Positioning jig

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a positioning jig which comprises a base, a first limiting piece and a limiting assembly. The base is provided with a datum line; the first limiting pieces are connected to the base, the multiple first limiting pieces are distributed around the datum line, and a mounting space is defined among the multiple first limiting pieces; the limiting assembly comprises a rotating shaft, a second limiting piece and a check block, the second limiting piece is rotationally connected to the base through the rotating shaft, the check block is provided with a first end and a second end which are opposite to each other, and the first end is fixedly connected to the second limiting piece; according to the positioning jig provided by the utility model, the substrate can be prevented from being separated from the positioning jig in the direction far away from the base through the rotating shaft, the second limiting piece and the stop block, and the mounting stability of the substrate on the positioning jig is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a positioning fixture. Background Art

[0002] In the production and processing technology of semiconductor materials, the substrate is also called the base plate, also called the supporting substrate; the substrate is mainly the substrate for epitaxial layer growth, and plays the role of support, fixation and material property matching in the production and manufacturing process; the positioning fixture is used to fix the substrate sheet in a specific position or posture during the manufacturing and processing process; most of the positioning fixtures in the prior art only realize the loading and positioning of the substrate sheet by setting a plurality of limit posts on the base and clamping the substrate sheet between the plurality of limit posts; however, since this positioning fixture does not have a blocking structure on the limit posts, the substrate sheet is easy to detach from the positioning fixture along the limit posts in the direction away from the base, affecting the installation stability of the substrate sheet. Utility Model Content

[0003] Aiming to solve at least one of the technical problems existing in the prior art, the utility model provides a positioning fixture which can improve the installation stability of the substrate.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a positioning fixture, which has a first direction, and the positioning fixture includes a base, a first limiting member and a limiting assembly; the base has a reference line, and the reference line is parallel to the first direction; the first limiting member is connected to the base, and the number of the first limiting members is multiple, and the multiple first limiting members are distributed around the reference line, and an installation space is defined between the multiple first limiting members; the limiting assembly includes a rotating shaft, a second limiting member and a stopper, the second limiting member is rotatably connected to the base through the rotating shaft and can rotate around the first axis of the rotating shaft, and the stopper has a first end and a second end opposite to each other, and the first end is fixedly connected to an end of the second limiting member away from the base in the first direction; wherein, the second limiting member rotates around the first axis to drive the second end to move between a first position and a second position, and the first direction is perpendicular to the first plane; when the second end is placed in the first position, along the first direction, the orthographic projection of the second end on the first plane is located within the range of the installation space on the first plane; when the second end is placed in the second position, the orthographic projection of the second end on the first plane is located outside the range of the installation space on the first plane.

[0005] In some embodiments, the first axis is perpendicular to the first direction.

[0006] In some embodiments, the limiting assembly further includes a handle, and the handle is fixedly connected to the second limiting member.

[0007] In some embodiments, the limiting assembly further includes a reset elastic member, which is located on a side of the handle away from the stop block in the first direction, and two ends of the reset elastic member in the first direction are respectively connected to the base and the handle.

[0008] In some embodiments, the base is recessed with a first mounting groove on one end in the first direction, the rotating shaft is disposed in the first mounting groove, the base is provided with a first opening connected to the first mounting groove, and the handle is fixedly connected to the second limiting member through the first opening.

[0009] In some embodiments, the first mounting groove has a first groove bottom, a second mounting groove is recessed in the first groove bottom, the base has a second opening connected to the second mounting groove, the second opening can accommodate at least part of the handle, the second mounting groove has a second groove bottom, and the two ends of the reset elastic member in the first direction are respectively connected to the second groove bottom and the handle.

[0010] In some embodiments, the number of the limiting components is two.

[0011] In some embodiments, the first limiting member includes a connecting column and a limiting column, wherein one end of the connecting column in the first direction is connected to the base, and the limiting column is fixedly connected to one end of the connecting column in the first direction away from the base, and the radius of the connecting column is greater than the radius of the limiting column.

[0012] In some embodiments, the first limiting member also includes a frustum, the limiting column is fixedly connected to the connecting column via the frustum, the frustum has a first end face and a second end face relative to each other in the first direction, the radius of the first end face is smaller than the radius of the second end face, the limiting column is fixedly connected to the first end face, and the connecting column is fixedly connected to the second end face.

[0013] In some embodiments, the central axis of the connecting column, the central axis of the limiting column, and the central axis of the cone coincide with each other, the radius of the connecting column is equal to the radius of the second end face, and the radius of the limiting column is equal to the radius of the first end face.

[0014] Compared with the prior art, a positioning jig provided by an embodiment of the utility model has the following beneficial effects: by rotating the second limit piece to move the second end of the stop block to the second position, the stop block can avoid the installation space in the first direction and form an installation channel for the substrate to enter and exit the installation space, so that the substrate can be loaded into the installation space through the installation channel along the first direction to complete the installation and positioning of the substrate, and then the second limit piece is rotated to move the second end of the stop block to the first position. Since the positive projection of the second end on the first plane is within the range on the first plane of the installation space, the stop block can block the movement of the substrate in the first direction to limit the movement of the substrate, so that the stop block can prevent the substrate from detaching from the positioning jig in the direction away from the base in the first direction, thereby improving the installation stability of the substrate; therefore, the positioning jig provided by the utility model can prevent the substrate from detaching from the positioning jig in the direction away from the base through the rotating shaft, the second limit piece and the stop block, thereby improving the installation stability of the substrate on the positioning jig. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a positioning fixture provided by an embodiment of the utility model;

[0016] Figure 2 This is a rendering of a positioning fixture provided by an embodiment of the utility model when a substrate is installed;

[0017] Figure 3 It is a front view of a positioning fixture provided by an embodiment of the utility model;

[0018] Figure 4 It is a side view of a positioning fixture provided by an embodiment of the utility model;

[0019] Figure 5 It is a top view of a positioning fixture provided by an embodiment of the utility model;

[0020] Figure 6 This is a schematic structural diagram of a positioning fixture provided by an embodiment of the utility model with the limiting component omitted.

[0021] In the figure, 1, base; 10, reference line; 11, first mounting groove; 12, second mounting groove; 111, first opening; 112, first groove bottom; 121, second opening; 122, second groove bottom;

[0022] 2. first stopper; 20. installation space; 21. connection column; 22. stopper column; 23. round table; 231. first end surface; 232. second end surface;

[0023] 3. Limiting assembly; 31. Rotating shaft; 32. Second limiting member; 33. Stopper; 34. Handle; 35. Reset elastic member; 331. First end; 332. Second end;

[0024] 4. Substrate;

[0025] Z, first direction; X, second direction; Y, third direction. DETAILED DESCRIPTION

[0026] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0028] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0031] like Figure 1-6 As shown, a preferred positioning fixture of an embodiment of the utility model has a first direction Z, and the positioning fixture includes a base 1, a first limiting member 2 and a limiting assembly 3.

[0032] The base 1 has a reference line 10, which is parallel to the first direction Z; the first limiter 2 is connected to the base 1, and the number of the first limiters 2 is multiple, and the multiple first limiters 2 are distributed around the reference line 10, and the multiple first limiters 2 define an installation space 20; the limiter assembly 3 includes a rotating shaft 31, a second limiter 32 and a stopper 33, the second limiter 32 is rotatably connected to the base 1 through the rotating shaft 31 and can rotate around the first axis of the rotating shaft 31, and the stopper 33 has a first end 331 and a second end 332 opposite to each other, and the first end 331 is fixedly connected to The second limit member 32 is located at one end away from the base 1 in the first direction Z; wherein, the second limit member 32 rotates around the first axis to drive the second end 332 to move between the first position and the second position, and the first direction Z is perpendicular to the first plane; when the second end 332 is placed in the first position, along the first direction Z, the orthographic projection of the second end 332 on the first plane is located within the range of the installation space 20 on the first plane; when the second end 332 is placed in the second position, the orthographic projection of the second end 332 on the first plane is located outside the range of the installation space 20 on the first plane.

[0033] Based on this technical solution, the second limiting member 32 is rotated to move the second end 332 of the stopper 33 to the second position, so that the stopper 33 can avoid the installation space 20 in the first direction Z and form an installation channel for the substrate 4 to enter and exit the installation space 20, so that the substrate 4 can be loaded into the installation space 20 through the installation channel along the first direction Z to complete the loading and positioning of the substrate 4, and then the second limiting member 32 is rotated to move the second end 332 of the stopper 33 to the first position. Since the positive projection of the second end 332 on the first plane is located within the range of the first plane of the installation space 20, the stopper 33 can block the movement of the substrate 4 in the first direction Z to limit the movement of the substrate 4, so that the stopper 33 can prevent the substrate 4 from detaching from the positioning fixture in the direction away from the base 1 in the first direction Z, thereby improving the installation stability of the substrate; therefore, the positioning fixture provided by the utility model can prevent the substrate 4 from detaching from the positioning fixture in the direction away from the base 1 through the rotating shaft 31, the second limiting member 32 and the stopper 33, thereby improving the installation stability of the substrate 4 on the positioning fixture.

[0034] Optionally, the second limit member 32 is rotatably connected to the base 1 through the shaft 31. The specific connection method can be that the shaft 31 is rotatably connected to the base 1 and can rotate around the first axis of the shaft 31, and the second limit member 32 is fixedly connected to the shaft 31 and can rotate around the first axis with the shaft 31; or the shaft 31 is fixedly connected to the base 1, and the second limit member 32 is rotatably connected to the shaft 31 and can rotate around the first axis of the shaft 31.

[0035] The first axis is the central axis of the rotation shaft 31 .

[0036] In this embodiment, the base 1 has a circular outer contour, and the reference line 10 is the central axis of the circular outer contour of the base 1 .

[0037] In some other embodiments, the reference line 10 may be any straight line on the base 1 that is parallel to the first direction Z, which is not limited here.

[0038] In this embodiment, the first axis is perpendicular to the first direction Z. In this way, the staff can operate the second limiter 32 to rotate around the first axis to press the stopper 33 toward the side away from the installation space 20, thereby moving the second end 332 of the stopper 33 from the first position to the second position, so that the substrate 4 can be transferred into the installation space 20. Similarly, the staff can operate the second limiter 32 to rotate around the first axis to press the stopper 33 toward the side close to the installation space 20, thereby moving the second end 332 of the stopper 33 from the second position to the first position, so that the stopper 33 can prevent the substrate 4 from escaping from the positioning fixture in the direction away from the base 1, which is convenient for operation.

[0039] The limiting assembly 3 further includes a handle 34, which is fixedly connected to the second limiting member 32. The handle 34 is used to facilitate the operator to operate the second limiting member 32 to rotate around the first axis.

[0040] In this embodiment, the first direction Z is the height direction of the positioning fixture, the second direction X is the width direction of the positioning fixture, the third direction Y is the length direction of the positioning fixture, the first direction Z, the second direction X and the third direction are perpendicular to each other, and the first plane is a horizontal plane.

[0041] Figure 2 and Figure 5 The second end 332 of the stopper 33 is shown to be placed at the first position, and the orthographic projection of the second end 332 on the first plane is located within the range of the installation space 20 on the first plane.

[0042] It should be noted that Figure 5 The dashed circle shown represents the range of the installation space 20 along the first direction Z on the first plane.

[0043] See also Figure 1 , Figure 2 and Figure 4 The position limiting assembly 3 provided in the embodiment of the utility model further includes a reset elastic member 35, which is located on the side of the handle 34 away from the stopper 33 in the first direction Z, and the two ends of the reset elastic member 35 in the first direction Z are respectively connected to the base 1 and the handle 34. In this way, the handle 34 can be automatically reset by the reset elastic member 35, so that in the absence of external force, the handle 34 will place the second end 332 of the stopper 33 in the first position through the second position limiting member 32, and then the stopper 33 will play a role in preventing the substrate 4 from escaping from the positioning fixture in the absence of external force.

[0044] In this embodiment, the resetting elastic member 35 is a resetting spring.

[0045] See also Figure 1-Figure 5 The first limiting member 2 provided in the embodiment of the utility model comprises a connecting column 21 and a limiting column 22. One end of the connecting column 21 in the first direction Z is connected to the base 1. The limiting column 22 is fixedly connected to one end of the connecting column 21 away from the base 1 in the first direction Z. The radius of the connecting column 21 is greater than the radius of the limiting column 22. In this way, the upper surface of the connecting column 21 can be used as an axial limiting surface of the substrate 4 to limit the position change of the substrate 4 along the limiting column 22 in the direction away from the stopper 33.

[0046] In some other embodiments, the radius of the connecting column 21 may be less than or equal to the radius of the limiting column 22. In this way, the upper surface of the base 1 serves as an axial limiting surface of the substrate 4 to limit the position change of the substrate 4 along the limiting column 22 in the direction away from the stop block 33.

[0047] The first limiting member 2 further includes a truncated cone 23, through which the limiting column 22 is fixedly connected to the connecting column 21. The truncated cone 23 has a first end face 231 and a second end face 232 opposite to each other in the first direction Z. The radius of the first end face 231 is smaller than the radius of the second end face 232. The limiting column 22 is fixedly connected to the first end face 231, and the connecting column 21 is fixedly connected to the second end face 232. In this way, the limiting column 22 is connected to the small face end of the truncated cone 23, and the connecting column 21 is connected to the large face end of the truncated cone 23. The side surface of the truncated cone 23 can be used as a circumferential limiting surface of the substrate 4, so as to clamp the substrate 4 through the outer side wall of the truncated cone 23.

[0048] In this embodiment, the central axis of the connecting column 21, the central axis of the limiting column 22, and the central axis of the cone 23 coincide with each other, the radius of the connecting column 21 is equal to the radius of the second end face 232, and the radius of the limiting column 22 is equal to the radius of the first end face 231. In this way, the limiting column 22 can smoothly transition to the connecting column 21 through the cone 23, and the side surface of the cone 23 can also be used as the circumferential limiting surface of the substrate 4. A first installation area is defined between multiple limiting columns 22, and a second installation area is defined between multiple cones 23. The maximum radius of the second installation area is equal to the radius of the first installation area, and the first installation space 20 includes the first installation area and the second installation area; when the radius of the substrate 4 is equal to the radius of the first installation area, the substrate 4 can be installed in the first installation area to clamp the substrate 4 through multiple limiting columns 22 to achieve the installation and positioning of the substrate 4; when the radius of the substrate 4 is smaller than the radius of the first installation area and larger than the minimum radius of the second installation area, the substrate 4 can be installed in the second installation area to clamp the substrate 4 through multiple cones 23 to achieve the installation and positioning of the substrate 4; therefore, by coinciding the axes of the three and defining the radius relationship of the three, multiple first limiting members 2 can be used for the installation and positioning of substrates 4 of various sizes, and have a wide range of applications.

[0049] In this embodiment, the structure of the second limiting member 32 is similar to that of the first limiting member 2 .

[0050] See also Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 6 The base 1 is provided with a first mounting groove 11 on one end in the first direction Z, the rotating shaft 31 is provided in the first mounting groove 11, the base 1 is provided with a first opening 111 communicating with the first mounting groove 11, and the handle 34 is fixedly connected to the second position-limiting member 32 through the first opening 111. The first mounting groove 11 is adopted and the first opening 111 is provided in the first mounting groove 11, and the staff can operate the handle 34 to move through the first opening 111, so as to achieve the purpose of driving the second position-limiting member 32 to rotate and driving the stopper 33 to move.

[0051] The first mounting groove 11 has a first groove bottom 112, and the first groove bottom 112 is recessed with a second mounting groove 12. The base 1 is provided with a second opening 121 connected to the second mounting groove 12. The second mounting groove 12 has a second groove bottom 122, and the second opening 121 can accommodate at least part of the handle 34. The two ends of the reset elastic member 35 in the first direction Z are respectively connected to the second groove bottom 122 and the handle 34. By using a second mounting groove 12 and connecting one end of the reset elastic member 35 to the second groove bottom 122, the second mounting groove 12 can limit and guide the reset elastic member 35, which helps the reset elastic member 35 to better reset the second limit member 32; by providing a second opening 121 on the base 1 that is connected to the second mounting groove 12 and can accommodate at least part of the handle 34, the handle 34 can partially enter the second mounting groove 12 through the second opening 121 when rotating around the first axis, thereby expanding the rotation range of the handle 34 around the first axis, and then expanding the rotation range of the second limit member 32 and the stop block 33 around the first axis, so that the second end 332 can avoid the installation space 20 further, making it easier for the staff to install the substrate 4 into the installation space 20.

[0052] In this embodiment, there are two limit assemblies 3. The two limit assemblies 3 can limit the substrate 4 from leaving the positioning fixture in the first direction Z in the direction away from the base 1 at two positions respectively through the two stoppers 33, and the reliability is high; at the same time, the staff only needs to operate the second limit member 32 of one of the limit assemblies 3 with one hand to press the second end 332 of the stopper 33 on the second limit member 32 to the side away from the installation space 20, so that the second end 332 can avoid the installation space 20 in the first direction Z, so that the staff can use the other hand to load the substrate 4 into the installation space 20 along the installation direction inclined to the first direction Z, which is convenient for operation.

[0053] In some other implementations, the number of the limiting components 3 may also be one, three, four, five or any other number, which is not limited here.

[0054] In this embodiment, the two limiting components 3 are symmetrically arranged about the reference line 10 .

[0055] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A positioning fixture having a first direction (Z), characterized in that: include: A base (1), the base (1) having a reference line (10), the reference line (10) being parallel to the first direction (Z); a first limiting member (2), the first limiting member (2) being connected to the base (1), the first limiting member (2) being provided in a plurality, the plurality of first limiting members (2) being distributed around the reference line (10), and an installation space (20) being defined between the plurality of first limiting members (2); A limit assembly (3), the limit assembly (3) comprising a rotating shaft (31), a second limit member (32) and a stopper (33), the second limit member (32) being rotatably connected to the base (1) via the rotating shaft (31) and being capable of rotating around a first axis of the rotating shaft (31), the stopper (33) having a first end (331) and a second end (332) opposite to each other, the first end (331) being fixedly connected to an end of the second limit member (32) in the first direction (Z) away from the base (1); The second limiting member (32) rotates around the first axis to drive the second end (332) to move between a first position and a second position, and the first direction (Z) is perpendicular to the first plane; when the second end (332) is in the first position, along the first direction (Z), the orthographic projection of the second end (332) on the first plane is within the range of the installation space (20) on the first plane; when the second end (332) is in the second position, the orthographic projection of the second end (332) on the first plane is outside the range of the installation space (20) on the first plane.

2. The positioning fixture according to claim 1, characterized in that: The first axis is perpendicular to the first direction (Z).

3. The positioning fixture according to claim 2, characterized in that: The limiting assembly (3) further comprises a handle (34), wherein the handle (34) is fixedly connected to the second limiting member (32).

4. The positioning fixture according to claim 3, characterized in that: The limit assembly (3) further comprises a reset elastic member (35), the reset elastic member (35) being located on a side of the handle (34) away from the stop block (33) in the first direction (Z), and the two ends of the reset elastic member (35) in the first direction (Z) are respectively connected to the base (1) and the handle (34).

5. The positioning fixture according to claim 4, characterized in that: The base (1) is recessed with a first mounting groove (11) at one end in the first direction (Z), the rotating shaft (31) is arranged in the first mounting groove (11), the base (1) is provided with a first opening (111) connected to the first mounting groove (11), and the handle (34) is fixedly connected to the second limiting member (32) through the first opening (111).

6. The positioning fixture according to claim 5, characterized in that: The first mounting groove (11) has a first groove bottom (112), the first groove bottom (112) is recessed with a second mounting groove (12), the base (1) is provided with a second opening (121) connected to the second mounting groove (12), the second opening (121) can accommodate at least part of the handle (34), the second mounting groove (12) has a second groove bottom (122), and the two ends of the resetting elastic member (35) in the first direction (Z) are respectively connected to the second groove bottom (122) and the handle (34).

7. The positioning fixture according to any one of claims 1 to 6, characterized in that: The number of the limiting components (3) is two.

8. The positioning fixture according to claim 1, characterized in that: The first limiting member (2) comprises a connecting column (21) and a limiting column (22); one end of the connecting column (21) in the first direction (Z) is connected to the base (1); the limiting column (22) is fixedly connected to one end of the connecting column (21) in the first direction (Z) away from the base (1); and the radius of the connecting column (21) is greater than the radius of the limiting column (22).

9. The positioning fixture according to claim 8, characterized in that: The first limiting member (2) further comprises a truncated cone (23), the limiting column (22) being fixedly connected to the connecting column (21) via the truncated cone (23), the truncated cone (23) having a first end face (231) and a second end face (232) opposite to each other in the first direction (Z), the radius of the first end face (231) being smaller than the radius of the second end face (232), the limiting column (22) being fixedly connected to the first end face (231), and the connecting column (21) being fixedly connected to the second end face (232).

10. The positioning fixture according to claim 9, characterized in that: The central axis of the connecting column (21), the central axis of the limiting column (22), and the central axis of the truncated cone (23) coincide with each other; the radius of the connecting column (21) is equal to the radius of the second end surface (232); and the radius of the limiting column (22) is equal to the radius of the first end surface (231).

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