Positioning jig

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a positioning jig which comprises a base and a plurality of limiting pieces. The limiting piece comprises a connecting column, a limiting column and a check block, the connecting column is connected to the base, the limiting column is fixedly connected to the connecting column, the check block is provided with a first end and a second end which are opposite to each other, and the first end is connected to the limiting column; the connecting column rotates around a first axis and can drive the second end to move between a first position and a second position; according to the positioning jig provided by the utility model, the connecting column is rotationally connected to the base, and the stop block is connected to one end, far away from the base, of the limiting column, so that the substrate can be prevented from being separated from the positioning jig along the limiting column in the direction far away from the base, and the mounting stability of the substrate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a positioning fixture. Background Art

[0002] In the production and processing technology of semiconductor materials, the substrate is also called the base plate, also called the supporting substrate; the substrate is mainly the substrate for epitaxial layer growth, and plays the role of supporting, fixing and matching material properties during the production and manufacturing process; the positioning fixture is used to fix the substrate in a specific position or posture during the manufacturing and processing process; most of the positioning fixtures in the prior art only realize the loading and positioning of the substrate by setting a plurality of limit posts on the base and clamping the substrate between the plurality of limit posts; however, since this positioning fixture does not have a blocking structure on the limit posts, the substrate is easy to detach from the positioning fixture along the limit posts in the direction away from the base, affecting the installation stability of the substrate. Utility Model Content

[0003] Aiming to solve at least one of the technical problems existing in the prior art, the utility model provides a positioning fixture which can improve the installation stability of the substrate.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a positioning fixture, having a first direction and a second direction intersecting each other, the positioning fixture comprising a base and a plurality of limiting members; the base having a reference line, the reference line being parallel to the first direction; the plurality of limiting members being distributed around the reference line, the limiting members comprising a connecting column, a limiting column and a stopper, the connecting column having a first axis, the connecting column being connected to the base and being able to rotate around the first axis, the limiting column being fixedly connected to an end of the connecting column away from the base in the first direction, the stopper having a first end and a second end opposite to each other, the first end being fixedly connected to an end of the limiting column away from the connecting column in the first direction; wherein an installation space is defined between the plurality of limiting columns, the first plane is perpendicular to the first direction, the connecting column rotating around the first axis can drive the second end to move between the first position and the second position; when the second end is placed in the first position, along the first direction, the orthographic projection of the second end on the first plane is located within the range of the installation space in the first plane; when the second end is placed in the second position, the orthographic projection of the second end on the first plane is located outside the range of the installation space in the first plane.

[0005] In some embodiments, the radius of the connecting column is greater than the radius of the limiting column.

[0006] In some embodiments, the limiting member also includes a frustum, and the limiting column is fixedly connected to the connecting column via the frustum, the frustum has a first end face and a second end face relative to each other in the first direction, the radius of the first end face is smaller than the radius of the second end face, the limiting column is fixedly connected to the first end face, and the connecting column is fixedly connected to the second end face.

[0007] In some embodiments, the limiting column has a second axis, the cone has a third axis, the first axis, the second axis and the third axis coincide with each other, the radius of the connecting column is equal to the radius of the second end face, and the radius of the limiting column is equal to the radius of the first end face.

[0008] In some embodiments, the first axis and the first direction are parallel.

[0009] In some embodiments, the base includes a main body and multiple mounting parts, the main body has the first axis, the multiple mounting parts are connected to the main body and distributed around the first axis, the multiple limiting members are respectively installed on the multiple main bodies, and the connecting column and the mounting part are rotatably connected.

[0010] In some embodiments, the limiting member also includes a guide protrusion, which is fixedly connected to the outer wall of the connecting column; the mounting portion is provided with a mounting groove, and one end of the connecting column away from the limiting column in the first direction is inserted into the mounting groove; a guide groove is provided on the inner wall of the mounting groove, and the guide protrusion and the guide groove are slidably connected; wherein, the sliding of the guide protrusion along the guide groove can drive the connecting column to rotate around the first axis.

[0011] In some embodiments, the positioning fixture further includes a reset elastic member, which is disposed in the mounting groove and located on a side of the connecting column away from the limiting column, and the reset elastic member is connected to the connecting column.

[0012] In some embodiments, the positioning fixture also includes a pressure plate, which has a through hole extending along the first direction; along the first direction, the hole wall of the through hole contacts the outer wall of the limiting column or the hole wall of the through hole contacts the outer wall of the cone.

[0013] In some embodiments, the pressure plate is connected to a plurality of guide rods distributed around the through hole, the main body is provided with a plurality of guide holes, and the plurality of guide rods pass through the plurality of guide holes respectively.

[0014] Compared with the prior art, a positioning jig improved by the embodiment of the utility model has the following beneficial effects: by rotating the limiting member to move the second end of the stop block to the second position, the stop block can avoid the installation space in the first direction and form an installation channel for the substrate to enter and exit the installation space, so that the substrate can be loaded into the installation space through the installation channel along the first direction to complete the loading and positioning of the substrate, and then the limiting member is rotated to move the second end to the first position. Since the positive projection of the second end on the first plane is located within the range of the installation space on the first plane, the stop block can block the movement of the substrate in the first direction to limit the movement of the substrate, so that the stop block can prevent the substrate from detaching from the positioning jig along the limiting column away from the base, thereby improving the installation stability of the substrate; therefore, the positioning jig provided by the utility model is rotatably connected to the base through the connecting column and the stop block is connected to the end of the limiting column away from the base, which can prevent the substrate from detaching from the positioning jig along the limiting column away from the base, thereby improving the installation stability of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a positioning fixture provided by an embodiment of the utility model;

[0016] Figure 2 This is a rendering of a positioning fixture provided by an embodiment of the utility model equipped with a substrate;

[0017] Figure 3 It is a front view of a positioning fixture provided by an embodiment of the utility model;

[0018] Figure 4 It is a cross-sectional view of a positioning fixture provided by an embodiment of the utility model;

[0019] Figure 5 It is a top view provided by an embodiment of the utility model;

[0020] Figure 6 This is a schematic diagram of the structure of a positioning fixture provided by an embodiment of the utility model after omitting the pressing plate;

[0021] Figure 7 This is a top view of a positioning fixture provided by an embodiment of the utility model with the pressure plate omitted;

[0022] Figure 8 It is a structural schematic diagram of a position limiting member provided in an embodiment of the utility model;

[0023] Fig. 9 It is a structural schematic diagram of the installation part provided by the embodiment of the utility model;

[0024] Fig.10 It is a structural schematic diagram of a pressing plate provided in an embodiment of the utility model.

[0025] In the figure, 1, base; 11, main body; 12, mounting portion; 111, guide hole; 121, mounting groove; 122, guide slide groove;

[0026] 2. Limiting member; 21. Connecting column; 22. Limiting column; 23. Stopper; 24. Round table; 25. Guide protrusion; 231. First end; 232. Second end; 241. First end face; 242. Second end face;

[0027] 3. Reset elastic member; 31. Limit screw;

[0028] 4. Pressing plate; 41. Through hole; 42. Guide rod;

[0029] 5. Substrate;

[0030] 10, reference line; 20, first axis; 30, second axis; 40, third axis;

[0031] 220. Installation space. DETAILED DESCRIPTION

[0032] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0034] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0037] like Figure 1-10 As shown, a preferred positioning fixture of the embodiment of the utility model has a first direction Z and a second direction X intersecting each other, and includes a base 1 and a plurality of stoppers 2. The base 1 has a reference line 10, and the reference line 10 is parallel to the first direction Z. The plurality of stoppers 2 are distributed around the reference line 10. The limiting member 2 includes a connecting column 21, a limiting column 22 and a stopper 23, wherein the connecting column 21 has a first axis 20, the connecting column 21 is rotatably connected to the base 1 and can rotate around the first axis 20, the limiting column 22 is fixedly connected to one end of the connecting column 21 away from the base 1 in the first direction Z, and the stopper 23 has a first end 231 and a second end 232 relative to each other, the first end 231 is fixedly connected to one end of the limiting column 22 away from the connecting column 21 in the first direction Z; wherein an installation space 220 is defined between a plurality of limiting columns 22, the first plane is perpendicular to the first direction Z, and the connecting column 21 rotates around the first axis 20 to drive the second end 232 to move between the first position and the second position; when the second end 232 is placed in the first position, along the first direction Z, the orthographic projection of the second end 232 on the first plane is located within the range of the installation space 220 on the first plane; when the second end 232 is placed in the second position, the orthographic projection of the second end 232 on the first plane is located outside the range of the installation space 220 on the first plane.

[0038] Based on this technical solution, by rotating the stopper 2 to move the second end 232 of the stopper 23 to the second position, the stopper 23 can avoid the installation space 220 in the first direction Z and form an installation channel for the substrate 5 to enter and exit the installation space 220, so that the substrate 5 can be loaded into the installation space 220 through the installation channel along the first direction Z to complete the loading and positioning of the substrate 5, and then the stopper 2 is rotated to move the second end 232 to the first position. Since the orthographic projection of the second end 232 on the first plane is located within the range of the installation space 220 on the first plane, The stopper 23 is within the range, so the movement of the substrate 5 in the first direction Z can be blocked to limit the movement of the substrate 5, so that the stopper 23 can prevent the substrate 5 from escaping from the positioning fixture along the limiting column 22 in the direction away from the base 1, thereby improving the installation stability of the substrate 5; therefore, the positioning fixture provided by the utility model is rotatably connected to the base 1 through the connecting column 21 and the stopper 23 is connected to the upper end of the limiting column 22, which can prevent the substrate 5 from escaping from the positioning fixture along the limiting column 22 in the direction away from the base 1, thereby improving the installation stability of the substrate 5.

[0039] In this embodiment, the first direction Z is the height direction of the positioning fixture, the second direction X is the radial direction of the positioning fixture, the first direction Z is perpendicular to the second direction X, and the first plane is a horizontal plane.

[0040] Figure 2 , Figure 5 and Figure 7 The second end 232 of the stopper 23 is shown to be located at the first position, and the orthographic projection of the second end 232 on the first plane is located within the range of the installation space 220 .

[0041] It should be noted that Figure 7 The dotted circle represents the range of the installation space 220 on the first plane along the first direction Z.

[0042] In this embodiment, the base 1 has a circular outer contour, and the reference line 10 is the central axis of the circular outer contour of the base 1 .

[0043] In some other embodiments, the reference line 10 may be any straight line on the base 1 that is parallel to the first direction Z, which is not limited here.

[0044] See also Figure 3 , Figure 6 , Figure 7 and Figure 8 In this embodiment, the radius of the connecting column 21 is greater than the radius of the limiting column 22. Thus, the upper surface of the connecting column 21 can serve as an axial limiting surface of the substrate 5 to limit the position change of the substrate 5 along the limiting column 22 in the direction away from the stopper 23.

[0045] In some other embodiments, the radius of the connecting column 21 may be less than or equal to the radius of the limiting column 22. In this way, the upper surface of the base 1 can serve as an axial limiting surface of the substrate 5 to limit the position change of the substrate 5 along the limiting column 22 in the direction away from the stop block 23.

[0046] The limiting member 2 further includes a truncated cone 24, through which the limiting column 22 is fixedly connected to the upper end of the connecting column 21. The truncated cone 24 has a first end face 241 and a second end face 242 opposite to each other in the first direction Z. The radius of the first end face 241 is smaller than the radius of the second end face 242. The limiting column 22 is fixedly connected to the first end face 241, and the connecting column 21 is fixedly connected to the second end face 242. In this way, the limiting column 22 is connected to the small face end of the truncated cone 24, and the connecting column 21 is connected to the large face end of the truncated cone 24, so that the side surface of the truncated cone 24 can be used as a circumferential limiting surface of the substrate 5, so that the substrate 5 can be clamped by the truncated cone 24.

[0047] The limiting column 22 has a second axis 30, the truncated cone 24 has a third axis 40, the first axis 20, the second axis 30 and the third axis 40 are coincident, the radius of the connecting column 21 is equal to the radius of the second end face 242, and the radius of the limiting column 22 is equal to the radius of the first end face 241. In this way, the limiting column 22 can smoothly transition to the connecting column 21 through the truncated cone 24, and the outer side surface of the truncated cone 24 can also be used as the circumferential limiting surface of the substrate 5. Since a limiting space can be defined between multiple truncated cones 24, when the radius of the substrate 5 is equal to the radius of the installation space 220, the substrate 5 can be installed in the installation space 220 to realize the loading and positioning of the substrate 5. When the radius of the substrate 5 is less than the radius of the installation space 220 and greater than the minimum radius of the limiting space, the substrate 5 can be installed in the limiting space to realize the loading and positioning of the substrate 5. Therefore, by adopting the method of coinciding the three axes and defining the three radii, the positioning fixture can be used for loading and positioning substrates 5 of various sizes, and has a wide range of applications.

[0048] The first axis 20 and the first direction Z are parallel.

[0049] The limiting member 2 further includes a guide protrusion 25 , which is fixedly connected to the outer side wall of the connecting column 21 .

[0050] See also Figure 1-Figure 6 ,and Figure 8-Figure 9 The base 1 includes a main body portion 11 and multiple mounting portions 12, the main body portion 11 has a first axis 20, the multiple mounting portions 12 are connected to the main body portion 11 and distributed around the first axis 20, the multiple limit members 2 are respectively installed on the multiple main body portions 11, and the connecting column 21 is rotatably connected to the mounting portion 12.

[0051] The main body 11 defines a plurality of guide holes 111 .

[0052] The mounting portion 12 is provided with a mounting groove 121, and one end of the connecting column 21 away from the limiting column 22 in the first direction Z is inserted into the mounting groove 121; a guide groove 122 is provided on the inner side wall of the mounting groove 121, and the guide protrusion 25 is slidably connected to the guide groove 122; wherein, the sliding of the guide protrusion 25 along the guide groove 122 can drive the connecting column 21 to rotate around the first axis 20.

[0053] The positioning fixture further includes a reset elastic member 3, which is arranged in the mounting groove 121 and located on the side of the connecting column 21 away from the limiting column 22, and the reset elastic member 3 is connected to the connecting column 21. The reset elastic member 3 can realize the automatic reset of the limiting member 2.

[0054] In this embodiment, the resetting elastic member 3 is a resetting spring.

[0055] In this embodiment, two ends of the resetting elastic member 3 in the first direction Z are respectively connected to the connecting column 21 and the limiting screw 31 .

[0056] See Figure Figure 1-Figure 5 ,and Fig.10 The positioning fixture provided by the utility model further includes a pressing plate 4, which is provided with a through hole 41 penetrating along the first direction Z; along the first direction Z, the limiting columns 22 of all the limiting members 2 are located in the through hole 41. The through hole 41 enables the pressing plate 4 to surround and protect the limiting member 2, thereby preventing the outer wall of the limiting member 2 from colliding with external objects.

[0057] In this embodiment, the hole wall of the through hole 41 is in contact with the outer side wall of the truncated cone 24. With the hole wall of the through hole 41 in contact with the outer side wall of the truncated cone 24, the staff only needs to press the pressure plate 4 with one hand to make the pressure plate 4 contact with the outer side wall of the truncated cone 24 of all the stoppers 2, so as to drive all the stoppers 2 to move along the first direction Z and enable the connecting column 21 to rotate around the first axis 20, so that the second ends 232 of the stoppers 23 on the multiple stoppers 2 can all move to the second position and avoid the installation space 220 in the first direction Z, so that the staff can load the substrate 5 into the installation space 220 to complete the loading and positioning of the substrate 5. Similarly, the staff only needs to release the pressure ring to move the stopper 23 to the first position and block the substrate 5 in the first direction Z to limit the movement of the substrate 5.

[0058] In some other embodiments, a setting mode in which the hole wall of the through hole 41 contacts the outer side wall of the limiting column 22 may also be adopted.

[0059] The pressing plate 4 is connected to a plurality of guide rods 42 distributed around the through hole 41, and the plurality of guide rods 42 respectively pass through the plurality of guide holes 111. The use of the guide rods 42 and the guide holes 111 can guide the movement of the pressing plate 4, ensuring that the staff can move all the limit members 2 along the first direction Z and move the stoppers 23 to the second position to avoid the installation space 220 in the first direction Z by pressing the pressing plate 4 with one hand, so as to facilitate the staff to complete the installation and removal of the substrate 5 on the positioning fixture.

[0060] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A positioning fixture having an intersecting first direction (Z), characterized in that: include: A base (1), the base (1) having a reference line (10), the reference line (10) being parallel to the first direction (Z); a plurality of limiting members (2), the plurality of limiting members (2) being distributed around the reference line (10), the limiting members (2) comprising a connecting column (21), a limiting column (22) and a stopper (23), the connecting column (21) having a first axis (20), the connecting column (21) being connected to the base (1) and being capable of rotating around the first axis (20), the limiting column (22) being fixedly connected to an end of the connecting column (21) away from the base (1) in the first direction (Z), the stopper (23) having a first end (231) and a second end (232) opposite to each other, the first end (231) being fixedly connected to an end of the limiting column (22) away from the connecting column (21) in the first direction (Z); Wherein, a mounting space (220) is defined between the plurality of limit columns (22), the first direction (Z) is perpendicular to the first plane, and the connecting column (21) can drive the second end (232) to move between a first position and a second position by rotating around the first axis (20); when the second end (232) is in the first position, along the first direction (Z), the orthographic projection of the second end (232) on the first plane is within the range of the mounting space (220) on the first plane; when the second end (232) is in the second position, the orthographic projection of the second end (232) on the first plane is outside the range of the mounting space (220) on the first plane.

2. The positioning fixture according to claim 1, characterized in that: The radius of the connecting column (21) is greater than the radius of the limiting column (22).

3. The positioning fixture according to claim 2, characterized in that: The limiting member (2) further comprises a truncated cone (24), the limiting column (22) being fixedly connected to the connecting column (21) via the truncated cone (24), the truncated cone (24) having a first end face (241) and a second end face (242) opposite to each other in the first direction (Z), the radius of the first end face (241) being smaller than the radius of the second end face (242), the limiting column (22) being fixedly connected to the first end face (241), and the connecting column (21) being fixedly connected to the second end face (242).

4. The positioning fixture according to claim 3, characterized in that: The limiting column (22) has a second axis (30), the truncated cone (24) has a third axis (40), the first axis (20), the second axis (30) and the third axis (40) coincide with each other, the radius of the connecting column (21) is equal to the radius of the second end face (242), and the radius of the limiting column (22) is equal to the radius of the first end face (241).

5. The positioning fixture according to claim 4, characterized in that: The first axis (20) and the first direction (Z) are parallel.

6. The positioning fixture according to claim 5, characterized in that: The base (1) comprises a main body (11) and a plurality of mounting parts (12), the main body (11) having the first axis (20), the plurality of mounting parts (12) being connected to the main body (11) and distributed around the first axis (20), the plurality of limiting members (2) being respectively mounted on the plurality of main bodies (11), and the connecting column (21) being rotatably connected to the mounting part (12).

7. The positioning fixture according to claim 6, characterized in that: The limiting member (2) further comprises a guide protrusion (25), wherein the guide protrusion (25) is fixedly connected to the outer side wall of the connecting column (21); The mounting portion (12) is provided with a mounting groove (121), and one end of the connecting column (21) away from the limiting column (22) in the first direction (Z) is inserted into the mounting groove (121); A guide slot (122) is provided on the inner side wall of the installation slot (121), and the guide protrusion (25) is slidably connected to the guide slot (122); The guide protrusion (25) slides along the guide slot (122) to drive the connecting column (21) to rotate around the first axis (20).

8. The positioning fixture according to claim 7, characterized in that: It also comprises a reset elastic member (3), wherein the reset elastic member (3) is arranged in the installation groove (121) and is located on a side of the connecting column (21) away from the limiting column (22), and the reset elastic member (3) and the connecting column (21) are connected.

9. The positioning fixture according to claim 8, characterized in that: It also includes a pressing plate (4), the pressing plate (4) being provided with a through hole (41) penetrating along the first direction (Z); along the first direction (Z), the hole wall of the through hole (41) is in contact with the outer wall of the limiting column (22) or the hole wall of the through hole (41) is in contact with the outer wall of the truncated cone (24).

10. The positioning fixture according to claim 9, characterized in that: The pressing plate (4) is connected to a plurality of guide rods (42) distributed around the through hole (41); the main body (11) is provided with a plurality of guide holes (111); and the plurality of guide rods (42) respectively pass through the plurality of guide holes (111).

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