (101).

2. A loading device for an exposure machine as claimed in claim 1, characterized in that: The feeding mechanism comprises a connecting frame (211) arranged at the upper end of the bottom plate (101), a slider (202) is slidably arranged inside the connecting frame (211), a second electric push rod (206) is arranged at the lower end of the slider (202), a screw rod (203) is rotatably arranged inside the connecting frame (211), the slider (202) is threadedly connected to the screw rod (203), a connecting plate (207) is arranged on the telescopic end of the second electric push rod (206), and the left and right sides of the connecting plate (207) are respectively slidably connected to the connecting plate (207). There is a sliding frame (205), the lower ends of the two sliding frames (205) are respectively provided with two suction cups (208), the upper ends of the two sliding frames (205) are both rotatably connected with connecting rods (204), a rotating frame (209) is rotatably connected between the rear sides of the two connecting rods (204), an electric drive unit 1 for driving the screw rod (203) to rotate is provided on the left side of the upper end of the connecting frame (211), and an electric drive unit 2 for driving the rotating frame (209) to move is provided on the upper end of the connecting plate (207).

3. A loading device for an exposure machine as claimed in claim 2, characterized in that: The electric drive unit 1 comprises a motor (201) arranged on the left side of the upper end of the connecting frame (211), and the output shaft of the motor (201) is connected to the left end of the screw rod (203) through a coupling.

4. A loading device for an exposure machine as claimed in claim 2, characterized in that: The electric drive unit 2 comprises an electric push rod 3 (210) arranged at the upper end of the connecting plate (207), and the telescopic end of the electric push rod 3 (210) is connected to the rear end of the rotating frame (209).

5. The loading device for an exposure machine according to claim 4, characterized in that: The feeding mechanism comprises a frame (303) arranged at the upper end of the base plate (101), a plurality of rollers (304) are rotatably connected inside the frame (303), two electric push rods (301) corresponding to front and rear positions are arranged at the upper end of the base plate (101), push plates (302) are arranged on the telescopic ends of the two electric push rods (301), and the two push plates (302) are installed in cooperation with one frame (303).

6. The loading device for an exposure machine according to claim 1, characterized in that: The four corners of the bottom plate (101) are each provided with mounting holes (102).

7. A loading device for an exposure machine as claimed in claim 5, characterized in that: A control panel (401) is provided at the upper end of the base plate (101), and electric push rod 1 (105), electric push rod 2 (206), electric push rod 3 (210), electric push rod 4 (301) and the motor (201) are all electrically connected to the control panel (401).

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