Test die for section sample of scanning probe microscope

Abstract

The utility model provides a scanning probe microscope cross-section sample test die which comprises a die bottom, a first part and a second part, and the first part and the second part protrude out of the die bottom, and the whole die is of a U-shaped structure. In the first part, the side surface facing the second part is called a surface A; the second part is provided with a bolt; during testing, the section sample is located between the first part and the second part, the section to be tested is horizontal, one side face of the section sample abuts against the A face of the first part, and the other side face of the section sample is fixed through a fastener. When a scanning probe microscope is used for testing a section sample, the mold can ensure that the sample is fixed well, the replacement is simple, and the test is stable.

Description

Technical Field

[0001] The utility model belongs to the technical field of scanning probe microscopes, in particular to a scanning probe microscope cross-section sample testing mold. Background Art

[0002] Scanning probe microscopy (SPM) is an instrument that provides high-resolution information about surface properties. Using a scanning probe microscope, samples can be tested at the nanoscale, such as cross-sectional morphology testing, cross-sectional electrical testing, etc. Electrical testing includes electrical information such as cross-sectional contact potential difference, electric field distribution, interface defects, and electrical conductivity.

[0003] For example, a solar cell is a semiconductor device that uses the photovoltaic effect to convert solar energy into electrical energy. Its internal structure directly affects its performance. Therefore, cross-sectional testing of solar cells to obtain microscopic information can provide researchers with important reference opinions on improving the structure and performance of solar cells.

[0004] However, when using a scanning probe microscope to test cross-sectional samples, adhesives are usually used to fix the samples before testing. In this method, the adhesive directly contacts the sample, which poses a risk of contamination, and the curing time is long. In addition, additional processing is required when replacing cross-sectional samples, which reduces the detection efficiency. Therefore, when using a scanning probe microscope for testing, protecting the cross-sectional area to be tested from contamination, fixing the cross-sectional sample well, and replacing the sample simply and efficiently are prerequisites for achieving true, stable, and efficient testing. Utility Model Content

[0005] In view of the above technical status, the utility model provides a scanning probe microscope cross-section sample test mold. When using the scanning probe microscope to test the cross-section sample, the mold can ensure that the sample is well fixed, the replacement is simple, and the test is stable.

[0006] The technical solution provided by the utility model is: a scanning probe microscope cross-section sample testing mold, including a mold bottom and a first part and a second part protruding from the mold bottom, and the overall structure is U-shaped; in the first part, the side facing the second part is called the A side; the second part is provided with a fastener; during testing, the cross-section sample is located between the first part and the second part, the cross-section to be tested is horizontal, one side of the cross-section sample is close to the A side of the first part, and the other side is fixed by the fastener.

[0007] The source of the cross-sectional sample is not limited, and may be, for example, a semiconductor material sample.

[0008] Preferably, the A surface of the first part is a planar structure.

[0009] Preferably, the fastener is a bolt structure passing through the second portion, and the other side surface is clamped and fixed by the bolt structure.

[0010] Preferably, the surface A of the first part is provided with a plurality of clamps that can be opened and closed on the surface A, so as to press the cross-section sample onto the surface A.

[0011] As an implementation method, the clamp includes a clip and an opening and closing mechanism, the clip is connected to the A surface through the opening and closing mechanism, the end of the clip is pressed, the front end of the clip is lifted up and leaves the A surface, and is in an open state, the end of the clip is removed, the end of the clip is lifted, and the front end of the clip falls and closes with the A surface. The opening and closing mechanism is not limited, for example, the opening and closing mechanism includes a spring, which can be a compression spring or a torsion spring, and the front end of the clip is opened and closed under the elastic force of the spring. As a further preferred embodiment, a limit column is used to limit the opening height of the clip, for example, the limit column passes through the clip and is fixed on the A surface, and the opening height of the clip is limited by the height of the limit column.

[0012] Preferably, the material of surface A is an insulating material, preferably an insulating plastic. Each clip is conductive and connected to a conductive lead. In this structure, the cross-sectional sample is provided with positive and negative electrodes and is not short-circuited, and can be used to test the electrical properties of the cross-sectional sample under an applied voltage condition. During the test, press the tail of a clip so that one end of it presses the positive electrode of the cross-sectional sample and the other end is connected to the positive electrode of the power supply. Press the tail of another conductive clip so that one end of it presses the negative electrode of the cross-sectional sample and the other end is connected to the negative electrode of the power supply.

[0013] Preferably, a heating element is provided at the bottom of the mold for heating the cross-sectional sample. As an implementation, the heating element is a thermistor heating sheet. Preferably, a groove for accommodating the heating element is provided at the bottom of the mold. This structure can be used for heating tests, such as microscopic tests of the difference in cross-section to be measured before and after constant heating conditions, microscopic tests of the difference in cross-section to be measured before and after variable temperature heating conditions, and microscopic tests of the change of cross-section to be measured over time under heating conditions. As a further preference, the heating temperature and heating time of the sample are controlled by changing the voltage applied to the heating element.

[0014] The method for preparing the cross-section sample is not limited, for example, the test sample is cut to directly expose the test area.

[0015] The source of the sample is not limited, for example, it can be a solar cell sample. By obtaining the microscopic information of the cell sample through cross-section testing of the solar cell sample, it can provide researchers with important reference opinions on the improvement of solar cell structure and performance enhancement.

[0016] Preferably, in the horizontal direction of the cross section, the size of the cross section sample is less than or equal to 30 mm, and in the vertical direction of the cross section, the size of the cross section sample is between 13 mm and 20 mm.

[0017] The method of using the scanning probe microscope cross-section sample testing mold capable of being heated and voltage applied is as follows:

[0018] (1) Place the cross-sectional sample between the first part and the second part, with one side thereof close to the A surface of the first part, keep the cross-sectional sample to be measured horizontal, and the cross-sectional sample to be measured protrudes from the surface of the first part, preferably slightly protrudes from the surface of the first part, rotate the bolt to make it contact and clamp the other side of the cross-sectional sample, thereby fixing the cross-sectional sample; rotate the clamp and press its tail so that its front end contacts and presses the cross-sectional sample.

[0019] (2) Fix the cross-section sample mold onto the scanning probe microscope sample stage and keep the cross section to be measured horizontal.

[0020] (3) After the test, remove the mold from the sample table, loosen the fixing bolts and clamps, and take out the cross-section sample.

[0021] Compared with the prior art, the utility model provides a mold to fix the sample when using a scanning probe microscope to test a cross-sectional sample. The mold has a simple structure, and the sample can be easily installed, fixed, disassembled and replaced. The mold can provide fixation, heating and pressurization functions for the sample, thereby not only realizing conventional cross-sectional morphology testing and cross-sectional electrical performance testing, but also realizing electrical performance testing under external voltage conditions, cross-sectional performance testing under different temperature conditions, etc. It is an auxiliary device for testing cross-sectional samples using a scanning probe microscope, and has good application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 1 is a front view of the scanning probe microscope cross-section sample test mold in Example 1.

[0023] Figure 2 yes Figure 1 Schematic diagram of the structure of the middle clip.

[0024] Figure 3 yes Figure 2 Top view of the .

[0025] Figure 4 This is a right view of the scanning probe microscope cross-section sample test mold in Example 1.

[0026] Figure 5 It is a schematic diagram of testing a cross-section sample using a scanning probe microscope in Example 1.

[0027] Figure 6 This is a right view of the scanning probe microscope cross-section sample test mold in Example 2.

[0028] Figure 7 1 is a front view of the scanning probe microscope cross-section sample test mold in Example 3.

[0029] Attached Figure 1-7 The numbers in the figure are: mold bottom 1, first part 2, second part 3, bolt 4, clip 5, front end of clip 6, end of clip 7, conductive lead 8, heating element 9, cross-sectional sample 10, cross-sectional area to be measured 11, one side of the cross-sectional sample 12, another side of the cross-sectional sample 13, surface of the first part 14, sample table 15, probe 16, limit column 17, spring 18. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with the embodiments and drawings. It should be pointed out that the embodiments described below are intended to facilitate the understanding of the present invention and do not have any limiting effect on the present invention.

[0031] Embodiment 1:

[0032] like Figure 1-5 As shown, the scanning probe microscope cross-section sample test mold includes a mold bottom 1 and a first part 2 and a second part 3 protruding from the mold bottom 1. The mold bottom 1, the first part 2 and the second part 3 are overall in a U-shaped structure.

[0033] In the first part 2, the side facing the second part 3 is called the A surface, and the A surface is a plane structure. The second part 3 is provided with a fixing bolt 4. The A surface of the first part 2 is provided with at least two clamping pieces 5 that can be opened and closed on the A surface, which are used to press the sample on the A surface.

[0034] Each clip 5 is connected to the A surface via a spring 18. By pressing the end 7 of the clip 5, the spring 18 is compressed, and the front end 6 of the clip 5 tilts upward away from the A surface, presenting an open state. The opening height of the clip 5 is limited by a limiting column 17. The limiting column 17 passes through the clip 5 and is fixed to the A surface. The tilting height of the front end 6 of the clip depends on the height of the limiting column 17. When the pressure on the end 7 of the clip is removed, the spring 15 returns to its natural state, the end 7 of the clip is lifted, and the front end 6 of the clip falls down and closes with the A surface to press the A surface.

[0035] The method for testing cross-section samples using a scanning probe microscope is as follows:

[0036] (1) Place the cross-sectional sample 10 between the first part 2 and the second part 3, keep the cross-sectional surface 11 of the cross-sectional sample 10 horizontal, one side surface 12 of the cross-sectional sample 10 close to the A surface of the first part 2, and the cross-sectional surface 11 protrudes from the surface 14 of the first part, and rotate the bolt 4 to make it contact and clamp the other side surface 13 of the cross-sectional sample;

[0037] (2) Press the end 7 of the clamp so that its front end 6 contacts and presses the cross-section sample;

[0038] (3) Fixing the mold on the scanning probe microscope sample stage 15, keeping the cross section to be tested horizontal, and the probe 16 facing the cross section to be tested 11 during the test, and performing cross section morphology test, cross section electrical test, etc., wherein the electrical test includes electrical information such as cross section contact potential difference, electric field distribution, interface defects, and electrical conductivity;

[0039] (4) After the test, remove the mold from the sample table, loosen the fixing bolts and clamps, and take out the cross-section sample.

[0040] Embodiment 2:

[0041] In this embodiment, the mold structure is basically the same as that of embodiment 1, except that: Figure 6 As shown, the material of surface A is insulating plastic, each clip is made of metal and is conductive, the front end 6 of each clip can press the cross-section sample against surface A, and the end 7 of the clip is connected to the conductive lead 8. The cross-section sample is provided with positive and negative electrodes without short circuit.

[0042] The method for testing cross-section samples using a scanning probe microscope is as follows:

[0043] (1) The same as step (1) in Example 1;

[0044] (2) Press the end 7 of one clip so that its front end 6 presses the positive electrode of the cross-section sample, and the other end is connected to the positive electrode of the power supply; press the end 7 of another conductive clip so that its front end 6 presses the negative electrode of the cross-section sample, and the other end is connected to the negative electrode of the power supply.

[0045] (3) The mold is fixed on the scanning probe microscope sample stage 15, and the cross section to be tested is kept horizontal. During the test, the probe 16 is facing the cross section to be tested 11. Not only can the cross section morphology test and cross section electrical test be performed, where the electrical test includes electrical information such as cross section contact potential difference, electric field distribution, interface defects, and conductivity, but also the electrical performance test of the cross section sample under the condition of applied voltage can be performed.

[0046] (4) After the test, remove the mold from the sample table, loosen the fixing bolts and clamps, and take out the cross-section sample.

[0047] Embodiment 3:

[0048] In this embodiment, the mold structure is the same as that of embodiment 2, except that: Figure 7 As shown, a heating element 9 is also provided at the bottom 1 of the mold for heating the cross-section sample. In this embodiment, the heating element 9 is a thermic heating sheet, and a groove for accommodating the heating element is provided at the bottom 1 of the mold. The heating temperature and heating time can be controlled by changing the voltage applied to the heating element.

[0049] The method of testing cross-sectional samples using a scanning probe microscope is basically the same as that in Example 2, with the difference being that this structure can be used not only to perform cross-sectional morphology tests and cross-sectional electrical tests, where the electrical tests include electrical information such as cross-sectional contact potential difference, electric field distribution, interface defects, and conductivity, but also to perform electrical performance tests of cross-sectional samples under applied voltage conditions, and can also perform heating tests, such as microscopic tests of the differences in cross-sectional areas before and after constant heating conditions, microscopic tests of the differences in cross-sectional areas before and after variable temperature heating conditions, and microscopic tests of changes in cross-sectional areas over time under heating conditions.

[0050] Embodiment 4:

[0051] In this embodiment, the heatable and pressurizable mold in Embodiment 3 is used to test the cross-section samples of solar cells.

[0052] The method for preparing the cross-section sample is: first use a cutting tool and a sample breaking fixture to cut the test sample so that the test area is directly exposed, and cut the sample size to fit the mold size.

[0053] The embodiments described above provide a detailed description of the technical solution of the utility model. It should be understood that the above is only a specific embodiment of the utility model and is not intended to limit the utility model. Any modifications, supplements or similar substitutions made within the scope of the principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A scanning probe microscope cross-section sample test mold, characterized by: It includes a mold bottom and a first part and a second part protruding from the mold bottom, and the whole is a U-shaped structure; In the first part, the side facing the second part is called the A side; The second portion is provided with a fastener; During testing, the cross-sectional sample is located between the first part and the second part, the cross-sectional area to be tested is horizontal, one side of the cross-sectional sample is close to the A side of the first part, and the other side is fixed by the fastener.

2. The scanning probe microscope cross-section sample testing mold according to claim 1, characterized in that: The A surface of the first part is a planar structure.

3. The scanning probe microscope cross-section sample testing mold according to claim 1, characterized in that: The fastener is a bolt structure passing through the second portion, and the other side surface is clamped and fixed by the bolt structure.

4. The scanning probe microscope cross-section sample testing mold according to claim 1, characterized in that: The A surface of the first part is provided with a plurality of clamps which can be opened and closed on the A surface and are used to press the cross-section sample on the A surface.

5. The scanning probe microscope cross-section sample testing mold according to claim 4, characterized in that: The clamp includes a clip and an opening and closing mechanism, wherein the clip is connected to the A surface via the opening and closing mechanism. When the end of the clip is pressed, the front end of the clip is lifted up and away from the A surface, presenting an open state. When the pressure on the end of the clip is removed, the end of the clip is lifted up, and the front end of the clip falls down and closes with the A surface.

6. The scanning probe microscope cross-section sample testing mold according to claim 5, characterized in that: The opening and closing mechanism comprises a spring, and the front end of the clip is opened and closed under the elastic force of the spring.

7. The scanning probe microscope cross-section sample testing mold according to claim 5, characterized in that: The limit column is used to limit the opening height of the clip.

8. The scanning probe microscope cross-section sample testing mold according to claim 7, characterized in that: The limiting column is fixed on the A surface through the clip.

9. The scanning probe microscope cross-section sample testing mold according to claim 5, characterized in that: The material of the A surface is an insulating material, there are at least two clips, each clip is conductive, and each clip is connected to a conductive lead; the cross-sectional sample is provided with positive and negative electrodes and is not short-circuited.

10. The scanning probe microscope cross-section sample testing mold according to claim 9, characterized in that: During the test, the front end of one clip presses the positive electrode of the cross-section sample, and the end is connected to the positive electrode of the power supply. The front end of another conductive clip presses the negative electrode of the cross-section sample, and the end is connected to the negative electrode of the power supply.

11. The scanning probe microscope cross-section sample testing mold according to claim 1, characterized in that: A heating element is arranged at the bottom of the mold for heating the cross-section sample.

12. The scanning probe microscope cross-section sample testing mold according to claim 11, characterized in that: The bottom of the mold is provided with a groove for accommodating the heating element.

13. The scanning probe microscope cross-section sample testing mold according to any one of claims 1 to 12, characterized in that: In the horizontal direction of the cross section, the size of the cross section sample is less than or equal to 30 mm, and in the vertical direction of the cross section, the size of the cross section sample is between 13 mm and 20 mm.

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