Tail gas treatment assembly and coating equipment

Abstract

The utility model discloses a tail gas treatment assembly and coating equipment. The tail gas treatment assembly comprises a gas inlet pipeline, a cooler, a filter, a negative pressure pump and a gas passing pipeline. And the gas inlet pipeline is communicated with the process pipe. The cooler comprises a body and a cooling pipeline. One end of the cooling pipeline is connected with the air inlet, and the other end of the cooling pipeline is connected with the air inlet pipeline. The air outlet is communicated with the filter, and a first valve is arranged between the filter and the air outlet. And the filter is communicated with the negative pressure pump. One end of the air passing pipeline is connected with the air outlet, the other end of the air passing pipeline is connected with the negative pressure pump, and the air passing pipeline is provided with a second valve. In this way, tail gas of the coating equipment can be fully treated, and the technical problem that the tail gas treatment assembly is blocked is solved.

Description

Technical Field

[0001] The present application relates to the field of vacuum coating technology, and in particular to an exhaust gas treatment component and a coating device. Background Art

[0002] In the production process of photovoltaic equipment, coating equipment is needed to coat the substrate. During the coating process, process gas needs to be introduced into the substrate. The process gas forms tail gas after coating, and the tail gas needs to be discharged from the process pipe. In the related technology, the process gas in the tail gas will react to produce dust particles, which can easily block the tail gas treatment components, requiring frequent shutdown for maintenance and cleaning, which takes up a lot of production time.

[0003] Most coating equipment operates under vacuum, where the process gas can be more evenly distributed throughout the coating chamber, and can contact the substrate more evenly and fully. Most of the negative pressure pumps used in existing coating equipment are diaphragm pumps. In order to achieve the vacuum required by the process in the same amount of time, the pumping speed of the diaphragm pump is required to be higher and higher as the coating equipment becomes larger, which means that the temperature of the exhaust gas sucked into the diaphragm pump is getting higher and higher. The key component of the diaphragm pump is the diaphragm. Long-term use under high temperature will damage the diaphragm pump, and the dust particles in the exhaust gas will also cause wear on the diaphragm. Generally speaking, the maintenance time and service life of the diaphragm determine the maintenance cycle and service life of the diaphragm pump. Utility Model Content

[0004] The embodiments of the present application provide an exhaust gas treatment component and a coating device, which can fully treat the exhaust gas of the coating device, cool the exhaust gas and reduce the technical problem of clogging of the exhaust gas treatment component.

[0005] In a first aspect, an embodiment of the present application provides an exhaust gas treatment component. The exhaust gas treatment component includes an air intake pipe, a cooler, a filter, a negative pressure pump and an air flow pipe. The air intake pipe is used to connect to a process pipe. The cooler includes a main body and a cooling pipe. The main body has an air inlet and an air outlet, and the cooling pipe connects the air inlet and the air intake pipe. The air outlet is connected to the filter, and a first valve is provided between the filter and the air outlet. The filter is connected to the negative pressure pump. One end of the air flow pipe is connected to the air outlet, and the other end of the air flow pipe is connected to the negative pressure pump, and the air flow pipe is provided with a second valve.

[0006] Optionally, the cooling duct is coiled around the outer circumference of the body.

[0007] Optionally, the main body includes an outer shell and an inner shell, the inner shell forms a containing space, and a accommodating space is formed between the outer shell and the inner shell. The containing space and the accommodating space are both used to contain coolant, and the containing space and the accommodating space are isolated, and the volume of the accommodating space is smaller than the volume of the containing space.

[0008] Optionally, the cooling duct includes a first end for connecting to the air intake duct and a second end for connecting to the air intake port; in the direction of gravity, the position of the first end is higher than the position of the second end.

[0009] Optionally, the interior of the body is used to contain coolant, the air inlet is located below the liquid level of the coolant, and the first end is located above the liquid level of the coolant.

[0010] Optionally, the cross-sectional area of ​​the cooling pipe gradually increases in an extending direction from the first end to the second end.

[0011] Optionally, the air outlet is arranged at the top of the cooler, and the height of the air outlet is higher than the height of the air inlet.

[0012] Optionally, the first valve and the second valve are pneumatic diaphragm valves.

[0013] Optionally, the negative pressure pump is connected to the waste discharge pipe.

[0014] In a second aspect, an embodiment of the present application provides a coating device, which includes a process pipe and the aforementioned tail gas treatment component, wherein the process pipe is connected to a cooling pipe of the tail gas treatment component.

[0015] The beneficial effect of the present application is that, different from the prior art, the present invention divides the whole set of tail gas treatment components into two channels by setting a first valve in front of the filter and setting a second valve on the air passage pipe, which are respectively used for tail gas treatment of deposition and other process steps in the diffusion process. The air intake pipe inputs the tail gas into the cooler, which can cool the tail gas on the one hand, and on the other hand, the cooler contains a coolant that can absorb the tail gas, thereby absorbing and filtering the tail gas; after the tail gas passes through the cooler and further enters the filter, the tail gas can be absorbed and filtered for a second time to further reduce the dust particles and residual process gas contained in the tail gas. Through the above two absorption and filtration of the tail gas, the residual process gas and dust particles in the tail gas can be greatly reduced, and the influence of dust particles on the blocking of the negative pressure pump and the whole set of tail gas treatment equipment can be reduced. Further, by setting a first valve at the front end of the filter, and connecting the air passage pipe provided with the second valve in parallel with the first valve and the filter, the tail gas can be selectively controlled to enter the negative pressure pump through the filter or through the air passage according to the process steps of the coating equipment. When exhaust gas containing dust particles is discharged, the first valve can be opened and the second valve can be closed, so that the exhaust gas can be input into the negative pressure pump through the secondary filtration of the cooler and the filter. In the process of discharging protective gas or inert gas, the first valve can be closed and the second valve can be opened, so that the exhaust gas can directly enter the negative pressure pump through the air pipe, which can improve the efficiency of exhaust gas discharge. Moreover, in the entire process flow, water vapor will adhere to the oxide on the surface of the filter element of the filter, and long-term use will affect the life of the filter element. This application only uses the filter in the process step of discharging exhaust gas containing dust particles, and the exhaust gas does not pass through the filter during the process of discharging protective gas or inert gas, which extends the service life of the filter element and reduces maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of an embodiment of the coating equipment of the present application;

[0017] Figure 2 yes Figure 1 The schematic diagram of the structure of the cooler in the coating equipment shown;

[0018] Figure 3 It is a schematic flow chart of a diffusion method using the coating equipment of the present application. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0020] Combination Figure 1 , an embodiment of the present application provides a coating device 1. The coating device 1 includes a process tube 10 and an exhaust gas treatment component 20, and the process tube 10 is connected to the air inlet pipe 201 of the exhaust gas treatment component 20. The process tube 10 can carry a carrier and a substrate, and can perform processes such as heating and coating on the carrier and the substrate. Oxygen, air, protective gas, inert gas and process gas can be introduced into the process tube 10 to provide process conditions for coating. The oxygen, air, protective gas, inert gas and process gas in the process tube 10 can be output to the exhaust gas treatment component 20, so as to absorb, recover or filter the exhaust gas. In some embodiments, the position of the process tube 10 is higher than the position of the exhaust gas treatment component 20 to prevent condensate, coolant or dust particles of the exhaust gas treatment component 20 from entering the process tube 10.

[0021] The embodiment of the present application provides an exhaust gas treatment component 20. The exhaust gas treatment component 20 includes a cooler, and the cooler includes a cooling pipe 21 and a body 22. The exhaust gas treatment component 20 also includes a filter 23, a negative pressure pump 25 and an air pipe 24. The negative pressure pump 25 can generate negative pressure, thereby providing power for the exhaust gas to flow. The body 22 has an air inlet 221 and an air outlet 222, and the cooling pipe 21 is connected to the air inlet 221 of the body 22, and the cooling pipe 21 can input the exhaust gas into the body 22 through the air inlet 221. The air outlet 222 of the body 22 is connected to the filter 23, and the exhaust gas after cooling and absorption by the body 22 can be input into the filter 23. A first valve 231 is provided between the filter 23 and the air outlet 222, and whether the exhaust gas passes through the filter 23 can be controlled by controlling the switch of the first valve 231. The filter 23 is connected to the negative pressure pump 25. One end of the air passage 24 is connected to the air outlet 222, and the other end of the air passage 24 is connected to the negative pressure pump 25. The air passage 24 is provided with a second valve 241. By controlling the switch of the second valve 241, it is possible to control whether the exhaust gas passes through the air passage 24. In other words, the second valve 241 and the air passage 24 are connected in parallel to the first valve 231 and the filter 23.

[0022] The cooling pipe 21 is connected to the process pipe 10 through the air intake pipe 201. Under the negative pressure provided by the negative pressure pump 25, the tail gas of the process pipe 10 can be input into the cooling pipe 21 through the air intake pipe 201, and then the tail gas is input into the main body 22 through the cooling pipe 21. On the one hand, the main body 22 can cool the tail gas, and on the other hand, the main body 22 contains a coolant that can absorb the tail gas, thereby absorbing and filtering the tail gas. For example, in some embodiments, the tail gas includes boron oxide dust, and the main body 22 can contain water, and the boron oxide is dissolved in hot water. In the above manner, the coolant can absorb the boron oxide in the high-temperature tail gas, thereby achieving the first filtration of the tail gas and cooling the tail gas at the same time.

[0023] After the tail gas passes through the body 22 and further enters the filter 23, the tail gas can be secondary absorbed and filtered to further reduce the dust particles and residual process gas contained in the tail gas.

[0024] By absorbing and filtering the exhaust gas twice, the residual process gas and dust particles in the exhaust gas can be greatly reduced, thereby reducing the problem of the negative pressure pump 25 and the entire exhaust gas treatment component 20 being blocked by dust particles.

[0025] Furthermore, by arranging the first valve 231 at the front end of the filter 23, and connecting the second valve 241 and the gas pipe 24 in parallel with the first valve 231 and the filter 23, the first valve 231 and the second valve 241 can be selectively switched according to the process steps of the coating equipment 1 to control the exhaust gas to enter the negative pressure pump 25 through the filter 23 or through the gas pipe 24. When the exhaust gas containing process gas and dust particles is discharged, the first valve 231 is opened and the second valve 241 is closed, so that the exhaust gas can be input to the negative pressure pump 25 through the secondary filtration of the filter 23. In the process of discharging protective gas or inert gas, the first valve 231 is closed and the second valve 241 is opened, so that the exhaust gas can directly enter the negative pressure pump 25 through the gas pipe 24. Compared with the prior art, the use time of the filter 23 is reduced within the same process time, the service life of the filter element of the filter 23 is extended, and the efficiency of exhaust gas emission can be increased.

[0026] In some embodiments, the cooling pipe 21 is coiled around the outer periphery of the body 22. By coiling the cooling pipe 21, the extension length of the cooling pipe 21 can be increased to increase the longer path for the exhaust gas to flow during discharge, so that the exhaust gas can be fully cooled during the flow. Further, the body 22 can contain a coolant. By coiling the cooling pipe 21 around the outer periphery of the body 22, the heat exchange is more sufficient, and the coolant can take away the heat of the exhaust gas in the cooling pipe 21 to increase the efficiency of cooling the exhaust gas.

[0027] In some embodiments, a waste pipe is provided at the bottom or near the bottom of the side wall of the body 22, and the coolant can be discharged through the waste pipe.

[0028] Combination Figure 2In some embodiments, the body 22 includes an outer shell 223 and an inner shell 224, the inner shell 224 is formed with a containing space 226, and a containing space 225 is formed between the outer shell 223 and the inner shell 224. The containing space 226 and the containing space 225 are both used to contain coolant, and the containing space 226 and the containing space 225 are isolated, and the volume of the containing space 225 is smaller than the volume of the containing space 226. The aforementioned air inlet 221 penetrates the outer shell 223 and the inner shell 224, and the cooling pipe 21 can input the exhaust gas into the containing space 226. In this way, the coolant in the containing space 226 can be used to cool, filter and absorb the exhaust gas, and the coolant contained in the containing space 225 is only used to cool the exhaust gas. However, since the volume of the containing space 225 is smaller than the volume of the containing space 226. In this way, the containing space 225 has a higher liquid level when containing a relatively small volume of coolant, and the containing space 226 can contain more coolant. The coolant in the accommodating space 225 can fully cool the exhaust gas in the coiled cooling pipe 21, and the coolant in the containing space 226 can fully cool, filter and absorb the exhaust gas.

[0029] In some embodiments, the cooling pipe 21 includes a first end for connecting to the air inlet pipe 201 and a second end for connecting to the air inlet 221. In the gravity direction, the position of the first end is higher than the position of the second end. By setting the position of the first end higher than the position of the second end, it is possible to prevent the liquid in the cooling pipe 21 from flowing back into the process pipe 10.

[0030] In some embodiments, the interior of the body 22 is used to contain coolant, the air inlet 221 is located below the liquid level of the coolant, and the first end is located above the liquid level of the coolant. The location of the air inlet 221 below the liquid level of the coolant can ensure that the exhaust gas can enter the coolant and be fully cooled, filtered and absorbed by the coolant. The location of the first end of the cooling pipe 21 above the liquid level of the coolant can prevent the coolant from flowing back into the process pipe 10 through the cooling pipe 21.

[0031] In some embodiments, the cross-sectional area of ​​the cooling pipe 21 gradually increases in the extension direction from the first end to the second end. The first end of the cooling pipe 21 is used to connect to the air intake pipe 201, and the second end is used to connect to the body 22. According to the variable cross-section one-dimensional steady isentropic flow principle, when the exhaust gas flow rate is less than the speed of sound and the cross-sectional area gradually increases, the flow rate of the gas will gradually decrease. By setting the cross-sectional area of ​​the cooling pipe 21 to gradually increase, the flow rate of the exhaust gas can be reduced so that the exhaust gas can be fully cooled during the flow process and fully filtered and absorbed by the coolant.

[0032] In some embodiments, the air outlet 222 is disposed at the top of the body 22, and the height of the air outlet 222 is higher than the height of the air inlet 221. In this way, the airflow dead angle in the body 22 can be reduced, and the exhaust gas can be filtered and absorbed by the coolant, and less retained in the body 22, and fully enter the air duct 24 or the filter 23.

[0033] In some embodiments, the first valve 231 and the second valve 241 are pneumatic diaphragm valves. Pneumatic diaphragm valves can be opened and closed by high-pressure gas. Setting the first valve 231 and the second valve 241 as pneumatic diaphragm valves can improve the convenience of opening and closing the first valve 231 and the second valve 241.

[0034] In some embodiments, the negative pressure pump 25 is connected to a waste pipe 26. The waste pipe 26 can be connected to the factory service, and the factory service can further recycle or environmentally treat the exhaust gas.

[0035] This application also proposes a diffusion method, combining Figure 3 . Diffusion methods include:

[0036] S10: placing the substrate on a wafer boat and transferring it into the process tube 10.

[0037] The substrate may be pre-treated to remove dirt and damage on the surface. The substrate may also be textured. After the substrate is placed in the wafer boat, it may be transferred to the process tube 10 by the process equipment, so as to prepare for coating in the process tube 10.

[0038] S20: First valve switching, closing the first valve 231 and opening the second valve 241.

[0039] S30: Evacuate and leak test the process pipe.

[0040] In some embodiments, after the wafer boat is transferred into the process tube 10, the inside of the process tube 10 needs to be evacuated and leak-checked. This prevents impurities in the air from affecting the diffusion process. During the evacuation process, the first valve 231 of the exhaust gas treatment component 20 is closed and the second valve 241 is opened. Optionally, in the first valve switching step, the second valve 241 is opened earlier than the first valve 231 is closed. There are basically no dust particles in the exhaust gas during the evacuation process, so it can be directly discharged through the gas pipe 24.

[0041] S40: Inert gas is introduced and the process tube 10 and the wafer boat are heated.

[0042] The inert gas may be preheated. The inert gas in this step may be a protective gas such as nitrogen or argon. The introduction of the inert gas can preheat the wafer boat and the process tube 10. It can also purge the process tube 10 to clean it. In this step, the first valve 231 is closed and the second valve 241 is opened. Since the inert gas in this step basically does not contain dust particles, it can be directly discharged from the gas pipe 24.

[0043] S50: introducing oxygen and inert gas to perform pre-oxidation treatment on the substrate.

[0044] Before the substrate is subjected to a deposition process, a pre-oxidation treatment is required. The pre-oxidation treatment can introduce oxygen and an inert gas into the process tube 10 to oxidize the substrate. The inert gas in this step can be nitrogen or argon.

[0045] S60: The second valve switching is to open the first valve 231 and close the second valve 241 .

[0046] S70: introducing process gas to perform a deposition process on the substrate.

[0047] Among them, the process of depositing the substrate can be carried out in multiple times, and the process gases introduced in the multiple depositions can be the same or different. In the process of performing the deposition process on the substrate. The tail gas of the process pipe 10 will contain components such as boron bromide and boron oxide dust. During the exhaust gas discharge process, the cooler can first cool the exhaust gas and absorb the components such as boron bromide and boron oxide dust in the exhaust gas through the coolant. During the deposition process, the first valve 231 is in an open state and the second valve 241 is in a closed state. Optionally, in the step of switching the valve for the second time, the first valve 231 is opened earlier than the second valve 241 is closed. In this way, the exhaust gas can pass through the filter 23, thereby filtering the exhaust gas for the second time and further reducing the dust particles in the exhaust gas.

[0048] S80: Inert gas is introduced and the process pipe 10 is heated.

[0049] S90: The third valve switching is to close the first valve 231 and open the second valve 241 .

[0050] After deposition, inert gas can be introduced again. The process pipe 10 can be further heated and advanced under the action of process gas and equipment heating. Optionally, in the step of switching the valve for the third time, the timing of opening the second valve 241 is earlier than the timing of closing the first valve 231. Optionally, the timing of the third valve switching is at one tenth, one fifth, one quarter, one third, middle or later time of the duration of step S80. If the valve switching is performed too early, the tail gas of the deposition process may not be purged clean and enter the gas pipe 24 and the negative pressure pump 25. By setting the timing of the third valve switching to be at one tenth, one fifth, one quarter, one third, middle or later time of the duration of step S80, it can be avoided that the tail gas of the deposition process has not been purged clean and enters the gas pipe 24 and the negative pressure pump 25.

[0051] S100: introducing oxygen and inert gas to perform a temperature-lowering oxidation treatment on the substrate.

[0052] After further heating, the process tube 10 needs to be cooled down, and the substrate needs to be cooled down and oxidized to reduce the temperature in the process tube 10, shorten the cooling time, and improve the production capacity.

[0053] S110: Inert gas is introduced to break the vacuum in the process tube 10 and cool the process tube 10.

[0054] After the substrate is cooled and oxidized, an inert gas is introduced into the process tube 10 to break the vacuum in the process tube 10, which is convenient for the removal of the carrier and the substrate. The introduction of the inert gas can also cool the inside of the process tube 10, further facilitating the removal of the carrier and the substrate. The above are only embodiments of the present application, and do not limit the scope of the patent of the present application. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of this application, or directly or indirectly used in other related technical fields, are also included in the scope of patent protection of the present application.

Claims

1. An exhaust gas treatment component, characterized in that: include: An air inlet pipe, used to connect with the process pipe; A cooler, the cooler comprising a body and a cooling pipe, the body having an air inlet and an air outlet, the cooling pipe connecting the air inlet and the air inlet pipe; A filter, the air outlet is communicated with the filter, and a first valve is provided between the filter and the air outlet; A negative pressure pump, wherein the filter is connected to the negative pressure pump; An air passage pipe, one end of which is connected to the air outlet, the other end of which is connected to the negative pressure pump, and the air passage pipe is provided with a second valve.

2. The exhaust gas treatment component according to claim 1, characterized in that: The cooling pipe is coiled around the outer circumference of the body.

3. The exhaust gas treatment component according to claim 1, characterized in that: The body includes an outer shell and an inner shell, the inner shell forms a containing space, and a accommodating space is formed between the outer shell and the inner shell. The containing space and the accommodating space are both used to contain coolant, and the containing space and the accommodating space are isolated, and the volume of the accommodating space is smaller than the volume of the containing space.

4. The exhaust gas treatment component according to claim 1, characterized in that: The cooling duct comprises a first end for connecting with the air intake duct and a second end for connecting with the air intake port; in the direction of gravity, the position of the first end is higher than the position of the second end.

5. The exhaust gas treatment component according to claim 4, characterized in that: The interior of the body is used to contain coolant, the air inlet is located below the liquid level of the coolant, and the first end is located above the liquid level of the coolant.

6. The exhaust gas treatment component according to claim 4, characterized in that: The cross-sectional area of ​​the cooling pipe gradually increases in an extending direction from the first end to the second end.

7. The exhaust gas treatment component according to claim 1, characterized in that: The air outlet is arranged at the top of the main body, and the height of the air outlet is higher than the height of the air inlet.

8. The exhaust gas treatment component according to claim 1, characterized in that: The first valve and the second valve are pneumatic diaphragm valves.

9. The exhaust gas treatment component according to claim 1, characterized in that: The negative pressure pump is connected to the waste discharge pipeline.

10. A coating device, characterized in that: include: The process pipe and the tail gas treatment component according to any one of claims 1 to 9, wherein the process pipe is connected to the air intake pipe of the tail gas treatment component.

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