Scratch-proof lamination jig for wafer picking and placing

Abstract

The utility model relates to the technical field of wafers, in particular to an anti-scratch lamination jig for taking and placing wafers. The lamination jig is characterized in that the lamination jig comprises a fixed area and an operation area, one side of the fixed area is bent downwards and connected with the operation area, the other side of the fixed area is provided with a baffle, the operation area is provided with a wafer installation block, the middle of the wafer installation block is provided with a U-shaped groove, and the wafer installation block is provided with a plurality of wafer installation grooves from front to back. Compared with the prior art, the wafer mounting block is provided with the U-shaped groove, so that the weight of the jig is reduced, and the wafer mounting groove is convenient to clean. And an anti-static material is selected, so that the friction static electricity on the surface of the jig is low, and the ESD management and control requirement is met.

Description

Technical Field

[0001] The utility model relates to the technical field of wafers, in particular to a wafer stacking fixture for taking and placing wafers to prevent scratches. Background Art

[0002] At present, some jigs for stacking wafers are heavy, the grooves for placing wafers are not easy to clean, and the surface electrostatic voltage exceeds the specification, greater than 1000V, posing certain safety hazards. Summary of the invention

[0003] The utility model overcomes the shortcomings of the prior art and provides a wafer stacking fixture for taking and placing wafers and preventing them from being scratched.

[0004] In order to achieve the above-mentioned purpose, a wafer picking and placing anti-scratch stacking fixture is designed, which is characterized by comprising a fixed area and an operating area, one side of the fixed area is bent downward and connected to the operating area, and a baffle is provided on the other side of the fixed area, and a wafer mounting block is provided on the operating area, a U-shaped groove is provided in the middle of the wafer mounting block, and a plurality of wafer mounting grooves are provided on the wafer mounting block from front to back.

[0005] The outer side of the wafer installation groove is communicated with the outside and is provided with a flaring structure.

[0006] The left and right ends of the inner side of the baffle are respectively provided with fixing blocks.

[0007] The material of the fixing block is anti-static POM board.

[0008] The baffle is provided with a skylight.

[0009] A blocking piece is provided on one side of the wafer mounting block close to the fixing area.

[0010] The lower end of the wafer mounting block is fixed on the working area by bolts.

[0011] The baffle is L-shaped, and the baffle and the fixing area are an integrated structure.

[0012] The structure of the working area is a rectangular plate structure.

[0013] Compared with the prior art, the utility model sets a U-shaped groove on the wafer mounting block to reduce the weight of the fixture and make the wafer mounting groove easy to clean. Anti-static material is selected, and the friction static voltage on the surface of the fixture is low, meeting the ESD control needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model.

[0015] Figure 2 It is a structural schematic diagram of the utility model from another perspective.

[0016] Figure 3 It is a top view of the utility model.

[0017] Figure 4 It is a bottom view of the utility model.

[0018] Figure 5 It is a side view of the utility model. DETAILED DESCRIPTION

[0019] The utility model is further described below with reference to the accompanying drawings.

[0020] like Figures 1 to 5 As shown, one side of the fixing area 1 is bent downward and connected to the working area 2, and a baffle 1-1 is provided on the other side of the fixing area 1. A wafer mounting block 2-1 is provided on the working area 2, and a U-shaped groove 2-2 is provided in the middle of the wafer mounting block 2-1. The wafer mounting block 2-1 is provided with a plurality of wafer mounting grooves 2-3 from front to back.

[0021] The outer side of the wafer mounting groove 2-3 is connected to the outside, and is provided with a flaring structure 2-4, which has a guiding function and is convenient for taking and placing the wafer.

[0022] The left and right ends of the inner side of the baffle 1-1 are respectively provided with fixing blocks 1-2. When in use, the fixing blocks 1-2 cooperate with the wafer box to play a limiting role. The fixing blocks 1-2 are made of anti-static POM board to improve the anti-static performance.

[0023] A skylight 1-3 is provided on the baffle plate 1-1, which cooperates with the baffle plate inside the wafer box to play a role of avoidance.

[0024] A baffle 2-5 is provided on one side of the wafer mounting block 2-1 close to the fixing area 1. The baffle 2-5 is an L-shaped structure. When in use, the baffle 2-5 cooperates with the wafer box to play a role of lower limit.

[0025] The lower end of the wafer mounting block 2 - 1 is fixed to the working area 2 by bolts 2 - 6 .

[0026] The baffle 1 - 1 is L-shaped, and the baffle 1 - 1 and the fixing area 1 are an integral structure.

[0027] The structure of the working area 2 is a rectangular plate structure.

[0028] When in use, the fixture of the utility model is fixed on one side of the wafer box through the fixing area to limit and stabilize. Then, several wafers are placed in the wafer mounting grooves 2-3 respectively to complete the stacking of wafers.

[0029] The utility model sets a U-shaped groove on the wafer mounting block to reduce the weight of the fixture and make the wafer mounting groove easy to clean. Anti-static material is selected, and the friction static voltage on the surface of the fixture is low, meeting the ESD control needs.

Claims

1. A wafer stacking fixture for anti-scratch wafer placement, characterized by: The invention comprises a fixing area and an operating area, wherein one side of the fixing area (1) is bent downward and connected to the operating area (2), and a baffle (1-1) is provided on the other side of the fixing area (1). A wafer mounting block (2-1) is provided on the operating area (2), a U-shaped groove (2-2) is provided in the middle of the wafer mounting block (2-1), and a plurality of wafer mounting grooves (2-3) are provided on the wafer mounting block (2-1) from front to back.

2. The wafer handling and anti-scratch stacking jig according to claim 1, characterized in that: The outer side of the wafer mounting groove (2-3) is communicated with the outside world and is provided with a flaring structure (2-4).

3. The wafer handling and anti-scratch stacking jig according to claim 1, characterized in that: Fixed blocks (1-2) are respectively provided at the left and right ends of the inner side of the baffle (1-1).

4. The wafer handling and anti-scratch stacking jig according to claim 3, characterized in that: The material of the fixing block (1-2) is an anti-static POM board.

5. The wafer stacking jig for removing and placing wafers and preventing scratches according to claim 1, characterized in that: The baffle (1-1) is provided with a skylight (1-3).

6. The wafer stacking jig for removing and placing wafers and preventing scratches according to claim 1, characterized in that: A blocking piece (2-5) is provided on one side of the wafer mounting block (2-1) close to the fixing area (1).

7. A wafer handling and anti-scratch stacking jig according to claim 1 or 6, characterized in that: The lower end of the wafer mounting block (2-1) is fixed to the operating area (2) by means of bolts (2-6).

8. The wafer stacking jig for removing and placing wafers and preventing scratches according to claim 1, characterized in that: The baffle (1-1) is in an L-shape, and the baffle (1-1) and the fixing area (1) are an integral structure.

9. A wafer handling and anti-scratch stacking jig according to claim 1 or 8, characterized in that: The structure of the working area (2) is a rectangular plate structure.

10. The wafer handling and anti-scratch stacking jig according to claim 1, characterized in that: The material of the wafer mounting block (2-1) is an anti-static POM board.

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