External air conditioning system with waste heat recovery function
By designing an external air conditioning system with waste heat recovery, and using the waste heat discharged from the incineration equipment to perform the dehumidification process of the dehumidification rotor, the problem of high energy consumption of air conditioners in and outside semiconductor manufacturing is solved, and the effects of heat recovery and energy saving and carbon reduction are achieved.
Patent Information
- Application Number
- CN202421491788.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-05-10
- Filing Date
- 2024-06-27
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-06-27
AI Technical Summary
The high energy consumption problem of external air conditioners during semiconductor manufacturing has led to an increase in energy consumption and carbon emissions, and a solution that can effectively recycle waste heat and reduce energy consumption is needed.
An external air conditioning system with waste heat recovery is designed. The waste heat discharged through the incineration equipment is used for the dehumidification process of the dehumidification rotor and is transported to the required place through the air duct to achieve heat recovery and energy conservation and carbon reduction.
It realizes the efficiency of heat recovery applications and energy conservation and carbon reduction, reduces energy costs, and increases the practicality and operability of the system.
Smart Images

Figure CN222837032U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an outdoor air conditioning system with waste heat recovery, and more particularly to a system with heat recovery application and energy saving and carbon reduction performance, and is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc. Background Art
[0002] Semiconductor manufacturing requires four major exhaust systems, including acid exhaust, alkali exhaust, volatile organic exhaust, and general exhaust. Therefore, a large amount of outside air must be added to meet the exhaust needs.
[0003] The semiconductor industry's factory system's outdoor air conditioning unit (MAU) is an energy-consuming but necessary device. The energy consumption of an outdoor air conditioning unit in a current process plant may be as high as 10,000 refrigeration tons.
[0004] In recent years, in order to achieve the goal of energy conservation and carbon reduction, the semiconductor industry has actively sought improvement solutions for high-energy-consuming equipment or facilities in the factory to reduce energy consumption. Among them, the main equipment to be improved is the outdoor air conditioning unit (MAU).
[0005] Therefore, in view of the above-mentioned shortcomings, the applicant hopes to propose an outdoor air conditioning system with waste heat recovery that has the functions of heat recovery application and energy saving and carbon reduction, so that users can easily operate and assemble it. The applicant has devoted himself to research and development, design and assembly to provide user convenience, which is the motivation for the applicant's research and development. Utility Model Content
[0006] In view of this, the utility model provides an outdoor air conditioning system with waste heat recovery, in order to at least partially solve the above technical problems.
[0007] The main purpose of the utility model is to provide an outside air conditioning system with waste heat recovery, which is mainly through a combination design of an outside air (Outside Air), an outside air conditioning system, a first heat exchanger, a water tank, a second heat exchanger, an incineration device and an air duct, so that the waste heat discharged by the incineration device can be provided to the dehumidification wheel of the outside air conditioning system to remove the latent heat of the outside air (Outside Air), and then transported to a desired place through the air duct. Therefore, it has the efficiency of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.
[0008] Another object of the present invention is to provide an outside air conditioning system with waste heat recovery, wherein the outside air conditioning system is provided with a box body, and the dehumidification wheel is arranged in the box body, and the dehumidification wheel has a processing area and a regeneration area, wherein the front assembly of the dehumidification wheel is designed with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device, so that the outside air (Outside Air) can first be dusted, filtered and its temperature and humidity controlled by the above-mentioned devices, and then transported to the processing area of the dehumidification wheel for dehumidification and adsorption, and a fan is provided in the box body, and the fan is arranged at any one of the front and rear positions of the dehumidification wheel to push and pull the outside air (Outside Air) to move forward, so that it has the efficiency of generating fresh air with constant temperature and humidity, thereby increasing the overall usability.
[0009] Another object of the present invention is to provide an external air conditioning system with waste heat recovery, which is connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant, and at least one electronic process plant through the air duct, so as to provide the above-mentioned places with the need to supplement a large amount of external air, and drive the air circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air, thereby increasing the overall operability. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. The following drawings are only provided for reference and explanation and are not intended to limit the present invention.
[0011] Figure 1 This is a schematic diagram of the main architecture;
[0012] Figure 2 Another schematic diagram of the architecture is shown in FIG.
[0013] [Description of Reference Numerals]
[0014] 10. Outside Air
[0015] 20. External air conditioning system
[0016] 21. Cabinet
[0017] 211. External air inlet
[0018] 22. The first filter equipment
[0019] 23. First temperature equipment
[0020] 231. Precooling coil
[0021] 232. Preheating coil
[0022] 233. Precooler
[0023] 234. Preheater
[0024] 24. Washing equipment
[0025] 25. Dehumidification wheel
[0026] 251. Processing Area
[0027] 252. Regeneration Zone
[0028] 26. Second temperature equipment
[0029] 261. Recooling coil
[0030] 262. Reheat coil
[0031] 263. Recooler
[0032] 264. Reheater
[0033] 27. Second filter equipment
[0034] 28. Fan
[0035] 30. First heat exchanger
[0036] 40. Water tank
[0037] 41. Water valve
[0038] 42. Pump
[0039] 50. Second heat exchanger
[0040] 60. Incineration equipment
[0041] 61. Combustion exhaust
[0042] 62. Heat exchanger
[0043] 70. Air duct
[0044] 71. Clean Room
[0045] 80. Bypass equipment
[0046] 90. Chimney DETAILED DESCRIPTION
[0047] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0048] Figure 1-2, is a schematic diagram of an embodiment of the utility model. The preferred embodiment of the outdoor air conditioning system with waste heat recovery of the utility model is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc., mainly with the efficiency of heat recovery application and energy saving and carbon reduction.
[0049] The outside air conditioning system with waste heat recovery of the present invention is mainly designed by combining an outside air 10, an outside air conditioning system 20, a first heat exchanger 30, a water tank 40, a second heat exchanger 50, an incineration device 60 and an air duct 70 (such as Figure 1 and Figure 2 As shown in the figure, the outside air 10 contains at least one gas or combination, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. The outside air 10 is commonly known as air. Furthermore, the incineration equipment 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator (not shown) or a regenerative thermal incinerator (RTO) (not shown). When the incineration equipment 60 is a direct-fired incinerator (TO), the direct-fired incinerator (TO) is provided with any one of two heat exchangers 62, three heat exchangers 62 or four heat exchangers 62, and the incineration equipment 60 is designed in combination with any one of a double-rotor volatile organic gas (VOC) treatment system (not shown) or a single-rotor volatile organic gas (VOC) treatment system (not shown), and the incineration equipment 60 discharges a combustion exhaust gas 61 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the combustion exhaust gas 61 has a temperature that is more than 150° C.
[0050] The outside air conditioning system 20 is provided with a housing 21, and the housing 21 is provided with an outside air inlet 211 for the outside air 10 to enter. The housing 21 of the outside air conditioning system 20 is combined with at least one first filter device 22, at least one first temperature device 23, at least one washing device 24, a dehumidification wheel 25 and at least one second temperature device 26 (such as Figure 1 and Figure 2 As shown), the dehumidification wheel 25 is a special paper wheel with a honeycomb shape carrying a desiccant. Since the honeycomb pore size is only 1.5 mm, the dehumidification wheel 25 is 1 m 3 The moisture absorption area of the wheel paper core is up to 3000m 2. The air flows through the honeycomb pores in a boundary laminar flow state, and the wet exchange effect is good, so the dehumidification capacity is relatively strong. And the dehumidification wheel 25 has a treatment zone 251 and a regeneration zone 252. In addition, the first heat exchanger 30 is connected to the regeneration zone 252, and provides a heat source to the regeneration zone 252 for desorption, and the first heat exchanger 30 allows a gas to enter, and the gas is any one of the outside air (Outside Air) and the gas treated by the treatment zone (not shown) for heat exchange. The water tank 40 is connected to the first heat exchanger 30 and the second heat exchanger 50 (as shown in the figure). Figure 1 and Figure 2 As shown in FIG. 1 , the water tank 40 outputs water, wherein the water is any one of filtered water, tap water, cooling water, and ice water, so that the heat of the second heat exchanger 50 is transferred to the first heat exchanger 30 through the water in the water tank 40, wherein the water tank 40 is connected to a pump 42 to push the water in the water tank 40, and the water tank 40 is provided with a water valve 41, and the water valve 41 controls the water entering the water tank 40, so that the water tank 40 has the effect of replenishing the water source. The first heat exchanger 30 and the second heat exchanger 50 are liquid-to-gas heat exchangers.
[0051] Furthermore, the incineration equipment 60 discharges a combustion exhaust gas 61, the combustion exhaust gas 61 has a temperature of more than 150° C., and the combustion exhaust gas 61 passes through the second heat exchanger 50 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the water in the second heat exchanger 50 and the gas are heat exchanged, so that the water in the water tank 40 can transfer heat to the first heat exchanger 30 for use, and the water in the first heat exchanger 30 and the gas are heat exchanged again to transport the gas with the heat source to the regeneration zone 252, so that the regeneration zone 252 can be thermally desorbed, and the gas after thermal desorption is discharged to the outside, which is either the sky or the chimney 90. The combustion exhaust gas 61 that has undergone heat exchange in the second heat exchanger 50 is transported to a chimney 90 for discharge.
[0052] In addition, the front combination of the dehumidification wheel 25 is designed with the at least one first filter device 22, the at least one first temperature device 23 and the at least one water washing device 24, wherein the at least one first filter device 22 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly a plate-shaped type, suitable for primary filtration, mainly used for filtering dust particles above 5μm, and the material is mainly non-woven fabrics, nylon mesh, activated carbon filter materials, and metal mesh. In addition, the medium filter (Medium efficiency filter) is mostly a bag-shaped type, widely used in medium filtration, mainly used for filtering dust particles above 1-5um, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 23 is any one or a combination of a pre-cooling coil 231 and a pre-heating coil 232 (such as Figure 2 As shown in FIG. 1 , the precooling coil 231 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 232 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 23 may also be any one or a combination of a precooler 233 and a preheater 234 (such as Figure 1 As shown), the precooler 233 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 234 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.
[0053] In addition, the at least one water washing device 24 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humidified air. In addition, the at least one second temperature device 26 is any one or a combination of a re-cooling coil 261 and a re-heating coil 262 (not shown) (such as Figure 2As shown in the figure, the above-mentioned re-cooling coil 261 is supplied with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the above-mentioned reheating coil 262 (not shown) is supplied with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 26 can also be any one or a combination of the recooler 263 and the reheater 264 (such as Figure 1 As shown), the recooler 263 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater 264 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.
[0054] The outside air 10 treated by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24 and the at least one second temperature device 26 is sent to the treatment area 251 of the dehumidification wheel 25 for dehumidification adsorption (such as Figure 1 and Figure 2 As shown in the figure, the dehumidification wheel 25 is arranged in any one of the front, rear and middle of the second temperature device 26. The drawings of the utility model show that the dehumidification wheel 25 is located in the middle of the second temperature device 26, but the drawings are not limited to the figures. The 3 / 4 area of the dehumidification wheel 25 is the processing area 251, and when the outside air (Outside Air) 10 to be processed passes through the processing area 251, the moisture in the outside air (Outside Air) 10 is absorbed by the desiccant attached to the special fiber, and becomes low-humidity dry air, and is blown out from the other end of the processing area 251, so that the outside air (Outside Air) 10 after passing through the at least one washing device 24 can be adjusted to the absolute humidity of the outside air (Outside Air) 10 to meet the requirements through condensation dehumidification.
[0055] In addition, the first heat exchanger 30 provides a heat source to the regeneration zone 252 (such as Figure 1 and Figure 2 As shown in FIG. 2 ), the temperature of the heat source exceeds 100°C and enters the remaining 1 / 4 of the dehumidification wheel 25, that is, the regeneration zone 252, in the opposite direction. The heat source slowly enters the regeneration zone 252 to increase the temperature of the desiccant attached to the special fiber, so that the moisture contained in the desiccant attached to the special fiber is vaporized and taken out of the desiccant wheel 25, so that the desiccant attached to the special fiber can restore the moisture absorption function, that is, the desiccant is regenerated. In addition, when the desiccant wheel 25 rotates slowly, the desiccant attached to the special fiber of the desiccant wheel 25 undergoes moisture absorption and regeneration processes simultaneously, so the desiccant wheel 25 can ensure continuous and stable output of dry air.
[0056] In addition, at least one second filter device 27 is disposed in the housing 21 of the outdoor air conditioning system 20. The at least one second filter device 27 is located at the rear section of the housing 21 (eg Figure 1 and Figure 2 As shown in the figure, the outside air 10 after dehumidification and adsorption in the treatment area 251 of the dehumidification wheel 25 enters the at least one second filter device 27 for filtration, and the at least one second filter device 27 is any one or a combination of a high-efficiency particulate air filter (HEPA) or an ultra-low penetration filter (ULPA). The high-efficiency particulate air filter (HEPA) is suitable for terminal filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1 / 200 of the diameter of a hair) or more can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and its material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12µm (120 nanometers). The filtration effect is about DOP 99.995% or more, and the material is mainly special ultra-fine glass fiber paper.
[0057] In addition, a fan 28 is disposed in the housing 21 of the outdoor air conditioning system 20. The fan 28 is disposed in front of the dehumidification wheel 25 (eg, Figure 2 As shown), the dehumidification wheel 25 (as shown Figure 1 Any one of the places as shown in the figure is mainly used to provide power to push and pull the outside air 10, so that the outside air 10 can be processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24 and the at least one second temperature device 26 in sequence (dust removal, filtration and temperature and humidity control of the devices are performed through the above devices), or is processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24, the at least one second temperature device 26 and the dehumidification wheel 25 in sequence (dust removal, filtration and temperature and humidity control of the devices are performed through the above devices, and then transported to the processing area 251 of the dehumidification wheel 25 for dehumidification and adsorption), so as to have the effect of generating fresh air with constant temperature and humidity.
[0058] In addition, the external air conditioning system 20 is connected to the air duct 70 so that the gas sent out by the external air conditioning system 20 can be transported to a desired place (such as Figure 1 and Figure 2 As shown), the air duct 70 is connected to any one of at least one clean room 71, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown), so as to provide the above-mentioned places with the need to supplement a large amount of the outside air (OutsideAir), and drive the air circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.
[0059] Furthermore, the dehumidification wheel 25 of the present invention is additionally provided with a bypass device 80 (such as Figure 2 As shown), the bypass device 80 is any one of a pipeline and a layer plate, and the pipeline is mainly connected to the front and rear ends of the processing area 251 of the dehumidification wheel 25 by a bypass pipeline provided on the outside of the box body 21 or a bypass pipeline provided on the inside of the box body 21, and a control valve is provided for switching. The layer plate is mainly provided with a bypass layer plate (not shown) in the box body 21. When necessary, the bypass layer plate will cover the processing area 251 of the dehumidification wheel 25 to form a gas channel for processing the outside air 10 by sequentially passing through the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24 and the at least one second temperature device 26. The outside air 10 can bypass the dehumidification wheel 25, mainly when the dehumidification wheel 25 fails, the dehumidification wheel 25 is adsorbed saturated or other force majeure factors occur, in order to avoid the outside air air conditioning system 20 from being unable to operate, a bypass facility for changing the direction of the airflow is designed.
[0060] Therefore, the utility model mainly adopts a combination design of an outside air 10, an outside air conditioning system 20, a first heat exchanger 30, a water tank 40, a second heat exchanger 50, an incineration device 60 and an air duct 70, so that the waste heat discharged by the incineration device 60 can be provided to the dehumidification wheel 25 of the outside air conditioning system 20 to remove the latent heat of the outside air 10, and then transported to the required place through the air duct 70. Therefore, it has the effect of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.
[0061] The above detailed description will enable those skilled in the art to understand that the present invention can indeed achieve the aforementioned objectives and is in compliance with the provisions of the Patent Law, thereby filing a utility model patent application.
[0062] However, what is described above is only a preferred embodiment of the present utility model and should not be used to limit the scope of implementation of the present utility model; therefore, all simple equivalent changes and modifications made according to the claims of the present utility model application and the contents of the utility model specification should still fall within the scope of protection of the present utility model.
[0063] The embodiments of the present invention are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present invention is defined by the attached claims and their equivalents. Without departing from the scope of the present invention, a person skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present invention.
Claims
1. An outdoor air conditioning system with waste heat recovery, characterized in that: include: an external air, the external air comprising at least one gas or a combination of gases; An outside air conditioning system, the outside air conditioning system is for the outside air to enter, the outside air conditioning system is provided with a box, the box is combined with at least one first filter device, at least one first temperature device, at least one water washing device, a dehumidification wheel and at least one second temperature device, the dehumidification wheel has a treatment area and a regeneration area, the treatment area performs dehumidification adsorption; a first heat exchanger connected to the regeneration zone of the dehumidification wheel and providing a heat source to the regeneration zone for desorption; a water tank connected to the first heat exchanger and outputting water; a second heat exchanger connected to the water tank and the first heat exchanger so as to transfer heat of the second heat exchanger to the first heat exchanger through water in the water tank; an incineration device, the incineration device discharges a combustion exhaust gas, the combustion exhaust gas has a temperature, and the combustion exhaust gas passes through the second heat exchanger; and An air duct is connected to the external air conditioning system.
2. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The combustion exhaust gas is further transported to a chimney.
3. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The water tank is further connected to a pump to push the water in the water tank.
4. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The water tank is further provided with a water valve, which controls the water entering the water tank.
5. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The first heat exchanger further allows a gas to enter for heat exchange.
6. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The air duct is further connected to any one of at least one clean room, at least one hospital ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area.
7. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel.
8. The outdoor air conditioning system with waste heat recovery according to claim 7, characterized in that: The bypass device is further any one of a pipeline and a layer plate.
9. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The at least one first filter device, the at least one first temperature device and the at least one water washing device are further arranged in front of the dehumidification wheel.
10. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The dehumidification wheel is further arranged at any one of the front, rear and middle of the second temperature device.
11. The outdoor air conditioning system with waste heat recovery according to claim 1 or 10, characterized in that: The second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.
12. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.
13. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The box body is further provided with a fan, which is arranged at any one of the front and rear positions of the dehumidification wheel.
14. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The box body is further provided with at least one second filter device, and the at least one second filter device is located at the rear section of the box body.
15. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The incineration equipment is further any one of a direct-fired incinerator, a catalytic incinerator or a thermal storage incinerator.
16. The outdoor air conditioning system with waste heat recovery according to claim 1, characterized in that: The incineration equipment is further designed in combination with either a double-rotor volatile organic gas treatment system or a single-rotor volatile organic gas treatment system.