Outside air conditioning system with hot fluid

By designing an external air conditioning system with hot fluids and using the regeneration zone of the heat exchanger and the dehumidification rotor for heat exchange, the problem of high energy consumption of the external air conditioning box during semiconductor manufacturing is solved, and the effect of energy saving and carbon reduction and energy consumption is achieved.

CN222837013UActive Publication Date: 2025-05-06DESICCANT TECH CORP +1
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Patent Information

Application Number
CN202421492885.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Priority Date
2024-05-10
Filing Date
2024-06-27
Publication Date
2025-05-06
Estimated Expiration
2034-06-27

AI Technical Summary

Technical Problem

The high energy consumption problem of external air conditioners during semiconductor manufacturing has led to large energy consumption and it is difficult to achieve the goal of energy conservation and carbon reduction.

Method used

An external air conditioning system with a hot fluid is designed, which includes an external air conditioning system, a heat exchanger, a hot fluid and an air duct. The heat fluid is connected to the regeneration zone of the dehumidification rotor through a heat exchanger, and is used to remove latent heat from the external gas and to be transported through the air duct to the desired place.

Benefits of technology

It realizes the efficiency of heat exchange applications and energy saving and carbon reduction, reduces energy costs, and increases the practicality and operability of the system.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an external air conditioning system with hot fluid, which is mainly characterized in that through the combined design of external air, an external air conditioning system, a heat exchanger, the hot fluid and an air pipe, the hot fluid can flow into the heat exchanger for heat exchange and is provided for a dehumidification rotating wheel of the external air conditioning system for use. And then the air is conveyed to a required place through the air pipe. Therefore, the heat exchanger has the effects of heat exchange application, energy conservation and carbon reduction, and can also achieve the effect of reducing energy cost.
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Description

Technical Field

[0001] The utility model relates to an outdoor air conditioning system with a thermal fluid, and more particularly to a system with heat exchange application and energy saving and carbon reduction performance, so that the system is suitable for places or plants related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc. Background Art

[0002] Semiconductor manufacturing requires four major exhaust systems, including acid exhaust, alkali exhaust, volatile organic exhaust, and general exhaust. Therefore, a large amount of outside air must be added to meet the exhaust needs.

[0003] The semiconductor industry's factory system's outdoor air conditioning unit (MAU) is an energy-consuming but necessary device. The energy consumption of an outdoor air conditioning unit in an advanced process plant may be as high as 10,000 refrigeration tons.

[0004] In recent years, in order to achieve the goal of energy conservation and carbon reduction, the semiconductor industry has actively sought improvement solutions for high-energy-consuming equipment or facilities in the factory to reduce energy consumption. Among them, the main equipment to be improved is the outdoor air conditioning unit (MAU).

[0005] Therefore, in view of the above-mentioned deficiencies, the applicant of the present utility model hopes to propose an outdoor air conditioning system with a thermal fluid that has the functions of heat exchange application and energy saving and carbon reduction, so that users can easily operate and assemble it. The applicant has devoted himself to research and design to provide user convenience, which is the motivation for the applicant of the present utility model to develop a utility model. Utility Model Content

[0006] One aspect of the utility model provides an outdoor air conditioning system with a thermal fluid, comprising:

[0007] An outside air (Outside Air), the outside air (Outside Air) contains at least one gas or a combination; an outside air air conditioning system, the outside air air conditioning system is for the outside air (Outside Air) to enter, the outside air air conditioning system is provided with a box, the box is provided with at least one first filter device, at least one first temperature device, at least one water washing device, a dehumidification wheel and at least one second temperature device, the dehumidification wheel has a treatment area and a regeneration area, the treatment area performs dehumidification adsorption; a heat exchanger, the heat exchanger is connected to the regeneration area of ​​the dehumidification wheel, and provides a heat source to the regeneration area for desorption; a hot fluid, the hot fluid flows into the heat exchanger for heat exchange; and an air duct, the air duct is connected to the outside air air conditioning system.

[0008] The main purpose of the utility model is to provide an outside air conditioning system with a thermal fluid, which is mainly designed by combining an outside air, an outside air conditioning system, a heat exchanger, a thermal fluid and an air duct, so that the thermal fluid can flow into the heat exchanger for heat exchange and be provided to the dehumidification wheel of the outside air conditioning system to remove the latent heat of the outside air, and then transport it to the required place through the air duct. Therefore, it has the efficiency of heat exchange application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality. Another object of the utility model is to provide an outside air conditioning system with a thermal fluid, wherein a box is provided in the outside air conditioning system, and the dehumidification wheel is arranged in the box, and the dehumidification wheel has a processing area and a regeneration area, wherein the front group of the dehumidification wheel is provided with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device, so that the outside air (Outside Air) can first pass through the above-mentioned devices for dust removal, filtration and control of its temperature and humidity, and then be transported to the processing area of ​​the dehumidification wheel for dehumidification and adsorption, and a fan is provided in the box, and the fan is arranged at any one of the front and rear positions of the dehumidification wheel to push and pull the outside air (Outside Air) to move forward, so that it has the efficiency of generating fresh air with constant temperature and humidity, thereby increasing the overall usability.

[0009] According to an embodiment of the utility model, the at least one thermal fluid is further hot water, and the heat exchanger is a water-to-air heat exchanger.

[0010] According to an embodiment of the present invention, the at least one heat flow system is further hot steam, and the heat exchanger is a gas-to-gas heat exchanger.

[0011] According to an embodiment of the utility model, the heat exchanger further allows a gas to enter for heat exchange. Another object of the utility model is to provide an external air conditioning system with a thermal fluid, which is connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area through the air duct system, so as to provide the above places with the need to supplement a large amount of external air, and drive the air flow circulation in the above places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air, thereby increasing the overall operability.

[0012] According to an embodiment of the present invention, the dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel.

[0013] According to an embodiment of the present invention, the bypass device is further any one of a pipeline and a layer plate.

[0014] According to an embodiment of the present invention, the at least one first filter device, the at least one first temperature device and the at least one water washing device are further arranged in front of the dehumidification wheel.

[0015] According to an embodiment of the present invention, the dehumidification wheel is further arranged in any one of the front, rear and middle of the second temperature device.

[0016] According to an embodiment of the present invention, the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

[0017] According to an embodiment of the present invention, the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

[0018] According to an embodiment of the utility model, at least one second filter device is further provided in the box body, and the at least one second filter device is located at the rear section of the box body.

[0019] In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. The drawings are only provided for reference and explanation and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 2 is a schematic diagram of the main structure of the outdoor air conditioning system of the embodiment.

[0021] Figure 2 It is a schematic diagram of the architecture of an outdoor air conditioning system according to another embodiment.

[0022] In the above drawings, the meanings of the reference numerals are as follows:

[0023] 10. Outside Air;

[0024] 20. External air conditioning system;

[0025] 21. Box body;

[0026] 211. External air enters the mouth;

[0027] 22. The first filter device;

[0028] 23. First temperature equipment;

[0029] 231, pre-cooling coil;

[0030] 232, preheating coil;

[0031] 233. Precooler;

[0032] 234. Preheater;

[0033] 24. Water washing equipment;

[0034] 25. Dehumidification wheel;

[0035] 251. Processing area;

[0036] 252. Regeneration Zone;

[0037] 26. Second temperature equipment;

[0038] 261, re-cooling coil;

[0039] 262, reheat coil;

[0040] 263, recooler;

[0041] 264. Reheater;

[0042] 27. Second filter device;

[0043] 28. Fan;

[0044] 30. Heat exchanger;

[0045] 60. Thermal fluid;

[0046] 70. Air duct;

[0047] 71. Clean room;

[0048] 80. Bypass equipment;

[0049] 90. Chimney. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0051] See also Figure 1~Figure 2 , is a schematic diagram of an embodiment of the utility model. The best implementation of the external air conditioning system with thermal fluid of the utility model is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc., mainly with heat recovery application and energy saving and carbon reduction efficiency.

[0052] The outside air conditioning system with a thermal fluid of the present invention is mainly designed by combining an outside air 10, an outside air conditioning system 20, a heat exchanger 30, a thermal fluid 60 and an air duct 70 (such as Figure 1 and Figure 2As shown), the outside air 10 contains at least one gas or combination, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities, and the outside air 10 is commonly known as air. In addition, the hot fluid 60 is any one of hot water or hot steam, wherein the hot water and the hot steam come from the hot water or hot steam generated by the boiler (not shown) used in any of the semiconductor process plant (not shown), the electronic process plant (not shown), the food processing area (not shown), and the medical hospital (not shown), or the hot water or hot steam generated by the incinerator (not shown), but it is not limited to the above content, and it can also be other places or equipment that generate hot water or hot steam, and the temperature of the hot water or hot steam is more than 100°C.

[0053] The outside air conditioning system 20 has a housing 21, and the housing 21 has an outside air inlet 211 for the outside air 10 to enter. The housing 21 of the outside air conditioning system 20 is provided with at least one first filter device 22, at least one first temperature device 23, at least one washing device 24, a dehumidification wheel 25 and at least one second temperature device 26 (such as Figure 1 and Figure 2 As shown), the dehumidification wheel 25 is a special paper wheel with a honeycomb shape carrying a desiccant. Since the honeycomb pore size is only 1.5 mm, the dehumidification wheel 25 is 1 m 3 The moisture absorption area of ​​the rotary paper core is up to 3000m 2 . The air flows through the honeycomb pores in a boundary laminar flow state, and the wet exchange effect is good, so the dehumidification capacity is strong. And the dehumidification wheel 25 has a treatment zone 251 and a regeneration zone 252. In addition, the heat exchanger 30 is connected to the regeneration zone 252, and provides a heat source to the regeneration zone 252 for desorption, and the heat exchanger 30 allows a gas to enter, and the gas is any one of the outside air (Outside Air) and the gas treated by the treatment zone (not shown) for heat exchange. In addition, the heat exchanger 52 allows the hot fluid 60 to flow in for heat exchange, and when the hot fluid 60 is hot water, the heat exchanger adopts a water-to-gas heat exchanger, and when the hot fluid 60 is hot steam, the heat exchanger adopts a gas-to-gas heat exchanger, so that the hot fluid 60 can exchange heat with the gas entering the heat exchanger 52, so as to transport the gas with a heat source to the regeneration zone 512, so that the regeneration zone 512 can perform thermal desorption.

[0054] In addition, the front group of the dehumidification wheel 25 is provided with the at least one first filter device 22, the at least one first temperature device 23 and the at least one water washing device 24, wherein the at least one first filter device 22 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly in the form of a plate, suitable for primary filtration, mainly used for filtering dust particles above 5μm, and the material is mainly non-woven fabrics, nylon mesh, activated carbon filter materials, and metal mesh. In addition, the medium filter (Medium efficiency filter) is mostly in the form of a bag, which is widely used in medium filtration, mainly used for filtering dust particles above 1-5um, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 23 is any one or a combination of a pre-cooling coil 231 and a pre-heating coil 232 (such as Figure 2 As shown in FIG. 1 , the precooling coil 231 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 232 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. In addition, the at least one first temperature device 23 may also be any one or a combination of a precooler 233 and a preheater 234 (such as Figure 1 As shown), the precooler 233 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 234 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0055] In addition, the at least one water washing device 24 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humidified air. In addition, the at least one second temperature device 26 is any one or a combination of a re-cooling coil 261 and a re-heating coil 262 (not shown) (such as Figure 2As shown in the figure), the above-mentioned re-cooling coil 261 is supplied with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the above-mentioned reheating coil 262 (not shown) is supplied with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. In addition, the at least one second temperature device 26 can also be any one or a combination of the recooler 263 and the reheater 264 (such as Figure 1 As shown), the recooler 263 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater 264 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0056] The outside air 10 treated by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24 and the at least one second temperature device 26 is sent to the treatment area 251 of the dehumidification wheel 25 for dehumidification adsorption (such as Figure 1 and Figure 2 As shown in the figure, the dehumidification wheel 25 is arranged in front of, behind or in the middle of the second temperature device 26. The drawings of the utility model show that the dehumidification wheel 25 is located in the middle of the second temperature device 26, but the drawings are not limited to the figures. The 3 / 4 area of ​​the dehumidification wheel 25 is the processing area 251. When the outside air 10 to be processed passes through the processing area 251, the moisture in the outside air 10 is absorbed by the desiccant attached to the special fiber, and becomes low-humidity dry air, and is blown out from the other end of the processing area 251, so that the outside air 10 after passing through the at least one washing device 24 can be adjusted to the absolute humidity of the outside air 10 to meet the requirements through condensation dehumidification.

[0057] The heat exchanger 30 also provides a heat source to the regeneration zone 252 (e.g. Figure 1 and Figure 2 As shown in FIG. 2 ), the temperature of the heat source exceeds 100°C and enters the remaining 1 / 4 area of ​​the dehumidification wheel 25, that is, the regeneration area 252, in the opposite direction. The heat source slowly enters the regeneration area 252 to increase the temperature of the desiccant attached to the special fiber, so that the water contained in the desiccant attached to the special fiber is vaporized and taken out of the desiccant wheel 25, so that the desiccant attached to the special fiber can restore the moisture absorption function, that is, the desiccant is regenerated. In addition, when the desiccant wheel 25 rotates slowly, the desiccant attached to the special fiber of the desiccant wheel 25 undergoes moisture absorption and regeneration processes simultaneously, so the desiccant wheel 25 can ensure continuous and stable output of dry air.

[0058] In addition, at least one second filter device 27 is disposed in the housing 21 of the outdoor air conditioning system 20. The at least one second filter device 27 is located at the rear section of the housing 21 (eg Figure 1 and Figure 2 As shown in the figure, the outside air 10 after dehumidification and adsorption in the treatment area 251 of the dehumidification wheel 25 enters the at least one second filter device 27 for filtration, and the at least one second filter device 27 is any one or a combination of a high-efficiency particulate air filter (HEPA) or an ultra-low penetration filter (ULPA). The high-efficiency particulate air filter (HEPA) is suitable for terminal filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1 / 200 of the diameter of a hair) or more can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and its material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12µm (120 nanometers). The filtration effect is about DOP99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

[0059] In addition, a fan 28 is disposed in the housing 21 of the outdoor air conditioning system 20. The fan 28 is disposed in front of the dehumidification wheel 25 (eg, Figure 2 As shown), the dehumidification wheel 25 (as shown Figure 1 Any one of the places shown in the figure is mainly used to provide power to push and pull the outside air 10, so that the outside air 10 can be processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24 and the at least one second temperature device 26 in sequence (dust is removed, filtered and its temperature and humidity are controlled by the above-mentioned devices), or is processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24, the at least one second temperature device 26 and the dehumidification wheel 25 in sequence (dust is removed, filtered and its temperature and humidity are controlled by the above-mentioned devices, and then transported to the processing area 251 of the dehumidification wheel 25 for dehumidification and adsorption), so as to have the effect of generating fresh air with constant temperature and humidity.

[0060] In addition, the external air conditioning system 20 is connected to the air duct 70 so that the gas sent out by the external air conditioning system 20 can be transported to a desired place (such as Figure 1 and Figure 2 As shown), the air duct 70 is connected to any one of at least one clean room 71, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown), so as to provide the above-mentioned places with the need to supplement a large amount of the outside air (OutsideAir), and drive the air circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

[0061] In addition, the dehumidification wheel 25 of the present invention is additionally provided with a bypass device 80 (such as Figure 2 As shown), the bypass device 80 is any one of a pipeline and a layer plate, and the pipeline is mainly connected to the front and rear ends of the processing area 251 of the dehumidification wheel 25 by a bypass pipeline provided on the outside of the box body 21 or a bypass pipeline provided on the inside of the box body 21, and a control valve is provided for switching. The layer plate is mainly provided with a bypass layer plate (not shown) in the box body 21. When necessary, the bypass layer plate will cover the processing area 251 of the dehumidification wheel 25 to form a gas channel for processing the outside air 10 by sequentially passing through the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24 and the at least one second temperature device 26. The outside air 10 can bypass the dehumidification wheel 25, mainly when the dehumidification wheel 25 fails, the dehumidification wheel 25 is adsorbed saturated or other force majeure factors occur, in order to avoid the outside air air conditioning system 20 from being unable to operate, a bypass facility for changing the direction of the airflow is designed.

[0062] Therefore, the utility model mainly adopts a combination design of an outside air 10, an outside air conditioning system 20, a heat exchanger 30, a hot fluid 60 and an air duct 70, so that the hot fluid 60 can flow into the heat exchanger 30 for heat exchange and be provided to the dehumidification wheel 25 of the outside air conditioning system 20 to remove the latent heat of the outside air 10, and then transport it to the required place through the air duct 70. Therefore, it has the effect of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

[0063] The embodiments of the present invention are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present invention is defined by the attached claims and their equivalents. Without departing from the scope of the present invention, a person skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. An outdoor air conditioning system with a thermal fluid, characterized in that: include: an external air, the external air comprising at least one gas or a combination of gases; An outside air conditioning system, the outside air conditioning system is for the outside air to enter, the outside air conditioning system is provided with a box, the box is provided with at least one first filter device, at least one first temperature device, at least one water washing device, a dehumidification wheel and at least one second temperature device, the dehumidification wheel has a treatment area and a regeneration area, the treatment area performs dehumidification adsorption; a heat exchanger connected to the regeneration zone of the dehumidification wheel and providing a heat source to the regeneration zone for desorption; a hot fluid, the hot fluid flows into the heat exchanger for heat exchange; as well as An air duct is connected to the external air conditioning system.

2. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The at least one thermal fluid is further hot water, and the heat exchanger is a water-to-air heat exchanger.

3. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The at least one hot fluid is further hot steam, and the heat exchanger is a gas-to-gas heat exchanger.

4. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The heat exchanger further allows a gas to enter for heat exchange.

5. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The air duct is further connected to any one of at least one clean room, at least one hospital ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area.

6. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel.

7. The outdoor air conditioning system with thermal fluid according to claim 6, characterized in that: The bypass device is further any one of a pipeline and a layer plate.

8. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The at least one first filter device, the at least one first temperature device and the at least one water washing device are further arranged in front of the dehumidification wheel.

9. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The dehumidification wheel is further arranged at any one of the front, rear and middle of the second temperature device.

10. The outdoor air conditioning system with thermal fluid according to claim 1 or 9, characterized in that: The second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

11. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

12. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The box body is further provided with a fan, which is arranged at any one of the front and rear positions of the dehumidification wheel.

13. The outdoor air conditioning system with thermal fluid according to claim 1, characterized in that: The box body is further provided with at least one second filter device, and the at least one second filter device is located at the rear section of the box body.