Film developing device

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a film developing device which comprises an outer box body, an inner box body and a motor. The inner box body is provided with a placing groove for placing a substrate slice; the inner box body is rotatably arranged in the outer box body; the motor is in transmission connection with the inner box body and used for driving the inner box body to rotate. According to the film washing device provided by the scheme, after a substrate film is put into the inner box body, the outer box body is filled with the washing liquid, and the inner box body is driven by the motor to rotate in the outer box body, so that the washing effect on the substrate film in the inner box body can be effectively improved, and the washing efficiency on the substrate film can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a wafer washing device. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices. In the process of manufacturing substrate sheets, the substrate sheets need to be cleaned. Common cleaning methods include immersion cleaning and rinsing, which are all performed after the substrate sheets are fixed, and the cleaning efficiency is low. Utility Model Content

[0003] In view of this, the purpose of the present application is to provide a film washing device for improving the cleaning efficiency of substrate films.

[0004] In order to achieve the above technical purpose, the present application provides a film processing device, comprising: an outer box body, an inner box body and a motor;

[0005] The inner box body is provided with a placement groove for placing the substrate sheet;

[0006] The inner box body can be rotatably disposed in the outer box body;

[0007] The motor is drivingly connected to the inner box body to drive the inner box body to rotate.

[0008] Furthermore, a rotatable base is provided in the outer box body;

[0009] The inner box body is arranged on the base;

[0010] The motor is drivingly connected to the base.

[0011] Furthermore, a rotatable shaft is provided in the inner box body;

[0012] The rotating shaft is arranged on the groove edge of the placement groove.

[0013] Furthermore, the base is transmission-connected to the rotating shaft.

[0014] Further, it also includes: a transmission shaft;

[0015] A rotatable column is provided on the base;

[0016] The column is provided with a first gear and a second gear;

[0017] An inner gear ring is provided on the inner periphery of the outer box body;

[0018] The first gear is meshedly connected to the inner gear ring;

[0019] The end of the rotating shaft is connected with a third gear;

[0020] The transmission shaft is rotatably disposed on the base, and one end of the transmission shaft is meshed and connected to the second gear, and the other end of the transmission shaft is meshed and connected to the third gear.

[0021] Furthermore, a plurality of rotating shafts are arranged in the inner box body;

[0022] The plurality of rotating shafts are meshed with each other through the third gear and are connected to rotate in the same direction.

[0023] Further, the rotation plane of the base is a horizontal plane;

[0024] The rotation plane of the column is a horizontal plane;

[0025] The rotation plane of the rotating shaft is a vertical plane.

[0026] Furthermore, a gear ring is provided at the bottom of the base;

[0027] The output end of the motor is meshingly connected with the ring gear.

[0028] Furthermore, a plurality of snap-in grooves are arranged at intervals along the axial direction of the rotating shaft along the groove edge of the placement groove;

[0029] The snap-in slot is used for the substrate sheet to be snapped in.

[0030] Furthermore, the inner box body is a hollow structure.

[0031] It can be seen from the above technical scheme that the present application provides a film developing device, including: an outer box body, an inner box body and a motor; the inner box body is provided with a placement groove for placing a substrate sheet; the inner box body can be rotatably arranged in the outer box body; the motor is transmission-connected to the inner box body, and is used to drive the inner box body to rotate.

[0032] The film washing device provided in this scheme can put the substrate sheet into the inner box body, then fill the cleaning liquid into the outer box body, and drive the inner box body to rotate inside the outer box body through a motor, which can effectively improve the cleaning effect of the substrate sheet in the inner box body and improve the cleaning efficiency of the substrate sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 A perspective view of the overall structure of a film processing device provided in an embodiment of the present application;

[0035] Figure 2 A perspective structural diagram of a film developing device provided in an embodiment of the present application with the outer box body removed;

[0036] Figure 3 A perspective structural diagram of an inner box of a film developing device provided in an embodiment of the present application;

[0037] In the figure:

[0038] 10. Outer box body; 11. Base; 12. Column; 13. First gear; 14. Second gear; 15. Internal gear ring; 16. Gear ring;

[0039] 20. Inner box body; 21. Placement slot; 22. Third gear; 23. Insertion slot; 24. Rotating shaft;

[0040] 30. Motor;

[0041] 40. Drive shaft. DETAILED DESCRIPTION

[0042] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0043] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0044] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0045] See also Figures 1 to 3 A film developing device provided in an embodiment of the present application includes: an outer box body 10, an inner box body 20 and a motor 30; the inner box body 20 is provided with a placement groove 21 for placing a substrate sheet; the inner box body 20 is rotatably arranged in the outer box body 10; the motor 30 is transmission-connected to the inner box body 20, and is used to drive the inner box body 20 to rotate.

[0046] In this embodiment, the outer box body 10 can be a semi-open box body or a hollow box body, so that the outer box body 10 can perform both immersion cleaning and flushing cleaning on the substrate sheet in the inner box body 20. A detachable cover can also be provided at the bottom of the outer box body 10; when the cover is installed, the outer box body 10 can store cleaning liquid for immersion cleaning; after the cover is removed, the cleaning liquid in the outer box body 10 is discharged, and the objects in the outer box body 10 can be flushed.

[0047] In the embodiment provided in the present application, the outer box body 10 is placed horizontally and is a semi-open box body. After the substrate sheet is placed in the placement groove 21, the cleaning liquid is injected into the outer box body 10, and then the motor 30 is started, and the substrate sheet is driven to rotate in the outer box body 10 by the motor 30. Compared with the immersion method in which the substrate sheet is fixed, this solution can effectively improve the cleaning efficiency and cleaning effect of the substrate sheet.

[0048] In one embodiment, a rotatable base 11 is disposed in the outer box body 10 ; the inner box body 20 is disposed on the base 11 ; and the motor 30 is transmission-connected to the base 11 .

[0049] Specifically, the motor 20 can be arranged outside the outer box body 10, and the output end of the motor 20 extends into the outer box body 10. A gear ring 16 can be arranged at the bottom of the base 11; the output end of the motor 30 is meshed with the gear ring 16 through a gear, so that the motor 30 can drive the base 11 to rotate.

[0050] The base 11 may be rotatably mounted in the outer box body 10 via a bearing; a positioning fixture may be provided on the base 11; and the inner box body 20 is fixedly mounted on the positioning fixture.

[0051] In a further improved embodiment, a rotatable shaft 24 is provided in the inner box body 20; the shaft 24 is provided at the groove edge of the placement groove 21. The shaft 24 is adapted so that after the substrate sheet is loaded into the inner box body 20, the shaft 24 abuts against the substrate sheet, so that the substrate sheet can be driven to rotate when the shaft 24 rotates. In practical applications, the shaft 24 can be installed at the bottom groove edge of the placement groove 21, so that the substrate sheet abuts against the shaft 24 after falling in the placement groove 21 due to gravity, that is, the substrate sheet is supported by the shaft 24, ensuring that the rotation of the shaft 24 can drive the substrate sheet to rotate.

[0052] Specifically, the rotation plane of the base 11 can be a horizontal plane, that is, the rotation axis of the base 11 is a vertical line, so that when the base 11 rotates, the inner box body 20 and the substrate sheet can be driven to rotate horizontally. The rotation plane of the shaft 24 can be a vertical plane, that is, the rotation axis of the shaft 24 is a horizontal line, so that when the shaft 24 rotates, the substrate sheet can be driven to rotate in the vertical direction.

[0053] By means of the rotating shaft 24 and the base 11 , the cleaning efficiency can be improved while avoiding the existence of cleaning dead corners on the substrate sheet, thereby further improving the cleaning effect on the substrate sheet.

[0054] In one embodiment, the base 11 is in transmission connection with the rotating shaft 24 , so that when the base 11 rotates, the driving force can be transmitted to the rotating shaft 24 , so that the rotating shaft 24 and the base 11 rotate synchronously.

[0055] As an implementation method in which the base 11 is transmission-connected with the rotating shaft 24, the film developing device may further include: a transmission shaft 40; a rotatable column 12 is provided on the base 11; a first gear 13 and a second gear 14 are provided on the column 12; an inner gear ring 15 is provided on the inner periphery of the outer box body 10; the first gear 13 is meshedly connected to the inner gear ring 15; a third gear 22 is connected to the end of the rotating shaft 24; the transmission shaft 40 is rotatably provided on the base 11, and one end is meshedly connected to the second gear 14, and the other end is meshedly connected to the third gear 22.

[0056] Specifically, the rotation plane of the column 12 can be a horizontal plane, that is, the rotation axis of the column 12 is a vertical line. The inner gear ring 15 can be arranged on the top inner periphery of the outer box body 10; correspondingly, the first gear 13 is arranged on the top of the column 12.

[0057] After the motor 30 is started, the motor 30 drives the base 11 to rotate; the base 11 drives the column 12 and the inner box body 20 to rotate; during the rotation of the base 11 along the inner gear ring 15, due to the engagement of the first gear 13 and the inner gear ring 15, the column 12 rotates; the rotating column 12 drives the transmission shaft 40 to rotate through the second gear 14; the transmission shaft 40 drives the rotating shaft 24 to rotate through the third gear 22, thereby realizing the transmission connection between the base 11 and the rotating shaft 24.

[0058] In one embodiment, a plurality of rotating shafts 24 are disposed in the inner box body 20; the plurality of rotating shafts 24 are meshed with each other through the third gear 22 and are connected to rotate in the same direction. That is, when one rotating shaft 24 rotates, it can drive the plurality of rotating shafts 24 to rotate synchronously. The plurality of rotating shafts 24 can enhance the driving effect on the substrate sheet.

[0059] In one embodiment, a plurality of snap-in slots 23 are provided at intervals along the axial direction of the rotating shaft 24 along the slot edge of the placement slot 21; the snap-in slots 23 are used for snapping substrate sheets in. The snap-in slots 23 can be used to place a plurality of substrate sheets at intervals, thereby improving the cleaning efficiency of the substrate sheets.

[0060] Optionally, the inner box body 20 is a hollow structure, which can increase the contact area between the cleaning liquid and the substrate sheet.

[0061] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A film processing device, characterized in that: include: An outer box body (10), an inner box body (20) and a motor (30); The inner box body (20) is provided with a placement groove (21) for placing the substrate sheet; The inner box body (20) is rotatably disposed in the outer box body (10); The motor (30) is drivingly connected to the inner box body (20) and is used to drive the inner box body (20) to rotate.

2. The film processing device according to claim 1, characterized in that: A rotatable base (11) is provided inside the outer box body (10); The inner box body (20) is arranged on the base (11); The motor (30) is drivingly connected to the base (11).

3. The film processing device according to claim 2, characterized in that: A rotatable shaft (24) is provided in the inner box body (20); The rotating shaft (24) is arranged on the groove edge of the placement groove (21).

4. The film processing device according to claim 3, characterized in that: The base (11) is drivingly connected to the rotating shaft (24).

5. The film processing device according to claim 4, characterized in that: Also includes: Transmission shaft (40); The base (11) is provided with a rotatable column (12); The column (12) is provided with a first gear (13) and a second gear (14); An inner gear ring (15) is provided on the inner periphery of the outer box body (10); The first gear (13) is meshingly connected to the inner gear ring (15); The end of the rotating shaft (24) is connected to a third gear (22); The transmission shaft (40) is rotatably disposed on the base (11), and one end of the transmission shaft is meshedly connected to the second gear (14), and the other end of the transmission shaft is meshedly connected to the third gear (22).

6. The film processing device according to claim 5, characterized in that: A plurality of rotating shafts (24) are arranged in the inner box body (20); The plurality of rotating shafts (24) are meshed with each other through the third gear (22) and are connected to rotate in the same direction.

7. The film processing device according to claim 5 or 6, characterized in that: The rotation plane of the base (11) is a horizontal plane; The rotation plane of the column (12) is a horizontal plane; The rotation plane of the rotating shaft (24) is a vertical plane.

8. The film processing device according to claim 2, characterized in that: A gear ring (16) is provided at the bottom of the base (11); The output end of the motor (30) is meshingly connected to the ring gear (16).

9. The film processing device according to claim 3, characterized in that: A plurality of snap-in grooves (23) are arranged at intervals along the axial direction of the rotating shaft (24) along the groove edge of the placement groove (21); The snap-in slot (23) is used for snapping the substrate sheet into.

10. The film processing device according to claim 1, characterized in that: The inner box body (20) is a hollow structure.

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