Tail gas treatment device with buffering function
By installing a buffer tank and a exhaust gas treatment tank in the exhaust gas treatment device, combined with the design of the spray assembly and the return pipe, the problem of exhaust gas interchange is solved, the exhaust gas purification treatment and the recycling of alkali liquid are realized, and the product quality and effective utilization of resources are ensured.
Patent Information
- Application Number
- CN202421452676.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-24
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-06-24
AI Technical Summary
In the prior art, the problem of exhaust gases intermittently in the production process of electronic grade hydrofluoric acid causes dirtier exhaust gases to rush to the finished product end, contaminating product quality.
A exhaust gas treatment device with buffering function is designed. By installing a buffer tank between the exhaust branch and the exhaust main pipe, and connecting the exhaust gas treatment tank at the outlet end of the buffer tank, the exhaust gas purification and recycling of alkali liquid are achieved by using the spray assembly and the return pipe.
It effectively avoids the intercourse between exhaust gases, prevents dirty exhaust gas from polluting the finished product system, realizes the purification and treatment of exhaust gases and the reuse of alkali liquid, and reduces environmental pollution and resource waste.
Smart Images

Figure CN222816574U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of hydrofluoric acid tail gas treatment, in particular to a tail gas treatment device with a buffering function. Background Art
[0002] Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas, a clear, colorless, fuming corrosive liquid. Hydrofluoric acid is irritating and corrosive to clothing, skin, eyes, respiratory tract, and digestive tract mucosa. Fluoride ions enter the blood or tissues and combine with their calcium and magnesium ions to become insoluble or slightly soluble calcium fluoride and magnesium fluoride. If the amount is large, it will directly block blood vessels and directly or indirectly affect the functions of the central nervous system and cardiovascular system. Appropriate protective measures need to be taken during the production process of hydrofluoric acid.
[0003] Existing electronic-grade hydrofluoric acid needs to discharge tail gas (mainly some non-condensable gases and light component impurities) during the production process. All the collected tail gas is collected through pipelines and collected in the same tail gas system for treatment. It is discharged after the treatment meets the emission standards. Because there are many sources of tail gas, there are both raw material and product ends. However, in the actual emission process, even if the exhaust fan air volume is large enough, there will still be the problem of tail gas leakage because of the shared pipeline. If the tail gas (dirtier) at the raw material end leaks to the finished product end, it will cause pollution to the product quality.
[0004] In view of this, the present application proposes an exhaust gas treatment device with a buffering function to solve the problem of exhaust gas crosstalk. Utility Model Content
[0005] The purpose of the utility model is to solve at least one of the technical problems existing in the prior art and to provide an exhaust gas treatment device with a buffering function.
[0006] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is as follows: an exhaust gas treatment device with a caching function, comprising an exhaust gas main pipe, a plurality of exhaust gas branch pipes are connected to the exhaust gas main pipe, a buffer tank is installed between the exhaust gas branch pipe and the exhaust gas main pipe, the air inlet pipe of the buffer tank is connected to the exhaust gas branch pipe, the air outlet end of the buffer tank is connected to the exhaust gas main pipe, and the air outlet end of the exhaust gas main pipe is connected to the exhaust gas treatment tank, and the exhaust gas treatment tank is provided with a spray assembly for absorbing exhaust gas; the exhaust gas treatment tank is connected to a drain pipe at the drain port, the drain pipe is connected to a reflux pipe, and the end of the reflux pipe is connected to the liquid inlet of the spray assembly.
[0007] Furthermore, a reflux pump is installed on the reflux pipe, and the reflux pump is connected to the liquid inlet end of the spray assembly.
[0008] Furthermore, the air inlet end of the tail gas branch pipe is connected to the raw material reaction tank and the finished product tank; a second one-way valve is installed between the finished product tank and the tail gas branch pipe.
[0009] Furthermore, a first one-way valve is installed between the raw material reaction tank and the tail gas branch pipe.
[0010] Furthermore, a liquid concentration sensor is installed on the exhaust gas treatment tank to detect the liquid concentration in the exhaust gas treatment tank.
[0011] Furthermore, the spray assembly includes a spray head, the spray head is connected to an alkali solution storage tank, and a liquid extraction pump is installed on a pipeline connecting the alkali solution storage tank and the spray head.
[0012] Furthermore, the nozzle is installed on the top of the exhaust gas treatment tank and is trumpet-shaped toward one end of the exhaust gas treatment tank.
[0013] Furthermore, a heat exchange mechanism is installed in the buffer tank, and the heat exchange mechanism is a cooling water circulation mechanism.
[0014] Furthermore, the cooling water circulation mechanism includes a water tank, a circulating self-priming pump is installed at the water outlet of the water tank, a heat exchange tube is connected to the circulating self-priming pump, and the water outlet end of the heat exchange tube is connected to the water tank.
[0015] Furthermore, the heat exchange tube is spirally shaped and arranged inside the buffer tank.
[0016] Compared with the prior art, the technical solution of this application has the following beneficial effects:
[0017] 1. This application solves the problem of exhaust gas cross-flow by installing a buffer tank between the exhaust branch pipe and the exhaust main pipe, so as to prevent the exhaust gas from flowing back to the finished product system and causing pollution to the product even if the system pressure is momentarily unbalanced.
[0018] 2. In the present application, the exhaust gas treatment tank is connected to the gas outlet end of the buffer tank. The exhaust gas treatment tank is provided with a spray assembly for absorbing the exhaust gas, so that the exhaust gas can be purified and treated to avoid exhaust gas pollution of the environment. In addition, by installing a liquid concentration sensor and a reflux pipe on the discharge pipe of the exhaust gas treatment tank, the alkali solution can be reused to effectively avoid the waste of the alkali solution. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic structural diagram of an exhaust gas treatment device with a cache function in a preferred embodiment of the utility model.
[0020] Figure numerals: 1. tail gas main pipe; 2. tail gas branch pipe; 3. buffer tank; 4. tail gas treatment tank; 5. drain pipe; 6. reflux pipe; 7. reflux pump; 8. raw material reaction tank; 9. finished product tank; 10. nozzle; 11. alkali solution storage tank; 12. liquid pump; 13. water tank; 14. circulating self-priming pump; 15. heat exchange tube; 16. liquid concentration sensor. DETAILED DESCRIPTION
[0021] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.
[0022] Reference Figure 1 As shown, a preferred embodiment of the utility model is an exhaust gas treatment device with a caching function, comprising an exhaust gas main pipe 1, to which a plurality of exhaust gas branch pipes 2 are connected, and a buffer tank 3 is installed between the exhaust gas branch pipe 2 and the exhaust gas main pipe 1, so as to solve the problem of exhaust gas mutual crosstalk, and avoid that even when the system pressure is momentarily unbalanced, the exhaust gas will not flow back to the finished product system to pollute the product; the air inlet pipe of the buffer tank 3 is connected to the exhaust gas branch pipe 2, the air outlet end of the buffer tank 3 is connected to the exhaust gas main pipe 1, and the air outlet end of the exhaust gas main pipe 1 is connected to an exhaust gas treatment tank 4, and a spray assembly for absorbing exhaust gas is provided on the exhaust gas treatment tank 4, so that the exhaust gas can be purified and treated to avoid exhaust gas polluting the environment; the exhaust gas treatment tank 4 is connected to a drain pipe 5 at the liquid discharge port, and the drain pipe 5 is connected to a reflux pipe 6, and the end of the reflux pipe 6 is connected to the liquid inlet of the spray assembly, so that the alkali solution can be reused, effectively avoiding the waste of alkali solution.
[0023] As a preferred embodiment of the utility model, it may also have the following additional technical features: a reflux pump 7 is installed on the reflux pipe 6, and the reflux pump 7 is connected to the liquid inlet end of the spray assembly, thereby realizing the recycling of the alkali solution and effectively avoiding the waste of the alkali solution.
[0024] In this embodiment, the inlet end of the tail gas branch pipe 2 is connected to the raw material reaction tank 8 and the finished product tank 9; a first one-way valve is installed between the raw material reaction tank 8 and the tail gas branch pipe 2; and a second one-way valve is installed between the finished product tank 9 and the tail gas branch pipe 2. Thus, the tail gas will not be diverted back to the reaction tank 8 and the finished product tank 9.
[0025] In this embodiment, the spray assembly includes a spray head 10, the spray head 10 is connected to an alkali solution storage tank 11, and a liquid pump 12 is installed on the pipeline connecting the alkali solution storage tank 11 and the spray head 10; the spray head 10 is installed on the top of the exhaust gas treatment tank 4, and is horn-shaped at one end facing the exhaust gas treatment tank 4. In this way, the alkali solution can fully contact the exhaust gas and neutralize the exhaust gas.
[0026] In this embodiment, a liquid concentration sensor 16 is also included. The liquid concentration sensor 16 is installed on the tail gas treatment tank 4 to detect the liquid concentration in the tail gas treatment tank 4. When the liquid concentration exceeds a preset value, the liquid pump 12 is turned on to inject alkali liquid into the tail gas treatment tank 4 so that it can continuously neutralize the tail gas. When the concentration reaches a certain value, the reflux pump 7 and the liquid pump 12 are turned off to discharge the waste liquid, thereby effectively achieving tail gas treatment.
[0027] In this embodiment, a heat exchange mechanism is installed in the buffer tank 3, and the heat exchange mechanism is a cooling water circulation mechanism, which includes a water storage tank 13, and a circulating self-priming pump 14 is installed at the water outlet of the water storage tank 13, and a heat exchange pipe 15 is connected to the circulating self-priming pump 14, and the water outlet end of the heat exchange pipe 15 is connected to the water storage tank 13; the heat exchange pipe 15 is spiral and arranged inside the buffer tank 3. In this way, the exhaust gas is cooled, the pressure in the buffer tank is reduced, and part of the exhaust gas is cooled.
[0028] The working principle of the utility model is: in order to solve the problem of exhaust gas cross-talk, a 1m 3 The buffer tank 3 of the system, all the tail gas of the system is first introduced into the buffer tank 3 separately through the pipeline, and then introduced into the tail gas treatment tank 4 through the buffer tank 3. In this way, when the system pressure is unbalanced instantly, there is a buffer storage tank, and the tail gas will not flow back to the finished product system to pollute the product. The device is provided with a controller, which is used to control the working state of the liquid concentration sensor 16, the reflux pump 7, the liquid pump 12, and the circulating self-priming pump 14. The circuit connection can be realized according to the existing technology, and this embodiment will not be repeated one by one.
[0029] Under the premise that no conflict occurs, those skilled in the art may freely combine and superimpose the above-mentioned additional technical features.
[0030] It is understood that the present invention is described by some embodiments, and those skilled in the art are aware that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.
Claims
1. An exhaust gas treatment device with a buffering function, characterized in that: It includes an exhaust main pipe, which is connected to a plurality of exhaust branch pipes, a buffer tank is installed between the exhaust branch pipe and the exhaust main pipe, the air inlet pipe of the buffer tank is connected to the exhaust branch pipe, the air outlet end of the buffer tank is connected to the exhaust main pipe, and the air outlet end of the exhaust main pipe is connected to an exhaust treatment tank, and the exhaust treatment tank is provided with a spray assembly for absorbing exhaust gas; the exhaust gas treatment tank is connected to a drain pipe at the drain port, the drain pipe is connected to a reflux pipe, and the end of the reflux pipe is connected to the liquid inlet of the spray assembly.
2. The exhaust gas treatment device with a buffering function according to claim 1, characterized in that: A reflux pump is installed on the reflux pipe, and the reflux pump is connected to the liquid inlet end of the spray assembly.
3. The exhaust gas treatment device with a buffering function according to claim 1, characterized in that: The air inlet end of the tail gas branch pipe is connected with a raw material reaction tank and a finished product tank.
4. The exhaust gas treatment device with a buffering function according to claim 3 is characterized in that: A first one-way valve is installed between the raw material reaction tank and the tail gas branch pipe; a second one-way valve is installed between the finished product tank and the tail gas branch pipe and also includes a liquid concentration sensor.
5. The exhaust gas treatment device with a buffering function according to claim 4 is characterized in that: The liquid concentration sensor is installed on the tail gas treatment tank and is used to detect the liquid concentration in the tail gas treatment tank.
6. The exhaust gas treatment device with a buffering function according to claim 1, characterized in that: The spray assembly comprises a spray head, the spray head is connected to an alkali solution storage tank, and a liquid extraction pump is installed on a pipeline connecting the alkali solution storage tank and the spray head.
7. The exhaust gas treatment device with a buffering function according to claim 6, characterized in that: The nozzle is installed on the top of the tail gas treatment tank and is trumpet-shaped toward one end of the tail gas treatment tank.
8. The exhaust gas treatment device with a buffering function according to claim 1, characterized in that: A heat exchange mechanism is installed in the buffer tank, and the heat exchange mechanism is a cooling water circulation mechanism.
9. The exhaust gas treatment device with a buffering function according to claim 8, characterized in that: The cooling water circulation mechanism comprises a water storage tank, a circulating self-priming pump is installed at the water outlet of the water storage tank, a heat exchange tube is connected to the circulating self-priming pump, and the water outlet end of the heat exchange tube is connected to the water storage tank.
10. The exhaust gas treatment device with a buffering function according to claim 9, characterized in that: The heat exchange tube is spiral-shaped and arranged inside the buffer tank.