Carrier used in wafer manufacturing process

Abstract

The carrier comprises a box body and a box cover covering the box body, the front side of the box body is open and extends inwards to form a containing cavity, a plurality of clamping grooves are correspondingly formed in the inner walls of the two sides of the containing cavity from top to bottom, the box cover is arranged in a light-closed and non-transparent mode, a rectangular visible through hole is formed in the center of the front side of the box cover, and the front side of the box cover is provided with a through hole. A visible through hole is formed in the front side of the box cover, a visible transparent plate used for sealing the visible through hole is fixedly installed in the visible through hole, the visible transparent plate is arranged close to the rear end of the visible through hole, a movable light shielding plate is arranged in the visible through hole, and the light shielding plate is located in front of the visible transparent plate. The visible transparent plate is covered by the movable shading plate, and in a normal conveying state, the visible transparent plate is covered by the shading plate, so that the whole box cover is light-proof; when the internal wafer needs to be observed, the shading plate is opened, the internal condition is observed through the visible transparent plate, and the box cover is prevented from being opened.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer packaging, in particular to a carrier used in a wafer manufacturing process. Background Art

[0002] When wafers flow between various process technologies, packaging carriers, namely wafer transfer boxes, are required. The covers of existing wafer transfer boxes can be roughly divided into two categories, one is a transparent cover and the other is a non-transparent cover. For the transparent cover, the advantage is that the internal wafer status, such as the number of wafers, placement position, etc., can be clearly seen, but it cannot block the external light, and the exposure to external light is likely to cause failure and damage to the internal wafers. For the light-shielding (non-transparent) cover, the advantage is that it can effectively block the external light, but the internal wafer status cannot be observed. If you want to observe the internal wafer status, you must open the cover. At this time, the dust in the environment will inevitably contaminate the wafer surface. Utility Model Content

[0003] In order to solve the above-mentioned deficiencies in the prior art, the utility model provides a carrier used in a wafer manufacturing process.

[0004] In order to achieve the above technical effects, the utility model adopts the following scheme:

[0005] A carrier used in a wafer manufacturing process comprises a box body and a box cover covering the box body, the front side of the box body is open and extends inward to form a accommodating cavity, a plurality of spaced slots are correspondingly arranged on the inner walls on both sides of the accommodating cavity from top to bottom, the box cover is light-proof and opaque, a rectangular visible through hole is opened at the front center of the box cover, the upper and lower ends of the visible through hole are arranged close to the upper edge and the lower edge of the box cover respectively, a visible transparent plate for sealing the visible through hole is fixedly installed in the visible through hole, the visible transparent plate is arranged close to the rear end of the visible through hole, a movable shading plate is arranged in the visible through hole, and the shading plate is arranged in front of the visible transparent plate.

[0006] A preferred technical solution is that the shading plate is arranged to move vertically, and a socket is provided at the upper end of the box cover and extends downward to communicate with the upper end of the visible through hole, and the socket is located in front of the visible transparent plate. The socket matches the size of the shading plate, and the width of the socket is larger than the width of the visible through hole. There are slots vertically connected to the socket on both side walls of the visible through hole, and the slots match the two side edges of the shading plate. The shading plate is inserted into the visible through hole through the socket, and the two side edges of the shading plate are respectively inserted into the slots on both sides.

[0007] A preferred technical solution is that the shading plate is arranged to move horizontally, a sliding hole extending horizontally inward is opened on the side wall of the visible through hole, the height of the sliding hole is arranged along the height of the visible through hole, the sliding hole matches the shading plate, the shading plate is horizontally inserted into the sliding hole and slides, and the width of the sliding hole is smaller than the width of the shading plate.

[0008] According to a preferred technical solution, a sliding hole is respectively provided on the side walls of both sides of the visible through hole, the two sliding holes are symmetrically arranged, and a shading plate is slidably matched in the two sliding holes.

[0009] According to a preferred technical solution, a limiting slide groove is provided at the upper end and / or the lower end of the slide hole, and the limiting slide groove extends along the slide hole from an end of the slide hole away from the visible through hole, and an end of the limiting slide groove facing the visible through hole is close to the visible through hole but not connected to the visible through hole.

[0010] According to a preferred technical solution, a circle of grooves is provided on the side wall of the visible through hole around the sliding hole, and the grooves are connected to the sliding hole, a rubber pad is fixedly embedded in the groove, and the rubber pad has a through hole connected to the sliding hole for the sunshade to pass through, and the inner wall of the through hole is arranged on the surface of the sunshade.

[0011] According to a preferred technical solution, a plurality of convex marks are protruding from the front side surface of the shading plate, and the convex marks are arranged near the edge of one end of the shading plate extending out of the sliding hole.

[0012] According to a preferred technical solution, the shading plate is attached to the front side of the visible transparent plate.

[0013] Compared with the prior art, the beneficial effects are:

[0014] The utility model has a simple structure and is easy to use. A visible transparent plate is installed on the front side of the box cover, and a movable shading plate is used to shield the visible transparent plate. In a normal conveying state, the shading plate covers the visible transparent plate, and the entire box cover is opaque. When it is necessary to observe the internal wafers, the shading plate is opened, and the internal situation is observed through the visible transparent plate, avoiding opening the box cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a cross-sectional schematic diagram of Example 1 of the utility model;

[0016] Figure 2 It is a front view schematic diagram of Example 1 of the utility model;

[0017] Figure 3 It is a front cross-sectional schematic diagram of the box cover of Example 1 of the utility model;

[0018] Figure 4 It is a front cross-sectional schematic diagram of the box cover of Example 2 of the present utility model.

[0019] Figure numerals: 1, box body; 2, box cover; 3, card slot; 4, visible transparent plate; 5, shading plate; 6, convex mark; 7, sliding hole; 8, limiting sliding groove; 9, limiting sliding block; 10, slot. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0021] Example 1

[0022] A carrier used in a wafer manufacturing process, comprising a box body 1 and a box cover 2 covering the box body 1, wherein the front side of the box body 1 is open and extends inwardly to form a receiving cavity, and a plurality of slots 3 are correspondingly arranged on the inner walls of both sides of the receiving cavity from top to bottom, and a wafer is horizontally placed in the box body 1 through the slots 3, and then the box body 1 is covered by the box cover 2, using the existing technology;

[0023] The box cover 2 is set to be light-proof and opaque, and a rectangular visible through hole is opened at the front center of the box cover 2, and the visible through hole corresponds to the front opening of the box body 1. The upper and lower ends of the visible through hole are respectively arranged close to the upper edge and the lower edge of the box cover 2, and a visible transparent plate 4 for sealing the visible through hole is fixedly installed in the visible through hole, and the visible transparent plate 4 is arranged close to the rear end of the visible through hole. A movable shading plate 5 is arranged in the visible through hole, and the shading plate 5 is arranged in front of the visible transparent plate 4.

[0024] By installing a visible transparent plate 4 on the front side of the box cover 2 and shielding the visible transparent plate 4 with a movable shading plate 5, under normal conveying conditions, the shading plate 5 covers the visible transparent plate 4, and the entire box cover 2 is opaque; when it is necessary to observe the internal wafers, the shading plate 5 is opened, and the internal situation is observed through the visible transparent plate 4 to avoid opening the box cover 2.

[0025] Specifically, the shading plate 5 is arranged to move horizontally, and a sliding hole 7 extending horizontally inward is opened on the side wall of the visible through hole, extending from the side wall of the visible through hole to the side wall of the box cover 2, and the height of the sliding hole 7 is set along the height of the visible through hole. The sliding hole 7 matches the shading plate 5, so that the shading plate 5 can completely cover the visible transparent plate 4. The shading plate 5 is horizontally inserted into the sliding hole 7 and slides. The width of the sliding hole 7 is smaller than the width of the shading plate 5. After opening the shading plate 5 and moving the shading plate 5 into the sliding hole 7, a part of the shading plate 5 still remains outside the sliding hole 7, so that the shading plate 5 can be pulled when closing.

[0026] Specifically, a sliding hole 7 is provided on each side wall of the visible through hole, and the two sliding holes 7 are symmetrically arranged. A shading plate 5 is slidably matched in the two sliding holes 7. The two shading plates 5 are installed to form a split setting, which can maximize the width of the visible through hole at the center of the front side of the box cover 2 and improve the observation field of view.

[0027] Specifically, a limiting slot 8 is provided at the upper end and / or the lower end of the slide hole 7, and the limiting slot 8 is extended from the end of the slide hole 7 away from the visible through hole along the slide hole 7, and the limiting slot 8 is close to the visible through hole but not connected to the visible through hole at the end thereof facing the visible through hole. A limiting slider 9 matching and embedded in the limiting slot 8 is fixed at one end of the visible through hole of the shading plate 5, and when the shading plate 5 slides in the slide hole 7, the limiting slider 9 slides in the limiting slot 8. The limitation of the limiting slot 8 can prevent the shading plate 5 from being completely pulled out of the slide hole 7 when the shading plate 5 is pulled out.

[0028] Specifically, a circle of grooves is provided on the side wall of the visible through hole around the sliding hole 7, and the grooves are connected to the sliding hole 7. A rubber pad is fixedly embedded in the groove. The rubber pad has a through hole connected to the sliding hole 7 for the shading plate 5 to pass through. The inner wall of the through hole is arranged on the surface of the shading plate 5. The friction force is increased by the contact between the rubber pad and the shading plate 5, and damping is provided to prevent the shading plate 5 from moving on its own without applying external force.

[0029] Specifically, a plurality of convex marks 6 are protruding from the front side of the shading plate 5 , and the convex marks 6 are arranged near the edge of one end of the shading plate 5 extending out of the sliding hole 7 . The shading plate 5 can be moved by pressing the convex marks 6 with fingers to avoid slipping.

[0030] Specifically, the shading plate 5 is attached to the front side of the visible transparent plate 4 .

[0031] Example 2

[0032] A carrier used in a wafer manufacturing process, comprising a box body 1 and a box cover 2 covering the box body 1, wherein the front side of the box body 1 is open and extends inwardly to form a receiving cavity, and a plurality of slots 3 are correspondingly arranged on the inner walls of both sides of the receiving cavity from top to bottom, and a wafer is horizontally placed in the box body 1 through the slots 3, and then the box body 1 is covered by the box cover 2, using the existing technology;

[0033] The box cover 2 is set to be light-proof and opaque, and a rectangular visible through hole is opened at the front center of the box cover 2, and the visible through hole corresponds to the front opening of the box body 1. The upper and lower ends of the visible through hole are respectively arranged close to the upper edge and the lower edge of the box cover 2, and a visible transparent plate 4 for sealing the visible through hole is fixedly installed in the visible through hole, and the visible transparent plate 4 is arranged close to the rear end of the visible through hole. A movable shading plate 5 is arranged in the visible through hole, and the shading plate 5 is arranged in front of the visible transparent plate 4.

[0034] By installing a visible transparent plate 4 on the front side of the box cover 2 and shielding the visible transparent plate 4 with a movable shading plate 5, under normal conveying conditions, the shading plate 5 covers the visible transparent plate 4, and the entire box cover 2 is opaque; when it is necessary to observe the internal wafers, the shading plate 5 is opened, and the internal situation is observed through the visible transparent plate 4 to avoid opening the box cover 2.

[0035] Specifically, the shading plate 5 is arranged to move vertically, and the upper end of the box cover 2 is provided with a plug hole extending downward and communicating with the upper end of the visible through hole, and the plug hole is located in front of the visible transparent plate 4, and the plug hole matches the size of the shading plate 5, and the width of the plug hole is greater than the width of the visible through hole, so that when the shading plate 5 is inserted downward through the plug hole, the two sides of the shading plate 5 can be inserted into the slots 10 on both sides, and the two side walls of the visible through hole have slots 10 vertically communicating with the plug hole, and the slots 10 match the two side sides of the shading plate 5, and the shading plate 5 is inserted into the visible through hole through the plug hole, and the two side sides of the shading plate 5 are respectively inserted into the slots 10 on both sides. In this way, moving the shading plate 5 vertically can be used to open or close the shading plate 5.

[0036] Specifically, the shading plate 5 is attached to the front side of the visible transparent plate 4 .

[0037] In the description of the present utility model, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present utility model.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0039] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

Claims

1. A carrier used in a wafer manufacturing process, characterized in that: The invention comprises a box body (1) and a box cover (2) covering the box body (1), the front side of the box body (1) is open and extends inward to form a receiving cavity, the inner walls on both sides of the receiving cavity are provided with a plurality of spaced slots (3) from top to bottom, the box cover (2) is light-proof and opaque, a rectangular visible through hole is provided at the center of the front side of the box cover (2), the upper and lower ends of the visible through hole are respectively arranged close to the upper edge and the lower edge of the box cover (2), a visible transparent plate (4) for sealing the visible through hole is fixedly installed in the visible through hole, the visible transparent plate (4) is arranged close to the rear end of the visible through hole, a movable light shielding plate (5) is arranged in the visible through hole, and the light shielding plate (5) is arranged in front of the visible transparent plate (4).

2. A carrier for use in a wafer manufacturing process as claimed in claim 1, characterized in that: The shading plate (5) is arranged to move vertically, and the upper end of the box cover (2) is provided with a plug hole extending downward and connected with the upper end of the visible through hole, and the plug hole is located in front of the visible transparent plate (4), and the plug hole matches the size of the shading plate (5), and the width of the plug hole is greater than the width of the visible through hole. The two side walls of the visible through hole are provided with slots (10) vertically connected with the plug hole, and the slots (10) match the two side edges of the shading plate (5), and the shading plate (5) is inserted into the visible through hole through the plug hole, and the two side edges of the shading plate (5) are respectively inserted into the slots (10) on both sides.

3. A carrier for use in a wafer manufacturing process as claimed in claim 1, characterized in that: The shading plate (5) is arranged to move horizontally, and a sliding hole (7) extending horizontally inward is opened on the side wall of the visible through hole. The height of the sliding hole (7) is arranged along the height of the visible through hole. The sliding hole (7) matches the shading plate (5). The shading plate (5) is horizontally inserted into the sliding hole (7) to slide, and the width of the sliding hole (7) is smaller than the width of the shading plate (5).

4. A carrier for use in a wafer manufacturing process as claimed in claim 3, characterized in that: A sliding hole (7) is respectively provided on the side walls of both sides of the visible through hole, the two sliding holes (7) are symmetrically arranged, and a light shielding plate (5) is matched and slidably provided in the two sliding holes (7).

5. The carrier used in the wafer manufacturing process as claimed in claim 3, characterized in that: A limiting slide groove (8) is provided at the upper end and / or the lower end of the slide hole (7), wherein the limiting slide groove (8) is extended from an end of the slide hole (7) away from the visible through hole and along the slide hole (7), and an end of the limiting slide groove (8) facing the visible through hole is arranged close to the visible through hole but not connected.

6. A carrier for use in a wafer manufacturing process as claimed in claim 3, characterized in that: A circle of grooves is provided on the side wall of the visible through hole around the sliding hole (7), and the grooves are connected to the sliding hole (7). A rubber pad is fixedly embedded in the grooves, and the rubber pad has a through hole connected to the sliding hole (7) for the sunshade (5) to pass through, and the inner wall of the through hole is arranged to be attached to the surface of the sunshade (5).

7. A carrier for use in a wafer manufacturing process as claimed in claim 3, characterized in that: A plurality of convex marks (6) are protruding from the front side surface of the shading plate (5), and the convex marks (6) are arranged close to the edge of one end of the shading plate (5) extending out of the sliding hole (7).

8. A carrier for use in a wafer manufacturing process as claimed in claim 1, characterized in that: The shading plate (5) is attached to the front side of the visible transparent plate (4).

Images