Substrate slice box

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a substrate slice box which comprises a box body. A plurality of clamping groove groups are arranged in the box body; the clamping groove group comprises a plurality of clamping grooves; the clamping groove is used for placing a substrate slice; the multiple clamping grooves in the clamping groove set are arranged in a step shape, so that the bottoms of any two adjacent clamping grooves in the clamping groove set are located at different heights. In the scheme, the plurality of substrate slices placed in the clamping slot group can be arranged in a step shape through the clamping slots arranged in the step shape, so that the substrate slices in the clamping slot group have height difference and are more easily taken out by a worker, the distance between the clamping slots does not need to be adjusted, and the substrate slices can be taken out more easily without changing the size of the box body. The convenience of taking out the substrate slice is improved, and the problem that an existing substrate slice is difficult to take out from the box body is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a substrate cassette. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices.

[0003] In the process of manufacturing indium phosphide substrate sheets, such as transportation during the intermediate process and storage after manufacturing, the placement of the substrate sheets is involved.

[0004] The existing method of placing the substrate sheet is to place it in a box body provided with a card slot; in order to reduce the occupied volume of the box body, the card slots in the box body are generally spaced at a small distance, and the placed substrate sheets are generally at the same height in the box body, so there is a problem of difficulty in removing the substrate sheets. Utility Model Content

[0005] In view of this, the purpose of the present application is to provide a substrate sheet box to solve the problem that the existing substrate sheets are difficult to take out from the box body.

[0006] In order to achieve the above technical objectives, the present application provides a substrate sheet box, comprising: a box body;

[0007] The box body is provided with a plurality of card slot groups;

[0008] The card slot group includes a plurality of card slots;

[0009] The card slot is used for placing the substrate sheet;

[0010] The plurality of card slots in the card slot group are arranged in a stepped manner, so that the bottoms of any two adjacent card slots in the card slot group are located at different heights.

[0011] Further, the card slot group includes at least two;

[0012] At least two of the slot groups are symmetrically distributed in a herringbone ladder shape.

[0013] Further, the card slot group includes a plurality of;

[0014] The plurality of slot groups are arranged in a straight line.

[0015] Furthermore, the distance between adjacent slot groups is greater than or equal to millimeters.

[0016] Furthermore, the box body is provided with a slot;

[0017] The slot penetrates the box body along the normal direction of the substrate sheet placed in the slot.

[0018] Furthermore, the clamping slots are symmetrically arranged on the side walls of the slots.

[0019] Furthermore, the bottom of the slot is an arc transition structure.

[0020] Furthermore, a through hole is provided at the bottom of the box body.

[0021] Furthermore, the box body is a polyetheretherketone box body.

[0022] Furthermore, the height difference between the bottoms of any two adjacent card slots in the card slot group is greater than or equal to 15 mm.

[0023] It can be seen from the above technical solution that the present application provides a substrate sheet box, comprising: a box body; a plurality of card slot groups are arranged in the box body; the card slot group comprises a plurality of card slots; the card slots are used for placing substrate sheets; the plurality of card slots in the card slot group are arranged in a stepped shape so that the bottoms of any two adjacent card slots in the card slot group are at different heights.

[0024] In this solution, the stepped arrangement of the card slots enables the multiple substrate sheets placed in the card slot group to be arranged in a stepped manner, so that there are height differences among the substrate sheets in the card slot group and they are easier for the staff to take out, and there is no need to adjust the spacing between the card slots. This can improve the convenience of taking out the substrate sheets without changing the size of the box body, and effectively solve the problem that the existing substrate sheets are difficult to take out from the box body. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0026] Figure 1 A perspective structural diagram of a substrate sheet box provided in an embodiment of the present application after a substrate sheet is placed therein;

[0027] Figure 2 A schematic structural diagram of a substrate cassette provided in an embodiment of the present application;

[0028] Figure 3 A schematic diagram of the arrangement of a card slot group of a substrate cassette provided in an embodiment of the present application;

[0029] In the figure:

[0030] 10. Box body; 100. Card slot group; 11. Card slot; 12. Slot; 13. Through hole;

[0031] 20. Substrate sheet. DETAILED DESCRIPTION

[0032] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0033] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0034] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0035] See also Figure 1 and Figure 2 A substrate cassette provided in an embodiment of the present application includes: a cassette body 10; a plurality of slot groups 100 are arranged in the cassette body 10. In this embodiment, the slot group 100 may include one or more.

[0036] The card slot group 100 includes a plurality of card slots 11. The card slots 11 are used for placing the substrate sheet 20. Taking the case where the box body 10 is placed horizontally as an example, the card slots 11 can be used for placing the substrate sheet 20 from top to bottom.

[0037] The plurality of card slots 11 in the card slot group 100 are arranged in a stepped manner, so that the bottoms of any two adjacent card slots 11 in the card slot group 100 are located at different heights.

[0038] The bottom of the card slot 11 is in contact with the substrate sheet 20; in the same card slot group 100, the card slots 11 are arranged in a step-like manner, which means that the bottoms of multiple card slots 11 rise or fall in a step-like manner, so that there is a height difference between the bottoms of adjacent card slots 11, and thus there is a height difference between the substrate sheets 20 placed on the adjacent card slots 11. When it is necessary to take out the substrate sheet 20 from the box body 10, the substrate sheets 20 in the same card slot group 100 can be taken out from high to low in sequence due to the height difference, so that the convenience of taking out the substrate sheet 20 is improved without changing the size of the box body 10 and the spacing between the card slots 11.

[0039] As an implementation, see Figure 3 , the multiple card slot groups 100 can be arranged in a straight line, so that the multiple card slots 11 of the multiple card slot groups 100 are arranged in a wavy shape.

[0040] In one embodiment, the card slot groups 100 may include at least two; and the at least two card slot groups 100 are symmetrically distributed in a herringbone shape.

[0041] Specifically, when all the card slots 11 on the box body 10 are arranged in a stepped manner with increasing height, when there are more card slots 11 and the height of the box body 10 is insufficient, there will be a problem that the depth of some card slots 11 is shallow, causing the substrate sheet 20 to extend out of the box body 10 to a higher height, thereby reducing the placement stability of the substrate sheet 20.

[0042] In this solution, the at least two slot groups 100 are symmetrically distributed in a herringbone ladder shape, which can prevent the substrate sheet 20 from extending too far out of the box body 10 without affecting the storage capacity of the box body 10 .

[0043] Similarly, the linear arrangement of the plurality of slot groups 100 can also avoid the problem of the substrate sheet 20 extending too far out of the box body 10 .

[0044] It should be noted that in the embodiment where the slot groups 100 are symmetrically distributed in a herringbone shape, the number of the slot groups 100 may be an even number or an odd number, specifically so that adjacent slot groups 100 are symmetrically distributed.

[0045] In one embodiment, the distance between adjacent slot groups 100 is greater than or equal to 30 mm.

[0046] like Figure 1As shown, when the two slot groups 100 are symmetrically distributed, the slot 11 at the rear end of one slot group 100 may have the same depth from the slot 11 at the front end of the other slot group 100, so that the substrate sheets 20 on the two slots 11 are at the same height. To this end, in this embodiment, the distance between adjacent slot groups 100 is set to be greater than or equal to 30 mm, which can avoid the problem of the two slots 11 being at the same depth as described above, which makes it difficult to remove the substrate sheet 20.

[0047] Furthermore, a slot 12 is provided on the box body 10 ; the slot 12 penetrates the box body 10 along the normal direction of the substrate sheet 20 placed in the card slot 11 .

[0048] Similarly, the box body 10 is placed horizontally for description, and the direction in which the slot 12 penetrates the box body 10 is the horizontal direction.

[0049] The slots 12 can reduce the weight of the box body 10 and make it easier for workers to observe the interior of the box body 10 .

[0050] In one embodiment, the card slots 11 may be symmetrically arranged on the side walls of the slot 12 , and two symmetrical card slots 11 together form a structure for mounting the substrate sheet 20 .

[0051] Furthermore, the bottom of the slot 11 is an arc transition structure, which is convenient for fixing the substrate sheet 20 with an arc-shaped outer circumference, and can also clamp the substrate sheet 20 with a polygonal structure.

[0052] Furthermore, a through hole 13 is provided at the bottom of the box body 10 .

[0053] The through hole 13 can allow ventilation of the box body 10 from top to bottom and reduce the weight of the box body 10 at the same time.

[0054] In practical applications, the box body 10 may be a polyetheretherketone box body.

[0055] In other embodiments, the height difference between the bottoms of any two adjacent slots 11 in the slot group 100 is greater than or equal to 15 mm, ensuring that the substrate sheet 20 is easy to remove.

[0056] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A substrate cassette, characterized in that: include: Box body (10); A plurality of slot groups (100) are arranged in the box body (10); The card slot group (100) comprises a plurality of card slots (11); The card slot (11) is used for placing the substrate sheet (20); The plurality of card slots (11) in the card slot group (100) are arranged in a stepped manner, so that the bottoms of any two adjacent card slots (11) in the card slot group (100) are located at different heights.

2. The substrate cassette according to claim 1, characterized in that: The card slot group (100) comprises at least two; At least two of the slot groups (100) are symmetrically distributed in a herringbone ladder shape.

3. The substrate cassette according to claim 1, characterized in that: The card slot group (100) comprises a plurality of; The plurality of slot groups (100) are arranged in a straight line.

4. The substrate cassette according to claim 2 or 3, characterized in that: The distance between adjacent slot groups (100) is greater than or equal to 30 mm.

5. The substrate cassette according to claim 1, characterized in that: The box body (10) is provided with a slot (12); The slot (12) penetrates the box body (10) along the normal direction of the substrate sheet (20) placed in the card slot (11).

6. The substrate cassette according to claim 5, characterized in that: The clamping groove (11) is symmetrically arranged on the side wall of the slot (12).

7. The substrate cassette according to claim 1, characterized in that: The bottom of the clamping slot (11) is an arc transition structure.

8. The substrate cassette according to claim 1, characterized in that: The bottom of the box body (10) is provided with a through hole (13).

9. The substrate cassette according to claim 1, characterized in that: The box body (10) is a polyetheretherketone box body.

10. The substrate cassette according to claim 1, characterized in that: The height difference between the bottoms of any two adjacent card slots (11) in the card slot group (100) is greater than or equal to 15 millimeters.

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