Workpiece positioning jig of scribing machine

Abstract

The utility model relates to the technical field of scribing machine workpiece positioning, and discloses a scribing machine workpiece positioning jig which comprises a vacuum suction cup and a positioning jig fixed on the vacuum suction cup, the positioning jig comprises a jig body, a plurality of cavities are arranged on the jig body, the cavities are communicated with the vacuum suction cup, and the vacuum suction cup is fixed on the positioning jig. A circle of air holes are evenly formed in the position, located on the edge of the cavity, of the jig body, the air holes are communicated with the cavity, when negative pressure gas is introduced into the vacuum suction cup, the cavity can adsorb the middle of a workpiece in a negative pressure mode, and the air holes can adsorb the edge of the workpiece in a negative pressure mode. According to the utility model, through the arrangement of the cavity, a workpiece is clamped in a vacuum adsorption mode, and meanwhile, leftover materials after cutting can be adsorbed and fixed, so that the leftover materials are prevented from influencing subsequent feeding.

Description

Technical Field

[0001] The utility model relates to the technical field of workpiece positioning of a dicing machine, in particular to a workpiece positioning fixture of a dicing machine. Background Art

[0002] The grinding wheel dicing machine is a precision CNC equipment that integrates water-gas-electric, air-static-pressure high-speed spindle, precision mechanical transmission, sensor and automatic control technologies. It is mainly used for dicing processing in silicon-based wafers, integrated circuits, semiconductor wafers, integrated circuits, optoelectronic devices, discrete devices, sensors, communications, medical and other industries, and is suitable for silicon wafers, glass, PCB boards, alumina, aluminum nitride, silicon carbide, gallium arsenide, bismuth antimonide and other materials.

[0003] The conventional clamping method for grinding wheel scribing adopts the film laminating process, where the workpiece is pasted on the film by a steel ring and fixed by vacuum adsorption of the film. However, some products cannot be fixed with film due to various limitations, such as the edge removal of Mini-LED packaging and the raised components on the substrate. At the same time, during the cutting process, the scraps generated will move and the knife will be hit, which is not conducive to the stable scribing of the workpiece by the scribing machine. Utility Model Content

[0004] 1. Technical issues to be solved

[0005] In view of the deficiencies in the prior art, the utility model provides a workpiece positioning fixture for a dicing machine, which solves the problem that when the prior dicing machine cannot use a film to fix the workpiece for positioning, the removed scraps of the workpiece are likely to affect subsequent processing.

[0006] (II) Technical solution

[0007] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0008] A workpiece positioning fixture for a dicing machine comprises a vacuum suction cup, a positioning fixture is fixed on the vacuum suction cup, the positioning fixture comprises a fixture body, a plurality of cavities are arranged on the fixture body, the cavities are connected with the vacuum suction cup, a circle of air holes are evenly arranged on the edge of the cavity on the fixture body, the air holes are connected with the cavity, when negative pressure gas is passed into the vacuum suction cup, the cavity can negatively pressure adsorb the middle part of the workpiece, and the air holes can negatively pressure adsorb the edge of the workpiece.

[0009] Preferably, the vacuum suction cup fixes the fixture body by negative pressure adsorption, and a waste box is arranged on the outside of the vacuum suction cup.

[0010] Preferably, an air supply assembly is provided in the middle of the vacuum suction cup, and the air supply assembly is respectively connected to the cavity and the vacuum suction cup.

[0011] Preferably, the air delivery assembly includes a ventilation body fixedly arranged in the middle of the vacuum suction cup, the lower end of the ventilation body is connected to at least one air inlet nozzle, the air inlet nozzle is connected to the mold cavity through an air outlet channel, the air outlet channel is matched one-to-one with the air inlet nozzle, and a cavity matching the ventilation body is provided at the lower part of the jig body, an annular groove is arranged on the ventilation body, the annular groove is connected to one of the air outlet channels through a connecting hole, and the annular groove is connected to the vacuum suction cup.

[0012] Preferably, the vacuum suction cup is provided with an air flow channel connected to the annular groove, and the vacuum suction cup is also arranged with a plurality of air outlet holes connected to the air flow channel, and the upper end surface of the vacuum suction cup is annularly arranged with a plurality of air grooves connected to the air outlet holes.

[0013] Preferably, a jig rib is fixedly installed on one side of the jig body close to the air hole, the shape formed by the jig rib is consistent with the shape of the workpiece, a connecting channel is arranged in the inner cavity of the jig body, and a side hole connected to the connecting channel is provided on the side wall of the cavity, and the connecting channel is connected to the air hole.

[0014] Preferably, an air inlet or air inlet hole is provided on the fixture body at the bottom of the cavity, the air inlet is connected to the cavity, the air inlet hole is connected to the air outlet, and a sealing gasket is arranged between the cavity and the vacuum suction cup.

[0015] Preferably, annular notches are arranged on the ventilation body at both upper and lower sides of the annular groove, and a sealing ring is arranged in the annular notch.

[0016] (III) Beneficial effects

[0017] The utility model has the following beneficial effects:

[0018] The workpiece positioning fixture of the dicing machine, the utility model, can stably fix the workpiece by negative pressure adsorption through the provided cavity, and at the same time, due to the air holes arranged in a ring shape near the edge of the cavity on the fixture body, the air holes can stably adsorb the edge of the workpiece by negative pressure during the positioning and clamping process. When the blade of the dicing machine cuts the workpiece, the scraps can also be stably adsorbed and fixed by the air holes, which can well avoid the impact of the scraps on the blade. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the structure of the implementation state of the utility model;

[0020] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 3This is a schematic diagram of the disassembled structure of the positioning fixture, vacuum suction cup and air supply component of the utility model;

[0022] Figure 4 This is a schematic diagram of the overall structure of the vacuum suction cup and the fixture body of the utility model;

[0023] Figure 5 It is a schematic diagram of the overall partial cross-sectional structure of the utility model;

[0024] Figure 6 It is a partial cross-sectional structural diagram of the vacuum suction cup and the air supply component of the utility model;

[0025] Figure 7 It is a schematic diagram of the overall structure of the fixture body of the utility model.

[0026] In the figure: 1. waste box; 2. vacuum suction cup; 21. air flow channel; 22. air outlet; 23. air groove; 3. positioning fixture; 31. fixture body; 32. fixture rib; 33. sealing strip; 34. connecting channel; 35. air hole; 36. side hole; 4. air supply component; 41. ventilation body; 42. air inlet nozzle; 43. air outlet channel; 44. connecting hole; 45. annular groove; 46. sealing ring; 5. cavity; 51. air inlet; 52. air inlet; 6. sealing pad. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1 The utility model provides a technical solution: a workpiece positioning fixture 3 of a dicing machine, including a vacuum suction cup 2, a positioning fixture 3 fixed on the vacuum suction cup 2, the positioning fixture 3 including a fixture body 31, a plurality of cavities 5 are arranged on the fixture body 31, the cavity 5 is connected with the vacuum suction cup 2, a circle of air holes 35 are evenly arranged on the edge of the cavity 5 on the fixture body 31, the air holes 35 are connected with the cavity 5, when negative pressure gas is introduced into the vacuum suction cup 2, the cavity 5 can negatively pressure absorb the middle part of the workpiece, and the air holes 35 can negatively pressure absorb the edge of the workpiece.

[0029] The utility model can stably fix the workpiece by negative pressure adsorption through the provided cavity 5, and at the same time, due to the air holes 35 arranged in a ring shape near the edge of the cavity 5 on the fixture body 31, the air holes 35 can stably adsorb the edge of the workpiece by negative pressure during the positioning and clamping process. When the blade of the dicing machine cuts the workpiece, the scraps can also be stably adsorbed and fixed by the air holes 35, which can well avoid the impact of the scraps on the blade.

[0030] Reference Figure 1 and 2 As shown, in this embodiment, the vacuum suction cup 2 negatively absorbs and fixes the fixture body 31, and a waste box 1 is arranged outside the vacuum suction cup 2. By installing the entire positioning fixture 3 by vacuum absorption, it is convenient to replace and disassemble the fixture body 31 on a daily basis to adapt to the processing of workpieces of different sizes.

[0031] Reference Figure 3 , 5 As shown in Figure 6, in this embodiment, an air supply component 4 is provided in the middle of the vacuum suction cup 2, and the air supply component 4 is connected to the cavity 5 and the vacuum suction cup 2 respectively. Through the air supply component 4, negative pressure gas can be introduced into the air supply component 4, thereby generating negative pressure on the vacuum suction cup 2, the cavity 5 and the air hole 35. Due to the arrangement of the air supply component 4, it is only necessary to introduce negative pressure gas from the air supply component 4 to meet the negative pressure adsorption positioning requirements for the fixture body 31 and the workpiece, which can facilitate the layout of subsequent pipelines, save space and be more beautiful.

[0032] Reference Figure 5 and 6As shown, in this embodiment, the air delivery component 4 includes a ventilation body 41 fixedly arranged in the middle of the vacuum suction cup 2, and the lower end of the ventilation body 41 is connected to at least one air inlet nozzle 42, and the air inlet nozzle 42 is connected to the mold cavity 5 through an air outlet channel 43, and the air outlet channel 43 is matched with the air inlet nozzle 42 one by one. A cavity matching the ventilation body 41 is provided at the lower part of the fixture body 31, and an annular groove 45 is arranged on the ventilation body 41. The annular groove 45 is connected to an air outlet channel 43 through a connecting hole 44, and the annular groove 45 is connected to the vacuum suction cup 2. When negative pressure gas is sent into the ventilation body 41 from the air inlet nozzle 42, the negative pressure gas can be sent into the cavity 5 and the air hole 35 due to the arrangement of the air outlet channel 43, so that the fixture body 31 can continuously vacuum adsorb the workpiece and the edge of the workpiece; at the same time, due to the arrangement of the connecting hole 44 and the annular groove 45, the negative pressure gas in the air outlet channel 43 can enter the vacuum suction cup 2 along the annular groove 45, so that the vacuum suction cup 2 vacuum adsorbs the entire fixture body 31. In actual applications, two air inlet nozzles 42 are usually arranged, one for negative pressure gas to supply the vacuum suction cup 2 to adsorb and fix the fixture body 31, and the other for gas to supply the cavity 5 and the air hole 35 on the fixture body 31 to adsorb and fix the workpiece. Therefore, the vacuum adsorption action of the vacuum suction cup 2 and the fixture body 31 can be separated, so that the stable installation of the fixture body 31 will not be affected when the workpiece after processing is taken out later.

[0033] Reference Figure 3 and 6 As shown, in this embodiment, the vacuum suction cup 2 is provided with an air flow channel 21 connected to the annular groove 45, and a plurality of air outlet holes 22 connected to the air flow channel 21 are arranged on the vacuum suction cup 2. A plurality of air grooves 23 connected to the air outlet holes 22 are arranged in an annular shape on the upper end surface of the vacuum suction cup 2. The negative pressure gas introduced through the air inlet nozzle 42 can enter the air flow channel 21 through the annular groove 45, thereby generating negative pressure suction in the air groove 23, so that the vacuum suction cup 2 can stably adsorb the fixture body 31. When the fixture needs to be replaced, it is only necessary to control whether the negative pressure gas of the corresponding air inlet nozzle 42 is passed or not.

[0034] Reference Figure 3 , 4 As shown in Figure 7, in this embodiment, a jig rib 32 is fixedly installed on one side of the jig body 31 near the air hole 35. The shape formed by the jig rib 32 is consistent with the shape of the workpiece. A connecting channel 34 is arranged in the inner cavity of the jig body 31. The side wall of the cavity 5 is provided with a side hole 36 connected to the connecting channel 34. The connecting channel 34 is connected to the air hole 35. The setting of the jig rib 32 can play a role in quickly positioning the workpiece before processing, and can play an emergency role in preventing the workpiece from shifting when the negative pressure suction force under the emergency workpiece is insufficient. The setting of the connecting channel 34 and the side hole 36 can effectively ensure the connectivity between the cavity 5 and the air hole 35.

[0035] Reference Figure 4 and 6 As shown, in this embodiment, an air inlet 51 or an air inlet hole 52 is provided at the bottom of the cavity 5 on the fixture body 31, the air inlet 51 is connected to the cavity, the air inlet hole 52 is connected to the air outlet 22, and a sealing gasket 6 is arranged between the cavity and the vacuum suction cup 2. By setting the air inlet 51, negative pressure can be generated in the cavity 5, and negative pressure is also generated at the air hole 35. Since the air inlet holes 52 arranged on some cavities 5 are also connected to the air inlet holes 52 on the vacuum suction cup 2, each workpiece uses an independent cavity 5 for negative pressure adsorption, ensuring that the clamping of other workpieces is not affected by the low negative pressure of the workpiece after cutting during the cutting process.

[0036] Reference Figure 5 As shown, in this embodiment, annular notches are arranged on both the upper and lower sides of the annular groove 45 on the ventilation body 41, and a sealing ring 46 is arranged in the annular notch. By providing the sealing ring 46, after the ventilation body 41 and the vacuum suction cup 2 are installed, it is possible to effectively prevent gas from leaking from the cavity wall between the ventilation body 41 and the vacuum suction cup 2 due to the installation gap.

[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A workpiece positioning fixture for a dicing machine, comprising a vacuum suction cup, characterized in that: A positioning jig is fixed on the vacuum suction cup, and the positioning jig includes a jig body. The jig body is provided with a plurality of cavities, and the cavities are connected with the vacuum suction cup. A circle of air holes is evenly arranged on the edge of the cavity on the jig body, and the air holes are connected with the cavity. When negative pressure gas is introduced into the vacuum suction cup, the cavity can negatively pressure adsorb the middle part of the workpiece, and the air holes can negatively pressure adsorb the edge of the workpiece.

2. The workpiece positioning fixture for a dicing machine according to claim 1, characterized in that: The vacuum suction cup fixes the fixture body by negative pressure adsorption, and a waste box is arranged on the outside of the vacuum suction cup.

3. The workpiece positioning fixture of a dicing machine according to claim 1, characterized in that: An air supply component is arranged in the middle of the vacuum suction cup, and the air supply component is communicated with the cavity and the vacuum suction cup respectively.

4. The workpiece positioning fixture for a dicing machine according to claim 3, characterized in that: The air delivery assembly includes a ventilation body fixedly arranged in the middle of the vacuum suction cup, the lower end of the ventilation body is connected to at least one air inlet nozzle, the air inlet nozzle is connected to the mold cavity through an air outlet channel, the air outlet channel is matched with the air inlet nozzle one by one, the lower part of the fixture body is provided with a cavity matching the ventilation body, the ventilation body is arranged with an annular groove, the annular groove is connected to one of the air outlet channels through a connecting hole, and the annular groove is connected to the vacuum suction cup.

5. The workpiece positioning fixture of a dicing machine according to claim 4, characterized in that: The vacuum suction cup is provided with an air flow channel connected to the annular groove, and the vacuum suction cup is also arranged with a plurality of air outlets connected to the air flow channel, and the upper end surface of the vacuum suction cup is annularly arranged with a plurality of air grooves connected to the air outlets.

6. A workpiece positioning fixture for a dicing machine according to any one of claims 1 to 5, characterized in that: A jig rib is fixedly installed on one side of the jig body close to the air hole, and the shape formed by the jig rib is consistent with the shape of the workpiece. A connecting channel is arranged in the inner cavity of the jig body, and a side hole connected to the connecting channel is provided on the side wall of the cavity, and the connecting channel is connected to the air hole.

7. The workpiece positioning fixture for a dicing machine according to claim 5, characterized in that: An air inlet or an air inlet hole is provided on the fixture body at the bottom of the cavity, the air inlet is connected to the cavity, the air inlet hole is connected to the air outlet, and a sealing gasket is arranged between the cavity and the vacuum suction cup.

8. The workpiece positioning fixture for a dicing machine according to claim 7, characterized in that: Annular notches are arranged on the ventilation body at both upper and lower sides of the annular groove, and sealing rings are arranged in the annular notches.

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