Pressure sensor
By setting an insulating gasket between the piezoelectric inductive layer of the pressure sensor and the metal electrode layer to form a gap cavity, the problem of calibration deviation of existing pressure sensors when used on different surfaces is solved, and the universality and calibration consistency of the sensor are improved.
Patent Information
- Application Number
- CN202421663767.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-15
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-15
AI Technical Summary
Existing pressure sensors have differences in production, resulting in deviations in detection pressures, especially when switching from plane to curved surface.
A pressure sensor is designed, which includes a lower substrate layer, an upper substrate layer and a piezoelectric inductive layer, and a gap cavity is formed by providing an insulating gasket between the piezoelectric inductive layer and the metal electrode layer, thereby maintaining consistency in the starting state when the pressure is calibrated.
It improves the versatility of the pressure sensor and the consistency of calibration, reducing calibration interference caused by sensor bending deformation when using the curved surface.
Smart Images
Figure CN222837715U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of sensors, in particular to a pressure sensor. Background Art
[0002] A pressure sensor is a sensor that senses pressure and converts pressure signals into electrical signals according to certain rules. Pressure sensors are usually composed of pressure-sensitive elements and signal processing units and can be used to monitor and test different devices. Pressure sensors have a wide range of applications, such as medical equipment, environmental monitoring, aerospace, industrial automation, consumer electronics, and the automotive industry.
[0003] Pressure sensors can be divided into piezoresistive, capacitive, piezoelectric or other types according to their working principles. Piezoresistive pressure sensors use the piezoresistive effect and generally adopt the form of upper and lower electrodes or single-sided electrodes; capacitive pressure sensors use capacitance changes; and piezoelectric sensors detect pressure changes through the piezoresistive effect of semiconductor materials. The most widely used is the piezoresistive pressure sensor, which has a lower price, higher accuracy and better linearity.
[0004] Although pressure sensors are widely used in various fields, existing pressure sensors have certain differences in the production process, which leads to deviations in the pressure of subsequent detection, especially when they are pasted on a flat surface and then switched to a curved surface. Utility Model Content
[0005] The technical problem to be solved by the utility model is to provide a pressure sensor, which makes the initial state the same when the pressure sensor is calibrated, thereby improving the versatility and consistency of calibration, and is also beneficial to reducing the calibration interference caused by the bending deformation of the sensor when used on a curved surface.
[0006] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a pressure sensor, comprising: a lower substrate layer, an upper substrate layer and a piezoelectric sensing layer, the lower substrate layer having a first metal electrode layer and a second metal electrode layer arranged at intervals on the surface of the upper substrate layer, a first insulating gasket being arranged on the surface of the first metal electrode layer opposite to the lower substrate layer, and a second insulating gasket being arranged on the surface of the second metal electrode layer opposite to the lower substrate layer;
[0007] The piezoelectric sensing layer is arranged on the surface of the lower substrate layer from the upper substrate layer, one end of the piezoelectric sensing layer is connected to the upper surface of the first insulating gasket, and the other end is connected to the upper surface of the second insulating gasket, so as to form a gap cavity between the piezoelectric sensing layer and the first metal electrode layer, the second metal electrode layer, and the lower substrate layer.
[0008] The technical solution further improved in the above technical solution is as follows:
[0009] 1. In the above solution, the area of the first insulating spacer is smaller than the area of the first metal electrode layer, and the area of the second insulating spacer is smaller than the area of the second metal electrode layer.
[0010] 2. In the above solution, the first insulating gasket is arranged in the central area of the first metal electrode layer, and the second insulating gasket is arranged in the central area of the second metal electrode layer.
[0011] 3. In the above solution, the thickness of the first insulating gasket and the second insulating gasket is 10 μm to 100 μm.
[0012] 4. In the above solution, the thickness of the first metal electrode layer and the second metal electrode layer is 10nm~100nm.
[0013] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:
[0014] The utility model pressure sensor has a first insulating gasket on the surface of the first metal electrode layer opposite to the lower substrate layer, and a second insulating gasket on the surface of the second metal electrode layer opposite to the lower substrate layer; a piezoelectric sensing layer is arranged on the surface of the lower substrate layer facing the upper substrate layer, one end of the piezoelectric sensing layer is connected to the upper surface of the first insulating gasket, and the other end is connected to the upper surface of the second insulating gasket, so that a gap cavity is formed between the piezoelectric sensing layer and the first metal electrode layer, the second metal electrode layer, and the lower substrate layer, so that when the pressure sensor calibrates the pressure, the initial state is the same, thereby improving the versatility and consistency of calibration, and is also beneficial to reducing the calibration interference caused by the bending deformation of the sensor when used on a curved surface. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Attached Figure 1 It is a structural schematic diagram of the pressure sensor of the utility model.
[0016] In the above figures: 1, lower substrate layer; 2, upper substrate layer; 3, piezoelectric sensing layer; 41, first metal electrode layer; 42, second metal electrode layer; 51, first insulating gasket; 52, second insulating gasket; 6, gap cavity. DETAILED DESCRIPTION
[0017] The present invention can be further understood through the specific embodiments given below, but they are not intended to limit the present invention.
[0018] The utility model is further described below in conjunction with embodiments:
[0019] Embodiment 1: A pressure sensor, comprising: a lower substrate layer 1, an upper substrate layer 2 and a piezoelectric sensing layer 3, wherein the surface of the lower substrate layer 1 facing the upper substrate layer 2 has a first metal electrode layer 41 and a second metal electrode layer 42 arranged at intervals, a first insulating gasket 51 is arranged on the surface of the first metal electrode layer 41 opposite to the lower substrate layer 1, and a second insulating gasket 52 is arranged on the surface of the second metal electrode layer 42 opposite to the lower substrate layer 1;
[0020] The piezoelectric sensing layer 3 is arranged on the surface of the upper substrate layer 2 facing the lower substrate layer 1, and one end of the piezoelectric sensing layer 3 is connected to the upper surface of the first insulating gasket 51, and the other end is connected to the upper surface of the second insulating gasket 52, so that a gap cavity 6 is formed between the piezoelectric sensing layer 3 and the first metal electrode layer 41, the second metal electrode layer 42, and the lower substrate layer 1.
[0021] The area of the first insulating spacer 51 is smaller than the area of the first metal electrode layer 41 , and the area of the second insulating spacer 52 is smaller than the area of the second metal electrode layer 42 .
[0022] The thickness of the first insulating spacer 51 and the second insulating spacer 52 is 50 μm.
[0023] The thickness of the first metal electrode layer 41 and the second metal electrode layer 42 is 25 nm.
[0024] Embodiment 2: A pressure sensor, comprising: a lower substrate layer 1, an upper substrate layer 2 and a piezoelectric sensing layer 3, wherein the surface of the lower substrate layer 1 facing the upper substrate layer 2 has a first metal electrode layer 41 and a second metal electrode layer 42 arranged at intervals, a first insulating gasket 51 is arranged on the surface of the first metal electrode layer 41 opposite to the lower substrate layer 1, and a second insulating gasket 52 is arranged on the surface of the second metal electrode layer 42 opposite to the lower substrate layer 1;
[0025] The piezoelectric sensing layer 3 is arranged on the surface of the upper substrate layer 2 facing the lower substrate layer 1, and one end of the piezoelectric sensing layer 3 is connected to the upper surface of the first insulating gasket 51, and the other end is connected to the upper surface of the second insulating gasket 52, so that a gap cavity 6 is formed between the piezoelectric sensing layer 3 and the first metal electrode layer 41, the second metal electrode layer 42, and the lower substrate layer 1.
[0026] The area of the first insulating spacer 51 is smaller than the area of the first metal electrode layer 41 , and the area of the second insulating spacer 52 is smaller than the area of the second metal electrode layer 42 .
[0027] The first insulating spacer 51 is disposed in the central area of the first metal electrode layer 41 , and the second insulating layer 51 is disposed in the central area of the first metal electrode layer 41 .
[0028] The thickness of the first insulating spacer 51 and the second insulating spacer 52 is 30 μm.
[0029] The thickness of the first metal electrode layer 41 and the second metal electrode layer 42 is 40 nm.
[0030] In the pressure sensor of this embodiment, a first insulating gasket is provided on the surface of the first metal electrode layer opposite to the lower substrate layer, and a second insulating gasket is provided on the surface of the second metal electrode layer opposite to the lower substrate layer; the piezoelectric sensing layer is provided on the surface of the upper substrate layer facing the lower substrate layer, one end of the piezoelectric sensing layer is connected to the upper surface of the first insulating gasket, and the other end is connected to the upper surface of the second insulating gasket, thereby forming a gap cavity between the piezoelectric sensing layer and the first metal electrode layer, the second metal electrode layer, and the lower substrate layer, so that when the pressure sensor calibrates the pressure, the initial state is the same, thereby improving the versatility and consistency of calibration, and is also beneficial when used on a curved surface to reduce calibration interference caused by bending deformation of the sensor.
[0031] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. A pressure sensor, characterized in that: include: A lower substrate layer (1), an upper substrate layer (2) and a piezoelectric sensing layer (3); the surface of the lower substrate layer (1) facing the upper substrate layer (2) comprises a first metal electrode layer (41) and a second metal electrode layer (42) arranged at intervals; a first insulating gasket (51) is arranged on the surface of the first metal electrode layer (41) opposite to the lower substrate layer (1); and a second insulating gasket (52) is arranged on the surface of the second metal electrode layer (42) opposite to the lower substrate layer (1); The piezoelectric sensing layer (3) is arranged on a surface of the upper substrate layer (2) facing the lower substrate layer (1); one end of the piezoelectric sensing layer (3) is connected to the upper surface of the first insulating gasket (51), and the other end is connected to the upper surface of the second insulating gasket (52), thereby forming a gap cavity (6) between the piezoelectric sensing layer (3) and the first metal electrode layer (41), the second metal electrode layer (42), and the lower substrate layer (1).
2. The pressure sensor according to claim 1, characterized in that: The area of the first insulating gasket (51) is smaller than the area of the first metal electrode layer (41), and the area of the second insulating gasket (52) is smaller than the area of the second metal electrode layer (42).
3. The pressure sensor according to claim 1, characterized in that: The first insulating gasket (51) is arranged in the central area of the first metal electrode layer (41), and the second insulating gasket (52) is arranged in the central area of the second metal electrode layer (42).
4. The pressure sensor according to claim 1, characterized in that: The thickness of the first insulating gasket (51) and the second insulating gasket (52) is 10 μm to 100 μm.
5. The pressure sensor according to claim 1, characterized in that: The thickness of the first metal electrode layer (41) and the second metal electrode layer (42) is 10 nm to 100 nm.