Air cylinder of vacuum chamber and vacuum chamber

Abstract

The utility model discloses an air cylinder of a vacuum chamber and the vacuum chamber. The air cylinder comprises a cylinder body, a cylinder cover, a piston, a push rod, an elastic piece and a corrugated pipe. The cylinder body comprises a front end cover and a rear end cover, and the cylinder body is provided with a containing cavity. One end of the push rod is connected with the piston, and the other end can be inserted into the guide hole of the front end cover and protrudes out of the front end cover to be connected with an external structure. One end of the corrugated pipe is connected to the piston, the other end of the corrugated pipe is connected to the front end cover, the push rod is sleeved with the corrugated pipe, and the corrugated pipe is configured to be capable of stretching or contracting along with movement of the piston and is a good sealing component. Therefore, in the process that the push rod moves along with the piston, gas in the air cylinder cannot flow out of the guide hole to enter the vacuum chamber along with the movement of the push rod due to obstruction of the corrugated pipe, so that although the accommodating chamber is in a non-vacuum environment, the vacuum degree of the chamber is not influenced, the molecular pump is protected, and meanwhile, the formation and the quality of a film layer are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a cylinder of a vacuum chamber and a vacuum chamber. Background Art

[0002] In the field of film coating, magnetron sputtering is an important technology. Magnetron sputtering coating technology is an efficient physical vapor deposition method that creates a magnetic field near the sputtering target, bends the path of electrons, increases the probability of collision between electrons and gas atoms, and thus increases the ionization rate of the gas, thereby generating more ions, increasing the sputtering rate of the target, and improving the uniformity and adhesion of the film layer.

[0003] In magnetron sputtering coating technology, the commonly used gas atom is argon (Ar). During the sputtering process, argon as a sputtering gas can provide the necessary ions to bombard the target material (i.e., coating material or target cathode), thereby causing the target atoms or molecules to sputter out from the surface and deposit on the substrate (substrate), thereby forming a thin film on the substrate (substrate) surface. In the related art, vacuum equipment is usually used to provide a vacuum environment for magnetron sputtering coating. When there are multiple magnetron targets in a coating chamber, a baffle is required to eliminate cross-contamination between the magnetron targets; the baffle can be driven manually, electrically, or pneumatically; because the magnetron target needs to swing its head, the baffle also needs to be driven with the swinging head, otherwise the function of the baffle cannot be realized. Due to the limitation of the sealing form, a cylinder structure is usually used to drive the movement of the baffle. However, the existing cylinder cannot effectively block the gas inside the cylinder during operation, which easily causes the gas in the cylinder to enter the vacuum equipment. Utility Model Content

[0004] The main purpose of the utility model is to provide a vacuum chamber cylinder and a vacuum chamber, aiming to solve the technical problem of a control component that can follow the movement of a moving component in a vacuum chamber and can also realize a specific function.

[0005] To achieve the above object, the utility model provides a cylinder for a vacuum chamber, comprising:

[0006] The cylinder body comprises a front cover and a rear cover, the cylinder body is provided with a receiving cavity, the inner wall of the receiving cavity has a limiting and guiding function, and the cylinder body has the function of isolating the vacuum environment from the non-vacuum environment;

[0007] A cylinder cover is fixed on the cylinder body, the cylinder cover has a built-in guide hole for guiding the push rod, the cylinder cover has a built-in positioning hole for positioning the elastic member, and the cylinder cover is provided with a guide hole for exhausting the gas in the cavity;

[0008] A piston is accommodated in the accommodating chamber, and the piston is in clearance with the inner wall of the accommodating chamber;

[0009] A push rod, one end of which is connected to the piston and the other end of which is inserted into the guide hole and protrudes out of the front end cover, wherein the push rod is configured to move with the piston;

[0010] A bellows has one end connected to a side of the piston close to the push rod and the other end connected to the front end cover, and the bellows is sleeved on the push rod to seal the push rod, and the bellows is configured to be able to expand or contract with the movement of the piston.

[0011] In some embodiments, the cylinder body includes a first wall and a second wall, the first wall and the second wall are arranged along the movement direction of the piston, the first wall protrudes toward the accommodating cavity compared to the second wall, and the partial end surface of the first wall facing the second wall forms the limiting portion, and the piston is configured to be able to move in a direction close to the front end cover until the piston abuts against the limiting portion.

[0012] In some embodiments, the bellows has a cavity, the elastic member is disposed in the cavity, one end of the elastic member is connected to the piston and the other end is connected to the front end cover, and the elastic member is configured to drive the piston to move in a direction away from the front end cover.

[0013] In some embodiments, the elastic member is located in the cavity, and the elastic member is sleeved on the push rod.

[0014] In some embodiments, a protrusion is provided on a side of the piston close to the front end cover, and an end of the bellows close to the piston is welded to the protrusion.

[0015] In some embodiments, the cylinder further includes a rear end cover, the rear end cover is provided with an air hole, and the air hole is configured to allow air to flow into the accommodating cavity or to discharge air in the accommodating cavity.

[0016] The second aspect of the utility model also provides a vacuum chamber, comprising the cylinder described in any one of the above embodiments, wherein the vacuum chamber has a moving part that performs linear motion, and the vacuum chamber is also provided with a baffle, which is used to cover the moving part or expose the moving part, and the cylinder is configured to drive the baffle to move.

[0017] In some embodiments, the cylinder includes an output end and an input end, the output end is configured as an end of the cylinder close to the front end cover, the input end is configured as an end of the cylinder away from the front end cover, and the output end is disposed in the vacuum chamber.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] In the technical solution of the utility model, the cylinder includes a cylinder body, a cylinder head, a piston, a push rod and a bellows. One end of the push rod is connected to the piston, and the other end can be inserted into the guide hole of the front cover and protrude from the front cover to be connected to the external structure. One end of the bellows is welded to the piston, and the other end is connected to the front cover, and the bellows is sleeved on the push rod, and the bellows is configured to be able to expand or contract with the movement of the piston. Therefore, when the push rod moves with the piston, the gas in the cylinder cannot flow out of the guide hole into the vacuum chamber with the movement of the push rod due to the obstruction of the bellows. Therefore, although the accommodating chamber is a non-vacuum environment, it does not affect the vacuum degree of the chamber, and protects the molecular pump while also ensuring the formation and quality of the film layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0021] Figure 1 This is a schematic diagram of the structure of a cylinder in one embodiment of the utility model;

[0022] Figure 2 A cross-sectional view of a cylinder in one embodiment of the utility model;

[0023] Figure 3 This is a schematic diagram of the relative positions of the vacuum chamber and the cylinder in one embodiment of the utility model;

[0024] Figure 4 Schematic diagram of the relative positions of the vacuum chamber and the cylinder in another embodiment of the present invention.

[0025] Description of Figure Numbers:

[0026] A vacuum chamber 10;

[0027] Cylinder 100;

[0028] Cylinder 110;

[0029] Cylinder head 111; guide hole 1111; guide hole 1112; positioning hole 1113;

[0030] Side wall 112; first wall 1121; second wall 1122; limiting portion 1123;

[0031] Accommodating chamber 113;

[0032] Piston 120; protrusion 121;

[0033] Push rod 130;

[0034] Bellows 140; Cavity 141;

[0035] Elastic member 150;

[0036] Front end cover 160;

[0037] rear end cover 170; air hole 171; air guide pipe 172;

[0038] Output 180;

[0039] Input terminal 190;

[0040] Moving parts 200;

[0041] Baffle 300.

[0042] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0044] In magnetron sputtering coating technology, the commonly used gas atom is argon (Ar). During the sputtering process, argon, as a sputtering gas, can provide the necessary ions to bombard the target material (i.e., coating material or target cathode), thereby causing the target atoms or molecules to sputter out from the surface and deposit onto the substrate (substrate), thereby forming a thin film on the surface of the substrate (substrate). In the related art, a vacuum chamber is usually used to provide a vacuum environment for magnetron sputtering coating. The vacuum environment is defined as a vacuum chamber, in which a support for carrying a workpiece, a fixture for placing the target material, and other structures are provided. In order to improve the operability of components such as the target material and the workpiece during the coating process, a cylinder can be used to drive the structure located in the vacuum chamber. When gas (usually compressed air) enters one end of the cylinder, the gas will exert pressure on the piston, pushing the piston to move to the other end. The cylinder in the related art is usually sealed with a piston ring or a gasket, but the applicant has found that the air tightness of the piston ring and the gasket is greatly reduced after repeated use. During the operation of the cylinder, the piston ring and the gasket cannot effectively block the gas inside the cylinder. The gas entering the cylinder easily flows out of the cylinder through the gap between the piston ring, the gasket and the piston rod, causing the compressed gas to enter the vacuum chamber. In case of severe leakage, the air pressure in the vacuum equipment will suddenly increase, causing the molecular pump to malfunction or be damaged, and may even cause an explosion; in case of slight leakage, the ion beam (gas atoms) will be disturbed by air molecules (the ion beam can maintain a higher energy and speed in a vacuum and bombard the target surface more effectively), thereby affecting the quality of the film layer and even causing the film layer to fail to form.

[0045] For this reason, please see Figure 1 to Figure 2The utility model provides a cylinder 100 for a vacuum chamber, the cylinder 100 comprising a cylinder body 110, a cylinder head 111, a piston 120, a push rod 130 and a bellows 140. The cylinder body 110 comprises a front end cover 160 and a rear end cover 170, and the cylinder body 110 is further provided with an accommodating chamber 113. Specifically, the front end cover 160, the rear end cover 170 and the side wall 112 jointly define the accommodating chamber 113. The cylinder further comprises a cylinder head 111, which is fixed to the cylinder body 110. The cylinder head 111 is provided with a guide hole 1111 communicating with the accommodating chamber 113, and the guide hole 1111 is used for guiding the push rod 130. The cylinder head 111 has a built-in positioning hole 1113, and the positioning hole 1113 is used for positioning the elastic member 150. The cylinder head 111 is further provided with a guide hole 1112, and the guide hole 1112 is used for exhausting the gas in the cavity 141. The piston 120 is disposed in the accommodating chamber 113, and the piston 120 is configured to be able to contact the inner wall of the accommodating chamber 113. In some embodiments, the piston 120 is fitted with the inner wall of the accommodating chamber 113 with a clearance, and there is no need to seal the piston 120, thereby improving the service life of the piston 120 and the smoothness of the movement. One end of the push rod 130 is integrally processed with the piston 120, and the other end is penetrated through the guide hole 1111 and protrudes from the cylinder head 111. The push rod 130 is configured to be able to move with the piston 120. The end of the push rod 130 away from the piston 120 can be connected to an external structure, so that the push rod 130 can drive the external structure to move when the piston 120 moves. One end of the bellows 140 is welded to the side of the piston 120 close to the push rod 130, and the other end is welded to the cylinder head 111. The bellows 140 is sleeved on the part of the push rod 130 located in the accommodating chamber 113, thereby sealing the push rod 130. The bellows 140 is configured to be able to expand or contract with the movement of the piston 120. Therefore, when the push rod 130 moves with the piston 120, the gas in the cylinder 100 cannot flow out of the guide hole 1111 with the movement of the push rod 130 due to the obstruction of the bellows 140, thereby reducing the probability of the gas in the cylinder 100 leaking into the vacuum chamber 10. It should be noted that the cylinder 100 can also be used in other equipment with a vacuum environment, including but not limited to vacuum coating equipment, crystal oscillator equipment, etc.

[0046] See also Figure 2 The side wall 112 includes a first wall 1121 and a second wall 1122, the first wall 1121 and the second wall 1122 are arranged along the movement direction of the piston 120, the first wall 1121 protrudes toward the accommodating cavity 113 compared to the second wall 1122, and a portion of the end surface of the first wall 1121 facing the second wall 1122 forms a limiting portion 1123, and the piston 120 is configured to be able to move toward the direction close to the cylinder head 111 until the piston 120 abuts against the limiting portion 1123. The setting of the limiting portion 1123 can limit the movement stroke of the piston 120, and prevent the piston 120 from being too close to the cylinder head 111 and causing damage to the bellows 140.

[0047] The cylinder cover 111 is provided with a guide hole 1112, the bellows 140 has a cavity 141, the guide hole 1112 is connected to the cavity 141, and the guide hole 1112 is configured to discharge the air in the cavity 141. In some embodiments, the vacuum chamber 10 is provided with a vacuum cavity, and the cylinder 100 is disposed in the vacuum cavity. After the workpiece and other components are set in place, the vacuum cavity is evacuated. Since the cavity 141 can be connected to the vacuum cavity through the guide hole 1112, the cavity 141 can also be evacuated synchronously with the vacuum cavity, thereby avoiding the air in the cavity 141 from leaking into the vacuum cavity to affect the formation and quality of the film layer, and reducing the probability of the target material being contaminated.

[0048] The cylinder 100 further includes an elastic member 150, which is disposed in the accommodating chamber 113. One end of the elastic member 150 is connected to the piston 120, and the other end is connected to the cylinder head 111. The elastic member 150 is configured to drive the piston 120 to move away from the cylinder head 111. In some embodiments, refer to Figure 2 The elastic member 150 includes but is not limited to a spring. The setting of the elastic member 150 is conducive to increasing the stability of the cylinder 100 and preventing the cylinder 100 from shaking during transportation or operation. In addition, when the piston 120 moves toward the cylinder head 111, the elastic member 150 can absorb the kinetic energy of the piston 120 and convert it into a rebound force, thereby playing a buffering role and preventing the cylinder 100 system from being damaged.

[0049] In some embodiments, see Figure 2 , the bellows 140 has a cavity 141, the elastic member 150 is located in the cavity 141, and the elastic member 150 is sleeved on the push rod 130, one end of the bellows 140 is welded to the piston 120, and the other end is connected to the cylinder head 111. In other embodiments, the elastic member 150 is sleeved on the inner side of the bellows 140, and one end of the elastic member 150 is connected to the piston 120, and the other end is connected to the cylinder head 111. In some other embodiments, the elastic member 150 is located in the accommodating cavity 113 and the elastic member 150 is arranged outside the cavity 141, one end of the elastic member 150 is welded to the piston 120, and the other end is connected to the cylinder head 111. The cylinder 100 can be provided with a plurality of elastic members 150, each of which is arranged around the circumference of the bellows 140. The material used for the elastic member 150 includes but is not limited to carbon steel, and the surface of the elastic member 150 has a coating, so as to prevent the elastic member 150 from rusting and affecting the performance of the elastic member 150 .

[0050] The cylinder 100 includes a front end cover 160 disposed in the accommodating chamber 113, and a bellows 140 is welded to one end of the front end cover 160 away from the cylinder head 111, and the front end cover 160 is connected to the cylinder body 110. Specifically, the front end cover 160 is annular, and includes an inner ring wall and an outer ring wall. In some embodiments, the outer ring wall of the front end cover 160 abuts against the inner wall of the accommodating chamber 113. To facilitate the installation and positioning of the front end cover 160, a clamping portion is provided at one end of the cylinder body 110 close to the cylinder head 111, and the diameter of the clamping portion is greater than the diameter of the accommodating chamber 113, and the side of the front end cover 160 away from the cylinder head 111 can abut against the clamping portion. The front end cover 160 can be connected to the cylinder body 110 by welding, and the front end cover 160 can also be connected to the cylinder body 110 by a threaded fastener. In other embodiments, the front end cover 160 can be connected to the cylinder head 111. The connection between the front end cover 160 and the cylinder head 111 can be welding or threaded fasteners. The front end cover 160 can also be integrally formed with the cylinder head 111. To facilitate the assembly of the cylinder head 111 to the cylinder body 110, in some embodiments, the cylinder head 111 has a guide ring, which is arranged around the guide hole 1111. The guide ring is configured to be inserted into the inner wall of the front end cover 160, and the push rod 130 can be inserted into the guide ring.

[0051] See also Figure 2 , a protrusion 121 is provided on the side of the piston 120 close to the cylinder head 111, and one end of the bellows 140 close to the piston 120 is welded to the protrusion 121. The provision of the protrusion 121 is conducive to the welding operation of the bellows 140. In some embodiments, the front end cover 160 is also provided with a protrusion, and one end of the bellows 140 can be welded to the protrusion. In the process of welding the bellows 140 to the piston 120, the bellows 140 needs to be clamped and fixed to prevent the bellows 140 from shaking during the welding process, which may cause welding difficulties or even welding failure. Therefore, the provision of the protrusion 121 is conducive to the clamping and fixing of the bellows 140.

[0052] The cylinder 100 further includes a rear end cover 170, and the rear end cover 170 is provided with an air hole 171, and the air hole 171 is configured to allow air to be introduced into the accommodating chamber 113 or to discharge the air in the accommodating chamber 113. It should be noted that the air introduced into the accommodating chamber 113 is compressed air. Specifically, when air is introduced into the accommodating chamber 113 through the air hole 171, the piston 120 can move toward the direction close to the cylinder head 111 under the action of the compressed air. When the push rod 130 moves to a specified position, the piston 120 can move toward the direction close to the rear end cover 170 under the action of the elastic member 150, and the compressed air in the accommodating chamber 113 is discharged through the air hole 171. In order to facilitate the introduction and discharge of gas, an air guide pipe 172 is inserted into the air hole 171.

[0053] The second aspect of the present invention further provides a vacuum chamber 10, which includes a cylinder 100 described in any of the above embodiments. Figure 3 to Figure 4 , a moving part 200 that performs linear motion is provided in the vacuum chamber 10, and a baffle 300 is also provided in the vacuum chamber 10, and the baffle 300 is used to shield the moving part 200 or expose the moving part 200, and the cylinder 100 is configured to be able to drive the baffle 300 to move. Among them, the baffle 300 and the cylinder 100 are arranged in the vacuum chamber 10, and the vacuum chamber 10 is configured as a vacuum environment. The cylinder 100 is configured to be able to drive the baffle 300 to move to shield the moving part 200 (target material) or expose the moving part 200. The cylinder 100 drives the baffle 300 to shield the moving part 200, thereby isolating the sputtering gas from the moving part 200, and preventing the sputtering gas from acting on the moving part 200. When the cylinder 100 drives the baffle 300 to expose the moving part 200, the sputtering gas can act on the moving part 200.

[0054] See also Figure 3 The cylinder 100 includes an output end 180 and an input end 190. The output end 180 is configured as an end of the cylinder 100 close to the cylinder head 111, and the input end 190 is configured as an end of the cylinder 100 away from the cylinder head 111. The output end 180 is arranged in the vacuum chamber 10. Due to the arrangement of the bellows 140, the output end 180 can isolate the push rod 130 from the accommodating chamber 113, so that the gas in the accommodating chamber 113 will not flow into the vacuum chamber 10 through the guide hole 1111 as the push rod 130 moves. The input end 190 is arranged outside the vacuum chamber 10, so the probability of air leakage into the vacuum chamber 10 is further reduced. In some embodiments, a seal is arranged at the input end 190, so that the cylinder 100 can also be accommodated in the vacuum chamber 10. Specifically, the cylinder 100 includes a rear end cover 170, and the rear end cover 170 has an air hole 171, which can be connected to the accommodating chamber 113, and the air hole 171 is configured to allow compressed air to pass into the accommodating chamber 113, and the air hole 171 can also be used to discharge the compressed air in the accommodating chamber 113. The cylinder 100 is provided with an air guide pipe 172, and the air guide pipe 172 is connected to the air hole 171. Since the air guide pipe 172 does not need to move relative to the air hole 171, the connection between the air guide pipe 172 and the air hole 171 can be sealed by a sealing ring or other structure.

[0055] In some embodiments, the cylinder 100 is used in combination with a solenoid valve. Specifically, when the piston 120 abuts against the rear end cover 170, the cylinder 100 is in a closed state and the solenoid valve is in a normally closed state. When the solenoid valve is energized, compressed air enters the cylinder 100 through the air duct 172, and the compressed air pushes the piston 120 to move in a direction close to the cylinder head 111. At the same time, the bellows 140 and the spring are compressed. When the piston 120 abuts against the limit portion 1123, the introduction of compressed air stops, and the cylinder 100 is in an open state. When the solenoid valve loses power, the solenoid valve resets to restore the normally closed state, and the elastic member 150 pushes the piston 120 to move in a direction away from the cylinder head 111, so that the compressed air is discharged from the air duct 172.

[0056] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0057] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0058] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A cylinder for a vacuum chamber, characterized in that: include: The cylinder body comprises a front cover and a rear cover, the cylinder body is provided with a receiving cavity, the inner wall of the receiving cavity has a limiting and guiding function, and the cylinder body has the function of isolating the vacuum environment from the non-vacuum environment; A cylinder cover is fixed on the cylinder body, the cylinder cover has a built-in guide hole for guiding the push rod, the cylinder cover has a built-in positioning hole for positioning the elastic member, and the cylinder cover is provided with a guide hole for exhausting the gas in the cavity; A piston is accommodated in the accommodating chamber, and the piston is in clearance with the inner wall of the accommodating chamber; A push rod, one end of which is connected to the piston and the other end of which is inserted into the guide hole and protrudes out of the front end cover, wherein the push rod is configured to move with the piston; A bellows has one end connected to a side of the piston close to the push rod and the other end connected to the front end cover, and the bellows is sleeved on the push rod to seal the push rod, and the bellows is configured to be able to expand or contract with the movement of the piston.

2. The cylinder of the vacuum chamber according to claim 1, characterized in that: The cylinder body includes a first wall and a second wall, the first wall and the second wall are arranged along the movement direction of the piston, the first wall protrudes toward the accommodating cavity compared to the second wall, and a limiting portion is formed on the partial end surface of the first wall facing the second wall, and the piston is configured to be able to move in a direction close to the front end cover until the piston abuts against the limiting portion.

3. The cylinder of the vacuum chamber according to claim 1, characterized in that: The bellows has a cavity, the elastic member is arranged in the cavity, one end of the elastic member is connected to the piston, and the other end is connected to the front end cover, and the elastic member is configured to drive the piston to move in a direction away from the front end cover.

4. The cylinder of the vacuum chamber according to claim 3, characterized in that: The elastic member is located in the cavity, and the elastic member is sleeved on the push rod.

5. The cylinder of the vacuum chamber according to claim 1, characterized in that: A convex portion is provided on one side of the piston close to the front end cover, and one end of the bellows close to the piston is welded to the convex portion.

6. The cylinder of the vacuum chamber according to claim 1, characterized in that: The cylinder further comprises a rear end cover, wherein the rear end cover is provided with an air hole, and the air hole is configured to allow air to flow into the accommodating cavity or to discharge air in the accommodating cavity.

7. A vacuum chamber, characterized in that: include: The cylinder described in any one of claims 1 to 6 is arranged in a vacuum chamber, and the vacuum chamber has a moving part that performs linear motion. The vacuum chamber is also provided with a baffle, and the baffle is used to cover the moving part or expose the moving part. The cylinder is configured to drive the baffle to move.

8. The vacuum chamber according to claim 7, wherein: The cylinder includes an output end and an input end, wherein the output end is configured as an end of the cylinder close to the front end cover, and the input end is configured as an end of the cylinder away from the front end cover, and the output end is arranged in the vacuum chamber.

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