Sample holder for dipping type tellurium-cadmium-mercury liquid phase epitaxial growth

Abstract

The utility model discloses a sample holder for dipping type tellurium-cadmium-mercury liquid phase epitaxial growth, which comprises a sample holder body and a steam cover, the sample holder body comprises a main body part, N grooves are formed on the peripheral surface of the main body part; the substrate is accommodated in the groove; the base is formed at the bottom of the main body part, and the outer diameter of the base is larger than that of the main body part; the steam cover comprises a cover body which is provided with an internal accommodating cavity and a lower opening; the outer wall face of the base abuts against the bottom end of the cover body, so that the lower opening is completely closed. The lower opening of the steam cover is completely sealed through abutting of the outer wall face of the base and the lower end of the cover body, so that mercury steam in mother liquor cannot enter an inner containing cavity of the steam cover before a substrate is immersed in the mother liquor, after the substrate is immersed in the mother liquor for epitaxial growth film forming and in the mother liquor cooling process; and the mercury steam is prevented from damaging the substrate and a film material epitaxially growing on the substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of new material preparation technology, in particular to a sample rack for immersion type mercury cadmium telluride liquid phase epitaxial growth. Background Art

[0002] Immersion liquid phase epitaxy is one of the main growth methods of HgCdTe thin films, and the sample holder is a key component of immersion liquid phase epitaxy growth. Its structural design directly determines the quality of the thin film material obtained by HgCdTe liquid phase epitaxy growth.

[0003] Figure 1 That is, a sample holder for immersion-type HgCdTe liquid phase epitaxial growth in the prior art is shown, which includes a steam hood 1 and a sample holder 2. Before being immersed in a mother liquid for epitaxial growth, both are located in an inner cavity of a quartz tube 3, and the upper portion of the sample holder 2 extends into the steam hood 1 through a bottom opening of the steam hood 1, and then the sample holder 2 is connected to the steam hood 1, and the formed whole is suspended above the mother liquid L (the mother liquid L is also arranged in the inner cavity of the quartz tube 3); when the mother liquid is controlled to reach an epitaxial growth temperature, the steam hood 1 and the sample holder 2 are separated, and the sample holder 2 moves downward in the steam hood 1 until it is immersed in the mother liquid for epitaxial growth; after the epitaxial growth is completed, the sample holder 2 moves upward in the steam hood 1, and finally the quartz tube 3 is rapidly cooled to cool the mother liquid and obtain an epitaxially grown thin film.

[0004] After the sample holder 2 enters the steam hood 1 through the bottom opening of the steam hood 1, an assembly gap S is formed between the bottom opening of the steam hood 1 and the sample holder 2. The temperature of the mother liquid is generally in the range of 400-550°C. The high temperature causes the mother liquid L to volatilize mercury vapor. The mercury vapor enters the steam hood 1 through the assembly gap S between the steam hood 1 and the sample holder 2 before the sample holder 2 is immersed in the mother liquid, causing erosion on the surface of the substrate on the sample holder 2, affecting the surface roughness and surface state of the substrate. After the epitaxial growth is completed, when the mother liquid is cooled, the high-temperature mercury vapor still enters the steam hood 1 through the assembly gap S, affecting the surface of the thin film on the sample holder 2 that has completed epitaxial growth, thereby affecting the quality of the mercury cadmium telluride epitaxial material finally obtained. Utility Model Content

[0005] The utility model aims to provide a sample holder for immersion type mercury cadmium telluride liquid phase epitaxial growth, which completely closes the lower opening of the steam cover by abutting the outer wall surface of the base with the lower end of the cover body, so that the mercury vapor in the mother liquid cannot enter the internal accommodating cavity of the steam cover before the substrate is immersed in the mother liquid and after the substrate is immersed in the mother liquid for epitaxial growth and film formation, and during the mother liquid cooling process, so as to avoid the mercury vapor from damaging the substrate and the film material epitaxially grown on the substrate.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A sample holder for immersion-type HgCdTe liquid phase epitaxial growth is provided, comprising a sample holder body and a steam cover, wherein the sample holder body comprises: a main body, on the outer peripheral surface of which N grooves are formed; a substrate, which is accommodated in the grooves; and a base, which is formed at the bottom of the main body, and the outer diameter of the base is greater than the outer diameter of the main body;

[0008] The steam hood comprises: a hood body having an internal accommodating cavity and a lower opening;

[0009] The lower opening is completely closed by the abutment between the outer wall surface of the base and the bottom end of the cover body.

[0010] Preferably, the sample holder further comprises: a driving component, which is used to drive the main body to move axially in the internal accommodating cavity.

[0011] Preferably, the main body has an axial cavity inside, and the inner wall surface of the axial cavity is formed with a main body internal thread; the base has a base through hole connected to the axial cavity;

[0012] The driving component extends into the axial cavity through the base through hole and is threadedly connected with the internal thread of the main body.

[0013] Preferably, the base is a truncated cone structure, and an oblique cutout matching the shape of the outer wall of the base is formed on the bottom end of the cover body.

[0014] Preferably, the sample holder further comprises: a main body upper end protrusion, which is formed at the upper end of the main body, and the outer peripheral surface of the main body upper end protrusion has an external thread;

[0015] The steam hood further comprises: a hood upper end protrusion formed at the upper end of the hood, and an inner circumferential surface of the hood upper end protrusion has a hood inner thread matching the outer thread.

[0016] Preferably, the main body, the protrusion on the upper end of the main body and the base are integrally formed.

[0017] Preferably, the cover body and the bulge on the upper end of the cover body are integrally formed.

[0018] Preferably, a plurality of hanging parts are connected to the cover body.

[0019] Preferably, the cover body and the hanging member are integrally formed.

[0020] Preferably, the main body is a hexagonal prism structure, with six grooves formed on its outer peripheral surface, and each groove accommodates a substrate.

[0021] In summary, compared with the prior art, the present invention has the following beneficial effects:

[0022] In the utility model, the lower opening of the steam hood is completely closed by abutting the outer wall surface of the base with the lower end of the hood body, so that the mercury vapor in the mother liquid cannot enter the internal accommodating cavity of the steam hood before the substrate is immersed in the mother liquid and after the substrate is immersed in the mother liquid for epitaxial growth and film formation, and during the cooling of the mother liquid, so as to avoid the mercury vapor from damaging the substrate and the film material epitaxially grown on the substrate; and the protrusions on the upper ends of the main body and the cover body can be threadedly connected, so that the sample holder and the steam hood form a stable whole, and at the same time, multiple substrates can be installed at the same time, thereby improving the efficiency of epitaxial growth. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The figure is a diagram showing the overall structure of a sample holder used for immersion HgCdTe liquid phase epitaxial growth in the prior art.

[0024] Figure 2a It is a front view of the sample rack in the utility model.

[0025] Figure 2b It is a cross-sectional view of the sample holder in the present utility model.

[0026] Figure 3a It is a cross-sectional view of the steam hood in the present utility model.

[0027] Figure 3b It is a top view of the steam hood in the utility model.

[0028] Figure 4 It is a schematic diagram of the working process of the sample rack in the utility model. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0030] Example 1

[0031] like Figure 1 , 2a-2b, 3a-3b, this embodiment provides a sample holder for immersion HgCdTe liquid phase epitaxial growth, which includes:

[0032] The sample holder 200 comprises: a main body 21, on the outer circumference of which N grooves 22 are formed. In this embodiment, N is a positive integer greater than or equal to 4, for example, in this embodiment, N=6, and the main body 21 is a hexagonal prism structure as a whole; a substrate is accommodated in the grooves 22. In this embodiment, each groove 22 accommodates one substrate; and a base 25 formed at the bottom of the main body 21, and the outer diameter of the base 25 is greater than the outer diameter of the main body 21;

[0033] The steam cover 300 comprises: a cover body 31 which is a cylindrical structure as a whole and has an internal accommodating cavity 32 and a lower opening 33;

[0034] and a driving component 100, which is used to drive the main body 21 to move axially in the internal accommodating cavity 32;

[0035] The driving component 100, the sample holder 200, and the steam cover 300 are all contained in the inner cavity of the quartz tube, and the lower opening 33 is completely closed by the abutment between the outer wall of the base 25 and the bottom end of the cover 31;

[0036] The sample holder 200 extends from the lower opening 33 of the steam cover 300 into the internal accommodating chamber 32, and the driving component 100 drives the main body 21 to move axially upward in the internal accommodating chamber 32 until the outer wall surface of the base 25 abuts against the bottom end of the cover body 31 to achieve complete closure of the lower opening 33, thereby avoiding the formation of an assembly gap at the lower opening 33 of the steam cover 300, so that the mercury vapor in the quartz tube cannot enter the internal accommodating chamber 32 of the steam cover 300.

[0037] Preferably, in this embodiment, the base 25 can be a truncated cone structure, and an oblique cutout 34 matching the shape of the outer wall of the base 25 is formed on the bottom end of the cover body 31, thereby matching the oblique outer wall of the truncated cone with the oblique cutout 34, extending the flow path of mercury vapor into the interior of the steam cover 300 through the gap between the two, thereby enhancing the sealing effect.

[0038] The working process of the sample rack in this embodiment is as follows:

[0039] like Figure 4 As shown in part (a), the driving component 100 is matched with the sample holder 200, and then the sample holder 200 is extended into the internal accommodating cavity 32 from the lower opening 33 of the steam cover 300;

[0040] like Figure 4 As shown in part (b) of the figure, the driving component 100 drives the main body 21 to move axially upward in the internal accommodating cavity 32 until the outer wall surface of the base 25 abuts against the oblique cutout 34 to achieve complete closure of the lower opening 33;

[0041] The sample holder 200 and the steam cover 300 are suspended as a whole above the mother liquid (also disposed in the inner cavity of the quartz tube). At this time, since the lower opening 33 of the steam cover 300 is completely closed, the high-temperature mercury vapor generated by the volatilization of the mother liquid L cannot enter the inner accommodating cavity 32, further preventing the substrate in the groove 22 from being corroded by the mercury vapor;

[0042] like Figure 4 As shown in part (c) of the figure, after the mother liquid is heated, the driving component 100 drives the main body 21 to move axially downward in the internal accommodating chamber 32 until the substrate is partially / entirely immersed in the mother liquid to start epitaxial growth, and a mercury cadmium telluride thin film is obtained after a predetermined time, as shown in FIG. Figure 4 As shown in part (d) of the figure, the driving component 100 drives the main body 21 to move axially upward in the internal accommodating chamber 32 again until the outer wall surface of the base 25 abuts against the oblique cutout 34 again to close the lower opening 33 again, and cool the quartz tube to cool the mother liquid. At this time, the high-temperature mercury vapor still cannot enter the internal accommodating chamber 32, and will not affect the quality of the surface of the epitaxially grown mercury cadmium telluride film.

[0043] Therefore, in this embodiment, the main body 21 can be driven to move axially by the driving component 100, so that the outer wall surface of the base 25 abuts against the oblique cutout 34, so as to completely close the lower opening 33 of the steam cover 300, thereby preventing the lower opening 33 of the steam cover 300 from forming an assembly gap, so that mercury vapor cannot enter the internal accommodating cavity 32 of the steam cover 300 before the substrate is immersed in the mother liquid and after the substrate is immersed in the mother liquid for epitaxial growth and film formation, and during the mother liquid cooling process, thereby preventing the mercury vapor from damaging the substrate and the epitaxially grown film material on the substrate;

[0044] At the same time, more than four substrates can be installed on the main body 21 at the same time, thereby improving the efficiency of epitaxial growth and meeting the needs of mass production.

[0045] Embodiment 2:

[0046] The difference between this embodiment and the first embodiment is that the main body 21 has an axial cavity 26 inside, and the inner wall surface of the axial cavity 26 is formed with a main body internal thread 28; the base 25 has a base through hole 27 connected to the axial cavity 26;

[0047] The driving component 100 extends into the axial cavity 26 through the base through hole 27 and is threadedly connected with the internal thread 28 of the main body;

[0048] The driving component 100 is rotatable, and when rotating, the main body 21 is moved axially in the internal accommodation cavity 32 through thread transmission.

[0049] For example, in this embodiment, the driving component 100 can be a rod-shaped member having an external thread threadedly connected to the internal thread 28 of the main body, and the driving component 100 can be rotated by a motor and other equipment and the setting of a related control program, thereby realizing automatic control to improve work efficiency.

[0050] Embodiment 3:

[0051] The difference between this embodiment and embodiment 1 or 2 is that the sample holder 200 further includes: a main body upper end protrusion 23, which is formed at the upper end of the main body 21 and extends to the outside of the main body 21, and the outer peripheral surface of the main body upper end protrusion 23 has an external thread 24; in this embodiment, the main body 21, the main body upper end protrusion 23 and the base 25 can be integrally formed;

[0052] At the same time, the steam cover 300 further includes: a cover upper end protrusion 35, which is formed at the upper end of the cover 31 and extends to the outside of the cover 31, and the inner circumferential surface of the cover upper end protrusion 35 has a cover internal thread 36; in this embodiment, the cover 31 and the cover upper end protrusion 35 are integrally formed;

[0053] The driving component 100 drives the main body 21 to move axially upward in the internal accommodating cavity 32 by rotating until the outer wall surface of the base 25 abuts against the oblique cutout 34, and at the same time, the upper protrusion 23 of the main body and the upper protrusion 35 of the cover are threadedly connected through the external thread 24 and the internal thread 36 of the cover, thereby forming a stable whole with the sample holder 200 and the steam cover 300;

[0054] When the driving component 100 drives the main body 21 to move axially downward in the internal accommodating cavity 32 by rotation, the upper end protrusion 23 of the main body can be completely / partially removed from the upper end protrusion 35 of the cover body, thereby allowing the substrate to be partially / completely immersed in the mother liquid.

[0055] Embodiment 4:

[0056] The only difference between this embodiment and any one of embodiments 1-4 is that a plurality of hanging parts 37 are connected to the cover body 31 so as to suspend the cover body 31 through the hanging parts 37. In this embodiment, there may be four hanging parts 37, which are evenly arranged along the circumferential direction. At the same time, the cover body 31 may be integrally formed with the hanging parts 37.

[0057] In summary, the utility model drives the main body to move axially through the driving component, so that the outer wall surface of the base abuts against the lower end of the cover body to completely close the lower opening of the steam cover, so that the mercury vapor in the mother liquid cannot enter the internal accommodating cavity of the steam cover before the substrate is immersed in the mother liquid and after the substrate is immersed in the mother liquid for epitaxial growth and film formation, and during the cooling of the mother liquid, thereby avoiding damage of the substrate and the film material epitaxially grown on the substrate by the mercury vapor; and the protrusions on the upper end of the main body and the protrusions on the upper end of the cover body can be threadedly connected, thereby forming a stable whole of the sample holder and the steam cover. At the same time, more than 4 substrates can be installed on the main body at the same time, thereby improving the efficiency of epitaxial growth and meeting the needs of mass production.

[0058] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A sample holder for immersion HgCdTe liquid phase epitaxial growth, comprising a sample holder and a steam cover, characterized in that: The sample holder comprises: a main body, on the outer circumference of which N grooves are formed; a substrate, which is accommodated in the grooves; and a base, which is formed at the bottom of the main body, and the outer diameter of the base is larger than the outer diameter of the main body; The steam hood comprises: a hood body having an internal accommodating cavity and a lower opening; The lower opening is completely closed by the abutment between the outer wall surface of the base and the bottom end of the cover body.

2. The sample holder according to claim 1, characterized in that The sample holder further comprises: a driving component, which is used to drive the main body to move axially in the internal accommodating cavity.

3. The sample holder according to claim 2, characterized in that The main body has an axial cavity inside, and the inner wall surface of the axial cavity is formed with a main body internal thread; the base has a base through hole connected to the axial cavity; The driving component extends into the axial cavity through the base through hole and is threadedly connected with the internal thread of the main body.

4. The sample holder according to claim 1, characterized in that The base is a truncated cone structure, and an oblique cutout matching the shape of the outer wall of the base is formed on the bottom end of the cover body.

5. The sample holder according to claim 1, characterized in that The sample holder also includes: a main body upper end protrusion, which is formed at the upper end of the main body, and the outer peripheral surface of the main body upper end protrusion has an external thread; The steam hood further comprises: a hood upper end protrusion formed at the upper end of the hood, and an inner circumferential surface of the hood upper end protrusion has a hood inner thread matching the outer thread.

6. The sample holder according to claim 5, characterized in that The main body, the upper end protrusion of the main body and the base are integrally formed.

7. The sample holder according to claim 6, characterized in that The cover body and the convexity at the upper end of the cover body are integrally formed.

8. The sample holder according to claim 1, characterized in that: The cover body is connected with a plurality of hanging parts.

9. The sample holder according to claim 8, characterized in that The cover body and the hanging component are integrally formed.

10. The sample holder according to claim 1, characterized in that The main body is a hexagonal column structure, with 6 grooves formed on its outer peripheral surface, and each groove corresponds to accommodating a substrate.

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