Substrate slice storage device

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a substrate slice storage device, which comprises a box body, a guide rod and a bearing piece, the box body is provided with a storage cavity, and an opening communicated with the storage cavity is formed in the box body; the guide rod is located in the storage cavity, and the end, away from the opening, of the guide rod is connected with the box body; a guide hole for the guide rod to pass through is formed in the bearing piece, a through hole is formed in the bearing piece, and the bearing piece is provided with a first supporting surface and a second supporting surface which are used for supporting a substrate slice; according to the substrate slice storage device provided by the utility model, the substrate slice can be stably placed on the bearing piece through the first supporting surface and the second supporting surface, the contact area between the bearing piece and the substrate slice can be reduced through the through hole, and the possibility of friction between the bearing piece and the substrate slice is reduced; therefore, the surface of the substrate slice can be prevented from being scratched or abraded.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a substrate slice storage device. Background Art

[0002] The substrate is the starting point for the growth of semiconductor chips and is also the main carrier of the chip. It is usually a large piece of crystal whose surface is ground into a smooth surface for the manufacture of wafers.

[0003] Most existing substrate sheet storage devices place the substrate sheet directly in a box to store the substrate sheet. This storage method results in a larger contact area between the substrate sheet and the storage device. The larger contact area increases the possibility of friction between the substrate sheet and the storage device. This friction may cause scratches or wear on the surface of the substrate sheet, thereby reducing the surface quality of the substrate sheet. Utility Model Content

[0004] Aiming to solve at least one of the technical problems existing in the prior art, the utility model provides a substrate sheet storage device, which can prevent scratches or wear on the surface of the substrate sheet.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a substrate sheet storage device, having a first horizontal direction and a second horizontal direction intersecting each other, the substrate sheet storage device comprising a box body, a guide rod and a supporting member; the box body has a storage cavity, and an opening connected to the storage cavity is formed on one end of the box body in the first horizontal direction; the guide rod is located in the storage cavity, and the end of the guide rod away from the opening in the first horizontal direction is connected to the box body; the supporting member is provided with a guide hole that penetrates the supporting member along the first horizontal direction and allows the guide rod to pass through, the supporting member is provided with a through hole that penetrates the supporting member from top to bottom, the supporting member has a first supporting surface located on one side of the through hole in the second horizontal direction and used to support the substrate sheet, and the supporting member has a second supporting surface located on the side of the through hole in the second horizontal direction away from the first supporting surface and used to support the substrate sheet.

[0006] In some embodiments, the first support surface and the second support surface are flush.

[0007] In some embodiments, the supporting member includes a first limiting portion, a supporting portion, a second limiting portion and a third limiting portion, the first limiting portion is connected to the second limiting portion and the third limiting portion at both ends in the first horizontal direction, the supporting portion is connected to the second limiting portion and the third limiting portion at both ends in the first horizontal direction, the supporting portion is located on one side of the first limiting portion in the second horizontal direction, the through hole is formed between the first limiting portion, the supporting portion, the second limiting portion and the third limiting portion; the top of the first limiting portion is recessed downward to provide a first limiting groove, the bottom surface of the first limiting groove is the first supporting surface, and the upper surface of the supporting portion is the second supporting surface.

[0008] In some embodiments, the top of the second limiting portion is recessed downward to form a second limiting groove, the second limiting groove has a third supporting surface for supporting the substrate sheet, and the third supporting surface is flush with the second supporting surface; the top of the third limiting portion is recessed downward to form a third limiting groove, the third limiting groove has a fourth supporting surface for supporting the substrate sheet, and the fourth supporting surface is flush with the second supporting surface.

[0009] In some embodiments, the first limiting groove has a first limiting surface located on one side of the substrate sheet in the second horizontal direction and in contact with the outer side wall of the substrate sheet; the second limiting groove has a second limiting surface located on one side of the substrate sheet in the first horizontal direction and in contact with the outer side wall of the substrate sheet; the third limiting groove has a third limiting surface located on the side of the substrate sheet in the first horizontal direction away from the second limiting surface and in contact with the outer side wall of the substrate sheet.

[0010] In some embodiments, the substrate sheet storage device further includes a driving member, wherein the driving member is connected to the supporting member and is capable of driving the supporting member to move along the first horizontal direction.

[0011] In some embodiments, the driving member includes a handle and a screw, the screw is arranged in the storage cavity, and the handle is connected to the end of the screw away from the opening in the first horizontal direction and is located on one side of the box body; the supporting member also includes a connecting portion, the connecting portion is connected to the end of the first limiting portion in the first horizontal direction close to the handle, and the connecting portion is provided with a threaded hole that penetrates along the first horizontal direction and cooperates with the screw; wherein, the rotation of the screw around the central axis of the screw can drive the connecting portion to move along the first horizontal direction.

[0012] In some embodiments, the substrate sheet storage device further includes a limit block connected to one end of the box body in the first horizontal direction close to the handle, the bottom of the limit block is recessed upward to provide an arc groove, and the screw rod passes through the arc groove.

[0013] In some embodiments, the substrate sheet is a circular substrate sheet, and the through hole is a square through hole.

[0014] Compared with the prior art, the substrate sheet storage device provided by the embodiment of the utility model has the following beneficial effects: (1) by respectively arranging the first supporting surface and the second supporting surface on both sides of the through hole, the first supporting surface and the second supporting surface can respectively support the two ends of the substrate sheet in the second horizontal direction so as to stably place the substrate sheet on the supporting member, and the through hole can reduce the contact area between the supporting member and the substrate sheet, thereby reducing the possibility of friction between the supporting member and the substrate sheet, thereby avoiding scratches or wear on the surface of the substrate sheet, and helping to ensure the surface quality of the substrate sheet; at the same time, through the mutual cooperation of the first supporting surface, the second supporting surface and the through hole, the substrate sheet can be suspended in the box body, so that the substrate sheet can avoid impurities that may exist in the box body, which helps to further avoid scratches or wear on the surface of the substrate sheet.

[0015] (2) The cooperation between the guide rod and the guide hole can play a guiding role in the process of the supporting member passing through the opening to enter and exit the storage cavity, thereby improving the smoothness of the movement of the supporting member and helping to avoid relative movement between the substrate sheet and the supporting member during the process of the supporting member entering and exiting the storage cavity, thereby avoiding friction between the substrate sheet and the supporting member, and further helping to further avoid scratches or wear on the surface of the substrate sheet, helping to better ensure the surface quality of the substrate sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a substrate storage device provided by an embodiment of the utility model in a first state;

[0017] Figure 2 It is a structural schematic diagram of a substrate storage device provided by an embodiment of the utility model in a second state;

[0018] Figure 3 It is a cross-sectional view of a substrate storage device provided by an embodiment of the utility model;

[0019] Figure 4 It is a structural schematic diagram of a substrate sheet storage device provided by an embodiment of the utility model, omitting the box body;

[0020] Figure 5 It is a structural schematic diagram of a supporting member provided in an embodiment of the utility model.

[0021] In the figure, 1, box body; 11, storage cavity; 12, opening;

[0022] 2. Guide rod;

[0023] 3. Supporting member; 31. First limiting portion; 32. Supporting portion; 33. Second limiting portion; 34. Third limiting portion; 35. Connecting portion; 301. Through hole; 302. Guide hole; 311. First limiting groove; 321. Second supporting surface; 331. Second limiting groove; 341. Fourth limiting groove;

[0024] 351, threaded hole; 3111, first supporting surface; 3112, first limiting surface; 3311, third supporting surface; 3312, second limiting surface; 3411, fourth supporting surface; 3412, third limiting surface;

[0025] 3111, 4, driving member; 41, handle; 42, screw;

[0026] 5. Limit block; 51. Arc groove;

[0027] 6. Substrate sheet;

[0028] X, first horizontal direction; Y, second horizontal direction; Z, height direction. DETAILED DESCRIPTION

[0029] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0032] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0034] like Figure 1-5 As shown, a substrate sheet storage device preferably provided in an embodiment of the utility model has a first horizontal direction X and a second horizontal direction Y intersecting each other. The substrate sheet storage device includes a box body 1 , a guide rod 2 and a supporting member 3 .

[0035] The box body 1 has a storage cavity 11, and an opening 12 connected to the storage cavity 11 is formed at one end of the box body 1 in the first horizontal direction X; the guide rod 2 is located in the storage cavity 11, and the end of the guide rod 2 in the first horizontal direction X away from the opening 12 is connected to the box body 1; the supporting member 3 has a guide hole 302 that penetrates the supporting member 3 along the first horizontal direction X and allows the guide rod 2 to pass through, the supporting member 3 has a through hole 301 that penetrates the supporting member 3 from top to bottom, the supporting member 3 has a first supporting surface 3111 located on one side of the through hole 301 in the second horizontal direction Y and used to support the substrate sheet 6, and the supporting member 3 has a second supporting surface 321 located on the side of the through hole 301 in the second horizontal direction Y away from the first supporting surface 3111 and used to support the substrate sheet 6.

[0036] Based on this technical solution, by respectively setting the first supporting surface 3111 and the second supporting surface 321 on both sides of the through hole 301, the first supporting surface 3111 and the second supporting surface 321 can respectively support the two ends of the substrate sheet 6 in the second horizontal direction Y to stably place the substrate sheet 6 on the supporting member, and the through hole 301 can reduce the contact area between the supporting member 3 and the substrate sheet 6, and reduce the possibility of friction between the supporting member 3 and the substrate sheet 6, thereby avoiding scratches or wear on the surface of the substrate sheet 6, which helps to ensure the surface quality of the substrate sheet 6; at the same time, through the mutual cooperation of the first supporting surface 3111, the second supporting surface 321 and the through hole 301, the substrate sheet 6 can be suspended in the box body 1, so that the substrate sheet 6 can avoid impurities that may exist in the box body 1, which helps to further avoid scratches or wear on the surface of the substrate sheet 6.

[0037] The cooperation between the guide rod 2 and the guide hole 302 can play a guiding role in the process of the supporting member 3 passing through the opening 12 into and out of the storage cavity 11, thereby improving the smoothness of the movement of the supporting member 3, and helping to avoid relative movement between the substrate sheet 6 and the supporting member in the process of the supporting member 3 entering and exiting the storage cavity 11, thereby avoiding friction between the substrate sheet and the supporting member, and further helping to further avoid scratches or wear on the surface of the substrate sheet 6, helping to better ensure the surface quality of the substrate sheet 6.

[0038] In this embodiment, the first horizontal direction X, the second horizontal direction Y and the height direction Z are perpendicular to each other. The first horizontal direction X and the second horizontal direction Y are respectively the length direction and the width direction of the substrate storage device.

[0039] In this embodiment, the substrate sheet 6 is a circular substrate sheet.

[0040] In some other embodiments, the substrate sheet 6 may also be in any shape such as square, polygon, etc., which is not limited here.

[0041] In this embodiment, the through hole 301 is a square through hole 301 .

[0042] In some other implementations, the through hole 301 may also be in any shape such as a circle, an ellipse, a polygon, etc., which is not limited here.

[0043] Preferably, the first support surface 3111 is flush with the second support surface 321. In this way, the substrate sheet 6 can be placed on the supporting member 3 without any height difference or tilt, which helps to avoid relative movement between the substrate sheet 6 and the supporting portion 32 during the process of the supporting member 3 entering and exiting the storage cavity 11, thereby helping to avoid friction between the substrate sheet 6 and the supporting portion 32, and further avoiding scratches or wear on the surface of the substrate sheet 6.

[0044] See also Figure 2-Figure 5The supporting member 3 provided in the embodiment of the utility model includes a first limiting portion 31, a supporting portion 32, a second limiting portion 33 and a third limiting portion 34. The two ends of the first limiting portion 31 in the first horizontal direction X are respectively connected to the second limiting portion 33 and the third limiting portion 34. The two ends of the supporting portion 32 in the first horizontal direction X are respectively connected to the second limiting portion 33 and the third limiting portion 34. The supporting portion 32 is located at one side of the first limiting portion 31 in the second horizontal direction Y. A through hole 301 is formed between the first limiting portion 31, the supporting portion 32, the second limiting portion 33 and the third limiting portion 34.

[0045] The top of the first limiting portion 31 is recessed downward to form a first limiting groove 311 . The bottom surface of the first limiting groove 311 is a first supporting surface 3111 , and the upper surface of the supporting portion 32 is a second supporting surface 321 . In this way, the first limiting portion 31 can limit the movement of the substrate sheet 6 on one side of the substrate sheet 6 in the second horizontal direction Y, and the second limiting portion 33 and the third limiting portion 34 can limit the movement of the substrate sheet 6 on both sides of the substrate sheet 6 in the first horizontal direction X, thereby helping to avoid relative movement between the substrate sheet 6 and the supporting portion 32, and further avoiding scratches or wear on the surface of the substrate sheet 6; when the substrate sheet 6 is placed in the storage cavity 11, the inner wall of the storage cavity 11, the first limiting portion 31, the second limiting portion 33 and the third limiting portion 34 can form six-sided shielding and protection for the substrate sheet 6; the upper surface of the supporting portion 32 is used as the second supporting surface 321, which is convenient for the staff to place the substrate sheet 6 on the supporting member 3 or remove the substrate sheet 6 from the substrate sheet 6 at a position close to the supporting portion 32.

[0046] In this embodiment, the through hole 301 passes through the second limiting portion 33 and the supporting portion 32 in sequence along the first horizontal direction X.

[0047] See also Figure 2 , Figure 4 and Figure 5 The top of the second limiting portion 33 is recessed downwards and provided with a second limiting groove 331, which has a third supporting surface 3311 for supporting the substrate sheet 6, and the third supporting surface 3311 is flush with the second supporting surface 321; the top of the third limiting portion 34 is recessed downwards and provided with a third limiting groove 341, which has a fourth supporting surface 3411 for supporting the substrate sheet 6, and the fourth supporting surface 3411 is flush with the second supporting surface 321. The third supporting surface 3311 and the fourth supporting surface 3411 that are flush with the second supporting surface 321 are adopted, and the third supporting surface 3311 and the fourth supporting surface 3411 can cooperate with the first supporting surface 3111 and the second supporting surface 321 to form a multi-position support for the substrate sheet 6, thereby improving the stability of the substrate sheet 6 when placed on the supporting member 3.

[0048] The first limiting groove 311 has a first limiting surface 3112 located on one side of the substrate sheet 6 in the second horizontal direction Y and in contact with the outer side wall of the substrate sheet 6; the second limiting groove 331 has a second limiting surface 3312 located on one side of the substrate sheet 6 in the first horizontal direction X and in contact with the outer side wall of the substrate sheet 6; the third limiting groove 341 has a third limiting surface 3412 located on one side of the substrate sheet 6 away from the second limiting surface 3312 in the first horizontal direction X and in contact with the outer side wall of the substrate sheet 6. The first limiting surface 3112, the second limiting surface 3312 and the third limiting surface 3412 in contact with the outer side wall of the substrate sheet 6 can better limit the movement of the substrate sheet 6 on the supporting member 3, thereby better avoiding the relative movement between the substrate sheet 6 and the supporting member 3, which helps to further avoid scratches or wear on the surface of the substrate sheet 6.

[0049] See also Figure 1 , Figure 2 and Figure 4 The substrate sheet storage device provided in the embodiment of the utility model further includes a driving member 4, which is connected to the supporting member 3 and can drive the supporting member 3 to move along the first horizontal direction X.

[0050] In this embodiment, the driving member 4 includes a handle 41 and a screw 42, the screw 42 is arranged in the storage cavity 11, the handle 41 is connected to the end of the screw 42 away from the opening 12 in the first horizontal direction X and is located on one side of the box body 1; the supporting member 3 also includes a connecting portion 35, the connecting portion 35 is connected to the end of the first limiting portion 31 close to the handle 41 in the first horizontal direction X, and the connecting portion 35 is provided with a threaded hole 351 that penetrates along the first horizontal direction X and matches with the screw 42; wherein the screw 42 rotates around the central axis of the screw 42 to drive the connecting portion 35 to move along the first horizontal direction X. In this way, the staff can operate the handle 41 to rotate the screw 42 to drive the supporting member 3 to enter and exit the storage cavity 11; therefore, when the substrate sheet 6 is placed in the storage cavity 11, the staff does not operate the handle 41, and the substrate sheet 6 will not leave the storage cavity 11, and the safety and reliability are high.

[0051] The principle of the screw rod 42 rotating to drive the connecting portion 35 to move along the first horizontal direction is similar to the principle of the lead screw transmission mechanism realizing the conversion between rotational motion and linear motion, which will not be elaborated here.

[0052] In some other embodiments, the driving member 4 can be any mechanism or device that can drive the supporting member 3 to move along the first horizontal direction X, such as a linear module, a hydraulic cylinder, a pneumatic cylinder, an electric cylinder, etc., and is not limited here.

[0053] See also Figure 1 , Figure 2 and Figure 5The substrate storage device provided by the embodiment of the utility model further includes a limit block 5, which is connected to one end of the box body 1 near the handle 41 in the first horizontal direction X. The bottom of the limit block 5 is recessed upward to form an arc groove 51, and the screw rod 42 passes through the arc groove 51. The limit block 5 is used and the arc groove 51 is provided on the limit block 5, so that the limit block 5 can limit the screw rod 42.

[0054] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A substrate sheet storage device having a first horizontal direction and a second horizontal direction intersecting each other, characterized in that: include: A box body, the box body having a storage cavity, and the box body having an opening in communication with the storage cavity at one end in the first horizontal direction; A guide rod, the guide rod being located in the storage cavity, and one end of the guide rod being away from the opening in the first horizontal direction is connected to the box body; A supporting member, wherein the supporting member is provided with a guide hole which passes through the supporting member along the first horizontal direction and for the guide rod to pass through, the supporting member is provided with a through hole which passes through the supporting member from top to bottom, the supporting member has a first supporting surface which is located on one side of the through hole in the second horizontal direction and is used to support the substrate sheet, and the supporting member has a second supporting surface which is located on the side of the through hole in the second horizontal direction away from the first supporting surface and is used to support the substrate sheet.

2. The substrate sheet storage device according to claim 1, characterized in that: The first supporting surface and the second supporting surface are flush with each other.

3. The substrate sheet storage device according to claim 2, characterized in that: The supporting member comprises a first limiting portion, a supporting portion, a second limiting portion and a third limiting portion, the first limiting portion is connected to the second limiting portion and the third limiting portion at two ends in the first horizontal direction respectively, the supporting portion is connected to the second limiting portion and the third limiting portion at two ends in the first horizontal direction respectively, the supporting portion is located at one side of the first limiting portion in the second horizontal direction, and the through hole is formed between the first limiting portion, the supporting portion, the second limiting portion and the third limiting portion; The top of the first limiting portion is recessed downward to form a first limiting groove, the bottom surface of the first limiting groove is the first supporting surface, and the upper surface of the supporting portion is the second supporting surface.

4. The substrate sheet storage device according to claim 3, characterized in that: The top of the second limiting portion is recessed downward to form a second limiting groove, the second limiting groove has a third supporting surface for supporting the substrate sheet, and the third supporting surface is flush with the second supporting surface; The top of the third limiting portion is recessed downward to form a third limiting groove, and the third limiting groove has a fourth supporting surface for supporting the substrate sheet, and the fourth supporting surface is flush with the second supporting surface.

5. The substrate sheet storage device according to claim 4, characterized in that: The first limiting groove has a first limiting surface located on one side of the substrate sheet in the second horizontal direction and in contact with the outer side wall of the substrate sheet; The second limiting groove has a second limiting surface located on one side of the substrate sheet in the first horizontal direction and in contact with the outer side wall of the substrate sheet; The third limiting groove has a third limiting surface which is located at a side of the substrate sheet away from the second limiting surface in the first horizontal direction and contacts with an outer side wall of the substrate sheet.

6. The substrate sheet storage device according to claim 4, characterized in that: It also includes a driving member, which is connected to the supporting member and can drive the supporting member to move along the first horizontal direction.

7. The substrate sheet storage device according to claim 6, characterized in that: The driving member comprises a handle and a screw, wherein the screw is disposed in the storage cavity, and the handle is connected to an end of the screw away from the opening in the first horizontal direction and is located at one side of the box body; The supporting member further comprises a connecting portion, the connecting portion being connected to an end of the first limiting portion close to the handle in the first horizontal direction, the connecting portion being provided with a threaded hole penetrating along the first horizontal direction and cooperating with the screw rod; Wherein, the screw can drive the connecting part to move along the first horizontal direction by rotating around the central axis of the screw.

8. The substrate sheet storage device according to claim 7, characterized in that: It also includes a limit block, which is connected to one end of the box body close to the handle in the first horizontal direction. The bottom of the limit block is recessed upward to provide an arc groove, and the screw rod passes through the arc groove.

9. The substrate storage device according to any one of claims 1 to 8, characterized in that: The substrate sheet is a circular substrate sheet, and the through hole is a square through hole.

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