Nozzle moisturizing device and coating equipment

Abstract

The utility model discloses a nozzle moisturizing device and coating equipment, the nozzle moisturizing device comprises a moisturizing box body used for containing moisturizing liquid and a nozzle matched with the moisturizing box body, the moisturizing box body comprises a moisturizing channel and an opening communicated with the moisturizing channel, and the nozzle comprises a liquid spraying channel; when the nozzle is mounted at the opening, the liquid spraying channel is communicated with the moisturizing channel; and the high-viscosity photoresist in the liquid spraying channel is moisturized through the volatility of the moisturizing liquid.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a nozzle moisturizing device and coating equipment. Background Art

[0002] The coating machine is a very important equipment in wafer processing. The stability of coating will affect the yield of the product. The photoresist used for coating usually has a high viscosity. If the nozzle used for coating is not used for a period of time, the photoresist inside the nozzle will become dry and hard. When it is used again, it will cause coating abnormalities and affect the product yield. Therefore, the nozzle will be moisturized when not in use.

[0003] In the prior art, the relevant moisturizing liquid is usually heated and sprayed so that the gas wets the nozzle to ensure that the photoresist in the nozzle has humidity and does not dry out. However, a large amount of gas is sprayed, which causes a lot of waste and affects the surrounding environment; or the nozzle is placed directly in the moisturizing liquid, which can easily lead to excessive infiltration and affect the composition of the photoresist. Utility Model Content

[0004] One of the purposes of the utility model is to provide a nozzle moisturizing device to solve the technical problems in the prior art that the nozzle moisturizing device is wasteful, pollutes the surrounding air and affects the photoresist composition.

[0005] One of the purposes of the utility model is to provide a coating device.

[0006] In order to achieve one of the purposes of the above-mentioned utility model, one embodiment of the utility model provides a nozzle moisturizing device, including: a moisturizing box body for containing moisturizing liquid and a nozzle cooperating with the moisturizing box body, the moisturizing box body includes a moisturizing channel and an opening connected to the moisturizing channel, and the nozzle includes a liquid spraying channel; when the nozzle is installed to the opening, the liquid spraying channel is connected to the moisturizing channel.

[0007] As a further improvement of an embodiment of the utility model, the moisturizing box body includes a cover body covering the moisturizing channel, the opening passes through the cover body, and the size of the opening is adapted to the nozzle.

[0008] As a further improvement of an embodiment of the utility model, the moisturizing channel includes a moisturizing liquid overflow port arranged on the top thereof, the moisturizing liquid overflow port is spaced apart from the cover body, and the moisturizing liquid overflow port is 5mm to 10mm away from the cover body.

[0009] As a further improvement of an embodiment of the utility model, the moisturizing channel includes a moisturizing liquid inlet, and the moisturizing liquid inlet is provided with a control valve, and the control valve is opened or closed at a preset time interval to control the moisturizing liquid inlet to open or close.

[0010] As a further improvement of one embodiment of the utility model, the moisturizing channel includes a moisturizing liquid overflow port arranged on the top thereof, the moisturizing box body includes a drainage channel, the moisturizing liquid overflow port connects the moisturizing channel and the drainage channel, and the bottom of the moisturizing box body is provided with a drainage port connected to the drainage channel.

[0011] As a further improvement of an embodiment of the utility model, a plurality of the moisturizing channels are evenly arranged around the periphery of the drainage channel, and the plurality of the moisturizing channels are independent of each other.

[0012] As a further improvement of an embodiment of the utility model, the liquid discharge port has a conical shape that is wider at the top and narrower at the bottom.

[0013] As a further improvement of one embodiment of the utility model, the moisturizing box body comprises a bottom wall, an outer peripheral wall, an inner peripheral wall coaxial with the outer peripheral wall and arranged at intervals, and a plurality of partition walls connecting the outer peripheral wall and the inner peripheral wall; the inner peripheral wall is arranged to form a drainage channel, and a plurality of moisturizing channels are formed between the outer peripheral wall and the inner peripheral wall.

[0014] As a further improvement of one embodiment of the utility model, the moisturizing channel includes a moisturizing liquid inlet arranged at the bottom of the outer peripheral wall, and a moisturizing liquid overflow port arranged at the top of the inner peripheral wall, and the moisturizing liquid overflow port connects the moisturizing channel and the drainage channel.

[0015] In order to achieve one of the purposes of the utility model mentioned above, one embodiment of the utility model provides a coating device, including the nozzle moisturizing device described in any one of the above technical solutions.

[0016] Compared with the prior art, the utility model provides a nozzle moisturizing device, in which a moisturizing liquid that is volatile at room temperature is stored in a moisturizing channel. When the nozzle is installed to the opening, the spray channel is connected to the moisturizing channel, and the moisturizing liquid can evaporate into the spray channel to ensure the wettability of high-viscosity photoresist. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of a nozzle moisturizing device in one embodiment of the utility model.

[0018] Figure 2 It is a top view of the nozzle moisturizing device in one embodiment of the utility model.

[0019] Figure 3 This is a schematic diagram of a nozzle moisturizing device in one embodiment of the utility model with the cover removed.

[0020] Figure 4 It is a schematic diagram of the exploded structure of part of the nozzle moisturizing device in one embodiment of the utility model.

[0021] Figure 5 It is a schematic diagram of the exploded view of the partial structure of the nozzle moisturizing device in one embodiment of the utility model from another angle.

[0022] Figure 6 It is a cross-sectional view of a nozzle moisturizing device in one embodiment of the utility model. DETAILED DESCRIPTION

[0023] The present invention will be described in detail below in conjunction with the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0024] It should be noted that the term "comprises" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In addition, the terms "first", "second", "third", "fourth", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] The terms "connected", "connected to" or any other variants are intended to cover various relative positions in a connection relationship, so as to include direct connection or indirect connection. Among them, the direct connection can be formed by a gas pipeline, the indirect connection can be a connection relationship established by a device such as a valve body, a sensor, etc., can be a connection relationship established by a gas circuit component such as a brake control unit, or can be a connection relationship established by any other medium such as air.

[0026] See also Figure 1-2 , is a structural schematic diagram of a nozzle moisturizing device 100 provided in an embodiment of the utility model, which is used in a wafer coating process to moisturize a photoresist nozzle to prevent the photoresist in the nozzle from drying and hardening, thereby affecting the coating uniformity when it is used again.

[0027] The nozzle moisturizing device 100 includes: a moisturizing box body 10 for containing moisturizing liquid and a nozzle 30 cooperating with the moisturizing box body 10, the moisturizing box body 10 includes a moisturizing channel 101 and an opening 102 connected to the moisturizing channel 101, and the nozzle 30 includes a liquid spraying channel 301; when the nozzle 30 is installed at the opening 102, the liquid spraying channel 301 is connected to the moisturizing channel 101.

[0028] The nozzle 30 should be provided with a sucking device so that the nozzle 30 can suck back the photoresist for a distance after coating is completed without dripping from the liquid spraying channel 301 . Therefore, the photoresist is maintained in the liquid spraying channel 301 .

[0029] The moisturizing liquid can volatilize at room temperature, and the volatiles enter the spray channel 301 through the opening 102, thereby replenishing moisture and other chemical components for the photoresist in the spray channel 301, ensuring the wettability of the photoresist in the spray channel 301, especially the wettability of the photoresist near the nozzle opening.

[0030] In one embodiment, the moisturizing box body 10 includes a cover body 20 covering the moisturizing channel 101, and the opening 102 passes through the cover body 20, and the size of the opening 102 is adapted to the nozzle 30. In this way, the cover body 10 covers the top of the moisturizing channel 101, and the size of the nozzle 30 can be just inserted into the opening 102, and there is good sealing between the moisturizing box body 10 and the nozzle 30, preventing the volatiles in the moisturizing channel 101 from entering the surrounding air.

[0031] In another embodiment, the opening 102 may also be an exposed opening formed on the top of the moisturizing box body 10, without the need to provide the cover body 20.

[0032] In one embodiment, combining Figure 3-5 As shown, the humidifying box body 10 comprises a bottom wall 11, an outer peripheral wall 12, an inner peripheral wall 13 coaxial with the outer peripheral wall 12 and spaced apart, and a plurality of partition walls 14 connecting the outer peripheral wall 12 and the inner peripheral wall 13. The bottom surfaces of the inner peripheral wall 13, the outer peripheral wall 12 and the partition wall 14 are the plane where the bottom wall 11 is located, and the top surfaces of the inner peripheral wall 13, the outer peripheral wall 12 and the partition wall 14 overlap and are covered by the cover body 20 together.

[0033] The outer peripheral wall 12 and the inner peripheral wall 13 are both in annular shape, and the inner peripheral wall 13 is arranged to form a liquid discharge channel 130 . The liquid discharge channel 130 is cylindrical. The bottom wall 11 is provided with a liquid discharge port 131 connected to the liquid discharge channel 130 .

[0034] A plurality of moisturizing channels 101 are formed between the outer peripheral wall 12 and the inner peripheral wall 13. The partition wall 14 is a vertical wall, which divides the annular space between the outer peripheral wall 12 and the inner peripheral wall 13 into a plurality of fan-shaped subspaces, namely the plurality of moisturizing channels 101, which are independent of each other and are arranged around the periphery of the drainage channel 130.

[0035] If the partition walls 14 are arranged evenly along the circumference, the moisturizing channels 101 separated therefrom are arranged evenly along the circumference and are of uniform size; if the partition walls 14 are arranged unevenly along the circumference, the moisturizing channels 101 separated therefrom are arranged unevenly along the circumference and are of inconsistent size. In actual applications, the position and number of the partition walls 14 can be adjusted as needed.

[0036] In a preferred embodiment, four evenly distributed partition walls 14 are provided, corresponding to four fan-shaped moisturizing channels 101 , and the arc corresponding to each moisturizing channel 101 is 90 degrees.

[0037] Each moisturizing channel 101 stores different moisturizing liquids corresponding to photoresists of different components. The cover body 20 has an opening 102 corresponding to each moisturizing channel 101 to allow the nozzle 30 of the photoresist of the corresponding component to penetrate into the moisturizing channel 101 .

[0038] It can be understood that the cover 20 seals the top of the moisturizing box body 10, and each moisturizing channel 101 is independent and sealed, so that the moisturizing liquid in each moisturizing channel 101 can only enter the corresponding liquid spraying channel 301 through the corresponding opening 102. In this way, cross contamination between different moisturizing liquids is reduced, and the influence of different moisturizing liquids on photoresists of different components is reduced.

[0039] In one embodiment, the moisturizing channel 101 includes a moisturizing liquid overflow port 103 disposed at the top thereof, the moisturizing liquid overflow port 103 is spaced apart from the cover body 10, and the moisturizing liquid overflow port 103 is 5 mm to 10 mm away from the cover body. In other words, the moisturizing liquid overflow port 103 is 5 mm to 10 mm away from the nozzle. If the moisturizing liquid overflow port 103 is too low, the moisturizing effect cannot be achieved, and if it is too high, there is a risk that the moisturizing liquid will contact the nozzle.

[0040] The implementation method of the moisturizing function of the present application is as follows: moisturizing liquid is placed in the moisturizing channel 101, and it can be poured directly through the cover body 20, or it can enter through the moisturizing liquid inlet 104 described below. The key point is that after the moisturizing liquid overflow port 103 is set at the top, it is ensured that the liquid level of the moisturizing liquid stored in the moisturizing channel 101 does not exceed the moisturizing liquid overflow port 103; in other words, the liquid level of the moisturizing liquid placed in the moisturizing channel 101 is maintained below the moisturizing liquid overflow port 103, so that the moisturizing liquid will not be too far away from the nozzle 30, which is conducive to evaporation and moisturizing, nor will it be too close to infiltrate the nozzle 30.

[0041] In a specific embodiment, the moisturizing liquid overflow port 103 is disposed at the top of the inner peripheral wall 13, and the moisturizing liquid overflow port 103 penetrates the inner peripheral wall 13, thereby connecting the moisturizing channel 101 and the drainage channel 130. If too much moisturizing liquid is added, it enters the drainage channel 130 through the moisturizing liquid overflow port 103, flows to the bottom of the drainage channel 130, and is discharged through the drainage port 131.

[0042] Combination Figure 6 As shown, the liquid discharge port 130 has a cone shape that is wide at the top and narrow at the bottom, without a step corner, to avoid abnormalities caused by liquid accumulation and blockage.

[0043] In one embodiment, the moisturizing channel 101 includes a moisturizing liquid inlet 104, and the moisturizing liquid inlet 104 is provided with a control valve, and the control valve is opened or closed at a preset time interval to control the opening or closing of the moisturizing liquid inlet 101. In this way, the interval time can be controlled and adjusted, and the opening time of the moisturizing liquid inlet 101 can be adjusted to adjust the flow rate of the moisturizing liquid, thereby ensuring the best moisturizing effect without causing waste.

[0044] The moisturizing liquid inlet 104 is arranged at the bottom of the peripheral wall 12. Specifically, the moisturizing liquid inlet 104 is arranged horizontally so as to be perpendicular to the vertical moisturizing box body 10. The moisturizing liquid inlet 104 is located between one-third and one-half of the height of the lower half of the peripheral wall 12. The moisturizing liquid cannot rush up from the bottom, so as to avoid excessive surging of the moisturizing liquid, which causes the moisturizing liquid to contact the nozzle 30 and cause abnormality of the photoresist in the spray channel 301.

[0045] The present application also protects a coating device, including the nozzle moisturizing device 100 described in any of the above technical solutions.

[0046] The beneficial effects of the utility model are as follows: after the moisturizing liquid in the moisturizing channel 101 evaporates at room temperature, it enters the spray channel 301 through the opening 102, replenishes moisture and other chemical components for the photoresist in the spray channel 301, and ensures the wettability of the photoresist in the spray channel 301; the cover body 20 is provided, so that the moisturizing box body 10 has airtightness, the moisturizing liquid will not evaporate to the outside air, different moisturizing liquids will not cross-contaminate each other, and different moisturizing liquids will not affect photoresists of different components; the moisturizing liquid overflow port 103 is provided at the top, so as to ensure the proper moisturizing function and the nozzle will not contact the moisturizing liquid.

[0047] It can be formed by referring to any of the technical solutions provided above, and will not be described in detail here.

[0048] It should be understood that although this specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation mode may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

[0049] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A nozzle moisturizing device, characterized in that: include: A moisturizing box body for containing moisturizing liquid and a nozzle matched with the moisturizing box body, the moisturizing box body includes a moisturizing channel and an opening connected to the moisturizing channel, and the nozzle includes a liquid spraying channel; when the nozzle is installed at the opening, the liquid spraying channel is connected to the moisturizing channel.

2. The nozzle moisturizing device according to claim 1, characterized in that: The moisturizing box body comprises a cover body covering the moisturizing channel, the opening passes through the cover body, and the size of the opening is adapted to the nozzle.

3. The nozzle moisturizing device according to claim 2, characterized in that: The moisturizing channel comprises a moisturizing liquid overflow port arranged at the top thereof, the moisturizing liquid overflow port is arranged at a distance from the cover body, and the moisturizing liquid overflow port is 5mm to 10mm away from the cover body.

4. The nozzle moisturizing device according to claim 1, characterized in that: The moisturizing channel comprises a moisturizing liquid inlet, and a control valve is arranged at the moisturizing liquid inlet. The control valve is opened or closed at a preset time interval to control the moisturizing liquid inlet to be opened or closed.

5. The nozzle moisturizing device according to claim 1, characterized in that: The moisturizing channel includes a moisturizing liquid overflow port arranged at the top thereof, the moisturizing box body includes a drainage channel, the moisturizing liquid overflow port connects the moisturizing channel and the drainage channel, and the bottom of the moisturizing box body is provided with a drainage port connected to the drainage channel.

6. The nozzle moisturizing device according to claim 5, characterized in that: The plurality of moisturizing channels are arranged around the periphery of the drainage channel, and the plurality of moisturizing channels are independent of each other.

7. The nozzle moisturizing device according to claim 5, characterized in that: The liquid discharge port has a tapered shape that is wider at the top and narrower at the bottom.

8. The nozzle moisturizing device according to claim 1, characterized in that: The moisturizing box body comprises a bottom wall, an outer peripheral wall, an inner peripheral wall coaxial with the outer peripheral wall and arranged at intervals, and a plurality of partition walls connecting the outer peripheral wall and the inner peripheral wall; the inner peripheral wall is arranged to form a drainage channel, and a plurality of moisturizing channels are arranged between the outer peripheral wall and the inner peripheral wall.

9. The nozzle moisturizing device according to claim 8, characterized in that: The moisturizing channel comprises a moisturizing liquid inlet provided at the bottom of the outer peripheral wall, and a moisturizing liquid overflow port provided at the top of the inner peripheral wall, wherein the moisturizing liquid overflow port communicates with the moisturizing channel and the liquid discharge channel.

10. A coating device, characterized in that: It comprises a nozzle moisturizing device as described in any one of claims 1 to 9.

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