Resistance furnace temperature sensor

Abstract

The utility model relates to the technical field of temperature sensors, and discloses a resistance furnace temperature sensor comprising a detection rod, the outer wall of the detection rod is provided with external threads, the outer wall of the detection rod is provided with scales along the axial direction, and the end face of the detection rod is provided with a threading hole along the axis; the measuring element is mounted at one end of the detection rod; the protective cover is arranged outside the measuring element in a covering manner and is detachably connected with the detection rod; the line pressing assembly is arranged at the other end of the detection rod and is detachably connected with the detection rod; a wire on the measuring element penetrates out of the wire penetrating hole, and the wire pressing assembly is used for pressing and fixing the wire. The beneficial effects of the utility model are that a gap is prevented from being generated with a mounting hole on a furnace wall, the accuracy of a temperature measurement result is improved, the installation depth is convenient to determine, the installation difficulty is reduced, the measurement precision is improved, and the replacement and wiring of a measurement element are convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature sensors, in particular to a resistance furnace temperature sensor. Background Art

[0002] In semiconductor crystal pulling, annealing and other processes, the resistance furnace converts electrical energy into thermal energy through the metal heating elements in the furnace to heat the workpiece or material. During the heating process, the heating elements will generate a stable temperature field. The farther away from the temperature field, the lower the temperature, and the closer to the temperature field, the higher the temperature.

[0003] The existing temperature sensor is generally inserted into the temperature field of the furnace to measure the actual heating temperature of the workpiece or material. When installing, it is easy to produce a gap between the installation hole on the furnace wall. Due to the large temperature difference between the inside and outside of the furnace, air convection will destroy the stable temperature field and affect the temperature measurement results. In addition, due to the different depths of the temperature sensor inserted into the furnace, the farther the measuring element in the temperature sensor is from the temperature field, the lower the measured temperature, and the closer it is to the temperature field, the higher the measured temperature. Therefore, the installation depth of the temperature sensor will affect the measurement results. If the staff wants to obtain higher measurement accuracy, there are precision requirements for the installation depth of the temperature sensor. The existing temperature sensor cannot determine the installation depth. Generally, skilled staff adopt the empirical method, which leads to inconsistent installation depths of temperature sensors for each person, high installation difficulty, and affects the detection accuracy. In addition, since the measuring element in the temperature sensor works at high temperature for a long time, it is easy to be damaged, and the existing measuring element is inconvenient to replace the wiring. Utility Model Content

[0004] The purpose of the utility model is to provide a resistance furnace temperature sensor, which avoids gaps with the installation holes on the furnace wall, improves the accuracy of temperature measurement results, facilitates determination of installation depth, reduces installation difficulty, improves measurement accuracy, and facilitates replacement of measurement components and wiring.

[0005] In order to achieve the above object, the utility model provides a resistance furnace temperature sensor, comprising:

[0006] A detection rod, wherein the outer wall of the detection rod is provided with an external thread, the outer wall of the detection rod is provided with a scale along the axial direction, and the end surface of the detection rod is provided with a threading hole along the axis;

[0007] A measuring element is mounted on one end of the detection rod;

[0008] A protective cover, which is arranged outside the measuring element and is detachably connected to the detection rod;

[0009] A wire pressing assembly is arranged at the other end of the detection rod and is detachably connected to the detection rod; the wire on the measuring element passes through the wire threading hole, and the wire pressing assembly presses and fixes the wire.

[0010] Furthermore, the detection rod includes a base plate and a rod body, the threading hole is located at the end of the base plate, the external thread is arranged on the outer wall of the rod body, and the opening is located at the end of the rod body.

[0011] Furthermore, the wire crimping assembly includes a fixing plate and a wire crimping screw, the fixing plate is detachably connected via the wire crimping screw, the fixing plate is provided with wire passing holes corresponding to the positions of the wire threading holes and having the same number as the wire threading holes, and the wire crimping screw is used for wire crimping.

[0012] Furthermore, the wire crimping assembly also includes a metal connecting piece, and the metal connecting piece is fixed to the end surface of the fixing plate through the wire crimping screw.

[0013] Furthermore, the number of the wire pressing screws is at least 2.

[0014] Furthermore, the detection rod and the fixing plate are both made of ceramic material.

[0015] Furthermore, a heat insulating sheet is provided between the detection rod and the wire pressing assembly.

[0016] Furthermore, the inner wall of the protective cover is provided with an internal thread, and the outer wall of the end of the detection rod is provided with a threaded connection portion corresponding to the internal thread.

[0017] Furthermore, the outer wall of the detection rod is provided with a plane along the axial direction, and the scales are distributed on the plane.

[0018] Furthermore, the protective cover is made of high temperature resistant transparent material.

[0019] Compared with the prior art, the resistance furnace temperature sensor of the utility model embodiment has the following beneficial effects: an external thread is provided on the outer wall of the detection rod, which is connected to the resistance furnace thread through the external thread, and the connection can be sealed with thermal insulation fiber or high-temperature curing agent to avoid gaps with the installation holes on the furnace wall, thereby improving the accuracy of temperature measurement results; at the same time, a scale is provided along the axial direction of the outer wall of the detection rod to facilitate determination of the installation depth, reduce installation difficulty, and improve measurement accuracy; in addition, a detachable protective cover and a wire crimping assembly are provided to facilitate replacement of wiring of the measuring element. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the resistance furnace temperature sensor of the utility model embodiment;

[0021] Figure 2This is a schematic diagram of the installation of the resistance furnace temperature sensor of the utility model embodiment;

[0022] Figure 3 It is a structural schematic diagram of a detection rod of a resistance furnace temperature sensor according to an embodiment of the utility model;

[0023] Figure 4 It is a structural schematic diagram of a fixing plate of a resistance furnace temperature sensor according to an embodiment of the utility model.

[0024] In the figure, 1. detection rod; 11. base plate; 12. rod body; 100. external thread; 101. scale; 103. threading hole; 104. plane; 2. measuring element; 21. wire; 3. protective cover; 4. wire pressing assembly; 41. fixing plate; 42. wire pressing screw; 411. wire passing hole; 43. metal connector; 5. thermal insulation sheet. DETAILED DESCRIPTION

[0025] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] like Figure 1As shown, a resistance furnace temperature sensor of a preferred embodiment of the utility model includes a probe rod 1, a measuring element 2, a protective cover 3 and a wire pressing assembly 4, wherein the probe rod 1 is used for installation and positioning with the mounting hole on the resistance furnace. In order to facilitate the fixing with the mounting hole on the resistance furnace, an external thread 101 is provided on the outer wall of the probe rod 1. The probe rod 1 and the resistance furnace are connected by threads. At the same time, a heat preservation fiber or a high-temperature curing agent can be used at the connection to seal the connection to avoid affecting the temperature field in the furnace and improve the accuracy of the measurement result. In addition, in order to facilitate the precise adjustment of the installation depth of the probe rod 1, a scale 102 is provided along the axial direction of the outer wall of the probe rod 1. The installation depth of the probe rod 1 can be intuitively determined according to the scale 102, reducing the difficulty of installation and improving the measurement accuracy. The measuring element 2 is the core component of the sensor, which is used to measure the temperature. It is installed at one end of the probe rod 1. In order to facilitate the wiring of the measuring element 2, a threading hole 103 is opened along the axis on the end face of the probe rod 1. In order to protect the measuring element 2 and to facilitate the replacement of the measuring element 2, the protective cover 3 is arranged outside the measuring element 2 and is detachably connected to the detection rod 1. Furthermore, in order to facilitate the fixing of the wire 21 when the measuring element 2 is connected, the wire pressing assembly 4 is arranged at the other end of the detection rod 1 and is detachably connected to the detection rod 1; see Figure 1 , Figure 2 as well as Figure 3 The wire 21 on the measuring element 2 can pass through the wire threading hole 103, and the wire crimping assembly 4 crimps and fixes the wire 21 to facilitate the connection between the wire 21 and the external electrical components.

[0028] In some embodiments, in order to facilitate the installation and fixation of the wire crimping assembly 4, the detection rod 1 includes a base plate 11 and a rod body, the wire threading hole 103 is located at the end of the base plate 11, and the external thread 101 and the scale 102 are arranged on the outer wall of the rod body. Specifically, the wire crimping assembly 4 includes a fixing plate 41 and a wire crimping screw 42. The fixing plate 41 is detachably connected by the wire crimping screw 42. The fixing plate 41 is provided with wire holes 411 corresponding to the position of the wire threading hole 103 and the same number as the wire crimping screw 42. The wire crimping screw 42 is used for crimping. Furthermore, in some embodiments, in order to facilitate the connection between the wire 21 and the external electrical components, the wire crimping assembly 4 also includes a metal connector 43, such as Figure 4 As shown, the metal contact piece 43 is fixed to the end face of the fixing plate 41 by means of a crimping screw 42. Among them, the number of the crimping screws 42 is at least 2, which respectively fix the positive wire 21 or the negative wire 21 led out of the measuring element 2. When it is necessary to fix the metal contact piece 43, the number of the crimping screws 42 can be appropriately increased or decreased, and threaded holes for installing the crimping screws 42 can be reserved on the fixing plate 41 according to the wiring requirements. In this embodiment, the substrate 11 and the rod body are integrally formed to form the detection rod 1. In order to ensure the high temperature resistance of the detection rod 1, the detection rod 1 and the fixing plate 41 are both made of ceramic material.

[0029] Furthermore, in order to reduce the impact of the high temperature in the furnace on the connection between the wire 21 of the measuring element 2 and the external electrical components, a heat insulation sheet 5 is also provided between the detection rod 1 and the wire crimping assembly 4. The heat insulation sheet 5 is made of heat insulating materials, such as glass limiters, asbestos, etc., to reduce the impact of the temperature in the furnace on the external electrical components.

[0030] In some embodiments, in order to facilitate the disassembly and assembly of the protective cover 3 and the detection rod 1, an internal thread is provided on the inner wall of the protective cover 3, and a threaded connection portion corresponding to the internal thread is provided on the outer wall of the end of the detection rod 1. The threaded connection is simple in structure and easy to disassemble. Further, in order to facilitate observation of whether the measuring element 2 is damaged, the protective cover 3 can be made of a high-temperature resistant transparent material, such as a PTFE transparent material. Furthermore, in order to facilitate observation and reading of the scale 102, a plane 104 is provided along the axial direction on the outer wall of the detection rod 1, and the scale 102 is distributed on the plane 104.

[0031] When using the resistance furnace temperature sensor provided by the utility model, the detection rod 1 is threadedly connected to the mounting hole on the furnace wall, and the installation depth is adjusted according to the scale 102 on the detection rod 1. Then, the connection is sealed with insulation fiber or high-temperature curing agent. The installation is quick and convenient, and the measurement result is highly accurate.

[0032] In summary, an embodiment of the utility model provides a resistance furnace temperature sensor, which has an external thread 101 on the outer wall of the detection rod 1, which is connected to the resistance furnace thread through the external thread 101, and the connection can be sealed with thermal insulation fiber or high-temperature curing agent to avoid gaps with the mounting holes on the furnace wall, thereby improving the accuracy of temperature measurement results; at the same time, a scale 102 is axially provided on the outer wall of the detection rod 1 to facilitate determination of the installation depth, reduce installation difficulty, and improve measurement accuracy; in addition, a detachable protective cover 3 and a wire crimping assembly 4 are provided to facilitate replacement of the wiring of the measuring element 2.

[0033] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A resistance furnace temperature sensor, characterized in that: include: A detection rod, wherein the outer wall of the detection rod is provided with an external thread, the outer wall of the detection rod is provided with a scale along the axial direction, and the end surface of the detection rod is provided with a threading hole along the axis; A measuring element is mounted on one end of the detection rod; A protective cover, which is arranged outside the measuring element and is detachably connected to the detection rod; A wire pressing assembly is arranged at the other end of the detection rod and is detachably connected to the detection rod; the wire on the measuring element passes through the wire threading hole, and the wire pressing assembly presses and fixes the wire.

2. The resistance furnace temperature sensor according to claim 1, characterized in that: The detection rod comprises a base plate and a rod body, the threading hole is located at the end of the base plate, and the external thread and the scale are arranged on the outer wall of the rod body.

3. The resistance furnace temperature sensor according to claim 2, characterized in that: The wire crimping assembly includes a fixing plate and a wire crimping screw, the fixing plate is detachably connected via the wire crimping screw, the fixing plate is provided with wire passing holes corresponding to the positions of the wire passing holes and having the same number as the wire passing holes, and the wire crimping screw is used for wire crimping.

4. The resistance furnace temperature sensor according to claim 3, characterized in that: The wire crimping assembly also includes a metal connecting piece, and the metal connecting piece is fixed to the end surface of the fixing plate through the wire crimping screw.

5. The resistance furnace temperature sensor according to claim 3, characterized in that: The number of the wire pressing screws is at least 2.

6. The resistance furnace temperature sensor according to claim 3, characterized in that: The detection rod and the fixing plate are both made of ceramic material.

7. The resistance furnace temperature sensor according to claim 1, characterized in that: A heat insulating sheet is also provided between the detection rod and the wire pressing assembly.

8. The resistance furnace temperature sensor according to claim 1, characterized in that: The inner wall of the protective cover is provided with an internal thread, and the outer wall of the end of the detection rod is provided with a threaded connection portion corresponding to the internal thread.

9. The resistance furnace temperature sensor according to claim 1, characterized in that: The outer wall of the detection rod is provided with a plane along the axial direction, and the scales are distributed on the plane.

10. The resistance furnace temperature sensor according to claim 1, characterized in that: The protective cover is made of high temperature resistant transparent material.

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